JP2011194561A - Chamfering device for disk-like workpiece - Google Patents

Chamfering device for disk-like workpiece Download PDF

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Publication number
JP2011194561A
JP2011194561A JP2010251142A JP2010251142A JP2011194561A JP 2011194561 A JP2011194561 A JP 2011194561A JP 2010251142 A JP2010251142 A JP 2010251142A JP 2010251142 A JP2010251142 A JP 2010251142A JP 2011194561 A JP2011194561 A JP 2011194561A
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chamfering
workpiece
grindstone
disk
shaft
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Takahiro Ueda
貴大 上田
Koichi Okuwa
幸一 大桑
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Nakamura Tome Precision Industry Co Ltd
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Nakamura Tome Precision Industry Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • B24B9/107Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass for glass plates while they are turning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/10Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14Zonally-graded wheels; Composite wheels comprising different abrasives

Abstract

PROBLEM TO BE SOLVED: To eliminate secondary grinding after chamfering by minimizing the occurrence of chipping generated at corners between chamfering faces and front and rear surfaces in a chamfering device for outer peripheral corners of a disk-like workpiece formed of a hard and brittle material.SOLUTION: The chamfering device for a disk-like workpiece includes upper and lower cup-like grinding wheels slidingly rubbing the outer peripheral corners on the upper surface side and the lower surface side of the disk-like workpiece held by a vertical rotary workpiece shaft, upper and lower chamfering grinding wheel shafts mounted with the upper and lower grinding wheels, and grinding wheel motors rotationally driving the grinding wheel shafts. The upper and lower grinding wheel shafts are arranged in a direction obliquely crossing three-dimensionally with an axis of the workpiece shaft so that peripheral edges of the upper and lower grinding wheels mounted thereon contact the upper and lower chamfering faces of the disk-like workpiece at one position respectively. The grinding wheel motors rotationally drive the grinding wheels toward the rotational direction with which both of the slindingly rubbing direction of the upper and lower grinding wheels at contact positions between the grinding wheels and the disk-like workpiece become the direction directed from the inner side to the outer side of the disk-like workpiece.

Description

この発明は、HDD(ハードディスクドライブ)の記録媒体として広く用いられているガラスやセラミックスなどの硬質脆性材料からなる円盤状ワークの外周角の面取加工装置に関するものである。   The present invention relates to a chamfering device for an outer peripheral angle of a disk-shaped workpiece made of a hard brittle material such as glass or ceramics, which is widely used as a recording medium for HDD (Hard Disk Drive).

HDDの記録媒体として用いる円盤状のワークは、高い記録密度と安定した高速回転を実現するために、情報の記録面となる表裏面の高い面精度が要求されると共に、その外周部の加工においても、高い加工精度が要求される。従来、この種円盤状ワークの表裏面は、2回の研削加工(ラッピング)とその後の仕上げ研磨とによって加工されており、外周部は、外周研削と面取加工とによって加工されている。その一般的な加工順序は、表裏面の1次研削を行ったあと、外周研削と面取を行い、そのあと表裏面の2次研削を行って研磨仕上げするというものである。   In order to realize high recording density and stable high-speed rotation, disk-shaped workpieces used as HDD recording media require high surface accuracy on the front and back surfaces that serve as information recording surfaces. However, high processing accuracy is required. Conventionally, the front and back surfaces of this kind of disk-shaped workpiece have been processed by two times of grinding (lapping) and subsequent finish polishing, and the outer peripheral portion has been processed by outer peripheral grinding and chamfering. The general processing order is to perform primary grinding on the front and back surfaces, then perform peripheral grinding and chamfering, and then perform secondary grinding on the front and back surfaces to finish polishing.

外周角(表裏面と外周面との間の稜線)の面取加工は、従来、図8に示すように、総形砥石6を用いて行っている。すなわち、加工しようとする円盤状ワーク1を鉛直方向の回転ワーク軸11の上端に水平に保持してその軸心回りに回転し、当該ワーク軸11と平行な面取砥石軸61に装着した総形砥石6を回転させて、砥石の外周に設けた台形溝65に円盤状ワーク1の外周部を挿入することにより、上下の外周角を同時に面取するというものである。この場合の円盤状ワーク1の面取面16における砥石6の摺擦方向は、図9に矢印dで示すように、円盤状ワーク1の円の接線方向である。   The chamfering of the outer peripheral angle (ridge line between the front and rear surfaces and the outer peripheral surface) is conventionally performed using a general-purpose grindstone 6 as shown in FIG. That is, the disc-like workpiece 1 to be machined is held horizontally at the upper end of the rotating workpiece shaft 11 in the vertical direction and rotated around its axis, and is attached to the chamfering grindstone shaft 61 parallel to the workpiece shaft 11. The upper and lower outer peripheral angles are chamfered simultaneously by rotating the shaped grindstone 6 and inserting the outer peripheral portion of the disc-like workpiece 1 into a trapezoidal groove 65 provided on the outer periphery of the grindstone. In this case, the rubbing direction of the grindstone 6 on the chamfered surface 16 of the disc-shaped workpiece 1 is a tangential direction of the circle of the disc-shaped workpiece 1 as indicated by an arrow d in FIG.

