JP2012147011A - Processing unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely remove polymers and particles adhered to a rear face without peeling off patterning applied to a surface, and to surely remove particles adhered to respective faces with pressing force corresponding to the respective faces.SOLUTION: This processing unit includes a first cleaning mechanism 30 for cleaning one face of the peripheral fringe part of a workpiece W by abutting on the face, and a second cleaning mechanism 40 for cleaning the other face of the peripheral fringe part by abutting on the face. The processing unit also includes a first adjusting mechanism 10 for adjusting pressing force applied to one face of the peripheral fringe part, and second adjusting mechanisms 21, 25 for adjusting pressing force applied to the other face of the peripheral fringe part. The second cleaning mechanism 40 has a second cleaning part which can abut on the other face of the peripheral fringe part and in which the center part of the cross-section thereof is made of a hard part and the peripheral part surrounding the circumference of the center part is made of a soft part softer than the hard part. When cleaning the peripheral fringe part of the workpiece W, the hard part is brought into abutting contact with the side end face of the peripheral fringe part of the workpiece W, and the soft part is brought into abutting contact with the other face of the peripheral fringe part of the workpiece W.

Description

  The present invention relates to a processing apparatus for processing a peripheral portion of a target object made of a semiconductor wafer or the like.

  Conventionally, a holding unit that holds a substrate (object to be processed), a sponge-like first substrate cleaning brush that cleans the surface (one surface) of the peripheral portion of the substrate, and a first substrate cleaning brush that is opposed to the first substrate cleaning brush A sponge-like second substrate cleaning brush that cleans the back surface (the other surface) of the peripheral edge of the substrate, and a brush contact / separation mechanism that causes the first substrate cleaning brush and the second substrate cleaning brush to approach and separate from each other; Is known (see Patent Document 1).

JP 2007-157936 A

  According to the conventional processing apparatus as described in Patent Document 1, although the surface and the back surface of the peripheral portion of the object to be processed can be cleaned, the first cleaning portion adds to the surface of the peripheral portion of the object to be processed. It was not possible to control the pressing force and the pressing force applied to the back surface of the peripheral edge of the object to be processed from the second cleaning unit. For this reason, the conventional processing apparatus has the following problems.

  Generally, polymers and particles that are difficult to remove tend to adhere to the back surface of the object to be processed. For this reason, patterning applied to the surface of the object to be processed may be peeled off when cleaning is performed with a strong force to remove the polymer or particles attached to the back surface of the object to be processed. On the other hand, when washing was performed with a weak force so that the patterning applied to the front surface was not peeled off, the polymer and particles adhering to the back surface could not be removed.

  In addition, since there are various types of particles, there are some types of particles that are difficult to remove from the object to be processed, depending on the type of particles attached. The type of particles adhering to the surface of the object to be processed may be different from the type of particles adhering to the back surface, and particles that are difficult to remove adhere to one surface (for example, the front surface) and the other surface (for example, the back surface) When particles that are easy to remove adhere to the surface, it was not possible to clean with a pressing force corresponding to each surface.

  The present invention has been made in consideration of such points, and without removing the patterning applied to the front surface, the polymer and particles adhering to the back surface can be surely removed, or the pressing according to each surface can be performed. It is an object of the present invention to provide a processing apparatus capable of reliably removing particles adhering to each surface by pressure.

The processing apparatus according to the present invention comprises:
A holding unit for holding the object to be processed;
A rotation driving unit that rotates the object to be processed held by the holding unit;
A first cleaning mechanism for cleaning in contact with one surface of the peripheral edge of the workpiece;
A second cleaning mechanism for cleaning in contact with the other surface of the peripheral edge of the workpiece;
A first adjustment mechanism that adjusts the pressing force applied to one surface of the peripheral edge from the first cleaning mechanism;
A second adjustment mechanism for adjusting the pressing force applied to the other surface of the peripheral edge from the second cleaning mechanism;
It has.

In the processing apparatus according to the present invention,
The second adjustment mechanism may include a permanent magnet provided in the second cleaning mechanism, and an electromagnet that adjusts a pressing force applied to the other surface of the peripheral portion by applying a magnetic force to the permanent magnet. preferable.

