JP2011197599A - Color filter, method of manufacturing the same, and liquid crystal display device having the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a color filter or the like, wherein the component of a colored layer is hardly eluted in a liquid crystal layer when it is used in a liquid crystal display device while the number of processes is reduced in the manufacturing process of the color filter.SOLUTION: The color filter includes: a transparent substrate 3; a black matrix 5 that is formed on the substrate and has a plurality of openings; a first colored layer 7R for display, second colored layer 7G for display, and third colored layer 7B for display, having an isolated pattern shape formed in the openings; a first colored layer 9R for column, second colored layer 9G for column, and third colored layer 9B for column, sequentially stacked on the black matrix; and a transparent protective layer 13 for covering the black matrix, the first to third colored layers for display, and the first to third colored layers for column. The end of the first colored layer for column is separated from the end of the second colored layer for column by 5 μm or longer, and the end of the second colored layer for column is separated from the end of the third colored layer for column by 5 μm or longer.

Description

  The present invention relates to a color filter used in a liquid crystal display device and the like and a method for manufacturing the color filter.

  In a liquid crystal display device, a display side substrate such as a color filter and a liquid crystal driving side substrate are opposed to each other, a liquid crystal layer is formed therebetween, and the arrangement of liquid crystal molecules in the liquid crystal layer is electrically controlled by the liquid crystal driving side substrate. Thus, display is performed by selectively changing the amount of transmitted or reflected light of the display side substrate.

  The display side substrate is provided with a spacer that holds a gap between the display side substrate and the liquid crystal driving side substrate. Conventionally, it has been necessary to perform the photolithography process for forming the spacer separately from the photolithography process for forming the colored layer. However, if an independent spacer forming step is provided, the number of steps necessary for the production of the color filter is increased, the production efficiency is lowered, and the production cost is increased.

  Therefore, for the purpose of improving the production efficiency of the color filter, a method has been proposed in which a colored layer is laminated on a black matrix and the laminated colored layer is used as a spacer. (See Patent Document 1)

JP 2008-158138 A

  However, as shown in FIG. 9, in the conventional color filter 31 in which the colored layers 33R, 33G, and 33B are formed in a stripe shape, the second colored layer 35G for the column and the third colored column for the column on the first colored layer 33R. In order to form a thick colored layer, the layer 35B preferably has a lower bottom area as large as possible. Therefore, when the transparent protective layer (also referred to as overcoat layer) 13 is formed by applying a transparent resin after forming the colored layer, the upper end portion of the third colored layer for column 35B is exposed from the transparent protective layer 13. When such a color filter 31 is used in a liquid crystal display device, contents such as pigments in the third colored layer for columns are eluted from the exposed portion into the liquid crystal layer, causing a display defect and the reliability of the liquid crystal panel. There was a problem that the performance decreased.

  The present invention has been made in view of the above-mentioned problems, and is a color filter in which the components of the colored layer are less likely to elute into the liquid crystal layer when used in a liquid crystal display device while reducing the number of steps in the color filter production process. The purpose is to provide.