硬質脆性板の研削においては、研削面とこれに隣接する面との角の部分に微少な割れや欠け(チッピング)が発生する。図8に示した従来の面取加工においては、面取面16と情報の記録面となる表裏面17との間の角18に50ミクロン程度のチッピングが発生する可能性があった。このチッピングは、前述した2次研削加工の研削代と研磨代とからなる取り代を60ミクロン程度とすることで除去していた。   In grinding a hard brittle plate, minute cracks and chips (chipping) occur at the corners between the ground surface and the adjacent surface. In the conventional chamfering process shown in FIG. 8, there is a possibility that chipping of about 50 microns occurs at a corner 18 between the chamfered surface 16 and the front and back surfaces 17 which are information recording surfaces. This chipping has been removed by setting the machining allowance consisting of the grinding allowance and polishing allowance of the above-described secondary grinding process to about 60 microns.

特開2005−271105号公報JP-A-2005-271105

円盤状ワークの生産性を向上させ、円盤状ワークをより安価に提供できるようにするために、円盤状ワークの加工工程の短縮化が要望されている。例えば、上記の加工において、研削加工を1工程にできないかという要望がある。2次研削加工を省略して面取加工のあと直ちに研磨仕上を行うことができれば、円盤状ワークの加工工程を大幅に短縮できる。   In order to improve the productivity of the disk-shaped workpiece and to provide the disk-shaped workpiece at a lower cost, there is a demand for shortening the machining process of the disk-shaped workpiece. For example, in the above processing, there is a demand for whether grinding can be performed in one step. If the secondary grinding process is omitted and the polishing finish can be performed immediately after the chamfering process, the machining process of the disk-shaped workpiece can be greatly shortened.

また、従来の面取加工用の総形砥石6は、金属ベース上にダイヤモンド砥粒を電着してなる砥石であり、砥石が摩耗したときには、砥石6自体の交換が必要であった。また、総形砥石であり、砥石軸61とワーク軸11が平行であるために、砥石とワークの接触線が長く、かつ円盤状の表裏の角を同時に加工するため、加工負荷も大きいという問題があった。   Further, the conventional grindstone 6 for chamfering is a grindstone formed by electrodepositing diamond abrasive grains on a metal base. When the grindstone is worn, it is necessary to replace the grindstone 6 itself. In addition, since this is a general-purpose grindstone, and the grindstone shaft 61 and the workpiece shaft 11 are parallel, the contact line between the grindstone and the workpiece is long, and the disk-shaped front and back corners are simultaneously machined. was there.

この発明は、これらの問題を解決するためになされたもので、面取面16と情報の記録面となる表裏面17との間の角18に生ずるチッピングの発生を可及的に防止することにより、面取加工後の2次研削加工を省略できるようにすることを第一の課題としている。   The present invention has been made to solve these problems, and to prevent as much as possible the occurrence of chipping at the corner 18 between the chamfered surface 16 and the front and back surfaces 17 serving as information recording surfaces. Therefore, the first problem is to enable the secondary grinding after chamfering to be omitted.

また、加工負荷が小さく、かつ砥石が摩耗したときにも砥石の交換をすることなく、砥石と円盤状ワークとの相対位置の調整によって高精度の加工形状を維持できる円盤状ワークの面取装置を得ることを課題としている。   In addition, a chamfering device for a disk-shaped workpiece that can maintain a highly accurate machining shape by adjusting the relative position of the grinding wheel and the disk-shaped workpiece without changing the grinding wheel even when the processing load is small and the wheel is worn. The challenge is to obtain.

この出願の発明に係る円盤状ワークの面取装置は、軸心を鉛直方向にして設けられた回転ワーク軸11と、当該ワーク軸11の上端に設けられて加工しようとする円盤状ワーク1を水平に保持するワークホルダ12と、当該ワークホルダ12で保持された円盤状ワーク1の外周角を摺擦するカップ状の面取砥石2と、この面取砥石を装着した砥石軸21と、この砥石軸を回転駆動する砥石モータ23とを備えている。   The disk-shaped workpiece chamfering apparatus according to the invention of this application includes a rotating workpiece shaft 11 provided with an axial center in a vertical direction, and a disk-shaped workpiece 1 provided at the upper end of the workpiece shaft 11 to be machined. A work holder 12 held horizontally, a cup-shaped chamfering grindstone 2 for rubbing the outer peripheral angle of the disc-shaped work 1 held by the work holder 12, a grindstone shaft 21 equipped with the chamfering grindstone, And a grindstone motor 23 that rotationally drives the grindstone shaft.

