JP2012094861A - 太陽電池の薄膜蒸着装置、方法及びシステム - Google Patents
太陽電池の薄膜蒸着装置、方法及びシステム Download PDFInfo
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
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Abstract
【解決手段】太陽電池の薄膜蒸着装置は、基板Wを境界として区分される複数個の単位チャンバー110a,110bと、複数個の単位チャンバーに蒸着ガスG1,G2を独立的に注入させるための蒸着ガス注入部120a,120bと、前記単位チャンバー内にそれぞれ備えられ、前記注入された蒸着ガスを分解するための分解手段130a,130bと、を備え、前記基板の両面それぞれは、前記複数個の単位チャンバーに露出され、太陽電池の薄膜蒸着装置及びそれを利用した製造方法は、基板の回転なしに固定された状態で基板の両面蒸着を可能にする。したがって、一面に対して一層のみが積層される従来の技術に比べて、要求される設備の数が画期的に減ることができる。
【選択図】図1
Description
その結果、本発明による蒸着装置は、従来の技術に比べて経済性に優れる。さらに、蒸着工程の数が減少することで、基板の外部露出時間も短縮し、その結果、基板の表面の汚染を低減することができ、優れた信頼性を有する太陽電池の製造が可能である。
本発明は以下の開示を含む。
太陽電池の薄膜蒸着装置であって、
基板を境界として区分される複数個の単位チャンバーと、
複数個の単位チャンバーに蒸着ガスを独立的に注入させるための蒸着ガス注入部と、
前記単位チャンバー内にそれぞれ備えられ、前記注入された蒸着ガスを分解するための分解手段と、を備え、前記基板の両面それぞれは、前記複数個の単位チャンバーに露出されることを特徴とする太陽電池の薄膜蒸着装置。
前記装置は、二つの単位チャンバーを備え、前記単位チャンバーは、前記基板及び前記基板を支持する支持部により分画されることを特徴とする(1)に記載の太陽電池の薄膜蒸着装置。
前記分解手段は、前記基板の一側から所定の間隔に離隔されることを特徴とする(2)に記載の太陽電池の薄膜蒸着装置。
前記分解手段は、熱線またはプラズマ発生部であることを特徴とする(3)に記載の太陽電池の薄膜蒸着装置。
前記蒸着ガスは、シラン及び水素を含み、蒸着される薄膜によってドーピングガスをさらに含むことを特徴とする(1)に記載の太陽電池の薄膜蒸着装置。
(1)ないし(5)のうちいずれか一項に記載の薄膜蒸着装置を複数個備え、前記複数個の蒸着装置により、同じ基板に対する順次的な薄膜蒸着工程が進められることを特徴とする太陽電池の薄膜蒸着システム。
前記薄膜蒸着システムは、
所定の間隔に離隔された(1)ないし(5)のうちいずれか一項に記載の薄膜蒸着装置と、
前記薄膜蒸着装置を通過する基板移送手段と、を備えることを特徴とする(6)に記載の太陽電池の薄膜蒸着システム。
前記複数個の薄膜蒸着装置による蒸着工程が進められることで、前記基板の両側面に薄膜が同時にまたは順次に蒸着されることを特徴とする(6)または(7)に記載の太陽電池の薄膜蒸着システム。
太陽電池基板の両面上に蒸着ガスを注入するステップと、
前記注入された蒸着ガスを分解して、前記基板の両面に薄膜を蒸着させるステップと、を含むことを特徴とする太陽電池の製造方法。
前記蒸着ガスは、前記基板を境界として分画された単位チャンバーに注入されることを特徴とする(9)に記載の太陽電池の製造方法。
前記基板は、前記単位チャンバーの境界面を構成することを特徴とする(10)に記載の太陽電池の製造方法。
前記蒸着ガスは、前記単位チャンバーに独立的に注入され、前記蒸着工程中で前記基板は回転しないことを特徴とする(10)に記載の太陽電池の製造方法。
前記基板は、第1型不純物がドーピングされたシリコン太陽電池であることを特徴とする(12)に記載の太陽電池の製造方法。
異種接合の太陽電池の製造方法であって、前記方法は、
前記シリコン基板の両面上に、真性の非晶質シリコン薄膜を蒸着させるステップと、
前記非晶質シリコン薄膜が蒸着された基板の両側面に、第2型不純物及び第1型不純物がそれぞれドーピングされた非晶質シリコン層をそれぞれ蒸着させるステップと、
前記基板上に透明伝導性の電極層を蒸着させるステップと、を含み、前記方法の各ステップは、(9)ないし(13)のうちいずれか一項に記載の方法によって進められることを特徴とする異種接合の太陽電池の製造方法。
前記蒸着ステップそれぞれは、流入された蒸着ガスをプラズマまたは熱分解させる方式で進められることを特徴とする(14)に記載の異種接合の太陽電池の製造方法。
