TW201215845A - Illumination system for automatic optical inspection and assembly of it and camera system - Google Patents

Illumination system for automatic optical inspection and assembly of it and camera system Download PDF

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Publication number
TW201215845A
TW201215845A TW099133802A TW99133802A TW201215845A TW 201215845 A TW201215845 A TW 201215845A TW 099133802 A TW099133802 A TW 099133802A TW 99133802 A TW99133802 A TW 99133802A TW 201215845 A TW201215845 A TW 201215845A
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Taiwan
Prior art keywords
light source
light
optical
illumination system
imaging system
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TW099133802A
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Chinese (zh)
Inventor
Guang-Shiah Wang
Huei-Yu Chen
Shu-Wei Zeng
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Machvision Inc
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Application filed by Machvision Inc filed Critical Machvision Inc
Priority to TW099133802A priority Critical patent/TW201215845A/en
Priority to KR1020110013674A priority patent/KR101232947B1/en
Priority to JP2011032957A priority patent/JP2012079677A/en
Publication of TW201215845A publication Critical patent/TW201215845A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21K—NON-ELECTRIC LIGHT SOURCES USING LUMINESCENCE; LIGHT SOURCES USING ELECTROCHEMILUMINESCENCE; LIGHT SOURCES USING CHARGES OF COMBUSTIBLE MATERIAL; LIGHT SOURCES USING SEMICONDUCTOR DEVICES AS LIGHT-GENERATING ELEMENTS; LIGHT SOURCES NOT OTHERWISE PROVIDED FOR
    • F21K9/00—Light sources using semiconductor devices as light-generating elements, e.g. using light-emitting diodes [LED] or lasers
    • F21K9/20—Light sources comprising attachment means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0008—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type the light being emitted at the end of the fibre
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
    • F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
    • F21W2131/40—Lighting for industrial, commercial, recreational or military use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/10—Light-emitting diodes [LED]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1785—Three dimensional

Abstract

The present invention discloses an illumination system for automatic optical inspection, capable of illuminating an object to be inspected, which comprises a first light source, a second light source, a third light source, a first optical device and at least three second optical devices. Each of the second optical devices is respectively disposed at the light output sides of the first light source, the second light source, and the third light source, and respectively focuses light output from them. The light output from the first light source and the second light source are symmetrically directed toward the surface of the object. The first optical device is aligned with the third light source, and the light output from the third light source is directed toward the object.

Description

201215845 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種用於自動光學檢測之照明系統及其 和成像系統之組合’特別係關於一種照明待檢測物體表面 之光源系統。 【先前技術】 自動光學檢測（AOI)是液晶顯示幕、半導體積體電路晶 片和電路板製造的關鍵步驟，用以診斷和改善生產製造過 程中的產品品質，從而降低製造成本。自動光學檢測的基 本性能由兩個關鍵指標衡量：檢測速度和檢測靈敏度。由 於生產技術的進步使製造速度加快、基板尺寸加大、印刷 圖形尺寸縮小’因此對自動光學檢測的速度和靈敏度提出 更尚的要求。 獲取待檢測物體或樣本表面圖像所需的光強與成像圖 元大小和檢測速度成反比。因此，要對LCD或晶片進行高 速度和高解析度的光檢測，則不可避免地需要高效的照明 光學系統。根據所需成像圖元大小而按比例增大成像透鏡 的數值孔徑（numerical aperture ;NA)雖然可以滿足增大光源 的需求，但是由於降低了景深，會對系統的機械精度產生 負面影響。另外，透鏡的數值孔徑也因為檢測大面積的樣 本表面所要求的大視場而受到限制。當使用線性掃描 感測器來掃描樣本表面時，通常使用線性光纖或線性led 陣列光來照明，這種照明方法和儀器在進行低解析度檢測 時，例如：大於10um的圖像，是有效的。但在高解析度檢 201215845 測時，如小於1 〇um的圖像時，這種照明技術效率很低。 圖1係中華民國第389833號發明專利所揭露之照明及 成像系統之示意圖。該照明及成像系統1 〇包含一第一照明 器111、一第二照明器112、一第一反光器121、一第二反光 器122、一平面折射鏡13、一光學元件14及一成像感應器15 。為使該第一照明器111及該第二照明器112之照明光線集 中於該待檢測物體80之表面，並匯集於一轴線成為線性照 明。為能以兩組照明器取代三組照明器，該第一反光器12j 之中間有一長槽孔1211，可供該第二反光器122之反射光通 過並抵達該待檢測物體80之表面。