面取砥石軸21は、これに装着した面取砥石2の周縁が円盤状ワーク1の外周角の一箇所で接触するように、ワーク軸11の軸心と斜めに立体交差する方向で設けられている。例えば、面取砥石軸21は、ワーク軸11の軸心を含む面pから一方の側に偏倚させかつ当該面と平行な面s内で軸心を斜めにして設けられている。   The chamfering grindstone shaft 21 is provided in a direction obliquely intersecting with the axis of the work shaft 11 so that the peripheral edge of the chamfering grindstone 2 mounted on the chamfering grindstone 2 is in contact with the outer peripheral angle of the disc-shaped work 1. ing. For example, the chamfering grindstone shaft 21 is provided so as to be biased to one side from the surface p including the axis of the work shaft 11 and to be inclined in the plane s parallel to the surface.

砥石モータ23は、面取砥石2と円盤状ワーク1との接触箇所における面取砥石2の摺擦方向dが円盤状ワーク1の内側から外側へと向かう方向、すなわち面取砥石2の外周が円盤状ワーク1の面取面16を表裏面17側から外周面15側へと移動する方向となるように、面取砥石2を回転駆動する。   The grindstone motor 23 has a direction in which the rubbing direction d of the chamfering grindstone 2 at the contact point between the chamfering grindstone 2 and the disc-shaped workpiece 1 is directed from the inside to the outside of the disc-shaped workpiece 1, that is, the outer periphery of the chamfering grindstone 2. The chamfering grindstone 2 is rotationally driven so that the chamfered surface 16 of the disc-shaped workpiece 1 moves in the direction from the front and back surface 17 side to the outer peripheral surface 15 side.

面取砥石2は、円盤状ワーク1の上面側の外周角を摺擦する上面取砥石2aと、下面側の外周角を摺擦する下面取砥石2bとを一対にして設けるのが好ましい。上下の面取砥石2a、2bは、円盤状ワークを挟んでその直径方向の両側に配置するか、両者を近接させて片側に配置する。前者の配置によれば、一対の面取砥石2a、2bの加工反力をバランスさせることができる。   The chamfering grindstone 2 is preferably provided with a pair of a top chamfering grindstone 2a that rubs the outer peripheral angle on the upper surface side of the disc-shaped workpiece 1 and a bottom chamfering grindstone 2b that rubs the outer peripheral angle on the lower surface side. The upper and lower chamfering grindstones 2a and 2b are arranged on both sides in the diametrical direction with a disc-shaped workpiece sandwiched therebetween, or are arranged on one side with the two being close to each other. According to the former arrangement, the processing reaction forces of the pair of chamfering grindstones 2a and 2b can be balanced.

上下一対の面取砥石2a、2bを設けたときは、円盤状ワーク1の外周面15を研削する外周砥石5を設けることで、円盤状ワーク1の外周面15と面取面16の加工とを同時に又は連続して行うことができる。外周砥石5は、一対の面取砥石2a、2bが円盤状ワーク1を摺擦する位置a、bを結んだ線の中点と直交する線上に軸心を一致させて設けるのが好ましい。   When the upper and lower pair of chamfering grindstones 2a and 2b are provided, by providing the outer grindstone 5 for grinding the outer circumferential surface 15 of the disc-shaped workpiece 1, the processing of the outer circumferential surface 15 and the chamfered surface 16 of the disc-shaped workpiece 1 can be performed. Can be performed simultaneously or sequentially. The outer peripheral grindstone 5 is preferably provided with its axis aligned on a line perpendicular to the midpoint of the line connecting the positions a and b where the pair of chamfering grindstones 2a and 2b rub the disc-like workpiece 1.

一対の面取砥石2a、2bを円盤状ワーク1の片側に近接させて設けたときは、外周砥石5の配置位置は、円盤状ワーク1を挟んで面取砥石2a、2bと対向する位置とする。これにより、面取砥石2の加工反力と外周砥石5の加工反力をバランスさせることができる。   When the pair of chamfering grindstones 2a and 2b are provided close to one side of the disc-shaped workpiece 1, the position of the outer peripheral grindstone 5 is the position facing the chamfering grindstones 2a and 2b with the disc-shaped workpiece 1 sandwiched therebetween. To do. Thereby, the processing reaction force of the chamfering grindstone 2 and the processing reaction force of the outer peripheral grindstone 5 can be balanced.

