JP2012045554A - Laser machining device and laser machining method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a laser machining device which has a controller for controlling laser pulse emission from a laser light source and enables high-quality laser machining.SOLUTION: There is provided the laser machining device including a laser light source for emitting a laser pulse to be irradiated on a workpiece, an irradiation position moving device for moving a position where the laser pulse emitted from the laser light source is irradiated on the workpiece, and a controller for controlling the emission of the laser pulse from the laser light source so that the laser pulse can be emitted at a pulse width and a frequency in accordance with the moving time when the irradiation position moving device moves the irradiation position of the laser pulse from a certain irradiation position to a next irradiation position on the workpiece.

Description

  The present invention relates to a laser processing apparatus and a laser processing method for performing processing by irradiating a workpiece with a laser beam.

  FIG. 5A is a schematic diagram illustrating a laser processing apparatus that performs drilling.

A laser oscillator 10, for example, a CO ₂ laser oscillator, receives a trigger signal from the control device 17 and emits a pulsed laser beam 20. The pulse laser beam 20 is shaped by a mask 11 and is incident on an acousto-optic deflector (AOD) 12.

  The AOD 12 receives the control signal transmitted from the control device 17 and emits it by changing the traveling direction of the incident pulse laser beam 20. The pulsed laser beam 20 deflected by the AOD 12 is incident on the printed circuit board 30 that is a processing target placed on the stage 16 via the galvano scanner 14 and the fθ lens 15. Drilling of the printed circuit board 30 is performed by the incident pulse laser beam 20.

  Note that during a period in which no control signal is applied from the control device 17 to the AOD 12, the pulsed laser beam 20 incident on the AOD 12 travels straight, enters the damper 13, and is absorbed.

  FIG. 5B is a schematic cross-sectional view showing the printed circuit board 30. The printed circuit board 30 has a laminated structure in which a copper layer 31, a resin layer 32 formed of an epoxy resin containing glass cloth, and a copper layer 33 are laminated in this order. The pulse laser beam 20 enters the printed circuit board 30 from the surface of the copper layer 33, penetrates the copper layer 33 and the resin layer 32, and a through hole reaching the copper layer 31 is formed.

  Irradiation with the pulsed laser beam 20 is performed by, for example, a cycle method. After one shot of laser pulse is incident on a certain processing position, the galvano scanner 14 is driven to position the incident position of the laser beam, and the next laser pulse is placed at the positioned incident position (processing position). Make it incident. For example, a through hole is formed by making a laser pulse of 3 to 5 shots incident on the same position. The operation of the galvano scanner 14 is controlled by the control device 17.

  In a printed circuit board used for a mobile phone or the like, the positions of holes are determined by the arrangement of electronic components, and the hole interval is not constant. For example, processing of a printed circuit board with variations in hole spacing is performed as follows.

  6A and 6B are timing charts showing a conventional laser processing method in which holes are formed by irradiation with a pulsed laser beam. The horizontal axis in both figures represents time.

  FIG. 6A shows a laser processing method in which the laser oscillation timing is synchronized with the scanning device stop signal. The scanning device stop signal is a signal transmitted from the galvano scanner 14 to the control device 17, whereby the positioning of the incident position of the laser beam in the galvano scanner 14 is completed (the galvano mirror is stopped at the end of positioning, and thereafter Continuation of the stop state) is transmitted to the control device 17.

  Immediately after receiving the scanning device stop signal, the control device 17 inputs a trigger signal to the laser oscillator 10 to emit a laser pulse, transmits a control signal to the AOD 12, and deflects the laser pulse incident on the AOD 12. Let The pulse widths of all laser pulses emitted from the laser oscillator 10 are equal to each other. The laser pulse deflected by the AOD 12 is incident on the processing position of the printed circuit board 30, and a process for making a hole in the printed circuit board 30 is performed.

  According to the method shown in FIG. 6A, the laser oscillation is performed in accordance with the scanning device stop signal, and consequently the scanning device moving time corresponding to the interval between the processing positions (the time required for positioning the galvano scanner 14). There is little time loss and the processing throughput can be improved. However, in general, when the oscillation frequency of a laser oscillator is changed, the output energy value changes even with an equal pulse width. Therefore, according to this method, since the oscillation frequency of the laser pulse emitted from the laser oscillator 10 is different for each laser pulse, the pulse energy is not constant and the processing quality may be deteriorated. For example, in the processing of the copper layer 33, the hole diameter varies.