In the processing apparatus according to the present invention,
The first cleaning mechanism is capable of abutting against one surface of the peripheral portion, the central portion of the cross section is a hard portion, and the outer peripheral portion surrounding the central portion is a soft portion that is softer than the hard portion It is preferable to have the 1st washing | cleaning part which consists of.

In the processing apparatus according to the present invention,
The second cleaning mechanism is capable of abutting against the other surface of the peripheral portion, the central portion of the cross section is a hard portion, and the outer peripheral portion surrounding the central portion is a soft portion that is softer than the hard portion It is preferable to have the 2nd washing | cleaning part which consists of.

In the processing apparatus according to the present invention,
It is preferable to further include a moving mechanism that is connected to the first cleaning mechanism and moves the first cleaning mechanism and the second cleaning mechanism in a direction from one surface of the workpiece to the other surface.

In the processing apparatus according to the present invention,
The second cleaning mechanism is connected to the first cleaning mechanism, and is swingable about a swing shaft. When the second cleaning mechanism is swung toward the first cleaning mechanism, the other surface of the peripheral portion is It is preferable to abut.

In the processing apparatus according to the present invention,
The second cleaning mechanism is swung toward the first cleaning mechanism around the swing shaft after the first cleaning mechanism abuts on the one surface of the peripheral edge, and the second cleaning mechanism It is preferable to contact the other surface.

In the processing apparatus according to the present invention,
The second adjusting mechanism applies a pressing force larger than the pressing force applied from the first cleaning mechanism to the one surface of the peripheral portion by the first adjusting mechanism, and the other surface of the peripheral portion from the second cleaning mechanism. It is preferable to add to.

  According to the present invention, the first adjustment mechanism can adjust the pressing force applied from the first cleaning mechanism to one surface of the peripheral edge of the object to be processed, and the second adjustment mechanism can adjust the second cleaning mechanism. The pressing force applied to the other surface of the peripheral edge of the object to be processed can be adjusted. For this reason, without removing the patterning applied to the front surface, the polymer and particles adhering to the back surface can be surely removed, or the particles adhering to each surface can be reliably removed with the pressing force according to each surface. can do.

The side sectional view showing the composition of the processing device by an embodiment of the invention. Side sectional drawing which shows the structure of the 1st adjustment mechanism of the processing apparatus by embodiment of this invention, and a 2nd adjustment mechanism. The upper sectional view showing the composition of the 1st washing part and the 2nd washing part of the processing device by an embodiment of the invention. Schematic which shows the drive aspect of the 2nd adjustment mechanism of the processing apparatus by embodiment of this invention. Side sectional drawing which shows the structure of the 1st washing | cleaning part of the processing apparatus by the modification of embodiment of this invention, and a 2nd washing | cleaning part.

Embodiments Hereinafter, embodiments of a processing apparatus according to the present invention will be described with reference to the drawings. Here, FIG. 1 to FIG. 5 are diagrams showing an embodiment of the present invention.

  As shown in FIG. 1, the processing apparatus includes a holding unit 1 that holds a semiconductor wafer W (hereinafter, also simply referred to as a wafer W) that is an object to be processed by vacuum suction, and a rotation that extends downward from the center of the holding unit 1. A shaft 5, a rotation driving unit 60 that rotates the rotating shaft 5 to rotate the wafer W held by the holding unit 1, a cup 70 that surrounds the wafer W held by the holding unit 1, and the wafer W A front surface cleaning mechanism (first cleaning mechanism) 30 that contacts and cleans the front surface (one surface) of the peripheral portion of the wafer W, and a back surface cleaning mechanism that contacts and cleans the rear surface (the other surface) of the peripheral portion of the wafer W ( Second cleaning mechanism) 40.

  As shown in FIG. 2, the surface cleaning mechanism 30 is provided with a first base end portion 31 and a lower end of the first base end portion 31, and can be brought into contact with the surface of the peripheral portion of the wafer W. And a surface cleaning part (first cleaning part) 32 in the form of a plate. As shown in FIGS. 3 (a) and 3 (b), the surface cleaning unit 32 is composed of a hard portion 32a having a hard central portion in the cross section, and an outer peripheral portion surrounding the center portion is softer than the hard portion 32a. It consists of part 32b.