The present invention for achieving the above-described object is as follows.
(1) A substrate, a black matrix formed on the substrate and having a plurality of openings, an isolated pattern-shaped first colored layer, a second colored layer for display, and a display formed in the openings. A third colored layer, a first colored layer for columns, a second colored layer for columns, a third colored layer for columns, and a first colored layer for display, which are formed by sequentially laminating on the black matrix. A transparent protective layer covering the layer, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, and the third colored layer for columns. And the end of the first colored layer for columns and the end of the second colored layer for columns are separated by 5 μm or more, and the end of the second colored layer for columns and the third colored for columns A color filter (2) substrate characterized in that the end of the layer is separated by 5 μm or more, and is formed on the substrate A black matrix having a plurality of openings, a first colored layer for display formed in the openings, a second colored layer for display, a third colored layer for display, and the black matrix in this order. The first colored layer for columns, the second colored layer for columns, the third colored layer for columns, the black matrix, the first colored layer for display, the second colored layer for display, and the display, which are formed by stacking A transparent protective layer covering the third colored layer for columns, the first colored layer for columns, the second colored layer for columns, and the third colored layer for columns, and an end of the first colored layer for columns And the end of the second colored layer for pillars is separated by 5 μm or more, and the third colored layer for pillars has a dome shape in which the upper bottom end is rounded. A filter (3) substrate, a black matrix formed on the substrate and having a plurality of openings; The first colored layer for display formed in this order on the black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display and the isolated pattern formed in the opening. Layer, second colored layer for pillar, third colored layer for pillar, black matrix, first colored layer for display, second colored layer for display, third colored layer for display, first for colored pillar A transparent protective layer covering the colored layer, the second colored layer for pillars, and the third colored layer for pillars, wherein the first colored layer for pillars and / or the second colored layer for pillars are The bottom bottom area is smaller than the bottom area, and has an inversely tapered shape. The top bottom end of the column first colored layer and the bottom bottom end of the column second colored layer are separated by 5 μm or more. (4) The third colored layer for pillars and the third colored layer for display are colored other than green. The color filter according to any one of (1), characterized in that a layer (3).
(5) A liquid crystal display device having the color filter according to any one of (1) to (4) (6) A step of forming a black matrix on a substrate so as to have a plurality of openings ( a), a step (b) of forming a first colored layer for display having an isolated pattern shape covering the opening, and a first colored layer for a column on the black matrix; and so as to cover the opening A step (c) of forming a second colored layer for display having an isolated pattern shape and a second colored layer for columns on the first colored layer for columns, and displaying an isolated pattern shape so as to cover the opening Forming a third colored layer for a column and a third colored layer for a column on the second colored layer for a column, the black matrix, the first colored layer for display, and the second colored for display Layer, the third colored layer for display, the first colored layer for columns, the first colored layer for columns And (e) forming a transparent protective layer covering the colored layer and the third colored layer for pillars, and in the step (c), the second colored layer for pillars has an end at the pillar. 5 μm or more away from the edge of the first colored layer for use, and in the step (d), the third colored layer for pillar is separated from the edge of the second colored layer for pillar by 5 μm or more. (7) A step (a) of forming a black matrix on a substrate so as to have a plurality of openings, and an isolated pattern shape covering the openings Forming the first colored layer for display and the first colored layer for pillars on the black matrix, the second colored layer for display having an isolated pattern shape covering the opening, Forming a second colored layer for pillars on the first colored layer for pillars (c) Forming a third colored layer for display having an isolated pattern shape covering the opening, and a third colored layer for columns on the second colored layer for columns (d), the black matrix, Transparent covering the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, and the third colored layer for columns A step (e) of forming a protective layer, and in the step (c), the second colored layer for columns is arranged such that an end is separated by 5 μm or more from an end of the first colored layer for columns. In the step (d), the third colored layer for pillars is formed so as to have a dome shape in which the end of the upper base is rounded. (8) ) Forming a black matrix on the substrate so as to have a plurality of openings (a); A step (b) of forming a first colored layer for display having an isolated pattern shape covering the opening, and a first colored layer for pillars on the black matrix; and an isolated pattern shape covering the opening A step (c) of forming a second colored layer for display and a second colored layer for columns on the first colored layer for columns; and a third colored layer for display having an isolated pattern shape covering the opening. And a step (d) of forming a third colored layer for columns on the second colored layer for columns, the black matrix, the first colored layer for display, the second colored layer for display, and the display Forming a transparent protective layer covering the third colored layer, the first colored layer for pillars, the second colored layer for pillars, and the third colored layer for pillars, and the step (e) In c), the end of the second colored layer for columns is separated from the end of the first colored layer for columns by 5 μm or more. In the step (b) and / or the step (c), the first colored layer for pillars and / or the second colored layer for pillars has a reverse taper having a lower bottom area smaller than an upper bottom area. Manufacturing method of color filter, characterized by forming into a shape

  According to the color filter having the above configuration, the end of the first colored layer for columns and the end of the second colored layer for columns are separated by 5 μm, and the second colored layer for columns and the third colored layer for columns Since the distance between the columns is 5 μm, the inclination of the stacked columns becomes gentle, so that a transparent protective layer having a sufficient thickness can be applied at the end of the stacked columns. The upper end of the three colored layers is not exposed from the transparent protective layer. Therefore, the components of the colored layer constituting the stacked column are difficult to elute into the liquid crystal layer. Moreover, in this invention, a spacer can be formed, without providing an independent spacer formation process.

  According to the present invention, it is possible to provide a color filter or the like in which the components of the colored layer are hardly eluted into the liquid crystal layer when used in a liquid crystal display device while the number of steps is reduced in the production process of the color filter.

(A) The partial top view of the color filter 1 which concerns on 1st Embodiment (however, illustration of the protective layer 13 is abbreviate | omitted), (b) The B part of the AA 'cross section in (a) is shown. FIG. (A) The fragmentary top view explaining preparation of the black matrix of the manufacturing process of the color filter 1 which concerns on 1st Embodiment, (b) The fragmentary sectional view which shows B part of the AA 'cross section in (a). (A) The fragmentary top view explaining preparation of the 1st colored layer of the manufacturing process of the color filter 1, (b) The fragmentary sectional view which shows B part of the AA 'cross section in (a). (A) The fragmentary top view explaining preparation of the 2nd colored layer of the manufacturing process of the color filter 1, (b) The fragmentary sectional view which shows B part of the AA 'cross section in (a). (A) The fragmentary top view explaining preparation of the 3rd colored layer of the manufacturing process of the color filter 1, (b) The fragmentary sectional view which shows the B section of the AA 'cross section in (a). FIG. 6 is a partial cross-sectional view of a color filter 15 according to a second embodiment. (A)-(d) The figure explaining the manufacturing process of the 3rd colored layer 17B for pillars of a dome shape. (A)-(d) The figure explaining the lamination | stacking pillar containing the 1st colored layer 19R for pillars and the 2nd colored layer 19G for pillars concerning 3rd Embodiment. (A) The fragmentary top view of the conventional color filter 31 (however, illustration of the protective layer 13 is abbreviate | omitted), (b) The fragmentary sectional view which shows the AA 'cross section in (a).