又該待檢測物體80之表 面反射光亦會穿過該長槽孔1211，並經由該光學元件14之 折射而至該成像感應器15内形成影像。 上述先則技術均使用弧面之反光器或折射鏡才能將光 線集中於一軸線，然該種照明系統需要較大之空間才能允 °午複雜之光程。此外’多個反光器、折射鏡和長槽孔亦需 要精达、之角度校準，如此才能正確控制折射或反射之方向 〇 【發明内容】 本發明係提供一種用於自動光學檢測之照明系統及其 和成像系統之組合，其係以發光二極體為光源及可聚光之 光予元件為組合’故能減少光線光程之總長度而有效縮小 該照明系統所需之空間。 本發明揭示一種用於自動光學檢測之照明系統，係照 月待檢測之物體，其包含一第一光源、一第二光源、一 201215845 第三光源、一第一光學元件及至少三個具不連續聚光曲面 之第二光學兀件。各該第二光學元件係分別設於該第一光 源、該第二光源及該第三光源之光輸出端，並且能將各該 光源輸出之光線集中。該第一光源及該第二光源之光輸出 端係對稱地指向該物體表面。又該第一光學元件係對準於 該對稱面，其可將該第三光源輸出之光線導向該物體表面 0 本發明之一範例係該第二光學元件包至少一個菲涅爾 鲁 透鏡(Fresnel lens)。 本發明之一範例係該第一光學元件為一分光鏡。 本發明揭示一種照明系統及成像系統之組合，係照明 一待檢測之物體並擷取該物體之影像，其包含一第一光源 、一第二光源、一第三光源、一第一光學元件、至少三個 具不連續聚光曲面之第二光學元件及一成像系統。各該第 二光學元件係分別設於該第一光源'該第二光源及該第三 φ 光源之光輸出端，並且能將各該光源輸出之光線集中。該 第一光源及該第二光源之光輸出端係對稱地指向該物體表 面。又該第一光學元件係對準於該對稱面，其可將該第三 光源輪出之光線導向該物體表面。該物體表面反射之光線 成像於該成像系統内。 上文已經概略地敍述本揭露之技術特徵及優點，俾使 下文之本揭露詳細描述得以獲得較佳瞭解。構成本揭露之 申請專利範圍標的之其它技術特徵及優點將描述於下文。 本揭路所屬技術領域中具有通常知識者應可瞭解，下文揭 201215845 不之概念與特^實施例可作為基礎而相當輕易地予以修改 i設計其它結構或製程而實現與本揭露相同之目的。本揭 路所屬技術領域中具有通常知識者亦應可瞭解，這類等效 的建構並無法脫離後附之中請專利範圍所提出之本揭露的 精神和範圍。 【實施方式】 圖2係本發明一實施例之一種用於自動光學檢測之照 明系統2〇之示意圖，係照明一待檢測之物體80’其包含-眷帛光源21、一第二光源22、-第三光源23、-第-光學 一件4及至夕二個第二光學元件25。各該第二光學元件μ 係分別設於該第一光源21、該第二光源22及該第三光源23 之光輸出端，並且能將各該光源輸出之光線直接或間接集 中於該待檢測之物體80表面上一軸線。該第一光源21及該 第二光源22之光輸出端係對稱地指向該物體表面，又該光 源21〜23係一 LED線性光源或光纖線性光源。又該第—光 # ^元件24係約略對準於該對稱面，其可將該第三光源23輸 出之光線導向該物體80表面。亦即，該第一光學元件以與 物體80表面呈現45度角，並且該第一光學元件叫立於物體 〇表面的正上方。因此該第一光源2丨、第二光源u及第三 光源23投射在該物體8〇表面之線性光線係各方面都很均勻 ’且強度集中於一處，從而使得成像之亮度大為提高。 圖3係本發明照明系統與成像系統結合之示意圓。於該 第一光學元件24設置一成像感應器30，例如··線性CCD攝 影機’其可接受經過該第一光學元件24之該待檢測物體8〇 201215845 之表面反射光。該第一光學元件24可以是一分光鏡 (splitting lens)。藉由本發明之照明系統2〇可使得該成像感 應器30有較佳之成像品質’且可以縮小該照明系統2〇及像 感應器3 0組合所需之空間。 而該第一光學元件24是一分光鏡，該第三光源23發出 光線透過該第一光學元件24，可將該等光線折射至物體80 之表面。此外，該等光線從物體8〇之表面垂直反射回該第 一光學元件24,再穿透過該第一光學元件24而抵該成像感 應器30内而形成影像。 圖4係本發明一實施例之第二光學元件之截面示意圖 。第二光學元件4〇係包含兩個菲涅爾透鏡（Fresnel lens)41。該 菲涅爾透鏡41有一表面具有鋸齒狀之不連續曲面結構，而 另一表面係平滑面。該兩個菲涅爾透鏡41係以不連續曲面 相接合而形成該第二光學元件40，當然也可以一體成型之 方式完成該具有菲、/圼爾透鏡結構之第二光學元件4〇。又一 般該第二光學元件40係一長條狀之透鏡或透鏡組，可以置 於線性LED光原之輸出端以聚集光線至該待檢測物體。 相比傳統的球面透鏡，菲涅爾透鏡通過將透鏡劃分出 為一系列理論上無數多個同心圓紋路（即菲涅爾帶）達到相 同的光學效果’同時節省了材料的用量。菲涅爾透鏡的設 計容許大幅度地削減透鏡厚度（以及重量與體積），因此 可以使本發明照明系統與成像系統結合所需之空間更縮小 〇 本揭露之技術内容及技術特點已揭示如上，然而熟系 201215845 本項技術之人士仍可能基於本揭露之教示及揭示而作種種 不背離本揭露精神之替換及修飾。因此，本揭露之保護範 圍應不限於實施例所揭示者，而應包括各種不背離本揭露 之替換及修飾，並為以下之申請專利範圍所涵蓋。 【圖式簡單說明】 圖1係中華民國第389833號發明專利所揭露之照明及 成像系統之示意圖； 圖2係本發明一實施例之—種用於自動光學檢測之照 明系統之示意圖； 圖3係本發明照明系統與成像系統結合之示意圖；以及 圖4係本發明一實施例之第二光學元件之截面示意圖。 【主要元件符號說明】 10 成像系統 13 平面折射鏡 14 光學元件 15 成像感應器 20 照明系統 21 第一光源 22 第二光源 23 第三光源 24 第一光學元件 25 第二光學元件 30 成像感應器 40 第二光學元件 41 菲！爾透鏡 201215845 80 待檢測物體 111 第一照明器 112 第二照明器 121 第一反光器 122 第二反光器 1211長槽孔201215845 VI. Description of the Invention: [Technical Field] The present invention relates to an illumination system for automatic optical detection and a combination thereof with an imaging system, particularly relating to a light source system for illuminating the surface of an object to be inspected. [Prior Art] Automatic Optical Inspection (AOI) is a key step in the manufacture of liquid crystal display panels, semiconductor integrated circuit wafers, and circuit boards to diagnose and improve the quality of products in the manufacturing process, thereby reducing manufacturing costs. The basic performance of automated optical inspection is measured by two key metrics: detection speed and detection sensitivity. Advances in production technology have led to faster manufacturing speeds, larger substrate sizes, and reduced print size. This has placed even greater demands on the speed and sensitivity of automated optical inspection. The intensity of light required to acquire an image of the object to be inspected or the surface of the sample is inversely proportional to the size of the imaged element and the speed of detection. Therefore, in order to perform high-speed and high-resolution light detection on an LCD or a wafer, an efficient illumination optical system is inevitably required. Proportional increase of the numerical aperture (NA) of the imaging lens according to the size of the desired