この発明の面取装置では、砥石2が円盤状ワーク1の面取面16を、情報の記録面となる表裏面17から外周面15に向う方向に摺擦して、外周角の面取を行う。これにより、砥石2の摺擦方向dの上流側となる面取面16と表裏面17との間の角18に生ずるチッピングの発生が減少し、砥石が離れて行く方向となる面取面16と外周面15との間の角19におけるチッピングの発生が増大する。外周面側の角19のチッピングは、大きな問題にはならないので、表裏面側の角18のチッピングが減少することによって、2次研削加工を省略することができることによる利益が大きい。   In the chamfering apparatus of the present invention, the grindstone 2 rubs the chamfered surface 16 of the disk-shaped workpiece 1 in the direction from the front and back surfaces 17 serving as the information recording surface toward the outer peripheral surface 15 to chamfer the outer peripheral angle. Do. As a result, the occurrence of chipping at the corner 18 between the chamfering surface 16 on the upstream side in the rubbing direction d of the grindstone 2 and the front and back surfaces 17 is reduced, and the chamfering surface 16 in the direction in which the grindstone moves away. And the occurrence of chipping at the corner 19 between the outer peripheral surface 15 increases. The chipping of the corner 19 on the outer peripheral surface side is not a big problem, so that the advantage of being able to omit the secondary grinding is great by reducing the chipping of the corner 18 on the front and back surfaces side.

また、面取砥石2が円盤状ワーク1の外周角の一箇所のみを摺擦しており、かつその摺擦方向が摺擦長さの短い面取面の幅方向であるため、砥石2に作用する負荷が小さい。更に砥石2が摩耗したときは、その摩耗量に応じてワーク軸11と砥石軸21との位置関係を調整することにより、すなわち砥石が摩耗した分だけ砥石軸21をワーク軸11に近付ける方向に送るか、又は摩耗した分だけ砥石軸21を軸方向にワークに向けて進出させることにより、砥石を交換することなく、高精度の面取加工を行うことができる。   Further, since the chamfering grindstone 2 rubs only at one location on the outer peripheral angle of the disk-shaped workpiece 1 and the rubbing direction is the width direction of the chamfering surface having a short rubbing length, The acting load is small. Further, when the grindstone 2 is worn, the positional relationship between the work shaft 11 and the grindstone shaft 21 is adjusted according to the amount of wear, that is, the grindstone shaft 21 is moved closer to the work shaft 11 by the amount worn by the grindstone. By feeding or advancing the grindstone shaft 21 toward the workpiece in the axial direction by the amount worn, high-precision chamfering can be performed without exchanging the grindstone.

第1実施例の要部を側方から見た斜視図The perspective view which looked at the principal part of 1st Example from the side 第1実施例の要部の平面図The top view of the principal part of 1st Example カップ状砥石の模式的な断面図Schematic cross-sectional view of a cup-shaped grindstone 面取加工された円盤状ワークの外周部の部分平面図Partial plan view of the outer periphery of a chamfered disc-shaped workpiece 同部分断面図Partial sectional view of the same 第2実施例の要部を示す平面図The top view which shows the principal part of 2nd Example 同側面図Side view 従来の面取加工装置の要部を示す側面図Side view showing the main parts of a conventional chamfering device 従来装置により面取加工された円盤状ワークの外周部の部分拡大平面Partially enlarged plane of the outer periphery of a disk-shaped workpiece chamfered by a conventional device

以下、図面を参照して、この発明の実施例を説明する。図1ないし図4は、上下一対の面取砥石2(2a、2b)を加工対象となる円盤状ワーク1の直径方向の両端の位置に配置した第1実施例を示した図である。5は円盤状ワーク1の外周面15を研削加工する外周砥石である。   Embodiments of the present invention will be described below with reference to the drawings. 1 to 4 are views showing a first embodiment in which a pair of upper and lower chamfering grindstones 2 (2a, 2b) are arranged at both ends in the diameter direction of a disk-like workpiece 1 to be machined. Reference numeral 5 denotes an outer peripheral grindstone for grinding the outer peripheral surface 15 of the disk-shaped workpiece 1.

円盤状ワーク1は、鉛直方向のワーク軸11の上端のワークホルダ12に保持されている。ワーク軸11は、図示しない主軸モータで、比較的遅い速度(2〜200rpm)で回転駆動される。上下のカップ状砥石2a、2bは、それぞれ砥石軸21a、21bの先端に装着され、砥石モータ23a、23bにより、図の矢印Ra、Rb方向に比較的高速(5000〜15000rpm)で回転駆動される。   The disk-shaped workpiece 1 is held by a workpiece holder 12 at the upper end of a workpiece shaft 11 in the vertical direction. The work shaft 11 is a spindle motor (not shown) and is driven to rotate at a relatively slow speed (2 to 200 rpm). The upper and lower cup-shaped grindstones 2a and 2b are mounted at the tips of the grindstone shafts 21a and 21b, respectively, and are driven to rotate at relatively high speeds (5000 to 15000 rpm) in the directions indicated by the arrows Ra and Rb by the grindstone motors 23a and 23b. .