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. An embodiment of the color filter of the present invention includes a color filter, a liquid crystal driving side substrate (not shown) provided with a common electrode and a pixel electrode, and a liquid crystal layer (not shown) formed between the color filter and the liquid crystal driving side substrate. IPS method (In-Plane Switching method, horizontal electric field liquid crystal driving method) in which the liquid crystal driving side substrate generates an electric field in a horizontal direction (lateral direction) with respect to the liquid crystal driving side substrate and drives the liquid crystal. This will be described as a color filter in a liquid crystal display device (not shown).

(Configuration of color filter 1)
First, the color filter 1 according to the first embodiment will be described with reference to FIG. Each drawing schematically shows each component, and does not accurately show an actual size or a relative size ratio. FIG. 1A is a partial plan view of the color filter 1 according to the first embodiment. However, in FIG. 1A, when the protective layer 13 is illustrated, the entire plan view is the protective layer 13, and thus the protective layer 13 is not illustrated. FIG.1 (b) is a fragmentary sectional view which shows B part of the AA 'cross section in Fig.1 (a).

  The color filter 1 has a black matrix 5 on a transparent substrate 3 and is provided with first colored layers 7R and 9R, second colored layers 7G and 9G, third colored layers 7B and 9B, a transparent protective layer 13, and the like. Among the colored layers, the first to third colored layers for display 7R, 7G, and 7B are provided so as to cover the openings of the black matrix 5, and the first to third colored layers for columns 9R, 9G, and 9B are stacked. To make laminated pillars and play a role as a spacer.

(Transparent substrate 3)
The transparent substrate 3 is not particularly limited, and a substrate generally used for a color filter can be used. For example, inflexible transparent rigid materials such as borosilicate glass, aluminoborosilicate glass, alkali-free glass, quartz glass, synthetic quartz glass, soda lime glass, white sapphire, transparent resin film, optical resin film, etc. A transparent flexible material having the following flexibility can be used. As the flexible material, acrylic such as polymethyl methacrylate, polyamide, polyacetal, polybutylene terephthalate, polyethylene terephthalate, polyethylene naphthalate, triacetyl cellulose, syndiotactic polystyrene, polyphenylene sulfide, polyether ketone, polyether ether ketone, Examples include fluororesin, polyether nitrile, polycarbonate, modified polyphenylene ether, polycyclohexene, polynorbornene resin, polysulfone, polyethersulfone, polyarylate, polyamideimide, polyetherimide, thermoplastic polyimide, and the like. However, those made of general plastics can also be used. In particular, alkali-free glass is a material having a small coefficient of thermal expansion, and is excellent in dimensional stability and characteristics in high-temperature heat treatment.

(Black Matrix 5)
The black matrix 5 is formed of a photosensitive resin containing light-shielding particles, has a thickness of about 0.5 μm to 2 μm, and is disposed on the transparent substrate 3 so as to have a plurality of openings. Each opening corresponds to the position of each pixel on the liquid crystal display substrate. The width of the black matrix between the openings in the long side direction of the openings is usually about 35 μm to 90 μm.

  Further, as the black matrix 5, an inorganic light-shielding film can also be used. The light-shielding film does not substantially transmit exposure light, and preferably has an average transmittance of 0.1% or less at the exposure wavelength. As the light shielding film, a light shielding film generally used for a color filter can be used, for example, a film of chromium, chromium oxide, chromium nitride, chromium oxynitride, molybdenum silicide, tantalum, aluminum, silicon, silicon oxide, silicon oxynitride, or the like. Is mentioned. Of these, chromium-based films such as chromium, chromium oxide, chromium nitride, and chromium oxynitride are preferably used. This is because such a chromium-based film has the most use record and is preferable in terms of cost and quality. This chromium-based film may be a single layer or may be a laminate of two or more layers. The film thickness of the inorganic light-shielding film is not particularly limited. For example, in the case of a chromium film, it can be about 50 nm to 150 nm.

  As a method for forming the inorganic light-shielding film, for example, a physical vapor deposition method (PVD) such as a sputtering method, an ion plating method, or a vacuum vapor deposition method is used. After the film formation, the light shielding film is patterned. The patterning method is not particularly limited, but usually a lithography method is used.

(First to third colored layers)
The first to third colored layers 7R, 7G, 7B, 9R, 9G, and 9B are formed of a photosensitive resin containing a colorant of each color, have a thickness of about 0.5 μm to 3 μm, and have a transparent substrate 3 It is arranged in an isolated pattern shape above. The display first to third colored layers 7R, 7G, and 7B are arranged so as to cover the openings of the black matrix 5.

