JP2011008070A5 - - Google Patents
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- Publication number
- JP2011008070A5 JP2011008070A5 JP2009152121A JP2009152121A JP2011008070A5 JP 2011008070 A5 JP2011008070 A5 JP 2011008070A5 JP 2009152121 A JP2009152121 A JP 2009152121A JP 2009152121 A JP2009152121 A JP 2009152121A JP 2011008070 A5 JP2011008070 A5 JP 2011008070A5
- Authority
- JP
- Japan
- Prior art keywords
- stress control
- micromirror device
- layer
- reflective layer
- stress
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 44
- 239000011241 protective layer Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 1
- 230000002411 adverse Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009152121A JP2011008070A (ja) | 2009-06-26 | 2009-06-26 | マイクロミラー装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009152121A JP2011008070A (ja) | 2009-06-26 | 2009-06-26 | マイクロミラー装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011008070A JP2011008070A (ja) | 2011-01-13 |
| JP2011008070A5 true JP2011008070A5 (enExample) | 2012-07-12 |
Family
ID=43564805
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009152121A Pending JP2011008070A (ja) | 2009-06-26 | 2009-06-26 | マイクロミラー装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011008070A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109154678B (zh) * | 2016-05-13 | 2021-03-26 | 三菱电机株式会社 | 光学部件及激光加工机 |
| DE102018211325A1 (de) * | 2018-07-10 | 2020-01-16 | Robert Bosch Gmbh | Fabry-Perot-Interferometer-Einheit und Verfahren zur Herstellung einer Fabry-Perot-Interferometer-Einheit |
| CN110954714B (zh) * | 2019-12-20 | 2021-10-19 | 江苏集萃微纳自动化系统与装备技术研究所有限公司 | 一种原子力显微镜的探针的刚度实时调节方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08254612A (ja) * | 1995-03-15 | 1996-10-01 | Canon Inc | 多層膜光学部品およびその製造方法 |
| JP4804830B2 (ja) * | 2005-08-29 | 2011-11-02 | 株式会社昭和真空 | 多層膜の成膜方法および成膜装置 |
| JP2009020468A (ja) * | 2007-07-13 | 2009-01-29 | Brother Ind Ltd | マイクロミラーの製造方法 |
-
2009
- 2009-06-26 JP JP2009152121A patent/JP2011008070A/ja active Pending
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