imaging element can satisfy the requirement of increasing the light source, but the depth of field is reduced, which has a negative impact on the mechanical precision of the system. In addition, the numerical aperture of the lens is also limited by the large field of view required to detect large areas of the sample surface. When a linear scanning sensor is used to scan the surface of a sample, it is usually illuminated with linear fiber or linear led array light. This illumination method and instrument is effective for low resolution detection, for example, images larger than 10um. . However, in the high-resolution test 201215845, such as less than 1 〇um image, this lighting technology is very inefficient. Figure 1 is a schematic illustration of the illumination and imaging system disclosed in the Chinese Patent No. 389833. The illumination and imaging system 1 includes a first illuminator 111, a second illuminator 112, a first reflector 121, a second reflector 122, a planar refractor 13, an optical component 14, and an imaging sensor. 15 . The illumination light of the first illuminator 111 and the second illuminator 112 is concentrated on the surface of the object to be inspected 80 and collected on an axis to become a linear illumination. In order to replace the three sets of illuminators with two sets of illuminators, a long slot 1211 is formed in the middle of the first reflector 12j for the reflected light of the second reflector 122 to pass through and reach the surface of the object to be detected 80. Further, the surface reflected light of the object to be detected 80 passes through the long slot 1211 and is refracted by the optical element 14 to form an image into the imaging inductor 15. The above-mentioned prior art uses a curved reflector or a refractor to concentrate the light on one axis. However, such a lighting system requires a large space to allow a complicated optical path. In addition, 'multiple reflectors, refractors and long slots need to be calibrated and angled so that the direction of refraction or reflection can be properly controlled. </ RTI> The present invention provides an illumination system for automatic optical inspection and The combination with the imaging system, which uses a light-emitting diode as a light source and a condensable light-emitting element as a combination, can effectively reduce the space required for the illumination system by reducing the total length of the light path. The invention discloses an illumination system for automatic optical detection, which is an object to be detected according to a month, which comprises a first light source, a second light source, a 201215845 third light source, a first optical component and at least three A second optical element that continuously converges the curved surface. Each of the second optical elements is disposed at the light output ends of the first light source, the second light source, and the third light source, and can concentrate the light output from each of the light sources. The light output ends of the first light source and the second light source are symmetrically directed toward the surface of the object. And the first optical component is aligned with the symmetry plane, and the light output by the third light source is directed to the surface of the object. One example of the invention is that the second optical component includes at least one Fresnel lens (Fresnel Lens). An example of the invention is that the first optical component is a beam splitter. The invention discloses a combination of an illumination system and an imaging system, which is to illuminate an object to be detected and capture an image of the object, comprising a first light source, a second light source, a third light source, a first optical component, At least three second optical elements having discontinuous concentrating surfaces and an imaging system. Each of the second optical components is respectively disposed at the light