JP2012104861A5 - - Google Patents

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Publication number
JP2012104861A5
JP2012104861A5 JP2012030228A JP2012030228A JP2012104861A5 JP 2012104861 A5 JP2012104861 A5 JP 2012104861A5 JP 2012030228 A JP2012030228 A JP 2012030228A JP 2012030228 A JP2012030228 A JP 2012030228A JP 2012104861 A5 JP2012104861 A5 JP 2012104861A5
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JP
Japan
Prior art keywords
laser
component
extreme ultraviolet
light
linearly polarized
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JP2012030228A
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English (en)
Japanese (ja)
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JP2012104861A (ja
JP5223015B2 (ja
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Priority to JP2012030228A priority Critical patent/JP5223015B2/ja
Priority claimed from JP2012030228A external-priority patent/JP5223015B2/ja
Publication of JP2012104861A publication Critical patent/JP2012104861A/ja
Publication of JP2012104861A5 publication Critical patent/JP2012104861A5/ja
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JP2012030228A 2012-02-15 2012-02-15 極端紫外光源装置 Active JP5223015B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012030228A JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012030228A JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007127777A Division JP4932592B2 (ja) 2007-05-14 2007-05-14 極端紫外光源装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012095210A Division JP5511882B2 (ja) 2012-04-19 2012-04-19 極端紫外光源装置

Publications (3)

Publication Number Publication Date
JP2012104861A JP2012104861A (ja) 2012-05-31
JP2012104861A5 true JP2012104861A5 (enrdf_load_stackoverflow) 2012-07-12
JP5223015B2 JP5223015B2 (ja) 2013-06-26

Family

ID=46394825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012030228A Active JP5223015B2 (ja) 2012-02-15 2012-02-15 極端紫外光源装置

Country Status (1)

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JP (1) JP5223015B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6252358B2 (ja) * 2014-05-27 2017-12-27 ウシオ電機株式会社 極端紫外光光源装置
JP7426299B2 (ja) 2020-06-26 2024-02-01 ギガフォトン株式会社 極端紫外光生成システム及び電子デバイスの製造方法
JP7657877B1 (ja) 2023-09-25 2025-04-07 レーザーテック株式会社 光源装置、検査装置、露光装置、光源制御方法、検査方法及び露光方法
JP7657878B1 (ja) 2023-09-25 2025-04-07 レーザーテック株式会社 光源装置、検査装置、露光装置、光源制御方法、検査方法及び露光方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3363835B2 (ja) * 1999-06-07 2003-01-08 住友重機械工業株式会社 戻り光除去方法と装置
JP2000357835A (ja) * 1999-06-15 2000-12-26 Amada Eng Center Co Ltd レーザ発振器
JP2002280322A (ja) * 2001-03-15 2002-09-27 Ishikawajima Harima Heavy Ind Co Ltd レーザ照射装置及びレーザ照射方法
JP4875879B2 (ja) * 2005-10-12 2012-02-15 株式会社小松製作所 極端紫外光源装置の初期アライメント方法

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