JP2011159623A5 - - Google Patents
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- Publication number
- JP2011159623A5 JP2011159623A5 JP2010279974A JP2010279974A JP2011159623A5 JP 2011159623 A5 JP2011159623 A5 JP 2011159623A5 JP 2010279974 A JP2010279974 A JP 2010279974A JP 2010279974 A JP2010279974 A JP 2010279974A JP 2011159623 A5 JP2011159623 A5 JP 2011159623A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- tantalum
- tungsten
- hafnium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 18
- 239000011248 coating agent Substances 0.000 claims 10
- 238000000576 coating method Methods 0.000 claims 10
- 229910052715 tantalum Inorganic materials 0.000 claims 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 4
- 229910052721 tungsten Inorganic materials 0.000 claims 4
- 239000010937 tungsten Substances 0.000 claims 4
- 229910026551 ZrC Inorganic materials 0.000 claims 2
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims 2
- XSPFOMKWOOBHNA-UHFFFAOYSA-N bis(boranylidyne)tungsten Chemical compound B#[W]#B XSPFOMKWOOBHNA-UHFFFAOYSA-N 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 2
- 229910052735 hafnium Inorganic materials 0.000 claims 2
- MELCCCHYSRGEEL-UHFFFAOYSA-N hafnium diboride Chemical compound [Hf]1B=B1 MELCCCHYSRGEEL-UHFFFAOYSA-N 0.000 claims 2
- -1 hafnium nitride Chemical class 0.000 claims 2
- WHJFNYXPKGDKBB-UHFFFAOYSA-N hafnium;methane Chemical compound C.[Hf] WHJFNYXPKGDKBB-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims 2
- 229910003468 tantalcarbide Inorganic materials 0.000 claims 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 2
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims 2
- 238000005255 carburizing Methods 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000000713 high-energy ball milling Methods 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 238000003825 pressing Methods 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/698,851 | 2010-02-02 | ||
| US12/698,851 US8385506B2 (en) | 2010-02-02 | 2010-02-02 | X-ray cathode and method of manufacture thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011159623A JP2011159623A (ja) | 2011-08-18 |
| JP2011159623A5 true JP2011159623A5 (enExample) | 2014-01-30 |
| JP5719162B2 JP5719162B2 (ja) | 2015-05-13 |
Family
ID=44316218
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010279974A Active JP5719162B2 (ja) | 2010-02-02 | 2010-12-16 | Ｘ線管陰極アセンブリシステム及び、ｘ線管システム |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8385506B2 (enExample) |
| JP (1) | JP5719162B2 (enExample) |
| CN (1) | CN102142346B (enExample) |
| DE (1) | DE102010061584A1 (enExample) |
Families Citing this family (27)
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| US8525411B1 (en) * | 2012-05-10 | 2013-09-03 | Thermo Scientific Portable Analytical Instruments Inc. | Electrically heated planar cathode |
| WO2013184213A2 (en) * | 2012-05-14 | 2013-12-12 | The General Hospital Corporation | A distributed, field emission-based x-ray source for phase contrast imaging |
| DE102012211287B3 (de) * | 2012-06-29 | 2013-10-10 | Siemens Aktiengesellschaft | Verfahren zum Betrieb einer Röntgenröhre |
| DE102012211285B3 (de) * | 2012-06-29 | 2013-10-10 | Siemens Aktiengesellschaft | Röntgenröhre und Verfahren zum Betrieb einer Röntgenröhre |
| US8831178B2 (en) * | 2012-07-03 | 2014-09-09 | General Electric Company | Apparatus and method of manufacturing a thermally stable cathode in an X-ray tube |
| US9202663B2 (en) * | 2012-12-05 | 2015-12-01 | Shimadzu Corporation | Flat filament for an X-ray tube, and an X-ray tube |
| US9048064B2 (en) * | 2013-03-05 | 2015-06-02 | Varian Medical Systems, Inc. | Cathode assembly for a long throw length X-ray tube |
| WO2015004732A1 (ja) * | 2013-07-09 | 2015-01-15 | 株式会社島津製作所 | Ｘ線管装置およびフィラメントの調整方法 |
| US9448327B2 (en) * | 2013-12-16 | 2016-09-20 | Schlumberger Technology Corporation | X-ray generator having multiple extractors with independently selectable potentials |
| US9443691B2 (en) * | 2013-12-30 | 2016-09-13 | General Electric Company | Electron emission surface for X-ray generation |
| EP3134122B1 (en) * | 2014-04-22 | 2020-06-17 | Immunolight, Llc. | Tumor imaging using photon-emitting phosphors having therapeutic properties |