output ends of the first light source 'the second light source and the third φ light source, and can concentrate the light outputted by each of the light sources. The light output ends of the first light source and the second light source are symmetrically directed to the surface of the object. The first optical component is also aligned with the plane of symmetry, which directs the light from the third source to the surface of the object. Light reflected from the surface of the object is imaged within the imaging system. The technical features and advantages of the present disclosure are summarized above, and the detailed description of the present disclosure will be better understood. Other technical features and advantages of the subject matter of the claims will be described below. It should be understood by those of ordinary skill in the art to which the present disclosure pertains that the concepts and embodiments of the present invention can be modified relatively easily as a basis for designing other structures or processes to achieve the same objectives as the present disclosure. It should be understood by those of ordinary skill in the art to which this invention pertains that such equivalent constructions are not departing from the spirit and scope of the present disclosure as set forth in the appended claims. 2 is a schematic diagram of an illumination system 2 for automatic optical detection according to an embodiment of the present invention, which is to illuminate an object 80 to be detected, which includes a 眷帛 light source 21 and a second light source 22, a third light source 23, a first optical piece 4 and two second optical elements 25. Each of the second optical elements μ is disposed at the light output ends of the first light source 21, the second light source 22, and the third light source 23, and can directly or indirectly concentrate the light outputted by the light source to be detected. An axis on the surface of the object 80. The light output ends of the first light source 21 and the second light source 22 are symmetrically directed to the surface of the object, and the light sources 21 to 23 are an LED linear light source or a fiber linear light source. Further, the first light-lighting element ^4 is approximately aligned with the plane of symmetry, which directs the light output from the third light source 23 to the surface of the object 80. That is, the first optical element presents an angle of 45 degrees with the surface of the object 80, and the first optical element is positioned directly above the surface of the object. Therefore, the linear light rays projected by the first light source 2, the second light source u, and the third light source 23 on the surface of the object 8 are uniform in all aspects and the intensity is concentrated in one place, so that the brightness of the image is greatly improved. Figure 3 is a schematic circle of the illumination system of the present invention in combination with an imaging system. An imaging sensor 30 is disposed in the first optical component 24, for example, a linear CCD camera&apos; that can receive surface reflected light from the object to be detected 8〇201215845 of the first optical component 24. The first optical element 24 can be a splitting lens. With the illumination system 2 of the present invention, the imaging sensor 30 can be made to have better image quality&apos; and the space required for the combination of the illumination system 2 and the sensor 30 can be reduced. The first optical element 24 is a beam splitter, and the third light source 23 emits light through the first optical element 24 to refract the light onto the surface of the object 80. In addition, the light rays are reflected back from the surface of the object 8 to the first optical element 24, and then penetrate the first optical element 24 to form an image in the image sensor 30. Figure 4 is a schematic cross-sectional view showing a second optical element in