JP2012093194A5 - - Google Patents

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Publication number
JP2012093194A5
JP2012093194A5 JP2010240069A JP2010240069A JP2012093194A5 JP 2012093194 A5 JP2012093194 A5 JP 2012093194A5 JP 2010240069 A JP2010240069 A JP 2010240069A JP 2010240069 A JP2010240069 A JP 2010240069A JP 2012093194 A5 JP2012093194 A5 JP 2012093194A5
Authority
JP
Japan
Prior art keywords
pressure control
control plate
wiring board
needle pressure
tip portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010240069A
Other languages
English (en)
Japanese (ja)
Other versions
JP5685413B2 (ja
JP2012093194A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010240069A priority Critical patent/JP5685413B2/ja
Priority claimed from JP2010240069A external-priority patent/JP5685413B2/ja
Publication of JP2012093194A publication Critical patent/JP2012093194A/ja
Publication of JP2012093194A5 publication Critical patent/JP2012093194A5/ja
Application granted granted Critical
Publication of JP5685413B2 publication Critical patent/JP5685413B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010240069A 2010-10-26 2010-10-26 プローブカード Expired - Fee Related JP5685413B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010240069A JP5685413B2 (ja) 2010-10-26 2010-10-26 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010240069A JP5685413B2 (ja) 2010-10-26 2010-10-26 プローブカード

Publications (3)

Publication Number Publication Date
JP2012093194A JP2012093194A (ja) 2012-05-17
JP2012093194A5 true JP2012093194A5 (zh) 2013-10-17
JP5685413B2 JP5685413B2 (ja) 2015-03-18

Family

ID=46386685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010240069A Expired - Fee Related JP5685413B2 (ja) 2010-10-26 2010-10-26 プローブカード

Country Status (1)

Country Link
JP (1) JP5685413B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6110117B2 (ja) * 2012-11-29 2017-04-05 株式会社日本マイクロニクス プローブ組立体及びプローブ基板
JP6889672B2 (ja) * 2018-02-19 2021-06-18 日本特殊陶業株式会社 検査装置用配線基板
KR102271347B1 (ko) * 2019-10-28 2021-06-30 주식회사 나노엑스 전기 소자 검사 장치용 프로브 헤드
KR102339327B1 (ko) * 2019-10-28 2021-12-15 주식회사 나노엑스 전기 소자 검사 장치용 프로브 헤드의 제조 방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4486248B2 (ja) * 1999-12-28 2010-06-23 株式会社日本マイクロニクス プローブカード及びその製造方法
JP4480258B2 (ja) * 2000-03-29 2010-06-16 株式会社日本マイクロニクス 半導体デバイス検査装置における電気的接触装置
JP3587301B2 (ja) * 2001-06-20 2004-11-10 株式会社エンプラス 電気部品用ソケット

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