JP2012069042A - タッチパネル入力装置の製造方法、圧電体素子及びタッチパネル入力装置 - Google Patents
タッチパネル入力装置の製造方法、圧電体素子及びタッチパネル入力装置 Download PDFInfo
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Abstract
【解決手段】タッチパネル入力装置の製造方法は、(a)成長基板上に第1密着層を形成、(b)第1密着層上に第2密着層を形成、(c)第2密着層表面の選択された領域にレーザを照射して第2密着層のみを選択された領域から除去、(d)第2密着層が除去された領域及び第2密着層上に成長下地層を形成、(e)成長下地層上に圧電性を有する酸化物薄膜を形成、(f)酸化物薄膜層を成長させた成長基板と、第1の透明電極が形成された第2の基板とを接着、(g)酸化物薄膜層を第2密着層が除去された領域のみにおいて、前記第1密着層と前記成長下地層との界面から剥離させ、前記第2の基板へ転写、(h)転写された酸化物薄膜層を挟みこむ形で、前記第2の基板を第2の透明電極が形成された第3の基板へ接着、の工程を有する。
【選択図】図6
Description
2 x方向透明電極
3 PZT薄膜パターン
4 y方向透明電極
5 タッチパネルガラス
6 表示エリア
7 制御回路
10 タッチパネル入力部
11 ダンパー
12 機器筐体
13 表示部
14 空間
21 成長基板
22 熱酸化膜
23 TiO2薄膜
24 Ti薄膜
25 Pt薄膜
100 タッチパネル
Claims (6)
- (a)成長基板を準備する工程と、
(b)前記成長基板上に第1密着層を形成する工程と、
(c)前記第1密着層上に第2密着層を形成する工程と、
(d)前記第2密着層表面の選択された領域に、レーザを照射することにより、前記第2密着層のみを前記選択された領域から除去する工程と、
(e)前記第2密着層が除去された領域及び前記第2密着層上に、成長下地層を形成する工程と、
(f)前記成長下地層上に圧電性を有する酸化物薄膜を形成する工程と、
(g)前記酸化物薄膜層を成長させた前記成長基板と、第1の透明電極が形成された第2の基板とを接着する工程と、
(h)前記酸化物薄膜層を前記第2密着層が除去された領域のみにおいて、前記第1密着層と前記成長下地層との界面から剥離させ、前記第2の基板へ転写する工程と、
(i)前記転写された酸化物薄膜層を挟みこむ形で、前記第2の基板を第2の透明電極が形成された第3の基板へ接着する工程と
を有するタッチパネル入力装置の製造方法。 - 前記圧電性酸化物薄膜は、ペロブスカイト結晶構造を持つ圧電体酸化物、層状ペロブスカイト結晶構造を持つ圧電体酸化物、非鉛系ペロブスカイト型圧電体酸化物、酸化亜鉛および水晶などの単結晶圧電体薄膜のうち選択された一つの圧電体組成から成ることを特徴とする請求項1記載のタッチパネル入力装置の製造方法。
- 前記第1密着層はTiO2、ZrO2、RuO2、IrO2のいずれか少なくとも一つから成り、
前記第2密着層はTi、Zr、Ru、Ir、Au、Cu、Niのいずれか少なくとも一つから成り、
前記成長下地層はPt、Ir、SrRuO3、LaNiO3のいずれか少なくとも一つまたはそれらの積層体から成ることを特徴とする請求項1又は2記載のタッチパネル入力装置の製造方法。 - 第1の透明基板と、
前記第1の透明基板上に形成された第1の透明電極と、
第2の透明基板と、
前記第2の透明基板上に形成された第2の透明電極と、
前記第1の透明電極と第2の透明電極とに挟まれる透明な圧電体酸化物薄膜とからなる圧電体素子であって、
前記第1の透明電極と前記第2の透明電極は少なくとも一方が複数の透明電極からなり、
前記第1の透明電極と前記第2の透明電極は異なる組み合わせで重なる複数の領域を有し、
前記圧電体酸化物薄膜は前記領域ごとに独立して形成されることを特徴とする圧電体素子。 - 前記第1の透明電極は複数行であり、前記第2の透明電極は複数列であって、前記圧電体酸化物薄膜は複数行複数列にわたって形成されることを特徴とする請求項4記載の圧電体素子。
- 第1の透明基板と、前記第1の透明基板上に形成された第1の透明電極と、第2の透明基板と、前記第2の透明基板上に形成された第2の透明電極と、前記第1の透明電極と第2の透明電極とに挟まれる透明な圧電体酸化物薄膜とからなる圧電体素子と、
前記圧電性酸化物薄膜が出力する電圧に従い位置検出を行うとともに、前記圧電体酸化物薄膜に駆動信号を供給する制御手段とを有するタッチパネル入力装置であって、
前記第1の透明電極と前記第2の透明電極は少なくとも一方が複数の透明電極からなり、
前記第1の透明電極と前記第2の透明電極は異なる組み合わせで重なる複数の領域を有し、
前記圧電体酸化物薄膜は前記領域ごとに独立して形成されることを特徴とするタッチパネル入力装置。
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WO2014097499A1 (ja) * | 2012-12-19 | 2014-06-26 | パナソニック株式会社 | 触覚入出力装置 |
US9223403B2 (en) | 2012-12-19 | 2015-12-29 | Panasonic Intellectual Property Management Co., Ltd. | Tactile input and output device |
JPWO2014097499A1 (ja) * | 2012-12-19 | 2017-01-12 | パナソニックIpマネジメント株式会社 | タッチパネルの制御方法、装置、プログラムおよびストレージ |
US10331211B2 (en) | 2014-02-28 | 2019-06-25 | Samsung Electronics Co., Ltd. | Device and method for providing tactile sensation |
JP2016045942A (ja) * | 2014-08-26 | 2016-04-04 | エルジー ディスプレイ カンパニー リミテッド | タッチパネル及びその動作方法 |
US9696845B2 (en) | 2014-08-26 | 2017-07-04 | Lg Display Co., Ltd. | Apparatus for driving of touch panel |
WO2019187182A1 (ja) * | 2018-03-24 | 2019-10-03 | Smk株式会社 | 触覚提示装置および操作入力装置 |
JP2021049768A (ja) * | 2019-09-20 | 2021-04-01 | テグ キョンブク インスティトゥート オブ サイエンス アンド テクノロジー | 電子装置の製造方法 |
US11367647B2 (en) | 2019-09-20 | 2022-06-21 | Daegu Gyeongbuk Institute Of Science And Technology | Method of manufacturing electronic device |
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JP5580155B2 (ja) | 2014-08-27 |
US20120075221A1 (en) | 2012-03-29 |
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