JP2012065000A - 圧電振動片、圧電振動子 - Google Patents
圧電振動片、圧電振動子 Download PDFInfo
- Publication number
- JP2012065000A JP2012065000A JP2010205225A JP2010205225A JP2012065000A JP 2012065000 A JP2012065000 A JP 2012065000A JP 2010205225 A JP2010205225 A JP 2010205225A JP 2010205225 A JP2010205225 A JP 2010205225A JP 2012065000 A JP2012065000 A JP 2012065000A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating piece
- piezoelectric vibrating
- axis direction
- end surface
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001039 wet etching Methods 0.000 claims abstract description 10
- 238000000605 extraction Methods 0.000 claims description 31
- 239000000853 adhesive Substances 0.000 claims description 30
- 230000001070 adhesive effect Effects 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 26
- 230000005284 excitation Effects 0.000 claims description 25
- 239000002184 metal Substances 0.000 description 28
- 229910052751 metal Inorganic materials 0.000 description 28
- 239000010453 quartz Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 238000010586 diagram Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 238000004088 simulation Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 235000014676 Phragmites communis Nutrition 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000035882 stress Effects 0.000 description 3
- 230000001154 acute effect Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010205225A JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012065000A true JP2012065000A (ja) | 2012-03-29 |
| JP2012065000A5 JP2012065000A5 (enrdf_load_stackoverflow) | 2013-10-24 |
Family
ID=46060301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010205225A Withdrawn JP2012065000A (ja) | 2010-09-14 | 2010-09-14 | 圧電振動片、圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012065000A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014057236A (ja) * | 2012-09-13 | 2014-03-27 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
| JP2016048867A (ja) * | 2014-08-28 | 2016-04-07 | 京セラクリスタルデバイス株式会社 | 水晶素子の製造方法 |
| JP2017017434A (ja) * | 2015-06-29 | 2017-01-19 | 京セラクリスタルデバイス株式会社 | 厚みすべり水晶素子 |
| JP2023080577A (ja) * | 2021-11-30 | 2023-06-09 | 京セラ株式会社 | 圧電振動素子及び圧電デバイス |
| JP2023108311A (ja) * | 2022-01-25 | 2023-08-04 | 京セラ株式会社 | 圧電素子及び圧電デバイス |
| JP2024022436A (ja) * | 2022-08-04 | 2024-02-16 | 台灣晶技股▲ふん▼有限公司 | 共振器 |
-
2010
- 2010-09-14 JP JP2010205225A patent/JP2012065000A/ja not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014057236A (ja) * | 2012-09-13 | 2014-03-27 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
| JP2016048867A (ja) * | 2014-08-28 | 2016-04-07 | 京セラクリスタルデバイス株式会社 | 水晶素子の製造方法 |
| JP2017017434A (ja) * | 2015-06-29 | 2017-01-19 | 京セラクリスタルデバイス株式会社 | 厚みすべり水晶素子 |
| JP2023080577A (ja) * | 2021-11-30 | 2023-06-09 | 京セラ株式会社 | 圧電振動素子及び圧電デバイス |
| JP2023108311A (ja) * | 2022-01-25 | 2023-08-04 | 京セラ株式会社 | 圧電素子及び圧電デバイス |
| JP2024022436A (ja) * | 2022-08-04 | 2024-02-16 | 台灣晶技股▲ふん▼有限公司 | 共振器 |
| JP7597779B2 (ja) | 2022-08-04 | 2024-12-10 | 台灣晶技股▲ふん▼有限公司 | 共振器 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102111117B (zh) | 压电振子 | |
| US8928207B2 (en) | Tuning-fork type quartz-crystal vibrating pieces and piezoelectric devices having low crystal impedance | |
| US8963402B2 (en) | Piezoelectric vibrator element, piezoelectric module, and electronic device | |
| JP2011166364A (ja) | 厚み系水晶振動子 | |
| JP2012065000A (ja) | 圧電振動片、圧電振動子 | |
| JP2012253630A (ja) | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 | |
| JP6252209B2 (ja) | 圧電振動片および当該圧電振動片を用いた圧電デバイス | |
| JP5910092B2 (ja) | 圧電振動素子、圧電振動子、電子デバイス、及び電子機器 | |
| JP2012029262A (ja) | 圧電振動片及びその製造方法 | |
| CN107241078B (zh) | 晶体元件和晶体器件 | |
| JP2002374146A (ja) | 圧電振動片及び圧電デバイス | |
| JP5824958B2 (ja) | 振動素子、振動子、電子デバイス、及び電子機器 | |
| JP6439808B2 (ja) | 音叉型振動子 | |
| JP6015010B2 (ja) | 振動素子、振動子、発振器および電子機器 | |
| JP2013093797A (ja) | 水晶振動デバイス | |
| JP6436175B2 (ja) | 音叉型振動子 | |
| JP5674241B2 (ja) | 圧電振動片、圧電振動子、電子デバイス | |
| JP5465041B2 (ja) | 音叉型屈曲水晶振動素子 | |
| JP2018056860A (ja) | 水晶素子、水晶デバイスおよび水晶素子の製造方法 | |
| JP2013207509A (ja) | 圧電振動片およびその製造方法 | |
| JP2018056861A (ja) | 水晶素子および水晶デバイス | |
| JP2017200093A (ja) | 水晶デバイス | |
| JP6560035B2 (ja) | 厚みすべり水晶素子 | |
| JP7329592B2 (ja) | 水晶素子及び水晶デバイス | |
| JP7725962B2 (ja) | 水晶振動板および水晶振動デバイス |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130909 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130909 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140313 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20140402 |