(Laminated column)
The laminated pillar according to the present embodiment is formed by laminating the first colored layer for column 9R, the second colored layer for pillar 9G, and the third colored layer for pillar 9B on the black matrix 5, and has a thickness of about 1 μm to 5 μm. Has a height. In the present embodiment, as shown in FIG. 1A, the stacked columns are arranged on the black matrix 5 between the third colored layers for display 7B. The laminated pillar plays a role of providing an appropriate interval between the color filter 1 and the liquid crystal driving side substrate provided with the liquid crystal layer sandwiched between the color filter 1 and the colored layer side of the color filter 1. The voids are filled with liquid crystal molecules to form a liquid crystal layer.

  The place where the stacked pillars are formed is not limited to being on the black matrix 5 between the third colored layers for display 7B as in the present embodiment, but between the second colored layers for display 7G and the second display layers. It can be provided on the black matrix between one colored layer 7R. When a laminated column is provided on the black matrix between the first colored layers for display 7R, the first colored layer for display 7R and the first colored layer for columns 9R may be connected to form a striped colored layer. .

  Further, when the area of the first column colored layer 9R is reduced, the areas of the column second colored layer 9G and the column third colored layer 9B are also reduced, the thickness of each column colored layer is also reduced, and the entire laminated column There is a possibility that the height of the material becomes lower, and the role of the spacer cannot be fulfilled. It is preferable that the first colored layer for column 9R has as large an area as possible.

  The column second colored layer 9G has a smaller area than the column first colored layer 9R, and the distance C between the end of the column second colored layer 9G and the end of the column first colored layer 9R, That is, it is preferable that the distance C between the closest portions of the column second colored layer 9G and the column first colored layer 9R is 5 μm or more. The column third colored layer 9B has a smaller area than the column second colored layer 9G, and the distance D between the end of the column third colored layer 9B and the end of the column second colored layer 9G, That is, it is preferable that the distance D between the closest portions of the column third colored layer 9B and the column first colored layer 9R is 5 μm or more. When the distances C and D are 5 μm or more, the inclination of the side surfaces of the stacked columns becomes gentle.

(Transparent protective layer 13)
The transparent protective layer 13 is formed of a photosensitive resin that is transparent in the visible light region, has a thickness of about 0.1 μm to 2.0 μm, and includes the black matrix 5 and the first to third colored layers 7R, 7G, 7B, It arrange | positions so that the surface of 9R, 9G, 9B may be covered. The transparent protective layer 13 is provided so that the content of each colored layer such as a pigment does not elute from each colored layer into the liquid crystal layer. The transparent protective layer is also called an overcoat layer.

  The black matrix 5, the first to third colored layers 7R, 7G, 7B, 9R, 9G, 9B, etc. are coated with a photosensitive resin, exposed using a photomask having a predetermined appropriate pattern, and developed. Then, it is formed by patterning. For the black matrix 5 and the first to third colored layers 7R, 7G, 7B, 9R, 9G, and 9B, a photosensitive resin in which an appropriate colorant or the like corresponding to each color is dispersed and contained is used. For example, in the present embodiment, the first colored layer is red, the second colored layer is green, and the third colored layer is blue.

  The transparent protective layer 13 is formed by applying a photosensitive resin, and then exposing and developing the entire surface without using a photomask.

  As the photosensitive resin, either a negative photosensitive resin or a positive photosensitive resin can be used. In the present embodiment, description will be made assuming that a negative photosensitive resin is used.

The negative photosensitive resin is not particularly limited, and a commonly used negative photosensitive resin can be used. For example, a chemically amplified photosensitive resin based on a crosslinked resin, specifically, a chemically amplified photosensitive resin in which a crosslinking agent is added to polyvinylphenol and an acid generator is further added. In addition, as an acrylic negative photosensitive resin, a photopolymerization initiator that generates a radical component upon irradiation with ultraviolet rays, a component that has an acrylic group in the molecule, causes a polymerization reaction by the generated radical, and cures thereafter, What contains the functional group (for example, the component which has an acidic group in the case of image development by an alkaline solution) which can melt | dissolve an unexposed part by image development can be used. Among the above-mentioned components having an acrylic group, examples of relatively low molecular weight polyfunctional acrylic molecules include dipentaerythritol hexaacrylate (DPHA), dipentaerythritol pentaacrylate (DPPA), and tetramethylpentatriacrylate (TMPTA). Can be mentioned. In addition, examples of high molecular weight polyfunctional acrylic molecules include polymers in which an acrylic group is introduced via an epoxy group into a part of the carboxylic acid group of the styrene-acrylic acid-benzyl methacrylate copolymer, and methyl methacrylate-styrene- An acrylic acid copolymer etc. are mentioned.
The positive photosensitive resin is not particularly limited, and a commonly used one can be used. Specifically, a chemically amplified photosensitive resin using a novolac resin as a base resin can be used.

  Examples of the photosensitive resin coating method include spin coating, casting, dipping, bar coating, blade coating, roll coating, gravure coating, flexographic printing, spray coating, and die coating. is there.