accordance with an embodiment of the present invention. The second optical element 4 includes two Fresnel lenses 41. The Fresnel lens 41 has a discontinuous curved surface having a serrated surface and the other surface is a smooth surface. The two Fresnel lenses 41 are joined by a discontinuous curved surface to form the second optical element 40. Alternatively, the second optical element 4 having a phenanthrene/mole lens structure may be integrally formed. Still further, the second optical element 40 is a long strip of lens or lens group that can be placed at the output of the linear LED light source to concentrate light onto the object to be detected. Compared to conventional spherical lenses, Fresnel lenses achieve the same optical effect by dividing the lens into a series of theoretically numerous concentric circular lines (ie, Fresnel bands) while saving material usage. The design of the Fresnel lens allows the lens thickness (and weight and volume) to be greatly reduced, so that the space required for the illumination system of the present invention to be combined with the imaging system can be further reduced. The technical content and technical features of the present disclosure have been disclosed above. However, those skilled in the art of the present invention may still make various substitutions and modifications without departing from the spirit and scope of the disclosure. Therefore, the scope of the present disclosure is not to be construed as limited by the scope of the invention, and the invention is intended to BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of an illumination and imaging system disclosed in the Chinese Patent No. 389833; FIG. 2 is a schematic diagram of an illumination system for automatic optical inspection according to an embodiment of the present invention; A schematic diagram of a lighting system in accordance with the present invention in combination with an imaging system; and FIG. 4 is a schematic cross-sectional view of a second optical component in accordance with an embodiment of the present invention. [Main Component Symbol Description] 10 Imaging System 13 Planar Refractor 14 Optical Element 15 Imaging Sensor 20 Illumination System 21 First Light Source 22 Second Light Source 23 Third Light Source 24 First Optical Element 25 Second Optical Element 30 Imaging Sensor 40 Second optical component 41 Philippine! Lens lens 201215845 80 Object to be detected 111 First illuminator 112 Second illuminator 121 First reflector 122 Second reflector 1211 long slot

Claims (1)

201215845 七、申請專利範圍： 係照明一彳寺檢测之物 一種用於自動光學檢測之照明系統，係 體’其包含： 一第一光源； 一第二光源，其中該第一光源及該第二光源之光輪 端係對稱地指向該物體表面； 一第三光源； 一第一光學元件，係位於該物體的正上方，可將該第 二光源輸出之光線導向該物體表面；以及 至少三個具不連續聚光曲面之第二光學元件，係分別 設於該第一光源、該第二光源及該第三光源之光輪出端， 並且能將各該光源輸出之光線集中 0 2.根據請求項1所述之用於自動光學檢測之照明系統，其中 該第光學元件係對準於該第一光源及該第二光源間之 對稱面。 3·根據請求項1所述之用於自動光學檢測之照明系統，其中 該第二光學元件包含至少一個菲淫爾透鏡。 4.根據4求項3所述之用於自動光學檢測之照明系統，其中 該菲涅爾透鏡之數量係兩個，且各自以不連續曲面相接合 而形成該第二光學元件。 5 ·根據凊求項1所述之用於自動光學檢測之照明系統，其中 該第一光源、該第二光源及該第三光源係一 led線性光源 或光纖線性光源。 6.根據凊求項1所述之用於自動光學檢測之照明系統，其中 該第一光學元件是一分光鏡。 201215845 7. —種用於自動光學檢測之照明系統及成像系統之組合，係 照明一待檢測之物體並擷取該物體之影像，其包含： 一第一光源； 一第二光源’其中該第一光源及該第二光源之光輸出 端係對稱地指向該物體表面； 一第三光源； 一第一光學元件’係位於該物體的正上方，可將該第 三光源輸出之光線導向該物體表面； 至少三個具不連續聚光曲面之第二光學元件，係分別 設於該第一光源、該第二光源及該第三光源之光輸出端， 並且能將各該光源輸出之光線集中；以及 一成像系統，接受該物體表面反射之光線並成像。 8. 根據請求項7所述之用於自動光學檢測之照明系統及成像 系統之組合’其中該第一光學元件係對準於該第一光源及 該第二光源間之對稱面。 9. 根據請求項7所述之用於自動光學檢測之照明系統及成像 系統之組合’其中該第二光學元件包含至少一個菲涅爾透 鏡。 1 〇.根據請求項9所述之用於自動光學檢測之照明系統及成像 系統之組合，其中該菲涅爾透鏡之數量係兩個，且各自以 不連續曲面相接合而形成該第二光學元件。 11.根據請求項7所述之用於自動光學檢測之照明系統及成像 系統之組合，其中該第一光源、該第二光源及該第三光源 係一 LED線性光源或光纖線性光源。 12_根據凊求項7所述之用於自動光學檢測之照明系統及成像 系統之組合，其中該第一光學元件是一分光鏡。 12 201215845 13. 根據請求項7所述之用於自動光學檢測之照明系統及成像 系統之組合，其中該成像系統包括一線性CCD攝影機。 14. 根據請求項7所述之用於自動光學檢測之照明系統及成像 系統之組合’其中該成像系統接受該物體表面反射之光線 係先穿透過該第一光學元件。