  FIG. 6B shows an example of a laser drilling method in which a laser pulse is continuously oscillated from a laser oscillator 10 at a constant oscillation frequency. The pulse widths of all laser pulses emitted from the laser oscillator 10 are equal to each other.

  The control device 17 oscillates a laser pulse from the laser oscillator 10 at a constant oscillation frequency, deflects the laser pulse oscillated next after receiving the scanning device stop signal to the AOD 12, and enters the printed circuit board 30. To control.

  According to the method shown in FIG. 6B, since the oscillation frequency of the laser pulse emitted from the laser oscillator 10 is the same for each laser pulse, the printed circuit board 30 can be irradiated with a laser pulse having a constant pulse energy. Even when there is variation in the interval between the processing positions, it is possible to keep the processing quality good. However, according to this method, for example, when the emission timing of the laser pulse is slightly earlier than the stationary timing of the galvano scanner 14, a time loss corresponding to the oscillation period of the laser pulse occurs, and the processing throughput is significantly reduced.

  An invention of a laser drilling method that can make the processing result uniform even when there is variation in the interval between the processing positions has been disclosed (for example, see Patent Document 1). In the invention described in Patent Document 1, the processing quality is improved by using laser pulses having mutually equal pulse widths, controlling the light intensity distribution ratio for each processing position, and making the input energy constant. Realized.

JP 2008-194709 A

  An object of the present invention is to provide a laser processing apparatus and a laser processing method capable of performing high-quality processing.

  According to one aspect of the present invention, a laser light source that emits a laser pulse emitted to a workpiece, and an irradiation position movement that moves an irradiation position on the workpiece of the laser pulse emitted from the laser light source. The apparatus and the irradiation position moving device emit laser pulses with a pulse width and frequency corresponding to the movement time for moving the irradiation position of the laser pulse from one irradiation position to the next irradiation position on the workpiece. Thus, there is provided a laser processing apparatus having a control device for controlling emission of a laser pulse from the laser light source.

  According to another aspect of the present invention, (a) a workpiece to be processed in which a plurality of machining positions are defined together with the machining order, the machining according to the interval according to the machining order of the machining positions. A step of determining a pulse width and a frequency of a laser pulse to be irradiated to the position; and (b) a laser pulse at a position to be processed of the workpiece by the pulse width and the frequency determined in the step (a). There is provided a laser processing method having an irradiation step.

  Furthermore, according to another aspect of the present invention, (c) a step of causing the first laser pulse to enter the first processing position, and (d) a first distance from the first processing position. A step of causing the second laser pulse emitted after the first laser pulse to enter the second processing position; and (e) a second distance from the second processing position. A step of causing a third laser pulse emitted next to the second laser pulse to enter a third processing position, and in the step (e), (i) the second distance is , When longer than the first distance, the pulse width of the third laser pulse is shorter than the pulse width of the second laser pulse, and (ii) the second distance is greater than the first distance. When it is short, the pulse width of the third laser pulse is set to be equal to that of the second laser pulse. Longer than the pulse width, and (iii) when the second distance is equal to the first distance, the laser processing to make the pulse width of the third laser pulse equal to the pulse width of the second laser pulse A method is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the laser processing apparatus and laser processing method which can perform a high quality process can be provided.

(A) is the schematic which shows the laser processing apparatus by an Example, (B) is schematic sectional drawing which shows the printed circuit boards 60a and 60b. It is a flowchart which shows the preparatory process performed prior to the irradiation of the laser beam to a printed circuit board. It is a timing chart which shows the laser processing method by an Example. It is the schematic which shows the laser processing apparatus by a modification. FIG. 2A is a schematic view showing a laser processing apparatus that performs drilling, and FIG. 2B is a schematic cross-sectional view showing a printed circuit board 30. (A) And (B) is a timing chart which shows the conventional laser processing method which drills by irradiation of a pulse laser beam.

  FIG. 1A is a schematic diagram illustrating a laser processing apparatus according to an embodiment.