前記蒸着ステップそれぞれは、別途の蒸着装置で進められることを特徴とする(15)に記載の異種接合の太陽電池の製造方法。
Claims (16)
- 太陽電池の薄膜蒸着装置であって、
基板を境界としてチャンバーを第1及び第2の単位チャンバーに区分する位置に基板を取り付ける支持部と、前記第1及び第2の単位チャンバーに蒸着ガスを独立的に注入させる位置に設けられた第1及び第2の蒸着ガス注入部と、前記第1及び第2の単位チャンバー内にそれぞれ備えられ、前記注入された蒸着ガスを分解するための第1及び第2の分解手段と、を備え、
前記支持部は、基板の両面それぞれを、前記第1及び第2の単位チャンバーにおいて露出される位置に設けられていることを特徴とする太陽電池の薄膜蒸着装置。 - 前記第1及び第2の単位チャンバーは、前記基板及び前記支持部により分画されることを特徴とする請求項1に記載の太陽電池の薄膜蒸着装置。
- 前記第1及び第2の分解手段は、前記基板の両面のそれぞれから所定の間隔だけ基板面の放線方向に離隔された位置に設けられることを特徴とする請求項2に記載の太陽電池の薄膜蒸着装置。
- 前記分解手段は、熱線またはプラズマ発生部を有することを特徴とする請求項3に記載の太陽電池の薄膜蒸着装置。
- 前記蒸着ガスは、シラン及び水素を含み、蒸着される薄膜に依存するドーピングガスをさらに含むことを特徴とする請求項1から4までのいずれか1項に記載の太陽電池の薄膜蒸着装置。
- 請求項1ないし5のうちいずれか1項に記載の薄膜蒸着装置を複数個備え、
前記複数個の蒸着装置により、同じ基板に対する薄膜蒸着工程を順次鯣留ように構成されていることを特徴とする太陽電池の薄膜蒸着システム。 - 前記薄膜蒸着システムは、
所定の間隔に離隔された請求項1ないし5のうちいずれか1項に記載の薄膜蒸着装置と、
前記薄膜蒸着装置間において基板を通過させる基板移送手段と、を備えることを特徴とする請求項6に記載の太陽電池の薄膜蒸着システム。 - 前記複数個の薄膜蒸着装置による蒸着工程が進められることで、前記基板の両側面に薄膜が同時にまたは順次に蒸着されることを特徴とする請求項6又は7に記載の太陽電池の薄膜蒸着システム。
- 太陽電池基板の両面上に蒸着ガスを注入するステップと、
前記注入された蒸着ガスを分解して、前記基板の両面に薄膜を蒸着させるステップと、を含むことを特徴とする太陽電池の製造方法。 - 前記蒸着ガスは、前記基板を境界として分画された単位チャンバーに注入されることを特徴とする請求項9に記載の太陽電池の製造方法。
- 前記基板は、前記単位チャンバーの境界面を構成することを特徴とする請求項10に記載の太陽電池の製造方法。
- 前記蒸着ガスは、前記単位チャンバーに独立的に注入され、前記蒸着工程中で前記基板は回転しないことを特徴とする請求項10に記載の太陽電池の製造方法。
- 前記基板は、第1型不純物がドーピングされたシリコン太陽電池であることを特徴とする請求項12に記載の太陽電池の製造方法。
- 異種接合の太陽電池の製造方法であって、
前記太陽電池基板の両面上に、真性の非晶質シリコン薄膜を蒸着させるステップと、
前記非晶質シリコン薄膜が蒸着された基板の両側面に、第2導電型不純物及び第1導電型不純物がそれぞれドーピングされた非晶質シリコン層をそれぞれ蒸着させるステップと、
前記基板上に透明伝導性の電極層を蒸着させるステップと、を含み、前記方法の各ステップは、請求項9ないし13のうちいずれか一項に記載の方法によって進められることを特徴とする異種接合の太陽電池の製造方法。 - 前記蒸着ステップそれぞれは、流入された蒸着ガスをプラズマまたは熱分解させる方式で進められることを特徴とする請求項14に記載の異種接合の太陽電池の製造方法。
- 前記蒸着ステップそれぞれは、別途の蒸着装置で進められることを特徴とする請求項15に記載の異種接合の太陽電池の製造方法。
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KR20190134183A (ko) * | 2018-05-25 | 2019-12-04 | 주성엔지니어링(주) | 기판지지장치 및 이를 구비하는 기판처리장치 |
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WO2019205351A1 (zh) * | 2018-04-24 | 2019-10-31 | 君泰创新(北京)科技有限公司 | 双面镀膜设备及其载板处理单元 |
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