  The colorant contained in the photosensitive resin used for the black matrix 5 and the first to third colored layers 7R, 7G, 7B, 9R, 9G, and 9B is not particularly limited, and a commonly used pigment is used. First, various known ones can be appropriately selected and used. As the light-shielding particles to be added to the black matrix 5, a mixture of pigments such as red, blue and green in addition to metal oxide powders such as titanium oxide and iron tetroxide, metal sulfide powders, metal powders and carbon black. Can be used.

  In the present embodiment, the first colored layer is red, the second colored layer is green, and the third colored layer is blue. However, the first, second, and third colored layers are Each may be green, blue, red, green, red, blue, or blue, green, red. However, the third colored layer is preferably not green. It is preferable that the outermost colored layer of the laminated column is not green because the pigment dispersion material, adhesion aid, and the like contained in the current green colored layer tend to adversely affect reliability such as voltage holding ratio.

  In the present embodiment, the color filter 1 has only three colored layers of red, blue, and green, but other colored layers such as yellow and cyan may be provided. At that time, a colored layer of another color may or may not be added to the formation of the laminated pillar.

(Method for producing color filter 1)
Then, the manufacturing method of the color filter which forms the color filter 1 shown in FIG. 1 is demonstrated using FIGS. Each of FIGS. 2 to 5 is a partial plan view for explaining a manufacturing process of the color filter 1 according to the first embodiment, and each of FIGS. It is a fragmentary sectional view which shows B part of the AA 'cross section in Fig.5 (a).

  First, as shown in FIGS. 2A and 2B, the black matrix 5 having a plurality of openings is formed on the transparent substrate 3.

  The black matrix 5 is formed by applying a black photosensitive resin for forming a black matrix on the transparent substrate 3, and having a transmissive portion at a portion corresponding to the formation position of the black matrix and a light-shielding portion at the other portion. The black matrix 5 is formed by patterning the black photosensitive resin by exposure and development using a mask.

  Next, as shown in FIGS. 3A and 3B, the first colored layer for display 7R covering the openings of the black matrix 5 and the openings where the third colored layer for display 7B is to be formed are formed. A column first colored layer 9R on the black matrix 5 is formed. The first colored layers 7R and 9R are formed by applying a red photosensitive resin for forming a red colored layer on the transparent substrate 3 and the black matrix 5, and displaying the first colored layer 7R for display and the first colored layer for columns. The first colored layer 7R for display and the column are formed by patterning the photosensitive resin by exposing and developing using a photomask having a transmissive portion at a portion corresponding to the 9R formation position and a light shielding portion at the other portion. The first colored layer 9R is formed. As shown in FIG. 3A, the first colored layer for display 7R is not connected to the first colored layer for display 7R formed in the opening of the adjacent pixel, and is formed in an isolated pattern shape. Is done.

  Next, as shown in FIGS. 4A and 4B, the second colored layer for display 7G that covers the openings of the black matrix 5, and the second colored layer for columns on the first colored layer for columns 9R. 9G is formed. The second colored layers 7G and 9G are formed by applying a green photosensitive resin for forming a green colored layer on the transparent substrate 3, the black matrix 5, and the first colored layers 7R and 9R, and then displaying the second colored layer for display. 7G and the second colored layer for pillar 9G corresponding to the formation position of the column, the photo-resist is patterned by exposure and development using a photomask having a transmission part in the part and a light-shielding part in the other part. The second colored layer for use 7G and the second colored layer for column 9G are formed. As shown in FIG. 4A, the second colored layer for display 7G is formed in an isolated pattern shape. Further, the second colored layer for column 9G has a smaller area than the first colored layer for column 9R, and the end of the second colored layer for column 9G is more than 5 μm away from the end of the first colored layer for column 9R. It is preferable.

  Next, as shown in FIGS. 5A and 5B, the third colored layer for display 7B covering the openings of the black matrix 5, and the third colored layer for pillars on the second colored layer for pillars 9G. 9B. The third colored layers 7B and 9B are formed by applying a blue photosensitive resin for forming a blue colored layer on the transparent substrate 3, the black matrix 5, the first colored layers 7R and 9R, and the second colored layers 7G and 9G. Then, exposure and development are performed using a photomask having a transmission part in a portion corresponding to the formation position of the third color layer for display 7B and the third color layer for column 9B, and a light-shielding part in the other part. The third resin colored layer 7B for display and the third colored layer 9B for pillars are formed by patterning the conductive resin. As shown in FIG. 5A, the display third colored layer 7B is formed in an isolated pattern shape. The third colored layer for column 9B has a smaller area than the second colored layer for column 9G, and the end of the third colored layer for column 9B is 5 μm or more away from the end of the second colored layer for column 9G. It is preferable.