  As shown in FIG. 2, the back surface cleaning mechanism 40 is provided with a second base end portion 41 and an upper end of the second base end portion 41, and can be brought into contact with the back surface of the peripheral portion of the wafer W. The back surface washing | cleaning part (2nd washing | cleaning part) 42 of a shape is provided. As shown in FIGS. 3 (a) and 3 (b), the back surface cleaning portion 42 is composed of a hard portion 42a having a hard central portion in the cross section, and an outer peripheral portion surrounding the central portion is softer than the hard portion 42a. It consists of part 42b.

  In the present embodiment, for both the front surface cleaning unit 32 and the rear surface cleaning unit 42, the center portion of the cross section is made of hard hard portions 32a, 42a, and the outer peripheral portion surrounding the center portion is the hard portion 32a, A description will be given using an embodiment composed of soft portions 32b and 42b softer than 42a. However, the present invention is not limited to this, and only one of the front surface cleaning unit 32 and the rear surface cleaning unit 42 is composed of hard portions 32a and 42a having a central portion in the cross section, and an outer peripheral portion surrounding the central portion is provided. You may consist of the soft parts 32b and 42b softer than the hard parts 32a and 42a.

  Further, as shown in FIG. 2, a housing 24 having an electromagnet 21 disposed therein is connected to the upper end of the surface cleaning mechanism 30. In addition, a top surface adjustment mechanism (first adjustment mechanism) 10 that adjusts the pressing force applied from the surface cleaning mechanism 30 to the surface of the peripheral portion of the wafer W is connected to the upper end of the housing 24.

  As shown in FIG. 2, the surface side adjustment mechanism 10 includes a cylindrical cylinder 12 and a piston 15 that can move in the vertical direction within the cylinder 12. In addition, the cylinder 12 is provided with an upper inflow portion 11 for flowing air into the upper side of the piston 15 and a lower inflow portion 16 for flowing air into the lower side of the piston 15. In addition, each of the upper side inflow part 11 and the lower side inflow part 16 is connected to the air supply part (not shown).

  Further, as shown in FIG. 2, a measured part 19 extending in the horizontal direction is connected to the upper end of the piston 15. Further, a measurement sensor 51 for measuring the pressing force applied from the measured part 19 is brought into contact with the lower end of the measured part 19. The measurement sensor 51 is connected to an output unit 52 that outputs a pressing force detected by the measurement sensor 51.

  Here, the air pressure applied to the piston 15 by the air flowing in from the upper inflow portion 11 and the air pressure applied to the piston 15 by the air flowing in from the lower inflow portion 16 are adjusted, thereby cleaning the surface. The pressing force applied from the portion 32 to the surface of the peripheral portion of the wafer W is adjusted.

  Further, as shown in FIG. 2, a permanent magnet 25 is connected to the lower end of the back surface cleaning mechanism 40. The backside adjustment mechanism (second adjustment mechanism) is configured by the permanent magnet 25 provided in the backside cleaning mechanism 40 and the electromagnet 21 that applies a magnetic force to the permanent magnet 25. The pressing force applied from the back surface cleaning unit 42 to the back surface of the peripheral portion of the wafer W is adjusted by adjusting the magnitude of the current flowing through the electromagnet 21 (the magnitude of the voltage applied to the electromagnet 21). .

  By the way, in the present embodiment, the back side adjustment mechanism (the electromagnet 21 and the permanent magnet 25) has a pressing force larger than the pressing force applied from the surface cleaning mechanism 30 to the surface of the peripheral edge of the wafer W by the front side adjustment mechanism 10. Can be applied from the back surface cleaning mechanism 40 to the back surface of the peripheral portion of the wafer W, and conversely, the pressing force applied to the surface of the peripheral portion of the wafer W from the front surface cleaning mechanism 30 by the front surface adjustment mechanism 10 is smaller. The pressing force can be applied to the back surface of the peripheral portion of the wafer W from the back surface cleaning mechanism 40.