201215845 VII. Patent application scope: A lighting system for automatic optical inspection, which is: a first light source; a second light source, wherein the first light source and the first a light source end of the two light sources is symmetrically directed to the surface of the object; a third light source; a first optical element located directly above the object, the light output from the second light source being directed to the surface of the object; and at least three a second optical component having a discontinuous condensing surface is disposed at the light source exit end of the first light source, the second light source, and the third light source, respectively, and can concentrate the light output of each of the light sources. The illumination system for automatic optical detection of item 1, wherein the first optical component is aligned with a plane of symmetry between the first light source and the second light source. 3. The illumination system for automated optical inspection of claim 1, wherein the second optical component comprises at least one Philippine lens. 4. The illumination system for automatic optical inspection according to claim 4, wherein the Fresnel lens is two in number and each is joined by a discontinuous curved surface to form the second optical element. The illumination system for automatic optical detection according to claim 1, wherein the first light source, the second light source, and the third light source are a led linear light source or a fiber linear light source. 6. The illumination system for automated optical inspection of claim 1, wherein the first optical component is a beam splitter. 201215845 7. A combination of an illumination system and an imaging system for automatic optical detection, which is to illuminate an object to be detected and capture an image of the object, comprising: a first light source; a second light source a light source and a light output end of the second light source are symmetrically directed to the surface of the object; a third light source; a first optical element is located directly above the object, and the light output from the third light source is directed to the object a second optical component having a discontinuous condensing curved surface disposed at the light output ends of the first light source, the second light source, and the third light source, respectively, and capable of concentrating light outputted by each of the light sources And an imaging system that receives the light reflected from the surface of the object and images it. 8. The combination of an illumination system and an imaging system for automatic optical detection according to claim 7, wherein the first optical element is aligned with a plane of symmetry between the first source and the second source. 9. The combination of an illumination system and an imaging system for automated optical inspection according to claim 7, wherein the second optical element comprises at least one Fresnel lens. 1 . The combination of an illumination system and an imaging system for automatic optical detection according to claim 9, wherein the number of the Fresnel lenses is two, and each is joined by a discontinuous curved surface to form the second optical element. 11. The combination of an illumination system and an imaging system for automatic optical inspection according to claim 7, wherein the first light source, the second light source, and the third light source are an LED linear light source or a fiber linear light source. 12. The combination of an illumination system and an imaging system for automated optical inspection according to claim 7, wherein the first optical component is a beam splitter. 12. The combination of an illumination system and an imaging system for automated optical inspection according to claim 7, wherein the imaging system comprises a linear CCD camera. 14. The combination of an illumination system and an imaging system for automated optical detection according to claim 7, wherein the illumination of the surface of the object that is reflected by the surface of the object passes through the first optical element.
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