A laser oscillator 40, for example, a CO ₂ laser oscillator, receives a trigger pulse (trigger signal) from the control device 47 and emits a pulsed laser beam 50. The cross-sectional shape of the pulse laser beam 50 is shaped by passing through the light-transmitting region of the mask 41 having a light-transmitting region and a light-blocking region, and enters the AOD 42.

  The AOD 42 is an optical deflector that uses the acousto-optic effect, and can receive a control signal transmitted from the control device 47 and emit it by changing the traveling direction of the incident pulse laser beam 50. The emission direction (deflection angle) of the pulse laser beam emitted from the AOD 42 can be changed according to the frequency of the control signal applied to the AOD 42. The control device 47 applies control signals having different frequencies to the AOD 42, and from each laser pulse of the pulse laser beam 50, a laser pulse (pulse laser beam 50 a) that travels along the optical path A with a relatively small deflection angle. The laser pulse (pulse laser beam 50b) traveling in the optical path B having a relatively large deflection angle is divided and generated in terms of time.

  The pulse laser beam 50 incident on the AOD 42 during a period in which the control signal is not applied to the AOD 42 from the control device 47 travels straight, enters the damper 43 and is absorbed.

  The pulse laser beam 50a that is deflected by the AOD 42 and travels along the optical path A is incident on the printed circuit board 60a that is a processing object placed on the stage 46a via the galvano scanner 44a and the fθ lens 45a.

  The galvano scanner 44a is a scanning device that includes two oscillating mirrors (galvano mirrors), and scans and emits an incident laser beam in a two-dimensional direction. The fθ lens 45a condenses the pulsed laser beam 50a and forms an image of the beam cross section (the shape of the light transmitting region) at the position of the mask 41 on the printed board 60a. The stage 46a is, for example, an XY stage that holds the printed circuit board 60a in a movable manner. Drilling of the printed circuit board 60a is performed by the pulse laser beam 50a incident on the printed circuit board 60a.

  Similarly, the pulse laser beam 50b that is deflected by the AOD 42 and travels in the optical path B passes through the galvano scanner 44b and the fθ lens 45b to the printed circuit board 60b that is a workpiece to be movably held on the stage 46b. Incident light is drilled in the printed circuit board 60b. The operation of the galvano scanners 44 a and 44 b is controlled by the control device 47.

  FIG. 1B is a schematic cross-sectional view showing printed circuit boards 60a and 60b. The printed boards 60a and 60b have a laminated structure in which copper layers 61a and 61b, resin layers 62a and 62b formed of an epoxy resin containing glass cloth, and copper layers 63a and 63b are laminated in this order. The pulse laser beams 50a and 50b are incident on the printed circuit boards 60a and 60b from the surfaces of the copper layers 63a and 63b, penetrate through the copper layers 63a and 63b and the resin layers 62a and 62b, and have through holes reaching the copper layers 61a and 61b. It is formed.

  Irradiation with the pulse laser beams 50a and 50b is performed by, for example, a cycle method. After one shot of a laser pulse is incident on a certain processing position, the galvano scanners 44a and 44b are driven to position the incident position of the laser beam, and the next laser pulse is changed to the positioned incident position (processing position). ). For example, a through hole is formed by making a laser pulse of 3 to 5 shots incident on the same processing position. The drilling process is performed by sequentially irradiating a plurality of processing positions defined on the printed circuit boards 60a and 60b with laser pulses.

  The printed circuit boards 60a and 60b are, for example, the same type of printed circuit boards in which the positions to be processed are equally arranged. The galvano scanners 44a and 44b are controlled to perform the same operation, and the printed circuit boards 60a and 60b are simultaneously subjected to the same drilling process at the corresponding processing positions.

  The control device 47 transmits a trigger pulse to the laser oscillator 40 and controls the emission of the pulsed laser beam 50 from the laser oscillator 40. In addition, the AOD 42 is controlled to generate a laser pulse traveling in the optical path A and a laser pulse traveling in the optical path B from each laser pulse of the pulse laser beam 50. At this time, the selection of the distribution to the optical paths A and B and the pulse width of the laser pulse to be distributed can be controlled by the frequency and application time of the control signal applied to the AOD 42, respectively. Further, the control device 47 controls the positioning operation of the galvano scanners 44a and 44b so that the through holes are formed at the processing positions of the printed circuit boards 60a and 60b. Moreover, the movement of the printed circuit boards 60a and 60b by the stages 46a and 46b is controlled.