  As shown in FIG. 2, the casing 24 is provided with a connecting member 45 that can swing around a swing shaft 45a. The back surface cleaning mechanism 40 is connected to the front surface cleaning mechanism 30 via a connecting member 45. Therefore, the back surface cleaning mechanism 40 can swing about the swing shaft 45a, and when it is swung to the front surface cleaning mechanism 30 side (upper side) (when in the closed position), the peripheral edge portion of the wafer W (See FIG. 4C).

  As shown in FIG. 1, the front surface cleaning mechanism 30 and the rear surface cleaning mechanism 40 are integrated into the front surface cleaning mechanism 30 via the housing 24 and the front surface side adjustment mechanism 10 in the vertical direction (from the front surface of the wafer W to the back surface). The cleaning unit moving mechanism 55 is connected to move in the direction toward the head.

  Further, as shown in FIG. 1, the rotation driving unit 60 includes a pulley 62 disposed on the outer periphery of the rotating shaft 5, a driving belt 63 wound around the pulley 62, and a driving force applied to the driving belt 63. And a motor 61 that rotates the rotary shaft 5 via the pulley 62. Further, a bearing 66 is disposed on the outer periphery of the rotating shaft 5. The rotating shaft 5 is connected to a holding unit moving mechanism 65 that moves the holding unit 1 in the vertical direction by moving the rotary shaft 5 in the vertical direction.

  In addition, as shown in FIG. 1, the processing apparatus includes a processing liquid supply unit 75 that supplies a processing liquid to the wafer W. On the front side of the wafer W, a front side supply nozzle 71 that is connected to the processing liquid supply unit 75 and supplies the processing liquid supplied from the processing liquid supply unit 75 to the surface of the wafer W is provided. Further, on the back surface side of the wafer W, a back surface side supply nozzle 72 that is connected to the processing liquid supply unit 75 and supplies the processing liquid supplied from the processing liquid supply unit 75 to the back surface of the wafer W is provided.

  In the present application, the treatment liquid means a chemical solution or pure water. And as a chemical | medical solution, dilute hydrofluoric acid etc. can be used, for example.

  Next, the operation of the present embodiment having such a configuration will be described.

  First, the wafer W taken out from the carrier (not shown) by the transfer robot (not shown) is placed on the holding unit 1 positioned at the transfer position (upper position) by the holding unit moving mechanism 65. (Holding step).

  Next, the holding part moving mechanism 65 moves the holding part 1 downward and positions it at a lower position (see FIG. 1).

  Next, the front surface cleaning mechanism 30 and the rear surface cleaning mechanism 40 are moved together by the cleaning unit moving mechanism 55 (see FIGS. 1 and 4A). At this time, the back surface cleaning unit 42 of the back surface cleaning mechanism 40 is swung to the opposite side (downward side) from the front surface cleaning mechanism 30 side and is positioned in the open position (see FIG. 4A).

  Thus, according to the present embodiment, the back surface cleaning unit 42 of the back surface cleaning mechanism 40 can be positioned on the back surface side of the wafer W while the back surface cleaning unit 42 of the back surface cleaning mechanism 40 is positioned in the open position ( (Refer FIG. 4 (a) (b)). Therefore, the size of the cup 70 surrounding the wafer W can be reduced, and the back surface cleaning unit 42 can be easily and quickly brought into contact with the back surface of the peripheral portion of the wafer W.

  That is, as in Patent Document 1, if the first substrate cleaning brush (front surface cleaning unit 32 ′) and the second substrate cleaning brush (back surface cleaning unit 42 ′) are made to approach and separate from each other, the holding unit 1 It is necessary to provide a gap between the held wafer W and the cup 70 so as to allow the first substrate cleaning brush (front surface cleaning unit 32 ′) and the second substrate cleaning brush (back surface cleaning unit 42 ′) to pass ( (See the dotted line 70 'in FIG. 1). For this reason, the size of the cup 70 surrounding the wafer W held by the holding unit 1 is increased.

