JP2012099570A5 - - Google Patents

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Publication number
JP2012099570A5
JP2012099570A5 JP2010244449A JP2010244449A JP2012099570A5 JP 2012099570 A5 JP2012099570 A5 JP 2012099570A5 JP 2010244449 A JP2010244449 A JP 2010244449A JP 2010244449 A JP2010244449 A JP 2010244449A JP 2012099570 A5 JP2012099570 A5 JP 2012099570A5
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JP
Japan
Prior art keywords
substrate
nozzle unit
processing
processing liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010244449A
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English (en)
Japanese (ja)
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JP2012099570A (ja
JP5717244B2 (ja
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Priority to JP2010244449A priority Critical patent/JP5717244B2/ja
Priority claimed from JP2010244449A external-priority patent/JP5717244B2/ja
Publication of JP2012099570A publication Critical patent/JP2012099570A/ja
Publication of JP2012099570A5 publication Critical patent/JP2012099570A5/ja
Application granted granted Critical
Publication of JP5717244B2 publication Critical patent/JP5717244B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010244449A 2010-10-29 2010-10-29 基板処理装置及び基板処理方法 Active JP5717244B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010244449A JP5717244B2 (ja) 2010-10-29 2010-10-29 基板処理装置及び基板処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010244449A JP5717244B2 (ja) 2010-10-29 2010-10-29 基板処理装置及び基板処理方法

Publications (3)

Publication Number Publication Date
JP2012099570A JP2012099570A (ja) 2012-05-24
JP2012099570A5 true JP2012099570A5 (enExample) 2013-12-12
JP5717244B2 JP5717244B2 (ja) 2015-05-13

Family

ID=46391177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010244449A Active JP5717244B2 (ja) 2010-10-29 2010-10-29 基板処理装置及び基板処理方法

Country Status (1)

Country Link
JP (1) JP5717244B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102814295A (zh) * 2012-09-06 2012-12-12 上海市闵行第二中学 一种数字检测仪探头的冲洗装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3437702B2 (ja) * 1996-02-01 2003-08-18 大日本スクリーン製造株式会社 基板処理装置
JP2006130484A (ja) * 2004-11-09 2006-05-25 Dainippon Screen Mfg Co Ltd 基板処理装置

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