JP2011513948A - 柔軟な躯体を持つ拡散冷却ｃｏ２レーザー - Google Patents

柔軟な躯体を持つ拡散冷却ｃｏ２レーザー Download PDF

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Publication number
JP2011513948A
JP2011513948A JP2010547618A JP2010547618A JP2011513948A JP 2011513948 A JP2011513948 A JP 2011513948A JP 2010547618 A JP2010547618 A JP 2010547618A JP 2010547618 A JP2010547618 A JP 2010547618A JP 2011513948 A JP2011513948 A JP 2011513948A
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walls
laser
wall
gas discharge
housing
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Pending
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JP2010547618A
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Japanese (ja)
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JP2011513948A5 (https=
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デマリア、アンソニー・ジェイ
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コヒーレント・インク
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/041—Arrangements for thermal management for gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0315—Waveguide lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition
    • H01S3/0385—Shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0404—Air- or gas cooling, e.g. by dry nitrogen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/09702—Details of the driver electronics and electric discharge circuits

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lasers (AREA)
JP2010547618A 2008-02-22 2009-02-12 柔軟な躯体を持つ拡散冷却ｃｏ２レーザー Pending JP2011513948A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/035,630 US8942270B2 (en) 2008-02-22 2008-02-22 Diffusion-cooled CO2 laser with flexible housing
PCT/US2009/000917 WO2009105174A2 (en) 2008-02-22 2009-02-12 Diffusion-cooled co2 laser with flexible housing

Publications (2)

Publication Number Publication Date
JP2011513948A true JP2011513948A (ja) 2011-04-28
JP2011513948A5 JP2011513948A5 (https=) 2012-03-29

Family

ID=40853845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010547618A Pending JP2011513948A (ja) 2008-02-22 2009-02-12 柔軟な躯体を持つ拡散冷却ｃｏ２レーザー

Country Status (7)

Country Link
US (1) US8942270B2 (https=)
JP (1) JP2011513948A (https=)
KR (1) KR20100121678A (https=)
CN (1) CN102007654B (https=)
DE (1) DE112009000417T5 (https=)
GB (1) GB2470530B (https=)
WO (1) WO2009105174A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014513441A (ja) * 2011-05-03 2014-05-29 コヒレント， インコーポレイテッド 複数回折りたたまれた共振器を備えている導波管ｃｏ２レーザ

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8422528B2 (en) * 2011-02-24 2013-04-16 Iradion Laser, Inc. Ceramic slab, free-space and waveguide lasers
US10404030B2 (en) 2015-02-09 2019-09-03 Iradion Laser, Inc. Flat-folded ceramic slab lasers
US9614342B2 (en) * 2015-04-16 2017-04-04 Coherent, Inc. Air-cooled carbon-dioxide laser
US9419404B1 (en) * 2015-04-22 2016-08-16 Coherent, Inc. Water-cooled carbon-dioxide laser
CN105048256B (zh) * 2015-09-23 2017-10-20 江苏卓远激光科技有限公司 一种激光器电极板活动安装式结构
CN105098594B (zh) * 2015-09-23 2018-05-08 江苏卓远激光科技有限公司 一种激光器电极板卡接式结构
WO2017075731A1 (zh) * 2015-11-03 2017-05-11 徐海军 四腔室结构的射频激光器
CN105576482B (zh) * 2016-03-09 2018-07-03 中国工程物理研究院应用电子学研究所 一种用于激光器晶体的纵向式冷却器系统
CN106451039A (zh) * 2016-10-17 2017-02-22 吉林省永利激光科技有限公司 无水冷的风冷型封离式二氧化碳激光器
US10644474B2 (en) * 2018-03-07 2020-05-05 Coherent, Inc. Conductively-cooled slab laser
KR102894577B1 (ko) * 2019-07-03 2025-12-02 에스이씨 테크놀로지스 에스.알.오. 온도 변화 동안 레이저 헤드의 편향을 제한하기 위한 방법 및 레이저 헤드
ES2966706T3 (es) 2020-02-05 2024-04-24 Coherent Inc Láser de gas excitado por radiofrecuencia
CN116014537A (zh) * 2023-01-31 2023-04-25 安徽光智科技有限公司 二氧化碳激光器腔体模块

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07307506A (ja) * 1994-05-16 1995-11-21 Mitsubishi Electric Corp レーザ発振器
WO1997015101A1 (en) * 1995-10-17 1997-04-24 Universal Laser Systems, Inc. Free-space gas slab laser
US5881087A (en) * 1997-04-30 1999-03-09 Universal Laser Systems, Inc. Gas laser tube design
US5901167A (en) * 1997-04-30 1999-05-04 Universal Laser Systems, Inc. Air cooled gas laser
US6192061B1 (en) * 1997-03-14 2001-02-20 Demaria Electrooptics Systems, Inc. RF excited waveguide laser
US6198758B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser with heat transfer system and method
US6198759B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser system and method for beam enhancement
US20040114647A1 (en) * 2002-12-16 2004-06-17 Sukhman Yefim P. Laser with heat transfer system
US20040179570A1 (en) * 2003-01-24 2004-09-16 Peter Vitruk RF excited gas laser

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3553603A (en) * 1966-03-21 1971-01-05 Avco Corp Laser device utilizing an electric field across a nonresonant optical cavity
US3781709A (en) * 1972-08-02 1973-12-25 Siemens Ag Laser arrangement
US4493087A (en) * 1979-12-13 1985-01-08 Walwel, Inc. RF Excited waveguide gas laser
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
US4787090A (en) * 1988-03-28 1988-11-22 United Technologies Corporation Compact distributed inductance RF-excited waveguide gas laser arrangement
CN2469589Y (zh) * 2001-02-28 2002-01-02 陈清明 一种用于高功率co2激光输出窗口的冷却装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07307506A (ja) * 1994-05-16 1995-11-21 Mitsubishi Electric Corp レーザ発振器
WO1997015101A1 (en) * 1995-10-17 1997-04-24 Universal Laser Systems, Inc. Free-space gas slab laser
US6192061B1 (en) * 1997-03-14 2001-02-20 Demaria Electrooptics Systems, Inc. RF excited waveguide laser
US5881087A (en) * 1997-04-30 1999-03-09 Universal Laser Systems, Inc. Gas laser tube design
US5901167A (en) * 1997-04-30 1999-05-04 Universal Laser Systems, Inc. Air cooled gas laser
US6198758B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser with heat transfer system and method
US6198759B1 (en) * 1999-12-27 2001-03-06 Synrad, Inc. Laser system and method for beam enhancement
US20040114647A1 (en) * 2002-12-16 2004-06-17 Sukhman Yefim P. Laser with heat transfer system
US20040179570A1 (en) * 2003-01-24 2004-09-16 Peter Vitruk RF excited gas laser

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014513441A (ja) * 2011-05-03 2014-05-29 コヒレント， インコーポレイテッド 複数回折りたたまれた共振器を備えている導波管ｃｏ２レーザ

Also Published As

Publication number Publication date
GB2470530B (en) 2012-03-07
DE112009000417T5 (de) 2010-12-30
CN102007654B (zh) 2013-05-01
WO2009105174A2 (en) 2009-08-27
GB201015431D0 (en) 2010-10-27
CN102007654A (zh) 2011-04-06
WO2009105174A3 (en) 2010-03-18
US8942270B2 (en) 2015-01-27
KR20100121678A (ko) 2010-11-18
GB2470530A (en) 2010-11-24
US20090213885A1 (en) 2009-08-27

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