  The control measure 47 comprises a storage device, for example a memory. For example, information necessary for processing is stored in the storage device. The control is performed based on the contents stored in the storage device, for example.

  FIG. 2 is a flowchart showing a preparation process performed prior to the irradiation of the laser beam onto the printed circuit board.

  Prior to the laser beam irradiation, first, in step S101, based on the processing position of the processing object (arrangement of the processing hole of the printed circuit board), the movement path of the galvano scanner (path for changing the direction of the galvano mirror) is optimized. The hole processing order is determined and the hole interval according to the processing order is grasped. The movement route of the galvano scanner is optimized, for example, so that the movement time of the galvano scanner (time for changing the direction of the galvano mirror) is minimized.

  An example of the relationship between the hole processing order (hole number) and the hole interval is shown in the frame of step S101. In this figure, the horizontal axis represents the hole drilling order (hole number), and the vertical axis represents the distance from the previous hole to be processed in the unit “mm”. From this figure, it can be seen that the printed circuit board to be processed is a printed circuit board in which the distance between the holes (processed positions) is distributed within a range of slightly less than 0.8 mm to less than 1.7 mm when viewed in accordance with the processing order. .

  In step S102, the drilling sequence is associated with the laser oscillation frequency. In this operation, in step S201, the relationship between the hole interval and the laser oscillation frequency is obtained and grasped from the moving speed of the galvano scanner in advance.

  An example of the relationship between the hole interval and the oscillation frequency of the laser pulse to be irradiated when the holes are formed at the hole interval is shown in the frame of step S201. In this figure, the horizontal axis represents the hole interval in the unit “mm”, and the vertical axis represents the laser oscillation frequency in the unit “Hz”. This figure shows the relationship between the laser oscillation frequency decreasing as the hole spacing increases. The relationship between the hole interval and the laser oscillation frequency corresponds to the relationship between the moving distance of the galvano scanner (the amount of change in the direction of the galvano mirror) and the laser oscillation frequency.

  The association between the drilling sequence and the laser oscillation frequency is performed based on the relationship between the drilling sequence determined in step S101 and the grasped hole interval, and the hole interval determined in step S201 and the laser oscillation frequency.

  An example of the relationship between the drilling sequence and the laser oscillation frequency is shown in the frame of step S102. In this figure, the horizontal axis represents the drilling sequence (hole number), and the vertical axis represents the laser oscillation frequency in the unit “Hz”. By referring to this figure, for example, the oscillation frequency of the laser pulse to be irradiated when processing the n-th hole in the processing order can be determined.

  In step S103, the drilling sequence and the processing pulse width are associated with each other. In this operation, in step S202, the laser oscillation frequency and the machining laser pulse in which the pulse energy of the laser pulse irradiated to the printed circuit board (the energy input to the printed circuit board by one shot of laser pulse) is constant in step S202. The relationship with the pulse width (processing pulse width) is obtained and grasped. The constant value of the pulse energy of the processing laser pulse irradiated to the printed circuit board is determined from the required hole quality, such as the diameter and aperture ratio of the hole to be formed.

  An example of the relationship between the oscillation frequency of the laser and the pulse width of the machining laser pulse, which makes the pulse energy of the machining laser pulse irradiated to the printed circuit board constant, is shown in the frame of step S202. In this figure, the horizontal axis represents the laser oscillation frequency in the unit “Hz”, and the vertical axis represents the pulse width of the machining laser pulse in the unit “μs”. As shown in this figure, in order to make the pulse energy of the processing laser pulse irradiated to the printed circuit board constant, it is necessary to increase the pulse width of the processing laser pulse when the laser oscillation frequency increases.

  The association between the drilling sequence and the machining pulse width is based on the relationship between the drilling sequence and the laser oscillation frequency obtained in step S102, and the relationship between the laser oscillation frequency and the machining pulse width obtained in step S202. And do it.

