JP2011181837A - 光電変換装置 - Google Patents
光電変換装置 Download PDFInfo
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
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Abstract
【解決手段】本発明は、少なくとも光電変換ユニットと、裏面透明導電層と、島状の低屈折率材料と、裏面金属電極層とをこの順に有する光電変換装置であって、前記低屈折率材料の厚みが1nm以上10nm以下であることを特徴とする光電変換装置である。
【選択図】図1
Description
(1)少なくとも光電変換ユニットと、裏面透明導電層と、島状の低屈折率材料と、裏面金属電極層とをこの順に有する光電変換装置であって、前記低屈折率材料の厚みが1nm以上10nm以下であることを特徴とする光電変換装置。
(2)前記低屈折率材料が、LiFを含み、かつ厚みが1nm以上10nm以下であることを特徴とする(1)に記載の光電変換装置。
(3)前記低屈折率材料が、MgF2を含み、かつ厚みが1nm以上5nm未満であることを特徴とする(1)に記載の光電変換装置。
(4)前記裏面透明導電層の表面の30%以上90%以下の部分が、前記低屈折率材料により被覆されていることを特徴とする(1)〜(3)のいずれかに記載の光電変換装置。
(5)前記低屈折率材料が、真空蒸着法により製膜されたものであることを特徴とする(1)〜(4)のいずれかに記載の光電変換装置。
(6)前記裏面透明導電層が、In、Zn、Al、Ga、Bのうち少なくとも一つを構成元素に含む酸化物から構成されることを特徴とする(1)〜(5)のいずれかに記載の光電変換装置。
J.Krc et al.,Progress in Photovoltaics 11(2003)15.
プラズマ・核融合学会誌 84(2008)10.
図1に示した構造の光電変換装置を以下に示す方法で製造した。絶縁性透光性基板1には、無アルカリガラス基板を使用した。光入射側透明電極層2には熱CVD法により作製したSnO2を用いた。この際の透明電極層2の膜厚は800nm、シート抵抗は10Ω/□、ヘーズは15〜20%とした。
低屈折率材料の形成工程を含まないことを除いて実施例1と同様にして作製した。
LiFの製膜時間を1100秒間としたこと除いて実施例1と同様にして作製した。
LiFの形成方法が高周波マグネトロンスパッタ法である点を除いて実施例1と同様にして作製した。すなわち、LiFの製膜は、100mmφのLiFターゲット(高純度化学製、純度99.9%)を使用し、Ar雰囲気下で、圧力を8Pa、高周波電力を300W、基板温度を150℃、製膜時間をそれぞれ400秒(比較例3)、800秒(比較例4)、1200秒(比較例5)として行った。このときの製膜速度は0.01nm/秒であった。
低屈折率材料としてMgF2を用い、製膜方法として電子ビーム蒸着法を用いたことを除いて実施例2と同様にして作製した。なお、MgF2の屈折率は1.39であった。なお、このMgF2の製膜方法は特許文献2に記載の方法に準拠した方法とした。
2 光入射側透明導電層
3 前方光電変換ユニット
4 後方光電変換ユニット
5 裏面透明導電層
6 低屈折率材料
7 裏面金属電極層
Claims (6)
- 少なくとも光電変換ユニットと、裏面透明導電層と、島状の低屈折率材料と、裏面金属電極層とをこの順に有する光電変換装置であって、前記低屈折率材料の厚みが1nm以上10nm以下であることを特徴とする光電変換装置。
- 前記低屈折率材料が、LiFを含み、かつ厚みが1nm以上10nm以下であることを特徴とする請求項1に記載の光電変換装置。
- 前記低屈折率材料が、MgF2を含み、かつ厚みが1nm以上5nm未満であることを特徴とする請求項1に記載の光電変換装置。
- 前記裏面透明導電層の表面の30%以上90%以下の部分が、前記低屈折率材料により被覆されていることを特徴とする請求項1〜3のいずれかに記載の光電変換装置。
- 前記低屈折率材料が、真空蒸着法により製膜されたものであることを特徴とする請求項1〜4のいずれかに記載の光電変換装置。
- 前記裏面透明導電層が、In、Zn、Al、Ga、Bのうち少なくとも一つを構成元素に含む酸化物から構成されることを特徴とする請求項1〜5のいずれかに記載の光電変換装置。
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPWO2013065557A1 (ja) * | 2011-11-01 | 2015-04-02 | 三菱電機株式会社 | 薄膜太陽電池セルおよびその製造方法、集積型薄膜太陽電池 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07321362A (ja) * | 1994-05-24 | 1995-12-08 | Sanyo Electric Co Ltd | 光起電力装置 |
JP2003298088A (ja) * | 2002-04-02 | 2003-10-17 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置 |
JP2007266095A (ja) * | 2006-03-27 | 2007-10-11 | Mitsubishi Heavy Ind Ltd | 光電変換セル、光電変換モジュール、光電変換パネルおよび光電変換システム |
WO2010004811A1 (ja) * | 2008-07-07 | 2010-01-14 | 三菱電機株式会社 | 薄膜太陽電池およびその製造方法 |
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2010
- 2010-03-03 JP JP2010046907A patent/JP5563850B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07321362A (ja) * | 1994-05-24 | 1995-12-08 | Sanyo Electric Co Ltd | 光起電力装置 |
JP2003298088A (ja) * | 2002-04-02 | 2003-10-17 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置 |
JP2007266095A (ja) * | 2006-03-27 | 2007-10-11 | Mitsubishi Heavy Ind Ltd | 光電変換セル、光電変換モジュール、光電変換パネルおよび光電変換システム |
WO2010004811A1 (ja) * | 2008-07-07 | 2010-01-14 | 三菱電機株式会社 | 薄膜太陽電池およびその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2013065557A1 (ja) * | 2011-11-01 | 2015-04-02 | 三菱電機株式会社 | 薄膜太陽電池セルおよびその製造方法、集積型薄膜太陽電池 |
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