On the other hand, according to the present embodiment, the back surface cleaning unit of the back surface cleaning mechanism 40 can be simply moved downward while the back surface cleaning unit 42 of the back surface cleaning mechanism 40 is positioned at the open position. 42 can be moved to the back side of the wafer W (see solid line arrow in FIG. 1).
For this reason, it is not necessary to provide a gap for allowing the back surface cleaning unit 42 to pass between the wafer W held by the holding unit 1 and the cup 70. As a result, the size of the cup 70 surrounding the wafer W can be reduced.

  Further, in the case of the conventional one described in Patent Document 1, when the back surface cleaning unit 42 is brought into contact with the peripheral edge of the back surface of the wafer W, the second substrate cleaning brush (back surface cleaning unit 42 ′) is used. Although the wafer W needs to be moved in the horizontal direction toward the periphery of the wafer W after being positioned on the back surface side of the wafer W (see the dotted arrow in FIG. 1), according to the present embodiment, the back surface cleaning is performed. It is only necessary to move the mechanism 40 downward (see solid arrow in FIG. 1). For this reason, the number of steps until the back surface cleaning unit 42 is brought into contact with the peripheral edge of the back surface of the wafer W can be reduced (the number of horizontal movement steps can be reduced). Can be brought into contact with the rear surface of the peripheral edge easily and quickly.

  Next, the rotation shaft 5 is rotationally driven by the rotation driving unit 60, whereby the wafer W held by the holding unit 11 is rotated (rotation process) (see FIG. 1). At this time, a driving force is applied from the motor 61 to the pulley 62 via the driving belt 63, whereby the rotating shaft 5 is driven to rotate.

  Next, the processing liquid supplied from the processing liquid supply unit 75 starts to be supplied to the surface of the wafer W by the front side supply nozzle 71. Similarly, the processing liquid supplied from the processing liquid supply unit 75 starts to be supplied to the back surface of the wafer W by the back surface side supply nozzle 72 (processing liquid supply process) (see FIG. 1). The following steps are performed while the processing liquid is supplied to the peripheral edge of the wafer W from the front-side supply nozzle 71 and the back-side supply nozzle 72 as described above.

  Thus, when the processing liquid is supplied from the front side supply nozzle 71 and the back side supply nozzle 72, the front surface cleaning unit 32 of the front surface cleaning mechanism 30 is brought into contact with the surface of the wafer W (see FIG. 4B). ). Thereafter, a current is passed through the electromagnet 21 in the casing 24 (see the arrow in FIG. 4C), and the magnetic force applied from the electromagnet 21 acts on the permanent magnet 25 provided at the lower end of the back surface cleaning mechanism 40. . As a result, the back surface cleaning section 42 of the back surface cleaning mechanism 40 is swung around the swing shaft 45a and positioned at the closed position, and the back surface cleaning section 42 is brought into contact with the back surface of the wafer W (FIG. 4C). )reference).

  At this time, by adjusting the magnitude of the current flowing through the electromagnet 21 (the magnitude of the voltage applied to the electromagnet 21), the pressing force applied to the back surface of the peripheral edge of the wafer W from the back surface cleaning unit 42 is adjusted. Can do.

  Further, by adjusting the air pressure due to the air flowing in from the upper inflow portion 11 and the air pressure due to the air flowing in from the lower inflow portion 16, it is applied from the surface cleaning portion 32 to the surface of the peripheral portion of the wafer W. The pressing force can be adjusted (see FIG. 2). The pressing force is detected by the measurement sensor 51 and output by the output unit 52.

  As described above, according to the present embodiment, the pressing force applied from the front surface cleaning mechanism 30 to the surface of the peripheral portion of the wafer W can be adjusted, and the rear surface cleaning mechanism (the electromagnet 21 and the permanent magnet 25) 40. The pressing force applied to the back surface of the peripheral edge of the wafer W can be adjusted. Therefore, the front surface of the wafer W can be cleaned with a weak force, and the back surface of the wafer W can be cleaned with a strong force. Conversely, the back surface of the wafer W can be cleaned with a weak force, and The surface can be cleaned with a strong force.

