JP2012160617A5 - - Google Patents

Claims (11)

An imprint apparatus inspection method for performing an imprint process for forming a pattern on the substrate by forming an imprint material on the substrate with a mold,
Supplying a first imprint material on the substrate;
A second step of forming a first mark by molding the first imprint material supplied in the first step with a mold;
A third step of supplying a second imprint material onto the substrate;
A fourth step of forming a second mark by molding the second imprint material supplied in the third step;
And a fifth step of measuring a relative position between the first mark formed in the second step and the second mark formed in the fourth step,
In the third step, the second imprint material is supplied so that the second imprint material does not contact the first mark formed in the second step.   Based on the position of the first mark formed in the second step, the dimension of the second mark formed in the fourth step, and the supply amount of the second imprint material, in the third step The inspection method according to claim 1, further comprising a step of obtaining a supply area of the second imprint material to be supplied. The first mark is an inner mark,
The inspection method according to claim 1, wherein the second mark is an outer mark formed outside the inner mark.   A plurality of different conditions including a distance between the position of the first mark and the supply position of the second imprint material and a supply amount of the second imprint material as variables are set, and the plurality of conditions For each of the above, the second mark is formed by the imprint apparatus on the substrate on which the first mark is formed, and the second imprint material does not contact the first mark among the plurality of conditions, The method further comprises the step of obtaining the supply position of the second imprint material and the supply amount of the second imprint material based on a condition that the shape of the second mark is within an allowable range. The inspection method according to claim 1.   5. The inspection method according to claim 1, wherein the mold used in the fourth step includes a recess so as not to crush the first mark. 6. The mold used in the second step has an alignment mark pattern,
In the second step, the first mark and the alignment mark are formed,
The inspection method according to claim 1, further comprising a step of aligning the substrate using the alignment marks formed in the second step before the third step. The imprint apparatus includes a scope for detecting the first mark and the second mark, and a stage for holding the substrate,
The fifth step includes
Measuring the position of the first mark by moving the stage so that the first mark is located in the field of view of the scope and detecting the first mark with the scope;
Measuring the position of the second mark by moving the stage so that the second mark is positioned within the field of view of the scope and detecting the second mark with the scope. The inspection method according to claim 1. 2. The method according to claim 1, further comprising a step of supplying an adhesion agent for improving adhesion between the first imprint material and the second imprint material to the substrate before the first step. The inspection method according to any one of 1 to 7. An imprint apparatus that performs an imprint process for forming a pattern on the substrate by forming an imprint material on the substrate with a mold,
The operation related to the imprint process so as to reduce the deviation of the relative position from the target relative position based on the inspection result obtained by the inspection method according to any one of claims 1 to 8. An imprint apparatus comprising a control unit for controlling the image. An imprint apparatus that performs an imprint process for forming a pattern on the substrate by forming an imprint material on the substrate with a mold,
A scope for detecting a mark on the substrate;
An imprinting apparatus comprising: a control unit that controls an operation according to each step in the inspection method according to claim 1. A step of the pattern formed on the substrate using an imprint apparatus according to claim 9 or 10,
Method of manufacturing an article, characterized in a Turkey that having a, a step of processing the substrate formed with the pattern in step.