JP5570225B2 - 照明光学系、それを用いた露光装置及びデバイスの製造方法 - Google Patents

照明光学系、それを用いた露光装置及びデバイスの製造方法 Download PDF

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Publication number
JP5570225B2
JP5570225B2 JP2010000916A JP2010000916A JP5570225B2 JP 5570225 B2 JP5570225 B2 JP 5570225B2 JP 2010000916 A JP2010000916 A JP 2010000916A JP 2010000916 A JP2010000916 A JP 2010000916A JP 5570225 B2 JP5570225 B2 JP 5570225B2
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optical system
light
irradiation
illumination
integrator
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JP2011142150A (ja
JP2011142150A5 (https=
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昇 大阪
孝昭 寺師
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Canon Inc
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Canon Inc
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  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2010000916A 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法 Expired - Fee Related JP5570225B2 (ja)

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JP2010000916A JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

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JP2010000916A JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

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JP2011142150A JP2011142150A (ja) 2011-07-21
JP2011142150A5 JP2011142150A5 (https=) 2013-02-21
JP5570225B2 true JP5570225B2 (ja) 2014-08-13

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JP2010000916A Expired - Fee Related JP5570225B2 (ja) 2010-01-06 2010-01-06 照明光学系、それを用いた露光装置及びデバイスの製造方法

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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622539A (ja) * 1985-06-28 1987-01-08 Canon Inc 照明光学系
JP2002222756A (ja) * 2001-01-26 2002-08-09 Canon Inc 照明装置、露光装置、デバイス製造方法及びデバイス
JP2005303135A (ja) * 2004-04-14 2005-10-27 Canon Inc 明光学装置およびそれを用いた投影露光装置
JP2006344726A (ja) * 2005-06-08 2006-12-21 Mejiro Precision:Kk 照明装置
JP4841624B2 (ja) * 2006-05-12 2011-12-21 大日本スクリーン製造株式会社 照明装置

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