JP2011197534A5 - - Google Patents
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- JP2011197534A5 JP2011197534A5 JP2010066168A JP2010066168A JP2011197534A5 JP 2011197534 A5 JP2011197534 A5 JP 2011197534A5 JP 2010066168 A JP2010066168 A JP 2010066168A JP 2010066168 A JP2010066168 A JP 2010066168A JP 2011197534 A5 JP2011197534 A5 JP 2011197534A5
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- optical path
- objective lens
- reference mirror
- interference
- sample
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Description
このような目的を達成するため、本発明に係る干渉対物レンズは、対物レンズ系と、前記対物レンズ系より試料側に配置され前記対物レンズ系を経て入射した光を分割する光路分割部材と、前記光路分割部材によって分割された一方の光路中に配置される参照鏡とを有し、前記光路分割部材によって分割された他方の光路中に位置する前記試料からの反射光と、前記参照鏡からの反射光とを干渉させる干渉対物レンズにおいて、前記参照鏡は、透明の基板部材の裏面に反射膜が形成された裏面反射鏡であり、前記光路分割部材より前記試料側に、前記裏面反射鏡の前記基板部材によって生じた光路差を補正する光路差補正部材を有する。 To achieve the above object, an interference objective lens according to the present invention, an objective lens system, the optical path splitting member for splitting the light which the disposed side of the sample from the objective lens system is incident via the objective lens system , and a reference mirror which is arranged in the optical path of one divided by the optical path splitting member, the reflected light from the sample positioned on the other optical path split by the optical path splitting member, the reference mirror in the interference objective lens for interference between light reflected from the reference mirror is a back surface reflector reflecting film is formed on the rear surface of the transparent substrate member, to the sample side of the optical path splitting member, the back reflection An optical path difference correcting member that corrects an optical path difference caused by the substrate member of the mirror;
また、本発明に係る干渉対物レンズは、対物レンズ系と、前記対物レンズ系より試料側に配置され前記対物レンズ系を経て入射した光を分割する光路分割部材と、前記光路分割部材によって分割された一方の光路中に配置される参照鏡とを有し、前記光路分割部材によって分割された他方の光路中に位置する前記試料からの反射光と、前記参照鏡からの反射光とを干渉させる干渉対物レンズにおいて、前記光路分割部材は、試料側部材と参照鏡側部材とからなり、前記試料側部材は、その光路長が前記裏面反射鏡の前記基板部材の光路長と前記参照鏡側部材の光路長との総和に相当するように形成されている。
The interference objective lens according to the present invention is divided by an objective lens system, an optical path dividing member that is disposed closer to the sample side than the objective lens system and splits light incident through the objective lens system, and the optical path dividing member. A reference mirror disposed in one optical path, and causes reflected light from the sample located in the other optical path divided by the optical path dividing member to interfere with reflected light from the reference mirror In the interference objective lens, the optical path dividing member includes a sample side member and a reference mirror side member, and the sample side member has an optical path length of the substrate member of the back reflector and the reference mirror side member. It is formed so as to correspond to the sum of the optical path lengths .
Claims (6)
前記光路分割部材によって分割された他方の光路中に位置する前記試料からの反射光と、前記参照鏡からの反射光とを干渉させる干渉対物レンズにおいて、
前記参照鏡は、透明の基板部材の裏面に反射膜が形成された裏面反射鏡であり、
前記光路分割部材より前記試料側に、前記裏面反射鏡の前記基板部材によって生じた光路差を補正する光路差補正部材を有することを特徴とする干渉対物レンズ。 An objective lens system, see the optical path splitting member is disposed on the sample side of the objective lens system splits the light incident through the objective lens system, which is arranged in the optical path of one divided by the optical path splitting member A mirror,
And the reflected light from the sample positioned on the other optical path split by the optical path splitting member, the interference objective lens for interference between reflected light from the reference mirror,
The reference mirror is a back surface reflecting mirror in which a reflective film is formed on the back surface of a transparent substrate member,
Wherein the sample side of the optical path splitting member, interference objective lens characterized by having an optical path difference compensation member for compensating the optical path difference caused by the substrate member of the back reflector.
前記光路分割部材によって分割された他方の光路中に位置する前記試料からの反射光と、前記参照鏡からの反射光とを干渉させる干渉対物レンズにおいて、
前記光路分割部材は、試料側部材と参照鏡側部材とからなり、
前記試料側部材は、その光路長が前記裏面反射鏡の前記基板部材の光路長と前記参照鏡側部材の光路長との総和に相当するように形成されていることを特徴とする干渉対物レンズ。 An objective lens system, an optical path dividing member arranged on the sample side of the objective lens system and dividing light incident through the objective lens system, and a reference mirror arranged in one optical path divided by the optical path dividing member And
In the interference objective lens that interferes with the reflected light from the sample located in the other optical path divided by the optical path dividing member and the reflected light from the reference mirror,
The optical path splitting member comprises a sample side member and a reference mirror side member,
The sample-side member, interference objective, characterized in that the optical path length is formed to correspond to the sum of the optical path length of the optical path length and the reference mirror side member of the base member of the back reflector .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010066168A JP5574226B2 (en) | 2010-03-23 | 2010-03-23 | Interference objective lens and microscope apparatus having the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010066168A JP5574226B2 (en) | 2010-03-23 | 2010-03-23 | Interference objective lens and microscope apparatus having the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011197534A JP2011197534A (en) | 2011-10-06 |
| JP2011197534A5 true JP2011197534A5 (en) | 2013-04-25 |
| JP5574226B2 JP5574226B2 (en) | 2014-08-20 |
Family
ID=44875783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010066168A Active JP5574226B2 (en) | 2010-03-23 | 2010-03-23 | Interference objective lens and microscope apparatus having the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5574226B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5786270B2 (en) * | 2013-03-06 | 2015-09-30 | 株式会社東京精密 | Two-color interference measuring device |
| WO2016084239A1 (en) * | 2014-11-28 | 2016-06-02 | 株式会社東京精密 | Two-color interference measurement device |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8304213A (en) * | 1983-12-07 | 1985-07-01 | Philips Nv | SINGLE LENS WITH AN ASPHERIC SURFACE. |
| JPH0524163Y2 (en) * | 1987-08-24 | 1993-06-21 | ||
| JP2520950Y2 (en) * | 1988-03-11 | 1996-12-18 | 株式会社ニコン | Objective lens for two-beam interference |
| JPH05288992A (en) * | 1992-04-15 | 1993-11-05 | Laser Tec Kk | Transmission type microscope |
| JP3210111B2 (en) * | 1992-12-24 | 2001-09-17 | キヤノン株式会社 | Displacement detector |
| JP3587562B2 (en) * | 1994-07-18 | 2004-11-10 | オリンパス株式会社 | Interference microscope |
| JP3672951B2 (en) * | 1994-12-13 | 2005-07-20 | オリンパス株式会社 | Image display device |
| JP2009015180A (en) * | 2007-07-09 | 2009-01-22 | Nikon Corp | Interference objective lens |
| JP2009236655A (en) * | 2008-03-27 | 2009-10-15 | Nikon Corp | Displacement detecting apparatus, exposure apparatus, and device manufacturing method |
-
2010
- 2010-03-23 JP JP2010066168A patent/JP5574226B2/en active Active
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