JP2012015170A - 受光素子およびその製造方法 - Google Patents

受光素子およびその製造方法 Download PDF

Info

Publication number
JP2012015170A
JP2012015170A JP2010147636A JP2010147636A JP2012015170A JP 2012015170 A JP2012015170 A JP 2012015170A JP 2010147636 A JP2010147636 A JP 2010147636A JP 2010147636 A JP2010147636 A JP 2010147636A JP 2012015170 A JP2012015170 A JP 2012015170A
Authority
JP
Japan
Prior art keywords
light receiving
layer
mqw
receiving element
inp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010147636A
Other languages
English (en)
Japanese (ja)
Inventor
Katsushi Akita
勝史 秋田
Takashi Ishizuka
貴司 石塚
Kei Fujii
慧 藤井
Hideaki Nakahata
英章 中幡
Yoichi Nagai
陽一 永井
Hiroshi Inada
博史 稲田
Yasuhiro Inoguchi
康博 猪口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2010147636A priority Critical patent/JP2012015170A/ja
Priority to PCT/JP2011/063630 priority patent/WO2012002144A1/ja
Priority to US13/806,585 priority patent/US8822977B2/en
Priority to CN201180032436.3A priority patent/CN102959736B/zh
Priority to EP11800611.3A priority patent/EP2590232A1/en
Priority to TW100122953A priority patent/TW201214733A/zh
Publication of JP2012015170A publication Critical patent/JP2012015170A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035236—Superlattices; Multiple quantum well structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264—Inorganic materials
    • H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
    • H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
    • H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/544—Solar cells from Group III-V materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Light Receiving Elements (AREA)
JP2010147636A 2010-06-29 2010-06-29 受光素子およびその製造方法 Pending JP2012015170A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2010147636A JP2012015170A (ja) 2010-06-29 2010-06-29 受光素子およびその製造方法
PCT/JP2011/063630 WO2012002144A1 (ja) 2010-06-29 2011-06-15 受光素子およびその製造方法
US13/806,585 US8822977B2 (en) 2010-06-29 2011-06-15 Photodetector and method of manufacturing the photodetector
CN201180032436.3A CN102959736B (zh) 2010-06-29 2011-06-15 光接收器元件及其制造方法
EP11800611.3A EP2590232A1 (en) 2010-06-29 2011-06-15 Photoreceptor element and method for producing same
TW100122953A TW201214733A (en) 2010-06-29 2011-06-29 Photoreceptor element and method for producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010147636A JP2012015170A (ja) 2010-06-29 2010-06-29 受光素子およびその製造方法

Publications (1)

Publication Number Publication Date
JP2012015170A true JP2012015170A (ja) 2012-01-19

Family

ID=45401871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010147636A Pending JP2012015170A (ja) 2010-06-29 2010-06-29 受光素子およびその製造方法

Country Status (6)

Country Link
US (1) US8822977B2 (zh)
EP (1) EP2590232A1 (zh)
JP (1) JP2012015170A (zh)
CN (1) CN102959736B (zh)
TW (1) TW201214733A (zh)
WO (1) WO2012002144A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013258328A (ja) * 2012-06-13 2013-12-26 Sumitomo Electric Ind Ltd 受光素子および光学装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9368677B2 (en) * 2011-08-01 2016-06-14 Sandia Corporation Selective layer disordering in III-nitrides with a capping layer
JP2014216624A (ja) * 2013-04-30 2014-11-17 住友電気工業株式会社 エピタキシャルウエハ、その製造方法、半導体素子、および光学センサ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029813A1 (ja) * 2008-09-11 2010-03-18 住友電気工業株式会社 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1555570A (zh) * 2001-07-31 2004-12-15 ����ŵ˹�ݴ�ѧ����ίԱ�� 量子点与量子阱耦合的半导体器件及其制造方法
JP5260909B2 (ja) 2007-07-23 2013-08-14 住友電気工業株式会社 受光デバイス
JP5195172B2 (ja) * 2008-08-29 2013-05-08 住友電気工業株式会社 水分検出装置、生体中水分検出装置、自然産物中水分検出装置、および製品・材料中水分検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010029813A1 (ja) * 2008-09-11 2010-03-18 住友電気工業株式会社 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013258328A (ja) * 2012-06-13 2013-12-26 Sumitomo Electric Ind Ltd 受光素子および光学装置

Also Published As

Publication number Publication date
EP2590232A1 (en) 2013-05-08
WO2012002144A1 (ja) 2012-01-05
CN102959736A (zh) 2013-03-06
CN102959736B (zh) 2015-11-25
US20130099203A1 (en) 2013-04-25
US8822977B2 (en) 2014-09-02
TW201214733A (en) 2012-04-01

Similar Documents

Publication Publication Date Title
JP5649157B2 (ja) 半導体素子およびその製造方法
JP5218476B2 (ja) 半導体素子、光学センサ装置および半導体素子の製造方法
WO2012114849A1 (ja) 受光素子およびその製造方法
WO2014175128A1 (ja) 半導体素子およびその製造方法
WO2012046676A1 (ja) エピタキシャルウエハ、受光素子、光学センサ装置、並びにエピタキシャルウエハおよび受光素子の製造方法
JP2011100770A (ja) 受光素子アレイの製造方法及び受光素子アレイ、並びにエピタキシャルウェハの製造方法及びエピタキシャルウェハ
JP5736922B2 (ja) 受光素子およびその製造方法
WO2012002144A1 (ja) 受光素子およびその製造方法
US9190544B2 (en) Photodiode, optical sensor device, and photodiode manufacturing method
JP2015015306A (ja) 半導体素子およびその製造方法
JP6036906B2 (ja) 受光素子およびその製造方法
JP5593846B2 (ja) 受光素子、光学センサ装置および受光素子の製造方法
JP5776715B2 (ja) 半導体素子、光学センサ装置および半導体素子の製造方法
JP5794288B2 (ja) 受光素子アレイ及びエピタキシャルウェハ
JP2015015476A (ja) エピタキシャルウェハおよびその製造方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130128

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130906

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20131224