上下の砥石モータ23a、23bは、図示しない上下の砥石台にそれぞれ搭載されており、これらの砥石台は、NC制御される図示しない送りモータ及び送りねじにより、砥石軸21a、21bと平行に進退する。砥石台を進出させると、カップ状砥石2のカップの周縁25が円盤状ワーク1の外周角に接触し、当該外周角の面取加工が行われる。面取寸法は、NC装置に設定した砥石台の進出終了位置により決定される。   The upper and lower grinding wheel motors 23a and 23b are respectively mounted on upper and lower grinding wheel bases (not shown). These grinding wheel bases are advanced and retracted in parallel with the grinding wheel shafts 21a and 21b by a feed motor and feed screw (not shown) controlled by NC. To do. When the grindstone is advanced, the peripheral edge 25 of the cup of the cup-shaped grindstone 2 comes into contact with the outer peripheral angle of the disc-shaped workpiece 1 and the chamfering of the outer peripheral angle is performed. The chamfer dimension is determined by the advance end position of the grindstone table set in the NC device.

砥石軸21a、21bの軸心は、同一の鉛直面s上に配置されており、この砥石軸配置面sは、ワーク軸11の軸心を含む面pと平行で、かつ距離eだけ偏倚している。砥石軸21a、21bは、砥石軸配置面s上で45度傾斜した角度で配置されている。その結果、図3に示すカップ状砥石2の周縁25は、図2の平面視で円盤状ワーク1の外周とカップ状砥石2a、2bの周縁25の楕円弧とが交差する2点の内のワーク軸配置面pに近い側の点である一箇所a、bで円盤状ワーク1の外周角に接触する。   The axes of the grindstone shafts 21a and 21b are arranged on the same vertical plane s, and this grindstone shaft arrangement plane s is parallel to the plane p including the axis of the work shaft 11 and is offset by a distance e. ing. The grindstone shafts 21a and 21b are arranged at an angle of 45 degrees on the grindstone shaft arrangement surface s. As a result, the peripheral edge 25 of the cup-shaped grindstone 2 shown in FIG. 3 is a work at two points where the outer periphery of the disc-shaped work 1 and the elliptical arc of the peripheral edge 25 of the cup-shaped grindstones 2a and 2b intersect in the plan view of FIG. The outer peripheral angle of the disk-shaped workpiece 1 is brought into contact at one point a, b which is a point on the side close to the shaft arrangement surface p.

そして、カップ状砥石2a、2bの回転方向が図1に矢印Ra、Rbで示す方向であることから、この接触箇所a、bにおいて、カップ状砥石の周縁25は、図4の矢印dで示すように、円盤状ワーク1の内側から外側に向けて円盤状ワーク1の外周角を摺擦する。すなわち、円盤状ワーク1の面取面16は、図4、5に示すように、ワークの表裏面17側から外周面15側へと弧状に走行する砥石周縁25によって研削される。   And since the rotation direction of the cup-shaped grindstones 2a and 2b is the direction indicated by arrows Ra and Rb in FIG. 1, the peripheral edge 25 of the cup-shaped grindstone is indicated by the arrow d in FIG. In this way, the outer peripheral angle of the disc-like workpiece 1 is rubbed from the inside to the outside of the disc-like workpiece 1. That is, as shown in FIGS. 4 and 5, the chamfered surface 16 of the disk-shaped workpiece 1 is ground by the grindstone peripheral edge 25 that travels in an arc shape from the front and back surfaces 17 side of the workpiece to the outer peripheral surface 15 side.

図3に例示したカップ状砥石2は、その周縁部分の内側と外側とが粒度の異なる砥石25iと25eで形成されたいわゆるマルチ砥石で、砥石軸21の傾斜角を変えることにより、粗研削と仕上げ研削とが行われるものである。   The cup-shaped grindstone 2 illustrated in FIG. 3 is a so-called multi grindstone formed by grindstones 25i and 25e having different particle sizes on the inner and outer sides of the peripheral portion thereof. By changing the inclination angle of the grindstone shaft 21, rough grinding is performed. Finish grinding is performed.

外周砥石5は、周面が円筒形の砥石で、ワーク軸11に平行に設けた外周砥石軸51に装着されている。外周砥石軸51は、ワーク軸11に対して接近離隔する図示しない砥石台に軸支されており、回転しながら円盤状ワーク1に接触することによって、円盤状ワーク1の外周面15を研削加工する。この外周面の研削加工は、従来装置と異なる所はない。   The outer peripheral grindstone 5 is a grindstone having a cylindrical peripheral surface, and is attached to an outer peripheral grindstone shaft 51 provided in parallel to the workpiece shaft 11. The outer peripheral grindstone shaft 51 is pivotally supported by a grindstone table (not shown) that approaches and separates from the work shaft 11 and contacts the disk-shaped work 1 while rotating to grind the outer peripheral surface 15 of the disk-shaped work 1. To do. This grinding of the outer peripheral surface is not different from the conventional apparatus.

