JP2012063363A5 - - Google Patents
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- Publication number
- JP2012063363A5 JP2012063363A5 JP2011256246A JP2011256246A JP2012063363A5 JP 2012063363 A5 JP2012063363 A5 JP 2012063363A5 JP 2011256246 A JP2011256246 A JP 2011256246A JP 2011256246 A JP2011256246 A JP 2011256246A JP 2012063363 A5 JP2012063363 A5 JP 2012063363A5
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- diaphragm
- sensor according
- base
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000010453 quartz Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 12
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011256246A JP5353996B2 (ja) | 2004-05-12 | 2011-11-24 | 圧力センサー |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004142958 | 2004-05-12 | ||
| JP2004142958 | 2004-05-12 | ||
| JP2011256246A JP5353996B2 (ja) | 2004-05-12 | 2011-11-24 | 圧力センサー |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006513032A Division JP5217163B2 (ja) | 2004-05-12 | 2005-05-10 | 圧力センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012063363A JP2012063363A (ja) | 2012-03-29 |
| JP2012063363A5 true JP2012063363A5 (https=) | 2012-06-28 |
| JP5353996B2 JP5353996B2 (ja) | 2013-11-27 |
Family
ID=35320320
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006513032A Expired - Fee Related JP5217163B2 (ja) | 2004-05-12 | 2005-05-10 | 圧力センサ |
| JP2011256246A Expired - Fee Related JP5353996B2 (ja) | 2004-05-12 | 2011-11-24 | 圧力センサー |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006513032A Expired - Fee Related JP5217163B2 (ja) | 2004-05-12 | 2005-05-10 | 圧力センサ |
Country Status (2)
| Country | Link |
|---|---|
| JP (2) | JP5217163B2 (https=) |
| WO (1) | WO2005108946A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2001637C2 (nl) * | 2008-05-30 | 2009-12-01 | Nedap Nv | Druksensor voor een melktransportstelsel. |
| JP5865184B2 (ja) * | 2012-06-13 | 2016-02-17 | Ntn株式会社 | 磁気式荷重センサおよび電動ブレーキ装置 |
| JP5708674B2 (ja) | 2013-01-24 | 2015-04-30 | トヨタ自動車株式会社 | 内燃機関の制御装置 |
| US10104270B2 (en) | 2014-03-24 | 2018-10-16 | Hideep Inc. | Method for operating camera underwater |
| KR101933049B1 (ko) * | 2017-06-23 | 2018-12-27 | 주식회사 하이딥 | 카메라의 수중 조작방법 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63136675A (ja) * | 1986-11-28 | 1988-06-08 | Sanken Electric Co Ltd | ダイヤフラム式半導体圧力センサ−の製造方法 |
| JP2516211B2 (ja) * | 1987-04-10 | 1996-07-24 | 三菱電機株式会社 | 半導体圧力センサ |
| US5134887A (en) * | 1989-09-22 | 1992-08-04 | Bell Robert L | Pressure sensors |
| DE4137624A1 (de) * | 1991-11-15 | 1993-05-19 | Bosch Gmbh Robert | Silizium-chip zur verwendung in einem kraftsensor |
| US5333504A (en) * | 1992-09-01 | 1994-08-02 | Rosemount Inc. | High overpressure low range pressure sensor |
| JP3551337B2 (ja) * | 1995-09-19 | 2004-08-04 | 株式会社デンソー | 半導体力学量センサおよびその製造方法 |
| JP2000214007A (ja) * | 1999-01-21 | 2000-08-04 | Polymatech Co Ltd | 感圧センサ |
| JP2002107254A (ja) * | 2000-09-28 | 2002-04-10 | Kyocera Corp | 圧力検出装置用パッケージ |
| JP2002195903A (ja) * | 2000-12-26 | 2002-07-10 | Fujikura Ltd | 圧力センサ |
| JP4744088B2 (ja) * | 2004-02-24 | 2011-08-10 | 京セラ株式会社 | 圧力検出装置用パッケージ |
-
2005
- 2005-05-10 JP JP2006513032A patent/JP5217163B2/ja not_active Expired - Fee Related
- 2005-05-10 WO PCT/JP2005/008537 patent/WO2005108946A1/ja not_active Ceased
-
2011
- 2011-11-24 JP JP2011256246A patent/JP5353996B2/ja not_active Expired - Fee Related
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