  An example of the relationship between the drilling sequence and the processing pulse width is shown in the frame of step S103. In this figure, the horizontal axis represents the hole machining order (hole number), and the vertical axis represents the machining pulse width in the unit “μs”. By referring to this figure, for example, when processing the n-th hole in the processing order, the pulse width of the processing laser pulse to be irradiated on the printed circuit board is determined.

  The relationship between the drilling sequence shown in this figure and the processing pulse width (the pulse width of the processing laser pulse to be irradiated on the printed circuit board when processing the n-th hole in the processing sequence) It is stored and used for controlling the application time of the control signal to the AOD.

  Comparing the graph shown in the frame of step S101 with the graph shown in the frame of step S103, the machining pulse width is shortened when the hole interval is large, and the machining pulse width is elongated when the hole interval is small. It can be understood that the processing pulse width should be shortened as the distance from the hole processed immediately before increases.

  Simultaneously with the association between the drilling sequence and the machining pulse width, the drilling sequence and the pulse width of the laser pulse emitted from the laser oscillator are also associated. For example, when machining the n-th hole in the machining order, the pulse width of the laser pulse to be emitted from the laser oscillator can be determined. The relationship between the drilling sequence and the pulse width of the laser pulse emitted from the laser oscillator (the pulse width of the laser pulse to be emitted from the laser oscillator when machining the n-th hole in the machining sequence) is, for example, in the control device And is used to control the pulse width of the trigger pulse for the laser oscillator. Similar to the relationship between the hole interval and the processing pulse width, the pulse width of the laser pulse emitted from the laser oscillator may be shortened as the distance from the hole processed immediately before increases.

  FIG. 3 is a timing chart showing the laser processing method according to the embodiment. The laser processing method according to the embodiment is performed under the control of the control device 47 using the laser processing apparatus shown in FIG. All the horizontal axes of the timing chart represent time. The vertical axis of the stages of “laser oscillation”, “incident beam on the printed circuit board 60a”, and “incident beam on the printed circuit board 60b” represents energy per unit time, “scanning device stop signal”, “deflector ( The vertical axis of the stage of “optical path A) control signal” and “deflector (optical path B) control signal” indicates the presence or absence of a signal.

  Immediately after the (m-1) shot laser pulse for the printed circuit boards 60a and 60b is emitted from the laser oscillator 40, the galvano scanners 44a and 44b cause the m shot laser pulse to enter the processing position. Perform positioning. When the positioning is completed, a scanning device stop signal is transmitted from the galvano scanners 44 a and 44 b to the control device 47.

  Immediately after receiving the scanning device stop signal, the control device 47 transmits a trigger pulse to the laser oscillator 40 to emit the m-th shot laser pulse, and applies a control signal having a relatively low frequency to the AOD 42 ( “Refer to the stage of“ deflector (optical path A) control signal ”), the laser pulse incident on the AOD 42 during the control signal application time is deflected so as to travel along the optical path A. Subsequently, a control signal having a relatively high frequency is applied to the AOD 42 (see the stage of “deflector (optical path B) control signal”), and the laser pulse incident on the AOD 42 during the control signal application time is applied to the optical path B. Deflection to travel along.

As a result, a laser pulse having a pulse width (t _m ) equal to the signal application time to the AOD 42 travels along the optical paths A and B, and passes through the galvano scanners 44a and 44b and the fθ lenses 45a and 45b. , 60b to be processed, and holes are drilled in the substrates 60a and 60b.

  Here, the application time of the control signal for distributing the laser pulse to the optical path A and the time for distributing it to the optical path B are equal to each other, for example, the time determined by the graph shown in the frame of step S103 in FIG. The pulse width of the laser pulse emitted from the laser oscillator 40 is short when the hole interval is large and small when the hole interval is small due to the correlation between the hole processing sequence and the pulse width of the laser pulse emitted from the laser oscillator. The pulse width is determined long. The pulse width of the laser pulse emitted from the laser oscillator 40 can be controlled by the pulse width of the trigger pulse transmitted from the control signal 47.

