JP2011153325A - 除塵用基板に好適な耐熱性樹脂 - Google Patents

除塵用基板に好適な耐熱性樹脂 Download PDF

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Publication number
JP2011153325A
JP2011153325A JP2011113782A JP2011113782A JP2011153325A JP 2011153325 A JP2011153325 A JP 2011153325A JP 2011113782 A JP2011113782 A JP 2011113782A JP 2011113782 A JP2011113782 A JP 2011113782A JP 2011153325 A JP2011153325 A JP 2011153325A
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Japan
Prior art keywords
resistant resin
heat
substrate
dust removal
compound
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Pending
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JP2011113782A
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English (en)
Japanese (ja)
Inventor
Yoshio Terada
好夫 寺田
Hirofumi Fujii
弘文 藤井
Akira Namikawa
亮 並河
Daisuke Uenda
大介 宇圓田
Yasuhiro Amano
康弘 天野
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Nitto Denko Corp
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Nitto Denko Corp
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Priority to JP2011113782A priority Critical patent/JP2011153325A/ja
Publication of JP2011153325A publication Critical patent/JP2011153325A/ja
Pending legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP2011113782A 2004-10-19 2011-05-20 除塵用基板に好適な耐熱性樹脂 Pending JP2011153325A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011113782A JP2011153325A (ja) 2004-10-19 2011-05-20 除塵用基板に好適な耐熱性樹脂

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004304027 2004-10-19
JP2004304027 2004-10-19
JP2011113782A JP2011153325A (ja) 2004-10-19 2011-05-20 除塵用基板に好適な耐熱性樹脂

Related Parent Applications (1)

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JP2005297735A Division JP4820615B2 (ja) 2004-10-19 2005-10-12 基板処理装置の除塵用基板及びそれを用いた除塵方法

Publications (1)

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JP2011153325A true JP2011153325A (ja) 2011-08-11

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ID=36769292

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JP2011113782A Pending JP2011153325A (ja) 2004-10-19 2011-05-20 除塵用基板に好適な耐熱性樹脂

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JP (1) JP2011153325A (zh)
CN (1) CN100535031C (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2401392T3 (es) * 2006-10-04 2013-04-19 Mitsubishi Gas Chemical Company, Inc. Composiciones de resina de poliimida termocurable de dos partes y producto curado de la misma
JP2020121270A (ja) * 2019-01-30 2020-08-13 日東電工株式会社 クリーニングシートおよびクリーニング機能付搬送部材
JP7270397B2 (ja) * 2019-01-30 2023-05-10 日東電工株式会社 クリーニングシートおよびクリーニング機能付搬送部材
CN112852333A (zh) * 2019-11-12 2021-05-28 山太士股份有限公司 探针清洁片及探针的清洁方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11130858A (ja) * 1997-10-31 1999-05-18 Hitachi Chem Co Ltd ポリイミド、その前駆体、それらの製造法及び感光性樹脂組成物
JP2004211053A (ja) * 2002-06-26 2004-07-29 Hitachi Chem Co Ltd フィルム状接着剤、接着シート及び半導体装置
JP2006096825A (ja) * 2004-09-28 2006-04-13 Hitachi Chem Co Ltd ポリイミド樹脂及びそれを用いた耐熱性樹脂組成物

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11130858A (ja) * 1997-10-31 1999-05-18 Hitachi Chem Co Ltd ポリイミド、その前駆体、それらの製造法及び感光性樹脂組成物
JP2004211053A (ja) * 2002-06-26 2004-07-29 Hitachi Chem Co Ltd フィルム状接着剤、接着シート及び半導体装置
JP2006096825A (ja) * 2004-09-28 2006-04-13 Hitachi Chem Co Ltd ポリイミド樹脂及びそれを用いた耐熱性樹脂組成物

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Publication number Publication date
CN100535031C (zh) 2009-09-02
CN1778830A (zh) 2006-05-31

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