JP2012079677A - 自動光学検出に用いられる照明システムおよびそれと画像形成システムとの組合せ - Google Patents

自動光学検出に用いられる照明システムおよびそれと画像形成システムとの組合せ Download PDF

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Publication number
JP2012079677A
JP2012079677A JP2011032957A JP2011032957A JP2012079677A JP 2012079677 A JP2012079677 A JP 2012079677A JP 2011032957 A JP2011032957 A JP 2011032957A JP 2011032957 A JP2011032957 A JP 2011032957A JP 2012079677 A JP2012079677 A JP 2012079677A
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JP
Japan
Prior art keywords
light source
light
image forming
optical detection
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011032957A
Other languages
English (en)
Japanese (ja)
Inventor
Guang Shiah Wang
グアンシーアウ ワン
Huei Yu Chen
フエイユィ チェン
Shu Wei Zeng
シューウェイ ゾン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Machvision Inc
Original Assignee
Machvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Machvision Inc filed Critical Machvision Inc
Publication of JP2012079677A publication Critical patent/JP2012079677A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
    • F21K9/20—Light sources comprising attachment means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
    • F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
    • F21W2131/40—Lighting for industrial, commercial, recreational or military use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1785—Three dimensional

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2011032957A 2010-10-05 2011-02-18 自動光学検出に用いられる照明システムおよびそれと画像形成システムとの組合せ Pending JP2012079677A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW099133802 2010-10-05
TW099133802A TW201215845A (en) 2010-10-05 2010-10-05 Illumination system for automatic optical inspection and assembly of it and camera system

Publications (1)

Publication Number Publication Date
JP2012079677A true JP2012079677A (ja) 2012-04-19

Family

ID=46137672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011032957A Pending JP2012079677A (ja) 2010-10-05 2011-02-18 自動光学検出に用いられる照明システムおよびそれと画像形成システムとの組合せ

Country Status (3)

Country Link
JP (1) JP2012079677A (ko)
KR (1) KR101232947B1 (ko)
TW (1) TW201215845A (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101476530B1 (ko) * 2013-01-22 2014-12-24 마하비전 아이엔씨. 라인 스캔을 위한 다중 각도 조명 광학 조립체 및 이를 이용한 광원 시스템

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI484164B (zh) * 2012-05-11 2015-05-11 Machvision Inc Optical re - inspection system and its detection method
TWI491871B (zh) * 2013-07-05 2015-07-11 Machvision Inc 用於光學檢測的照明系統及使用其之檢測系統、檢測方法
CN110346381B (zh) * 2019-08-12 2022-03-08 衡阳师范学院 一种光学元件损伤测试方法及装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278901U (ko) * 1988-12-05 1990-06-18
JPH04122840A (ja) * 1990-09-14 1992-04-23 Matsushita Electric Ind Co Ltd 基板の観察装置
JPH0829138A (ja) * 1994-07-20 1996-02-02 Fujitsu Ltd パターン検査装置及び方法
JP2003202302A (ja) * 1993-05-13 2003-07-18 Olympus Optical Co Ltd 表面欠陥検査装置
JP2004101311A (ja) * 2002-09-09 2004-04-02 Matsushita Electric Ind Co Ltd ラインセンサカメラ用の照明装置および照明方法
JP2007248051A (ja) * 2006-03-13 2007-09-27 Kyushu Institute Of Technology 対象物表面の欠陥検査方法
JP2009103512A (ja) * 2007-10-22 2009-05-14 Hitachi Ltd 配線パターン処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3519813B2 (ja) * 1995-03-14 2004-04-19 オリンパス株式会社 欠陥検出方法及び欠陥検出装置
US7253891B2 (en) * 2003-01-09 2007-08-07 Orbotech Ltd. Method and apparatus for simultaneous 2-D and topographical inspection
KR20080043047A (ko) * 2006-11-13 2008-05-16 주식회사 고영테크놀러지 새도우 모아레를 이용한 3차원형상 측정장치

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0278901U (ko) * 1988-12-05 1990-06-18
JPH04122840A (ja) * 1990-09-14 1992-04-23 Matsushita Electric Ind Co Ltd 基板の観察装置
JP2003202302A (ja) * 1993-05-13 2003-07-18 Olympus Optical Co Ltd 表面欠陥検査装置
JPH0829138A (ja) * 1994-07-20 1996-02-02 Fujitsu Ltd パターン検査装置及び方法
JP2004101311A (ja) * 2002-09-09 2004-04-02 Matsushita Electric Ind Co Ltd ラインセンサカメラ用の照明装置および照明方法
JP2007248051A (ja) * 2006-03-13 2007-09-27 Kyushu Institute Of Technology 対象物表面の欠陥検査方法
JP2009103512A (ja) * 2007-10-22 2009-05-14 Hitachi Ltd 配線パターン処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101476530B1 (ko) * 2013-01-22 2014-12-24 마하비전 아이엔씨. 라인 스캔을 위한 다중 각도 조명 광학 조립체 및 이를 이용한 광원 시스템

Also Published As

Publication number Publication date
KR20120035830A (ko) 2012-04-16
TW201215845A (en) 2012-04-16
KR101232947B1 (ko) 2013-02-13

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