Immediately after the emission of the m-th shot laser pulse from the laser oscillator 40 is finished and the printed circuit boards 60a and 60b are irradiated with the laser pulses distributed to the optical paths A and B, the galvano scanners 44a and 44b are (m + 1) Positioning is performed so that a shot laser pulse is incident on a processing position. Immediately after the scanning device stop signal is received, the control device 47 performs the same control on the laser oscillator 40 and the AOD 42, and the laser pulses having the pulse width t _{m + 1} from the (m + 1) -th shot laser pulse are optical paths A and B. And are made to enter the positions to be processed of the printed circuit boards 60a and 60b. For example, the pulse width t _m and the pulse width t _{m + 1 of the} machining laser pulse are equal to each other.

At this time, the pulse width and energy per unit time of the m-th shot laser pulse from the laser oscillator 40 are equal to those for the (m + 1) -th shot. As a result, the pulse energy S _m of the m-th shot laser pulse from the laser oscillator 40 is equal to the pulse energy S _{m + 1 of} the (m + 1) -th shot laser pulse. In addition, the energy per unit time of the m-th shot processing laser pulse irradiated to the printed circuit boards 60a and 60b is equal to that of the (m + 1) -th shot, and as a result, the pulse of the m-th processing laser pulse. The energies A _m and B _m are equal to the pulse energies A _{m + 1} and B _{m + 1} of the machining laser pulse for the (m + 1) th shot.

  The galvano scanners 44a and 44b are cut out from the (m + 2) -th shot laser pulse immediately after the processing laser pulses cut out from the (m + 1) -th shot laser pulse of the laser oscillator 40 are irradiated onto the printed circuit boards 60a and 60b. Positioning is performed so that the processing laser pulse is incident on the next processing position.

  Here, the distance between the machining position where the machining laser pulse for the (m + 1) shot is incident and the interval for the (m + 2) shot (the hole interval when the machining laser pulse for the (m + 2) shot is incident) is: It is larger than the processing position where the machining laser pulse for the m-th shot is incident and the interval for the (m + 1) -th shot (the interval between holes when the machining laser pulse for the (m + 1) -th shot is incident). For this reason, the positioning time (scanning device movement time) when irradiating the machining laser pulse for the (m + 2) shot is longer than that for the (m + 1) shot.

Immediately after the scanning device stop signal is received, the control device 47 performs the same control on the laser oscillator 40 and the AOD 42, and the laser pulses having the pulse width t _{m + 2} from the (m + 2) shot laser pulse are optical paths A and B. And are made to enter the positions to be processed of the printed circuit boards 60a and 60b.

The time from when the laser pulse of (m + 1) shot is oscillated from the laser oscillator 40 to when the laser pulse of (m + 2) shot is oscillated is from the time when the laser pulse of m shot is oscillated to (m + 1) shot. It is longer than the time until the laser pulse for oscillation is generated. The pulse width of the (m + 2) shot laser pulse from the laser oscillator 40 is shorter than that of the (m + 1) shot. Regarding the energy per unit time, the (m + 2) th shot is larger than the (m + 1) th shot. The pulse energy S _{m + 2} of the (m + 2) shot laser pulse from the laser oscillator 40 is equal to the pulse energy S _{m + 1 of} the (m + 1) shot laser pulse.

Further, the pulse width t _{m + 2} of the machining laser pulse is shorter than the pulse width t _{m + 1} . Regarding the energy per unit time of the processing laser pulse, the (m + 2) shot is larger than the (m + 1) shot. The pulse energy A _{m + 2} and B _{m + 2} of the (m + 2) shot processing laser pulse and the pulse energy A _{m + 1} and B _{m + 1 of} the (m + 1) shot processing laser pulse are equal to each other.

  The galvano scanners 44a and 44b are cut out from the (m + 3) shot laser pulse immediately after the processed laser pulses cut out from the (m + 2) shot laser pulse of the laser oscillator 40 are irradiated onto the printed circuit boards 60a and 60b. Positioning is performed so that the processing laser pulse is incident on the next processing position.

  Here, the distance between the processing position where the machining laser pulse for the (m + 2) shot is incident and the interval for the (m + 3) shot (the hole interval when the machining laser pulse for the (m + 3) shot is incident) is: It is smaller than the distance between the processing position where the m-th processing laser pulse is incident and the (m + 1) -th shot (the hole interval when the (m + 1) -th processing laser pulse is incident). For this reason, the positioning time (scanning device movement time) when irradiating the machining laser pulse for the (m + 3) shot is shorter than that for the (m + 1) shot.