  Next, the transparent protective layer 13 covering the black matrix 5 and the first to third colored layers 7R, 7G, 7B, 9R, 9G, 9B is formed, and the color filter 1 shown in FIG. 1A is formed. The transparent protective layer 13 is formed by applying a photosensitive resin transparent in the visible light region on the transparent substrate 3, the black matrix 5, the first colored layer, the second colored layer, and the third colored layer, and exposing and developing. Thus, the transparent protective layer 13 is formed. As shown in FIG. 1, the transparent protective layer 13 covers the black matrix 5, the display first to third colored layers 7R, 7G, and 7B and the column first to third colored layers 9R, 9G, and 9B. Yes.

(Effects of the first embodiment)
As described above, according to the first embodiment, it is possible to form a stacked column that serves as a spacer by stacking a black matrix and a colored layer of each color without providing an independent spacer forming step. Therefore, it is possible to reduce the manufacturing process of the color filter.

  Further, according to the first embodiment, the first colored layer for column 9R and the second colored layer for column 9G are separated by 5 μm or more, and the second colored layer for column 9G and the third colored layer for column 9B are 5 μm. Because of the above separation, the slope of the end of the laminated column becomes gentle, and the transparent photosensitive resin forms a coating film with sufficient thickness even on the side surface of the laminated column, so that the transparent protective layer covers the entire surface. And is formed with a sufficient thickness. Therefore, the components of the colored layer are not eluted from the colored layer to the liquid crystal layer.

  In addition, when laminating | stacking the conventional colored layer and forming a spacer, in order to ensure the height of a spacer, the 1st-3rd colored layer for pillars was designed so that the area could be taken as wide as possible. However, the present invention is characterized by adopting a configuration in which the end portions of the first to third colored layers for pillars have a certain distance even though the colored layer for pillars is intentionally reduced in area. is there.

(Second Embodiment)
Next, a second embodiment of the color filter of the present invention will be described with reference to FIG. FIG. 6 is a diagram illustrating the third colored layer 17B for pillars according to the second embodiment. In the following embodiment, the same number is attached | subjected to the element which fulfill | performs the same aspect as 1st Embodiment, and the overlapping description is avoided.

  The color filter 15 according to the second embodiment includes a third colored layer 17 </ b> B for a column that has a dome shape with a rounded upper end. As a method for forming such a colored layer having a dome shape, for example, there is a method in which the colored layer after exposure / development is subjected to heat treatment, the colored layer is softened, and rounded by surface tension. Moreover, it can also obtain by changing the material of the photosensitive resin used for formation of a colored layer into the material which is easy to be rounded.

  As another method for obtaining the third colored layer 17B for pillars having a dome shape, there is a method using a gradation mask (halftone mask). FIG. 7 is a diagram for explaining a method for obtaining the dome-shaped third colored layer 17 </ b> B for the pillar using the gradation mask 21.

  First, as shown in FIG. 7A, a photosensitive resin for forming a third colored layer is applied over the entire surface to form a coating film 16B.

  Next, as shown in FIG. 7B, the coating film 16 </ b> B is exposed through the gradation mask 21 having the semitransparent film 25. The translucent film 25 is a film that transmits part of the exposure light 29. The gradation mask 21 has only the semi-transparent film 25 at a location corresponding to the rounded portion of the third colored layer 17B for pillars, and has a light-shielding film 27 at a location corresponding to a location where the third colored layer is not formed. .

  As shown in FIG. 7C, exposure is performed through the gradation mask 21 and development is performed. As a result, a thin third colored layer is formed at a location corresponding to the semi-transmissive portion having only the semi-transparent film 25, and a third colored layer is formed at a location corresponding to the light-shielding portion having the light-shielding film 27. In addition, a thick third colored layer is formed at a location corresponding to the transmission part that does not have the semitransparent film 25 or the light shielding film 27.

  Subsequently, as shown in FIG. 7D, when the colored layer is subjected to heat treatment, the third colored layer softened by heat is rounded by the surface tension to obtain a dome-shaped third colored layer 17B for a column. .

  In the gradation mask, a transparent substrate, a light shielding film, and a semitransparent film having a transmittance adjusting function are stacked in random order, and a light shielding portion provided with a light shielding film on the transparent substrate, and a semitransparent film on the transparent substrate And a transmissive part in which neither a light-shielding film nor a semi-transparent film is provided on the transparent substrate.

  The light-shielding film does not substantially transmit exposure light, and preferably has an average transmittance of 0.1% or less at the exposure wavelength. As the light shielding film, a light shielding film generally used for a color filter can be used, for example, a film of chromium, chromium oxide, chromium nitride, chromium oxynitride, molybdenum silicide, tantalum, aluminum, silicon, silicon oxide, silicon oxynitride, or the like. Is mentioned. Of these, chromium-based films such as chromium, chromium oxide, chromium nitride, and chromium oxynitride are preferably used. This is because such a chromium-based film has the most use record and is preferable in terms of cost and quality. This chromium-based film may be a single layer or may be a laminate of two or more layers.

  The thickness of the light shielding film is not particularly limited, and for example, in the case of a chromium film, it can be about 50 nm to 150 nm.

