JP2011197534A5 - - Google Patents

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Publication number
JP2011197534A5
JP2011197534A5 JP2010066168A JP2010066168A JP2011197534A5 JP 2011197534 A5 JP2011197534 A5 JP 2011197534A5 JP 2010066168 A JP2010066168 A JP 2010066168A JP 2010066168 A JP2010066168 A JP 2010066168A JP 2011197534 A5 JP2011197534 A5 JP 2011197534A5
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JP
Japan
Prior art keywords
optical path
objective lens
reference mirror
interference
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010066168A
Other languages
English (en)
Japanese (ja)
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JP5574226B2 (ja
JP2011197534A (ja
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Publication date
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Priority to JP2010066168A priority Critical patent/JP5574226B2/ja
Priority claimed from JP2010066168A external-priority patent/JP5574226B2/ja
Publication of JP2011197534A publication Critical patent/JP2011197534A/ja
Publication of JP2011197534A5 publication Critical patent/JP2011197534A5/ja
Application granted granted Critical
Publication of JP5574226B2 publication Critical patent/JP5574226B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010066168A 2010-03-23 2010-03-23 干渉対物レンズ及びこれを有する顕微鏡装置 Active JP5574226B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010066168A JP5574226B2 (ja) 2010-03-23 2010-03-23 干渉対物レンズ及びこれを有する顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010066168A JP5574226B2 (ja) 2010-03-23 2010-03-23 干渉対物レンズ及びこれを有する顕微鏡装置

Publications (3)

Publication Number Publication Date
JP2011197534A JP2011197534A (ja) 2011-10-06
JP2011197534A5 true JP2011197534A5 (https=) 2013-04-25
JP5574226B2 JP5574226B2 (ja) 2014-08-20

Family

ID=44875783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010066168A Active JP5574226B2 (ja) 2010-03-23 2010-03-23 干渉対物レンズ及びこれを有する顕微鏡装置

Country Status (1)

Country Link
JP (1) JP5574226B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5786270B2 (ja) * 2013-03-06 2015-09-30 株式会社東京精密 ２色干渉計測装置
WO2016084239A1 (ja) * 2014-11-28 2016-06-02 株式会社東京精密 ２色干渉計測装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8304213A (nl) * 1983-12-07 1985-07-01 Philips Nv Enkelvoudige lens met een asferisch oppervlak.
JPH0524163Y2 (https=) * 1987-08-24 1993-06-21
JP2520950Y2 (ja) * 1988-03-11 1996-12-18 株式会社ニコン 二光束干渉用対物レンズ
JPH05288992A (ja) * 1992-04-15 1993-11-05 Laser Tec Kk 透過型顕微鏡
JP3210111B2 (ja) * 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JP3587562B2 (ja) * 1994-07-18 2004-11-10 オリンパス株式会社 干渉顕微鏡
JP3672951B2 (ja) * 1994-12-13 2005-07-20 オリンパス株式会社 画像表示装置
JP2009015180A (ja) * 2007-07-09 2009-01-22 Nikon Corp 干渉対物レンズ
JP2009236655A (ja) * 2008-03-27 2009-10-15 Nikon Corp 変位検出装置、露光装置、およびデバイス製造方法

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