JP2011141285A5 - - Google Patents

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Publication number
JP2011141285A5
JP2011141285A5 JP2011023349A JP2011023349A JP2011141285A5 JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5 JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5
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JP
Japan
Prior art keywords
substrate
light
polarization direction
linearly polarized
polarized light
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JP2011023349A
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English (en)
Japanese (ja)
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JP5287891B2 (ja
JP2011141285A (ja
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Priority to JP2011023349A priority Critical patent/JP5287891B2/ja
Priority claimed from JP2011023349A external-priority patent/JP5287891B2/ja
Publication of JP2011141285A publication Critical patent/JP2011141285A/ja
Publication of JP2011141285A5 publication Critical patent/JP2011141285A5/ja
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Publication of JP5287891B2 publication Critical patent/JP5287891B2/ja
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JP2011023349A 2011-02-04 2011-02-04 欠陥検査方法 Expired - Lifetime JP5287891B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011023349A JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011023349A JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004322905A Division JP4901090B2 (ja) 2003-03-26 2004-10-06 欠陥検査方法及び欠陥検出装置

Publications (3)

Publication Number Publication Date
JP2011141285A JP2011141285A (ja) 2011-07-21
JP2011141285A5 true JP2011141285A5 (enExample) 2011-12-22
JP5287891B2 JP5287891B2 (ja) 2013-09-11

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JP2011023349A Expired - Lifetime JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

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JP (1) JP5287891B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9612212B1 (en) 2015-11-30 2017-04-04 Samsung Electronics Co., Ltd. Ellipsometer and method of inspecting pattern asymmetry using the same
KR102368435B1 (ko) * 2017-07-28 2022-03-02 삼성전자주식회사 기판 검사 장치, 기판 검사 방법 및 이를 이용한 반도체 소자의 제조 방법
CN107682693B (zh) * 2017-11-07 2023-07-14 歌尔科技有限公司 一种图像传感器坏点亮点检测装置及检测方法
CN109856155A (zh) * 2019-01-18 2019-06-07 北京兆维电子(集团)有限责任公司 一种基于偏振光的液晶显示屏表面检测装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325805A (ja) * 1997-05-23 1998-12-08 Nikon Corp 半導体ウエハの自動検査装置
JP3982017B2 (ja) * 1997-08-05 2007-09-26 株式会社ニコン 欠陥検査装置
JP4184543B2 (ja) * 1999-06-10 2008-11-19 株式会社日立製作所 光学像検出方法および外観検査装置
JP3769996B2 (ja) * 1999-09-20 2006-04-26 三菱電機株式会社 欠陥検査用半導体基板、半導体基板の検査方法および半導体基板検査用モニター装置
JP4153652B2 (ja) * 2000-10-05 2008-09-24 株式会社東芝 パターン評価装置及びパターン評価方法
JP4183492B2 (ja) * 2002-11-27 2008-11-19 株式会社日立製作所 欠陥検査装置および欠陥検査方法

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