JP2011142150A5 - - Google Patents

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Publication number
JP2011142150A5
JP2011142150A5 JP2010000916A JP2010000916A JP2011142150A5 JP 2011142150 A5 JP2011142150 A5 JP 2011142150A5 JP 2010000916 A JP2010000916 A JP 2010000916A JP 2010000916 A JP2010000916 A JP 2010000916A JP 2011142150 A5 JP2011142150 A5 JP 2011142150A5
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JP
Japan
Prior art keywords
optical system
irradiation object
light
conjugate
illumination optical
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Application number
JP2010000916A
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English (en)
Japanese (ja)
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JP2011142150A (ja
JP5570225B2 (ja
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Priority to JP2010000916A priority Critical patent/JP5570225B2/ja
Priority claimed from JP2010000916A external-priority patent/JP5570225B2/ja
Publication of JP2011142150A publication Critical patent/JP2011142150A/ja
Publication of JP2011142150A5 publication Critical patent/JP2011142150A5/ja
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Publication of JP5570225B2 publication Critical patent/JP5570225B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010000916A 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法 Expired - Fee Related JP5570225B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010000916A JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010000916A JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

Publications (3)

Publication Number Publication Date
JP2011142150A JP2011142150A (ja) 2011-07-21
JP2011142150A5 true JP2011142150A5 (https=) 2013-02-21
JP5570225B2 JP5570225B2 (ja) 2014-08-13

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ID=44457811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010000916A Expired - Fee Related JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

Country Status (1)

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JP (1) JP5570225B2 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622539A (ja) * 1985-06-28 1987-01-08 Canon Inc 照明光学系
JP2002222756A (ja) * 2001-01-26 2002-08-09 Canon Inc 照明装置、露光装置、デバイス製造方法及びデバイス
JP2005303135A (ja) * 2004-04-14 2005-10-27 Canon Inc 明光学装置およびそれを用いた投影露光装置
JP2006344726A (ja) * 2005-06-08 2006-12-21 Mejiro Precision:Kk 照明装置
JP4841624B2 (ja) * 2006-05-12 2011-12-21 大日本スクリーン製造株式会社 照明装置

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