JP2011242522A - マイクロミラー装置 - Google Patents

マイクロミラー装置 Download PDF

Info

Publication number
JP2011242522A
JP2011242522A JP2010113240A JP2010113240A JP2011242522A JP 2011242522 A JP2011242522 A JP 2011242522A JP 2010113240 A JP2010113240 A JP 2010113240A JP 2010113240 A JP2010113240 A JP 2010113240A JP 2011242522 A JP2011242522 A JP 2011242522A
Authority
JP
Japan
Prior art keywords
layer
stress
film
mirror
micromirror device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010113240A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011242522A5 (enExample
Inventor
Akihiro Fuse
晃広 布施
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2010113240A priority Critical patent/JP2011242522A/ja
Publication of JP2011242522A publication Critical patent/JP2011242522A/ja
Publication of JP2011242522A5 publication Critical patent/JP2011242522A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP2010113240A 2010-05-17 2010-05-17 マイクロミラー装置 Pending JP2011242522A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010113240A JP2011242522A (ja) 2010-05-17 2010-05-17 マイクロミラー装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010113240A JP2011242522A (ja) 2010-05-17 2010-05-17 マイクロミラー装置

Publications (2)

Publication Number Publication Date
JP2011242522A true JP2011242522A (ja) 2011-12-01
JP2011242522A5 JP2011242522A5 (enExample) 2013-03-28

Family

ID=45409252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010113240A Pending JP2011242522A (ja) 2010-05-17 2010-05-17 マイクロミラー装置

Country Status (1)

Country Link
JP (1) JP2011242522A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014184513A (ja) * 2013-03-22 2014-10-02 Toshiba Corp 電気部品およびその製造方法
JP2015041075A (ja) * 2013-08-23 2015-03-02 ミツミ電機株式会社 光走査装置及び光走査ユニット
WO2022270475A1 (ja) * 2021-06-25 2022-12-29 Ａｇｃ株式会社 ミラー及びその製造方法
US11892660B2 (en) 2020-03-19 2024-02-06 Ricoh Company, Ltd. Reflecting element, light deflecting device, image projection device, optical writing device, object recognition device, mobile object, and head-mounted display

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08254612A (ja) * 1995-03-15 1996-10-01 Canon Inc 多層膜光学部品およびその製造方法
JP2000284275A (ja) * 1999-03-31 2000-10-13 Hitachi Ltd 反射型液晶表示装置
JP2002277630A (ja) * 2001-03-19 2002-09-25 Nippon Sheet Glass Co Ltd 高屈折率誘電体膜とその製造方法
JP2010002776A (ja) * 2008-06-20 2010-01-07 Canon Electronics Inc マイクロミラーデバイス、光走査装置及び画像形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08254612A (ja) * 1995-03-15 1996-10-01 Canon Inc 多層膜光学部品およびその製造方法
JP2000284275A (ja) * 1999-03-31 2000-10-13 Hitachi Ltd 反射型液晶表示装置
JP2002277630A (ja) * 2001-03-19 2002-09-25 Nippon Sheet Glass Co Ltd 高屈折率誘電体膜とその製造方法
JP2010002776A (ja) * 2008-06-20 2010-01-07 Canon Electronics Inc マイクロミラーデバイス、光走査装置及び画像形成装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014184513A (ja) * 2013-03-22 2014-10-02 Toshiba Corp 電気部品およびその製造方法
JP2015041075A (ja) * 2013-08-23 2015-03-02 ミツミ電機株式会社 光走査装置及び光走査ユニット
US11892660B2 (en) 2020-03-19 2024-02-06 Ricoh Company, Ltd. Reflecting element, light deflecting device, image projection device, optical writing device, object recognition device, mobile object, and head-mounted display
WO2022270475A1 (ja) * 2021-06-25 2022-12-29 Ａｇｃ株式会社 ミラー及びその製造方法

Similar Documents

Publication Publication Date Title
JP6516516B2 (ja) 光偏向器
CN103827725B (zh) 光学反射元件
NL2007886C2 (en) Mems scanning micromirror.
JP4905611B2 (ja) 光走査装置
JP6031683B2 (ja) 光学反射素子
JP2010026069A (ja) 振動ミラー素子
TW201140138A (en) Vibration mirror element and method for making a vibration mirror element
JP5394663B2 (ja) 光走査用マイクロミラーデバイス、光走査装置、画像形成装置、表示装置および入力装置
JP2011242522A (ja) マイクロミラー装置
JP2012113146A (ja) 振動素子、光走査装置、アクチュエータ装置、映像投影装置及び画像形成装置
JP6236987B2 (ja) 光走査装置及び光走査ユニット
JP6018926B2 (ja) マイクロミラーデバイス及びその製造方法
WO2020218585A1 (ja) マイクロミラーデバイス
JP2010210782A (ja) マイクロミラー装置
JP2011008070A (ja) マイクロミラー装置
JP2011242522A5 (enExample)
CN110462485A (zh) 光扫描装置及其制造方法
WO2021029946A1 (en) Substrate for scanning mirror system
JP2011118179A (ja) Ｍｅｍｓ光スキャナ
JP2005279863A (ja) アクチュエータの製造方法およびアクチュエータ
JP2014119616A (ja) マイクロデバイス及び光偏向器並びに光学デバイス
JP2011008070A5 (enExample)
JP2011022368A (ja) 光走査装置
JP5545190B2 (ja) 波長可変干渉フィルターの製造方法
JP2005292381A (ja) 光偏向器

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130213

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130213

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130716

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130717

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130912

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140218

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140410

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20140930