図6及び7は、上下一対の面取砥石2a、2bを円盤状ワーク1の片側に近接させて配置した第2実施例を示した図で、第1実施例で説明した部材と同一の部材には同一の符号が付してある。面取砥石2a、2bは、第1実施例と同様に砥石モータ23a、23bで回転駆動(5000〜15000rpm)される砥石軸21a、21bに装着されている。   6 and 7 are views showing a second embodiment in which a pair of upper and lower chamfering grindstones 2a and 2b are arranged close to one side of the disk-like workpiece 1, and are the same members as those explained in the first embodiment. Are given the same reference numerals. The chamfering grindstones 2a and 2b are mounted on grindstone shafts 21a and 21b that are rotationally driven (5,000 to 15000 rpm) by the grindstone motors 23a and 23b, as in the first embodiment.

砥石軸21a、21bの軸心は、ワーク軸11の軸心を含む面pと平行でかつ距離eだけ偏倚したそれぞれの砥石軸配置面sa、sbに45度傾斜した角度で配置されている。その結果、上下の面取砥石2a、2bの周縁は、図6の平面視で円盤状ワーク1の外周とカップ状砥石2a、2bの周縁25の楕円弧とが交差する点a、bで円盤状ワーク1の外周角に接触する。   The shaft centers of the grindstone shafts 21a and 21b are arranged at an angle of 45 degrees with respect to the respective grindstone shaft arrangement surfaces sa and sb that are parallel to the surface p including the axis of the workpiece shaft 11 and are offset by the distance e. As a result, the peripheral edges of the upper and lower chamfering grindstones 2a and 2b are disk-shaped at points a and b where the outer periphery of the disc-shaped workpiece 1 and the elliptical arc of the peripheral edge 25 of the cup-shaped grindstones 2a and 2b intersect in the plan view of FIG. It contacts the outer peripheral angle of the workpiece 1.

上下の面取砥石の砥石軸21a、21bは、同一の送り台26にそれぞれの砥石軸の軸方向に進退自在に装着した砥石台24a、24bに軸支されている。一般的には、砥石モータ33としてビルトイン型のモータを用い、当該モータの回転子軸を砥石軸とする。この場合は、砥石モータ23a、23bを砥石台24a、24bに固定することにより、砥石軸21a、21bが砥石台24a、24bに軸支される。   The grindstone shafts 21a and 21b of the upper and lower chamfering grindstones are pivotally supported by grindstone platforms 24a and 24b mounted on the same feed base 26 so as to be able to advance and retreat in the axial direction of the respective grindstone shafts. Generally, a built-in type motor is used as the grindstone motor 33, and the rotor shaft of the motor is a grindstone shaft. In this case, the grindstone shafts 21a and 21b are pivotally supported by the grindstone platforms 24a and 24b by fixing the grindstone motors 23a and 23b to the grindstone platforms 24a and 24b.

送り台26をワーク軸11に向けて進出させることにより、面取砥石2a、2bの周縁25が円盤状ワーク1の上下の外周角に同時に接触する。砥石モータ23a、23bが面取砥石2a、2bを図の矢印Ra、Rbで示す方向に回転駆動している関係上、第1実施例と同様に、上下の面取砥石2a、2bは、円盤状ワーク1の上下の外周角を内側から外側へと摺擦して、当該外周角の面取加工を行う。   By moving the feed base 26 toward the workpiece shaft 11, the peripheral edges 25 of the chamfering grindstones 2 a and 2 b simultaneously contact the upper and lower outer peripheral angles of the disk-shaped workpiece 1. The upper and lower chamfering stones 2a and 2b are discs as in the first embodiment because the grindstone motors 23a and 23b rotate and drive the chamfering grindstones 2a and 2b in the directions indicated by the arrows Ra and Rb. The upper and lower outer peripheral angles of the workpiece 1 are rubbed from the inner side to the outer side to chamfer the outer peripheral angle.

上下の面取面16の寸法は、送り台26の進出位置(ワーク軸11側への移動終了位置)によって設定される。面取砥石が摩耗したときの補正は、上下の砥石2a、2bの摩耗量が等しければ、送り台26の進出位置の補正により補正できるが、上下の砥石2a、2bりの摩耗量が異なるときは、それぞれの砥石を軸支している砥石台24a、24bの砥石軸方向の進出位置を補正することにより補正する。   The dimensions of the upper and lower chamfered surfaces 16 are set by the advance position of the feed base 26 (movement end position toward the work shaft 11). The correction when the chamfering wheel is worn can be corrected by correcting the advance position of the feed base 26 if the wear amount of the upper and lower grindstones 2a and 2b is equal, but when the wear amount of the upper and lower grindstones 2a and 2b is different. Is corrected by correcting the advancing position in the wheel axis direction of the wheel heads 24a and 24b supporting the respective wheels.

以上説明したように、この発明の面取装置は、面取砥石2の周縁25がワーク軸11に保持された円盤状ワーク1の外周角に一箇所で接触し、当該接触箇所における面取砥石の摺擦方向が円盤状ワーク1の内側から外側に向う方向となるように、砥石軸21の位置及び砥石モータ23の回転方向が設定されている。   As described above, in the chamfering device of the present invention, the peripheral edge 25 of the chamfering grindstone 2 contacts the outer peripheral angle of the disc-shaped workpiece 1 held by the workpiece shaft 11 at one location, and the chamfering grindstone at the contact location is provided. The position of the grindstone shaft 21 and the direction of rotation of the grindstone motor 23 are set so that the rubbing direction of the disc becomes a direction from the inside to the outside of the disc-shaped workpiece 1.