  As a method for forming the light shielding film, for example, a physical vapor deposition method (PVD) such as a sputtering method, an ion plating method, or a vacuum vapor deposition method is used. After the film formation, the light shielding film is patterned. The patterning method is not particularly limited, but usually a lithography method is used.

  The translucent film is not particularly limited, and examples thereof include films of oxides such as chromium, molybdenum silicide, tantalum, aluminum, and silicon, nitrides, and carbides. From the advantage that the translucent film and the light-shielding film can be patterned by the same etching equipment and process, the translucent film and the light-shielding film are preferably films made of similar materials. Since the light-shielding film is preferably a chromium-based film as described above, the translucent film is also preferably a chromium-based film such as chromium oxide, chromium nitride, chromium oxynitride, or chromium oxynitride carbide. In addition, these chromium-based films have excellent mechanical strength and are stable, so that a mask that can withstand long-term use can be obtained.

  The translucent film may be a single layer or may be composed of a plurality of layers. Thus, a multi-tone mask having a plurality of transmittances can be obtained.

  The film thickness of the translucent film can be, for example, about 5 nm to 50 nm in the case of a chromium film, and about 5 nm to 150 nm in the case of a chromium oxide film. Since the transmissivity of the semitransparent film varies depending on the film thickness, the desired transmissivity can be obtained by controlling the film thickness. Further, when the translucent film contains oxygen, nitrogen, carbon or the like, the transmittance varies depending on the composition. Therefore, the desired transmittance can be realized by simultaneously controlling the film thickness and the composition.

  As a method for forming the translucent film, for example, a physical vapor deposition method (PVD) such as a sputtering method, an ion plating method, or a vacuum vapor deposition method is used. For example, when forming a chromium oxynitride chromium carbide film using a sputtering method, a reactive gas sputtering method using a Cr target by introducing a carrier gas such as Ar gas, oxygen (carbonic acid) gas, or nitrogen gas into the reactor. Thus, a chromium oxynitride carbide carbide film can be formed. At this time, the composition of the chromium oxynitride carbide film can be controlled by controlling the flow rates of Ar gas, oxygen (carbonic acid) gas, and nitrogen gas. After film formation, patterning is performed to form a translucent film.

  According to the second embodiment, the outermost third colored layer for pillars, which is most easily exposed than the transparent protective layer, has a dome shape with rounded upper bottom ends. The laminated pillars can be reliably covered.

  In the second embodiment, the distance C between the end of the first colored layer for column 9R and the end of the second colored layer for column 9G may be 5 μm or more. The distance between the end of the second colored layer 9G and the end of the third colored layer 17B for pillars may be 5 μm or more.

(Third embodiment)
Next, a third embodiment of the color filter of the present invention will be described with reference to FIG. FIGS. 8A to 8D are views for explaining the first colored layer for column 19R and the second colored layer for column 19G according to the third embodiment.

  In the third embodiment, the first colored layer for column 19R and the second colored layer for column 19G have an inversely tapered shape in which the area of the upper base is larger than the area of the lower base. Such a reverse-tapered colored layer can be obtained by preparing a material used for forming the colored layer.

  As shown in FIG. 8 (a), an inverted tapered second column colored layer 19G may be formed on the normal column first colored layer 9R, or as shown in FIG. 8 (b). The normal column second colored layer 9G may be formed on the reverse tapered shape 19R, or as shown in FIG. 8C, on the reverse tapered shape column first colored layer 19R. You may form the 2nd colored layer 19G for pillars of a reverse taper shape.

  In the third embodiment, the distance C between the end of the first colored layer for column 9R or 19R and the end of the second colored layer for column 9G or 19G may be 5 μm or more. The distance between the end of the second colored layer for column 9G or 19G and the end of the third colored layer for column 9B may be 5 μm or more.

  Further, as shown in FIG. 8D, a third color layer 19B having a forward taper shape may be formed on the second color layer 19G having a reverse taper shape. The tapered third colored layer for pillar 19B has a lower bottom area larger than the upper bottom area, and the lower bottom area is close to the upper bottom area of the second colored layer for pillar 19G.

  According to the third embodiment, the first colored layer for column 19R or the second colored layer for column 19B has a reverse taper shape, and when applying the transparent photosensitive resin for forming the transparent protective layer, these Since the upper bottom portion holds the transparent photosensitive resin, it is possible to increase the thickness of the coating film on the side surface portion of the laminated pillar more reliably.

  The preferred embodiments of the color filter and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these naturally belong to the technical scope of the present invention. Understood.