  For this reason, when a polymer or particles that are difficult to remove adhere to the back surface of the wafer W, the surface of the wafer W is cleaned with a weak force and the back surface of the wafer W is cleaned with a strong force. The polymer and particles adhering to the back surface of the wafer W can be reliably removed without removing the patterning applied to the front surface.

  As a result, according to the present embodiment, the following effects can be obtained.

  First, when the wafer W is transferred, particles remaining on the peripheral edge are not caught between the arm of the transfer robot (not shown) and the wafer W. It is possible to prevent the back surface from being peeled off.

  Further, after the wafer W is returned into the carrier (not shown), the particles adhering to the peripheral portion of the wafer W in the carrier are not dropped, so that other wafers W in the carrier are soiled. Can be prevented.

  Furthermore, since the particles do not float in the water accumulated on the wafer W when the wafer W is exposed and processed, the refractive index of the water can be kept uniform, and the wafer W can be exposed accurately. Can be processed.

  Further, the front surface cleaning unit 32 and the back surface cleaning unit 42 are composed of hard portions 32a and 42a having a central portion in a cross section, and the outer peripheral portion surrounding the center portion is softer than the hard portions 32a and 42a. 42b (see FIGS. 3A and 3B). For this reason, as shown in FIG. 3B, the side end surface (APEX portion) of the peripheral portion of the wafer W is brought into contact with the hard portions 32a and 42a, and the surface of the peripheral portion of the wafer W is formed by the soft portions 32b and 42b. And a back surface (bevel part) can be pinched | interposed.

  As a result, the side end face (APEX part) of the peripheral part of the wafer W that is not subjected to patterning can be cleaned with a stronger force (than the front and back surfaces (bevel part) of the peripheral part of the wafer W).

  By the way, in the present embodiment, the processing liquid supplied from the front surface side supply nozzle 71 to the front surface of the wafer W and the processing liquid supplied from the back surface side supply nozzle 72 to the back surface of the wafer W can be appropriately changed. (See FIG. 1). For example, the chemical liquid may be supplied first from the front surface side supply nozzle 71 and the back surface side supply nozzle 72, then the rinse liquid may be supplied, and finally the dry liquid may be supplied. The type of processing liquid supplied from the front surface side supply nozzle 71 to the front surface of the wafer W and the type of processing liquid supplied from the back surface side supply nozzle 72 to the back surface of the wafer W can be changed independently. .

  When the predetermined processing of the peripheral portion of the wafer W with the processing liquid as described above is completed, the supply of the processing liquid from the front surface side supply nozzle 71 and the back surface side supply nozzle 72 is stopped. At this time, the current flowing through the electromagnet 21 in the housing 24 is stopped (or current is passed through the electromagnet 21 in the housing 24 in the reverse direction), and the back surface cleaning unit 42 is centered on the swing shaft 45a. It swings downward and is positioned in the open position. Thereafter, the cleaning unit moving mechanism 55 moves the front surface cleaning mechanism 30 and the back surface cleaning mechanism 40 together to move upward.

  At this time, the back surface cleaning unit 42 can be moved from the back surface side to the front surface side of the wafer W only by moving the back surface cleaning mechanism 40 upward (without moving it outward in the peripheral direction of the wafer W). The back surface cleaning unit 42 can be moved easily and quickly.

  Next, the wafer W is rotated at a high speed by the rotation driving unit 60, and the peripheral portion of the wafer W is dried. Thereafter, the motor 61 of the rotation drive mechanism 60 is stopped, and the rotation of the wafer W held by the holding unit 1 is also stopped.

  Next, the holding part moving mechanism 65 moves the holding part 1 upward and positions it at the delivery position (upper position).

  Next, the wafer W is removed from the holding unit 1 by a transfer robot (not shown).

  By the way, in the above, the housing 24 that accommodates the electromagnet 21 is connected to the surface cleaning mechanism 30, and the back surface cleaning unit 42 of the back surface cleaning mechanism 40 can swing around the swing shaft 45 a. It demonstrated using the aspect connected (refer FIG. 2).