このように、円盤状ワークの外周角を砥石で内側から外側へと摺擦して面取を行うと、加工された面取面16と情報の記録面となる円盤状ワークの表裏面17との間の角18におけるチッピングの発生を防止することができ、従来行われていた表裏面17の2次研削加工を省略して、表裏面の1次研削加工、外周加工及び面取加工並びに仕上研磨の3工程で円盤状ワークの研削・研磨を行うことができ、加工工程の大幅な短縮が可能になる。   Thus, when chamfering is performed by rubbing the outer peripheral angle of the disk-shaped workpiece from the inside to the outside with a grindstone, the processed chamfered surface 16 and the front and back surfaces 17 of the disk-shaped workpiece serving as an information recording surface Chipping at the corner 18 between the front and back surfaces can be prevented, and the conventional secondary grinding of the front and back surfaces 17 can be omitted, and the primary grinding, outer periphery and chamfering and finishing of the front and back surfaces can be omitted. The disk-like workpiece can be ground and polished in the three polishing steps, and the machining process can be greatly shortened.

1 円盤状ワーク
2a、2b カップ状の面取砥石
11 ワーク軸
12 ワークホルダ
16 面取面
17 表裏面
18 角
21 砥石軸
23 砥石モータ
a、b ワークと面取砥石の接触箇所
d 面取砥石の摺擦方向
p ワーク軸の軸心を含む面
Ra、Rb 面取砥石の回転方向
s 砥石軸の配置面
DESCRIPTION OF SYMBOLS 1 Disc shaped workpiece 2a, 2b Cup-shaped chamfering grindstone 11 Work shaft 12 Work holder 16 Chamfering surface 17 Front and back surface 18 Angle 21 Grinding wheel shaft 23 Grinding wheel motor a, b Contact part of workpiece and chamfering grindstone d Sliding direction p Surface including axis of workpiece axis Ra, Rb Rotating direction of chamfering grindstone s Arrangement surface of grindstone shaft

Claims (4)

軸心を鉛直方向にして設けられた回転ワーク軸と、当該ワーク軸の上端に設けられて円盤状ワークを水平に保持するワークホルダと、当該ワークホルダで保持された円盤状ワークの外周角を摺擦する面取砥石と、当該面取砥石の砥石軸を回転駆動する砥石モータとを備えた円盤状ワークの面取装置において、
前記砥石軸が、これに装着したカップ状の面取砥石の周縁が前記円盤状ワークの外周角の一箇所に接触するように前記ワーク軸の軸心と立体交差する方向で設けられ、
前記砥石モータが、面取砥石の周縁と円盤状ワークとの接触箇所における面取砥石の摺擦方向が円盤状ワークの内側から外側へと向かう方向となる回転方向に、面取砥石を回転駆動することを特徴とする、
円盤状ワークの面取装置。
A rotating work shaft provided with the shaft center in the vertical direction, a work holder provided at the upper end of the work shaft to hold the disc-shaped work horizontally, and an outer peripheral angle of the disk-shaped work held by the work holder. In a chamfering device for a disk-shaped workpiece, comprising a chamfering grindstone for rubbing and a grindstone motor for rotationally driving a grindstone shaft of the chamfering grindstone,
The grindstone shaft is provided in a direction that three-dimensionally intersects with the axis of the workpiece shaft so that the peripheral edge of the cup-shaped chamfering grindstone mounted on the grindstone shaft contacts one location of the outer peripheral angle of the disc-shaped workpiece,
The grinding wheel motor drives the chamfering grindstone in a rotational direction in which the rubbing direction of the chamfering grindstone at the contact point between the peripheral edge of the chamfering grindstone and the disc-shaped workpiece is directed from the inside to the outside of the disc-shaped workpiece. It is characterized by
A chamfering device for disk-shaped workpieces.
前記面取砥石の砥石軸が、ワーク軸の軸心を含む面の一方の側に偏倚して、かつ当該面と平行な面内で、軸心をワーク軸に対して斜めにして設けられている、請求項1記載の円盤状ワークの面取装置。   The grindstone axis of the chamfering grindstone is biased to one side of the surface including the axis of the workpiece axis, and the axis is provided obliquely with respect to the workpiece axis in a plane parallel to the surface. The disc-shaped workpiece chamfering device according to claim 1. 円盤状ワークの上下の外周角をそれぞれ面取りする上下一対の面取砥石を備え、当該一対の面取砥石が、ワーク軸に保持された円盤状ワークの直径方向の両端の位置で当該ワークを摺擦するように配置されている、請求項1又は2記載の円盤状ワークの面取装置。   A pair of upper and lower chamfering wheels that chamfer the upper and lower outer peripheral angles of the disk-shaped workpiece are provided, and the pair of chamfering wheels slide the workpiece at positions at both ends in the diameter direction of the disk-shaped workpiece held on the workpiece shaft. The disk-shaped workpiece chamfering device according to claim 1 or 2, which is arranged to rub. 円盤状ワークの上下の外周角をそれぞれ面取りする上下一対の面取砥石を備え、当該一対の面取砥石が、ワーク軸に保持された円盤状ワークの直径方向の片側の近接した位置で当該ワークを摺擦するように配置され、当該ワークの外周面を研削する外周砥石が、一対の面取砥石と当該ワークを挟んで対向する位置に配置されている、請求項1又は2記載の円盤状ワークの面取装置。   A pair of upper and lower chamfering grindstones that chamfer the upper and lower outer peripheral angles of the disc-shaped workpiece, respectively, and the pair of chamfering grindstones are located close to each other on one side in the diameter direction of the disc-shaped workpiece held by the workpiece shaft. The disk-like shape according to claim 1 or 2, wherein an outer peripheral grindstone for grinding the outer peripheral surface of the workpiece is disposed at a position facing the pair of chamfering grindstones with the workpiece interposed therebetween. Work chamfering device.
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014226767A (en) * 2013-05-27 2014-12-08 株式会社東京精密 Wafer chamfer device and wafer chamfer method
CN105479281A (en) * 2016-01-25 2016-04-13 张家港市金采阳机械有限公司 Polisher provided with hard alloy wheel
CN105965342A (en) * 2016-05-10 2016-09-28 天津北玻玻璃工业技术有限公司 Process for grinding double bevel edges of glass
CN105965343A (en) * 2016-05-10 2016-09-28 天津北玻玻璃工业技术有限公司 Equipment for grinding double bevel edges of glass
JP2019072788A (en) * 2017-10-13 2019-05-16 オリンパス株式会社 Processing method, processing device and grindstone
CN115026693A (en) * 2022-06-15 2022-09-09 深圳顺络电子股份有限公司 Automatic polishing equipment and automatic polishing method for precision test assembly