DESCRIPTION OF SYMBOLS 1 ......... Color filter 3 ......... Transparent substrate 5 ......... Black matrix 7R ......... First colored layer for display 7G ......... Second colored layer for display 7B ......... Third colored layer for display 9R ... ... 1st colored layer for pillars 9G ... 2nd colored layer for pillars 9B ... 3rd colored layer for pillars 13 ... ... Transparent protective layer 15 ... ... Color filter 16B ... ... Coating film 17B ... 3rd colored layer for columns 19R ... 1st colored layer for columns 19G ... 2nd colored layer for columns 19B ... 3rd colored layer for columns 21 ... …… Photomask 23 ......... Transparent substrate 25 ......... Translucent film 27 ......... Light-shielding film 29 ......... Exposure light 31 ......... Color filter 33R ......... First colored layer 33G ......... Second colored layer for display 33B ......... Third for display Colored layer 35G ......... Second colored layer for pillars 35B ......... Third colored layer for pillars

Claims (8)

A substrate,
A black matrix formed on the substrate and comprising a plurality of openings;
A first colored layer for display, a second colored layer for display, and a third colored layer for display formed in an isolated pattern formed in the opening;
A first colored layer for pillars, a second colored layer for pillars, and a third colored layer for pillars, which are sequentially laminated on the black matrix;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns A transparent protective layer covering the layer,
Comprising
The end of the first colored layer for columns and the end of the second colored layer for columns are separated by 5 μm or more,
An end of the second colored layer for columns and an end of the third colored layer for columns are separated by 5 μm or more. A substrate,
A black matrix formed on the substrate and comprising a plurality of openings;
A first colored layer for display, a second colored layer for display, and a third colored layer for display formed in an isolated pattern formed in the opening;
A first colored layer for pillars, a second colored layer for pillars, and a third colored layer for pillars, which are sequentially laminated on the black matrix;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns A transparent protective layer covering the layer,
Comprising
The end of the first colored layer for columns and the end of the second colored layer for columns are separated by 5 μm or more,
The color filter according to claim 3, wherein the third colored layer for pillars has a dome shape in which an end of an upper base is rounded. A substrate,
A black matrix formed on the substrate and comprising a plurality of openings;
A first colored layer for display, a second colored layer for display, and a third colored layer for display formed in an isolated pattern formed in the opening;
A first colored layer for pillars, a second colored layer for pillars, and a third colored layer for pillars, which are sequentially laminated on the black matrix;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns A transparent protective layer covering the layer,
Comprising
The first colored layer for pillars and / or the second colored layer for pillars has a reverse tapered shape having a lower bottom area smaller than an upper bottom area,
The color filter, wherein an end of the upper bottom of the first colored layer for columns and an end of the lower bottom of the second colored layer for columns are separated by 5 μm or more.   The color filter according to any one of claims 1 to 3, wherein the third colored layer for columns and the third colored layer for display are colored layers other than green.   A liquid crystal display device comprising the color filter according to claim 1. Forming a black matrix on the substrate so as to have a plurality of openings;
A step (b) of forming a first colored layer for display having an isolated pattern shape so as to cover the opening, and a first colored layer for columns on the black matrix;
Forming a second colored layer for display having an isolated pattern shape covering the opening, and a second colored layer for columns on the first colored layer for columns (c);
A step (d) of forming a third colored layer for display having an isolated pattern shape so as to cover the opening, and a third colored layer for columns on the second colored layer for columns;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns Forming a transparent protective layer covering the layer (e);
Comprising
In the step (c), the second colored layer for pillars is formed so that the end part is separated by 5 μm or more from the end part of the first colored layer for pillars,
In the step (d), the column colored third colored layer is formed such that the end portion is separated by 5 μm or more from the edge portion of the column second colored layer. Forming a black matrix on the substrate so as to have a plurality of openings;
A step (b) of forming a first colored layer for display having an isolated pattern shape so as to cover the opening, and a first colored layer for columns on the black matrix;
Forming a second colored layer for display having an isolated pattern shape covering the opening, and a second colored layer for columns on the first colored layer for columns (c);
A step (d) of forming a third colored layer for display having an isolated pattern shape so as to cover the opening, and a third colored layer for columns on the second colored layer for columns;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns Forming a transparent protective layer covering the layer (e);
Comprising
In the step (c), the second colored layer for pillars is formed so that the end part is separated by 5 μm or more from the end part of the first colored layer for pillars,
In the step (d), the third colored layer for pillars is formed so as to have a dome shape in which an end of an upper base is rounded. Forming a black matrix on the substrate so as to have a plurality of openings;
A step (b) of forming a first colored layer for display having an isolated pattern shape so as to cover the opening, and a first colored layer for columns on the black matrix;
Forming a second colored layer for display having an isolated pattern shape covering the opening, and a second colored layer for columns on the first colored layer for columns (c);
A step (d) of forming a third colored layer for display having an isolated pattern shape so as to cover the opening, and a third colored layer for columns on the second colored layer for columns;
The black matrix, the first colored layer for display, the second colored layer for display, the third colored layer for display, the first colored layer for columns, the second colored layer for columns, the third colored for columns Forming a transparent protective layer covering the layer (e);
Comprising
In the step (c), the second colored layer for pillars is formed so that the end part is separated by 5 μm or more from the end part of the first colored layer for pillars,
In the step (b) and / or the step (c), the first colored layer for pillars and / or the second colored layer for pillars has an inversely tapered shape in which the lower bottom area is smaller than the upper bottom area. A method for producing a color filter, characterized by comprising:

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