  However, the present invention is not limited to this, and as shown in FIG. 5, the casing 24 that houses the electromagnet 21 is disposed below the permanent magnet 25 provided at the lower end of the second base end portion 41, and the second base A guide portion 44 having a guide groove 44a for guiding the end portion 41 and the back surface cleaning portion 42 in the vertical direction may be disposed, and the back surface cleaning portion 42 may be movable in the vertical direction. In this case, the surface cleaning mechanism 30 is directly connected to the surface-side adjustment mechanism 10 (without going through the housing 24).

  Also according to such an aspect, the pressing force applied from the front surface cleaning mechanism 30 to the surface of the peripheral portion of the wafer W can be adjusted, and the pressing force applied from the back surface cleaning mechanism 40 to the rear surface of the peripheral portion of the wafer W is adjusted. Can be adjusted. For this reason, the peripheral portion of the wafer W can be reliably cleaned, and particles can be reliably removed from the peripheral portion of the wafer W.

1 holding part 10 surface side adjustment mechanism (first adjustment mechanism)
21 Electromagnet 25 Permanent magnet 30 Surface cleaning mechanism (first cleaning mechanism)
32 Surface cleaning section (first cleaning section)
32a Hard part 32b Soft part 40 Back surface cleaning mechanism (second cleaning mechanism)
42 Back surface cleaning section (second cleaning section)
42a Hard part 42b Soft part 45a Oscillating shaft 55 Cleaning part moving mechanism (moving mechanism)
60 Rotation Drive Unit 65 Holding Unit Movement Mechanism 70 Cup W Wafer (Subject)

Claims (7)

A holding unit for holding the object to be processed;
A rotation driving unit that rotates the object to be processed held by the holding unit;
A first cleaning mechanism for cleaning in contact with one surface of the peripheral edge of the workpiece;
A second cleaning mechanism for cleaning in contact with the other surface of the peripheral edge of the workpiece;
A first adjustment mechanism that adjusts the pressing force applied to one surface of the peripheral edge from the first cleaning mechanism;
A second adjustment mechanism for adjusting the pressing force applied to the other surface of the peripheral edge from the second cleaning mechanism;
With
The second cleaning mechanism is capable of abutting against the other surface of the peripheral portion, the central portion of the cross section is a hard portion, and the outer peripheral portion surrounding the central portion is a soft portion that is softer than the hard portion A second cleaning section consisting of
When cleaning the peripheral portion of the object to be processed, the hard portion is in contact with a side end surface of the peripheral portion, and the soft portion is in contact with the other surface of the peripheral portion.   The second adjustment mechanism includes a permanent magnet provided in the second cleaning mechanism, and an electromagnet that adjusts a pressing force applied to the other surface of the peripheral portion by applying a magnetic force to the permanent magnet. The processing apparatus according to claim 1, characterized in that:   The first cleaning mechanism is capable of abutting against one surface of the peripheral portion, the central portion of the cross section is a hard portion, and the outer peripheral portion surrounding the central portion is a soft portion that is softer than the hard portion The processing apparatus according to claim 1, further comprising a first cleaning unit made of   And a moving mechanism that is connected to the first cleaning mechanism and moves the first cleaning mechanism and the second cleaning mechanism in a direction from one surface of the object to be processed to the other surface. The processing apparatus according to any one of claims 1 to 3.   The second cleaning mechanism is connected to the first cleaning mechanism, and is swingable about a swing shaft. When the second cleaning mechanism is swung toward the first cleaning mechanism, the other surface of the peripheral portion is The processing apparatus according to claim 1, wherein the processing apparatus is in contact with the processing apparatus.   The second cleaning mechanism is swung toward the first cleaning mechanism around the swing shaft after the first cleaning mechanism abuts on the one surface of the peripheral edge, and the second cleaning mechanism The processing apparatus according to claim 5, wherein the processing apparatus is in contact with the other surface.   The second adjusting mechanism applies a pressing force larger than the pressing force applied from the first cleaning mechanism to the one surface of the peripheral portion by the first adjusting mechanism, and the other surface of the peripheral portion from the second cleaning mechanism. The processing apparatus according to claim 1, wherein the processing apparatus is added to the processing apparatus.

Images