JP2011530423A5 - - Google Patents

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Publication number
JP2011530423A5
JP2011530423A5 JP2011523023A JP2011523023A JP2011530423A5 JP 2011530423 A5 JP2011530423 A5 JP 2011530423A5 JP 2011523023 A JP2011523023 A JP 2011523023A JP 2011523023 A JP2011523023 A JP 2011523023A JP 2011530423 A5 JP2011530423 A5 JP 2011530423A5
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JP
Japan
Prior art keywords
polishing
substrate
polishing surface
delivery arm
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011523023A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011530423A (ja
Filing date
Publication date
Priority claimed from US12/191,959 external-priority patent/US20100041316A1/en
Application filed filed Critical
Publication of JP2011530423A publication Critical patent/JP2011530423A/ja
Publication of JP2011530423A5 publication Critical patent/JP2011530423A5/ja
Pending legal-status Critical Current

Links

JP2011523023A 2008-08-14 2009-07-15 改良された化学的機械的研磨システムのための方法 Pending JP2011530423A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/191,959 US20100041316A1 (en) 2008-08-14 2008-08-14 Method for an improved chemical mechanical polishing system
US12/191,959 2008-08-14
PCT/US2009/050663 WO2010019339A2 (en) 2008-08-14 2009-07-15 Method for an improved chemical mechanical polishing system

Publications (2)

Publication Number Publication Date
JP2011530423A JP2011530423A (ja) 2011-12-22
JP2011530423A5 true JP2011530423A5 (enExample) 2012-09-06

Family

ID=41669549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011523023A Pending JP2011530423A (ja) 2008-08-14 2009-07-15 改良された化学的機械的研磨システムのための方法

Country Status (4)

Country Link
US (1) US20100041316A1 (enExample)
JP (1) JP2011530423A (enExample)
KR (1) KR20110055617A (enExample)
WO (1) WO2010019339A2 (enExample)

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US20140020830A1 (en) * 2012-07-19 2014-01-23 Applied Materials, Inc. Carrier Head Sweep Motor Current for In-Situ Monitoring
US20140024299A1 (en) * 2012-07-19 2014-01-23 Wen-Chiang Tu Polishing Pad and Multi-Head Polishing System
CN105164793B (zh) * 2013-03-15 2018-01-02 应用材料公司 对于利用用于化学机械抛光的晶片及晶片边缘/斜角清洁模块的盘/垫清洁的设计
US9806677B2 (en) 2015-03-16 2017-10-31 Telefonaktiebolaget Lm Ericsson (Publ) Amplifier adapted for noise suppression
KR102591906B1 (ko) * 2017-10-31 2023-10-20 가부시키가이샤 에바라 세이사꾸쇼 연마 장치 및 연마 방법
JP7763244B2 (ja) 2020-09-08 2025-10-31 アプライド マテリアルズ インコーポレイテッド Ｃｍｐ処理のための基板ハンドリングシステム及び方法
KR102838644B1 (ko) 2021-03-03 2025-07-28 어플라이드 머티어리얼스, 인코포레이티드 통합된 기판 정렬 스테이지를 갖는 건조 시스템
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