Immediately after the scanning device stop signal is received, the control device 47 performs the same control on the laser oscillator 40 and the AOD 42, and from the (m + 3) shot laser pulse, the laser pulse having the pulse width t _{m + 3} is applied to the optical paths A and B. And are made to enter the positions to be processed of the printed circuit boards 60a and 60b.

The time from when the laser pulse of the (m + 2) shot is oscillated from the laser oscillator 40 to when the laser pulse of the (m + 3) shot is oscillated is the (m + 1) shot after the laser pulse of the m shot is oscillated. Shorter than the time until the laser pulse is oscillated. The pulse width of the (m + 3) shot laser pulse from the laser oscillator 40 is longer than that of the (m + 1) shot. Regarding the energy per unit time, the (m + 3) th shot is smaller than the (m + 1) th shot. The pulse energy S _{m + 3} of the (m + 3) shot laser pulse from the laser oscillator 40 is equal to the pulse energy S _{m + 1 of} the (m + 1) shot laser pulse.

Further, the pulse width t _{m + 3} of the machining laser pulse is longer than the pulse width t _{m + 1} . Regarding the energy per unit time of the machining laser pulse, the (m + 3) shot is smaller than the (m + 1) shot. The pulse energy A _{m + 3} and B _{m + 3} of the (m + 3) shot processing laser pulse and the pulse energy A _{m + 1} and B _{m + 1 of} the (m + 1) shot processing laser pulse are equal to each other.

  According to the laser processing method according to the embodiment, the pulse energy of the irradiated laser pulse is made constant by changing the pulse width and oscillation frequency of the laser pulse to be irradiated according to the hole interval and the corresponding scanning device moving time. Therefore, it is possible to realize high quality processing with small variations in processing quality of each hole. Since the laser beam is oscillated in synchronization with the end of positioning of the galvano scanner, it is possible to perform processing at a processing speed comparable to that of the processing method shown in FIG.

  If the (m + 4) shot machining laser pulse is incident at the same interval as the (m + 1) shot, the pulse width and oscillation frequency of the (m + 4) shot machining laser pulse. Is equal to the (m + 1) th shot.

    Although the present invention has been described with reference to the embodiments, the present invention is not limited thereto.

  For example, in the embodiment, the pulse width of the laser pulse to be irradiated is changed according to the hole interval so that the pulse energy of the laser pulse to be irradiated is constant. Even if the pulse width is changed so that the pulse energy of the laser pulse to be deflected is within a range of ± 5% from a certain value, high-quality processing can be similarly realized.

  In the embodiment, a galvano scanner was used as the scanning device, and a laser pulse was emitted from the laser oscillator in synchronization with the operation of the galvano scanner and deflected by AOD. The pulse width of the processing laser pulse applied to the printed circuit board was controlled by the application time of the control signal to the AOD. It is also possible to adopt a modification that does not use a galvano scanner or AOD.

  FIG. 4 is a schematic view showing a laser processing apparatus according to a modification. In the modification, the laser pulse emitted from the laser oscillator 40 is propagated by the propagation optical system 48 to the substrate 60 that is a workpiece to be held on the XY stage 46 so as to be movable. The control device 47 controls the emission of the laser pulse from the laser oscillator 40 and the movement of the substrate 60 by the stage 46. The controller 47 can control the pulse width of the emitted laser pulse by the pulse width of the trigger pulse given to the laser oscillator 40. The scanning device in the modification is a stage 46. The stage 60 is moved by the stage 46 to move the laser pulse incident position, and the stage moving time (the moving time to move the laser pulse incident position from one incident position to the next incident position on the substrate 60). ) To change the pulse width of the laser pulse and perform laser processing.

As an example of a timing chart of laser processing, the stage of “laser oscillation” and the stage of “scanning device stop signal” in FIG. 2 can be used. The control device 47 transmits a trigger pulse to the laser oscillator 40 immediately after receiving the stop signal from the stage 46. The pulse width of the trigger pulse is a length according to the interval between the machining positions (the previous stage movement time). The control device 47 changes the pulse width of the trigger pulse so that the pulse energies S _m , S _{m + 1} , S _{m + 2} , and S _{m + 3 of the} laser pulse emitted from the laser oscillator 40 are all equal to each other. Control. High quality laser processing is possible also by the modification.