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101985219B1 (en) * 2012-05-07 2019-06-03 신에쯔 한도타이 가부시키가이샤 Circumferential polishing device for disc-shaped workpieces
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760624A (en) * 1993-07-29 1995-03-07 Wacker Chemitronic Ges Elektron Grundstoffe Mbh Method of polishing edge of semiconductor disk
JP2003145398A (en) * 2001-11-15 2003-05-20 Systemseiko Co Ltd Disc workpiece grinding method and device
JP2004050345A (en) * 2002-07-19 2004-02-19 Hitachi Zosen Corp Processing device for outer periphery of thin plate-like work
JP2008264941A (en) * 2007-04-20 2008-11-06 Yuhi Denshi Kk Device and method for polishing disc-shaped workpiece

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2180404Y (en) * 1993-08-03 1994-10-26 华南理工大学 Glass edge grinder
JP2000218482A (en) * 1999-01-28 2000-08-08 Daido Steel Co Ltd Paper sheet type end face polsher
JP5020603B2 (en) * 2006-11-15 2012-09-05 ショーダテクトロン株式会社 Glass substrate chamfering equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760624A (en) * 1993-07-29 1995-03-07 Wacker Chemitronic Ges Elektron Grundstoffe Mbh Method of polishing edge of semiconductor disk
JP2003145398A (en) * 2001-11-15 2003-05-20 Systemseiko Co Ltd Disc workpiece grinding method and device
JP2004050345A (en) * 2002-07-19 2004-02-19 Hitachi Zosen Corp Processing device for outer periphery of thin plate-like work
JP2008264941A (en) * 2007-04-20 2008-11-06 Yuhi Denshi Kk Device and method for polishing disc-shaped workpiece

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014226767A (en) * 2013-05-27 2014-12-08 株式会社東京精密 Wafer chamfer device and wafer chamfer method
CN105479281A (en) * 2016-01-25 2016-04-13 张家港市金采阳机械有限公司 Polisher provided with hard alloy wheel
CN105965342A (en) * 2016-05-10 2016-09-28 天津北玻玻璃工业技术有限公司 Process for grinding double bevel edges of glass
CN105965343A (en) * 2016-05-10 2016-09-28 天津北玻玻璃工业技术有限公司 Equipment for grinding double bevel edges of glass
CN105965342B (en) * 2016-05-10 2019-02-05 天津北玻玻璃工业技术有限公司 Glass double bevel edging technique
JP2019072788A (en) * 2017-10-13 2019-05-16 オリンパス株式会社 Processing method, processing device and grindstone
CN115026693A (en) * 2022-06-15 2022-09-09 深圳顺络电子股份有限公司 Automatic polishing equipment and automatic polishing method for precision test assembly

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