| US9711320B2 (en) | 2014-04-29 | 2017-07-18 | General Electric Company | Emitter devices for use in X-ray tubes |
| US9472371B2 (en) | 2014-09-26 | 2016-10-18 | Varian Medical Systems, Inc. | Filament for X-ray cathode |
| US9711321B2 (en) * | 2014-12-30 | 2017-07-18 | General Electric Company | Low aberration, high intensity electron beam for X-ray tubes |
| CN104735898A (zh) * | 2015-03-30 | 2015-06-24 | 同方威视技术股份有限公司 | 电子帘加速器、反射极以及电子加速方法 |
| DE102015211235B4 (de) * | 2015-06-18 | 2023-03-23 | Siemens Healthcare Gmbh | Emitter |
| CN105070625A (zh) * | 2015-08-18 | 2015-11-18 | 上海宏精医疗器械有限公司 | 一种高效的x射线管装置 |
| US9953797B2 (en) * | 2015-09-28 | 2018-04-24 | General Electric Company | Flexible flat emitter for X-ray tubes |
| EP3226277A1 (en) * | 2016-03-31 | 2017-10-04 | General Electric Company | Angled flat emitter for high power cathode with electrostatic emission control |
| US10991539B2 (en) * | 2016-03-31 | 2021-04-27 | Nano-X Imaging Ltd. | X-ray tube and a conditioning method thereof |
| US10468222B2 (en) | 2016-03-31 | 2019-11-05 | General Electric Company | Angled flat emitter for high power cathode with electrostatic emission control |
| JP6744116B2 (ja) * | 2016-04-01 | 2020-08-19 | キヤノン電子管デバイス株式会社 | エミッター及びｘ線管 |
| US10373792B2 (en) * | 2016-06-28 | 2019-08-06 | General Electric Company | Cathode assembly for use in X-ray generation |
| US10636608B2 (en) * | 2017-06-05 | 2020-04-28 | General Electric Company | Flat emitters with stress compensation features |
| DE102017127372A1 (de) * | 2017-11-21 | 2019-05-23 | Smiths Heimann Gmbh | Anodenkopf für Röntgenstrahlenerzeuger |
| US20200066474A1 (en) * | 2018-08-22 | 2020-02-27 | Modern Electron, LLC | Cathodes with conformal cathode surfaces, vacuum electronic devices with cathodes with conformal cathode surfaces, and methods of manufacturing the same |
| US12046441B2 (en) * | 2021-12-21 | 2024-07-23 | GE Precision Healthcare LLC | X-ray tube cathode focusing element |
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| US3558964A (en) | 1968-10-21 | 1971-01-26 | Gen Electric | High current thermionic hollow cathode lamp |
| US3914639A (en) * | 1974-04-05 | 1975-10-21 | Anthony J Barraco | Heater unit for cathode |
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| RU2008148847A (ru) * | 2006-05-11 | 2010-06-20 | Конинклейке Филипс Электроникс Н.В. (Nl) | Конструкция эмиттера, обеспечивающая аварийный режим работы в случае повреждения эмиттера, предназначенного для медицинского применения рентгеновских лучей |
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| EP1983546A1 (en) * | 2007-04-20 | 2008-10-22 | PANalytical B.V. | X-ray cathode and tube |
| US7627087B2 (en) * | 2007-06-28 | 2009-12-01 | General Electric Company | One-dimensional grid mesh for a high-compression electron gun |
| WO2009013677A1 (en) * | 2007-07-24 | 2009-01-29 | Philips Intellectual Property & Standards Gmbh | Thermionic electron emitter and x-ray source including same |
| US7539286B1 (en) * | 2007-11-19 | 2009-05-26 | Varian Medical Systems, Inc. | Filament assembly having reduced electron beam time constant |
| JP5426089B2 (ja) * | 2007-12-25 | 2014-02-26 | 株式会社東芝 | Ｘ線管及びｘ線ｃｔ装置 |
| US7924983B2 (en) | 2008-06-30 | 2011-04-12 | Varian Medical Systems, Inc. | Thermionic emitter designed to control electron beam current profile in two dimensions |
| US8077829B2 (en) | 2008-09-25 | 2011-12-13 | Varian Medical Systems, Inc. | Electron emitter apparatus and method of assembly |
| US7903788B2 (en) * | 2008-09-25 | 2011-03-08 | Varian Medical Systems, Inc. | Thermionic emitter designed to provide uniform loading and thermal compensation |
| US8027433B2 (en) * | 2009-07-29 | 2011-09-27 | General Electric Company | Method of fast current modulation in an X-ray tube and apparatus for implementing same |
| US8175222B2 (en) | 2009-08-27 | 2012-05-08 | Varian Medical Systems, Inc. | Electron emitter and method of making same |
-
2010
- 2010-02-02 US US12/698,851 patent/US8385506B2/en active Active
- 2010-12-16 JP JP2010279974A patent/JP5719162B2/ja active Active
- 2010-12-27 CN CN201010623682.3A patent/CN102142346B/zh not_active Expired - Fee Related
- 2010-12-27 DE DE102010061584A patent/DE102010061584A1/de not_active Ceased
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