  In addition, various changes, improvements, combinations, and the like are possible.

  For example, in the embodiment, the pulse laser beam is irradiated by the cycle method, but may be performed by the burst method.

In the embodiment, the CO ₂ laser oscillator is used. However, it is possible to use a laser oscillator having a variable oscillation frequency such as a solid-state laser such as an Nd: YAG laser or an excimer laser.

  Furthermore, in the embodiment, the control device 47 emits a laser pulse from the laser oscillator 40 based on the received scanning device stop signal. For example, the control device 47 stores the storage device in the control device 47 in step S102 of FIG. The relationship between the drilling sequence shown in the frame and the laser oscillation frequency (the oscillation frequency of the laser pulse to be irradiated when processing the n-th hole in the processing sequence) is stored, and the scanning device according to the stored contents Regardless of the stop signal, the emission timing of the laser pulse from the laser oscillator 40 may be controlled.

  In general, laser processing for processing a workpiece whose interval between irradiated positions is not constant can be preferably used. In particular, it can be suitably used for laser processing in which similar processing is performed at each irradiated position.

10 Laser oscillator 11 Mask 12 AOD
13 Damper 14 Galvano Scanner 15 fθ Lens 16 Stage 17 Controller 20 Pulsed Laser Beam 30 Printed Circuit Board 31 Copper Layer 32 Resin Layer 33 Copper Layer 40 Laser Oscillator 41 Mask 42 AOD
43 Damper 44a, 44b Galvano scanner 45a, 45b fθ lens 46, 46a, 46b Stage 47 Control device 48 Propagation optical system 50, 50a, 50b Pulse laser beam 60 Substrate 60a, 60b Printed circuit board 61a, 61b Copper layer 62a, 62b Resin layer 63a, 63b copper layer

Claims (8)

A laser light source that emits a laser pulse to be irradiated on a workpiece;
An irradiation position moving device for moving an irradiation position of the laser pulse emitted from the laser light source on the workpiece;
The irradiation position moving device emits a laser pulse with a pulse width and a frequency according to a moving time for moving the irradiation position of the laser pulse from one irradiation position to the next irradiation position on the workpiece. A laser processing apparatus comprising: a control device that controls emission of a laser pulse from the laser light source.   The controller controls the pulse of the laser pulse emitted from the laser light source according to the movement time so that the pulse energy of the laser pulse emitted from the laser light source falls within a range of ± 5% from a certain value. The laser processing apparatus according to claim 1, wherein the width and frequency are controlled. The laser light source is
A laser oscillator that emits an original laser pulse;
The laser processing apparatus according to claim 1, further comprising: a laser pulse generator that generates a laser pulse to be irradiated to a workpiece from an original laser pulse emitted from the laser oscillator. (A) A pulse width and a frequency of a laser pulse applied to a processing object in which a plurality of processing positions are defined together with the processing order according to an interval according to the processing order of the processing position; A step of determining
(B) A laser processing method including a step of irradiating a processing position of the processing object with a laser pulse with the pulse width and frequency determined in the step (a).   5. The pulse width and frequency of the laser pulse are determined in the step (a) so that the pulse energy of the laser pulse applied to the processing position falls within a range of ± 5% from a certain value. Laser processing method.   The laser processing method according to claim 4 or 5, wherein, in the step (b), a hole is formed at a processing position of the processing object. (C) making the first laser pulse incident on the first processing position;
(D) making a second laser pulse emitted next to the first laser pulse incident on a second processing position separated from the first processing position by a first distance;
(E) a step of causing a third laser pulse emitted next to the second laser pulse to enter a third processing position that is separated from the second processing position by a second distance. And
In the step (e),
(I) When the second distance is longer than the first distance, the pulse width of the third laser pulse is made shorter than the pulse width of the second laser pulse,
(Ii) When the second distance is shorter than the first distance, the pulse width of the third laser pulse is made longer than the pulse width of the second laser pulse,
(Iii) A laser processing method in which when the second distance is equal to the first distance, the pulse width of the third laser pulse is made equal to the pulse width of the second laser pulse.   The laser processing method according to claim 7, wherein a hole is formed in the first to third processing positions by the steps (c) to (e).

Images