JP2011128438A5 - - Google Patents
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- Publication number
- JP2011128438A5 JP2011128438A5 JP2009287926A JP2009287926A JP2011128438A5 JP 2011128438 A5 JP2011128438 A5 JP 2011128438A5 JP 2009287926 A JP2009287926 A JP 2009287926A JP 2009287926 A JP2009287926 A JP 2009287926A JP 2011128438 A5 JP2011128438 A5 JP 2011128438A5
- Authority
- JP
- Japan
- Prior art keywords
- optical waveguide
- plane
- mirror
- crystal
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000003287 optical effect Effects 0.000 claims description 28
- 239000013078 crystal Substances 0.000 claims description 16
- 239000012792 core layer Substances 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000010410 layer Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000002178 crystalline material Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000011162 core material Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000005253 cladding Methods 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009287926A JP5369301B2 (ja) | 2009-12-18 | 2009-12-18 | 光導波路の製造方法、光導波路及び光送受信装置 |
| US12/969,832 US8532457B2 (en) | 2009-12-18 | 2010-12-16 | Method of manufacturing optical waveguide, optical waveguide and optical transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009287926A JP5369301B2 (ja) | 2009-12-18 | 2009-12-18 | 光導波路の製造方法、光導波路及び光送受信装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011128438A JP2011128438A (ja) | 2011-06-30 |
| JP2011128438A5 true JP2011128438A5 (enExample) | 2012-10-25 |
| JP5369301B2 JP5369301B2 (ja) | 2013-12-18 |
Family
ID=44151238
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009287926A Active JP5369301B2 (ja) | 2009-12-18 | 2009-12-18 | 光導波路の製造方法、光導波路及び光送受信装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8532457B2 (enExample) |
| JP (1) | JP5369301B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8837872B2 (en) * | 2010-12-30 | 2014-09-16 | Qualcomm Incorporated | Waveguide structures for signal and/or power transmission in a semiconductor device |
| WO2013085225A1 (en) * | 2011-12-08 | 2013-06-13 | Lg Innotek Co., Ltd. | Optical printed circuit board and method of manufacturing the same |
| DE102012015209B3 (de) * | 2012-08-03 | 2013-11-28 | Technische Universität Braunschweig Carolo-Wilhelmina | Ringlaserkreisel |
| GB2539598A (en) * | 2014-04-11 | 2016-12-21 | Voxtake Ltd | An automated communication system |
| US9721812B2 (en) * | 2015-11-20 | 2017-08-01 | International Business Machines Corporation | Optical device with precoated underfill |
| CN109239838B (zh) * | 2018-11-13 | 2020-06-19 | 苏州晶方半导体科技股份有限公司 | 一种光波导及其制备方法、光波导系统 |
| TWI851445B (zh) * | 2023-10-12 | 2024-08-01 | 特崴光波導股份有限公司 | 光傳輸模組 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02118607A (ja) | 1988-10-28 | 1990-05-02 | Nec Corp | 光結合回路 |
| JP2986140B2 (ja) * | 1993-12-24 | 1999-12-06 | 日本電気株式会社 | マルチチップモジュール |
| JPH09132500A (ja) * | 1995-11-10 | 1997-05-20 | Sony Corp | 三角錐形状半導体構造とこれを用いた光学素子 |
| JPH10242557A (ja) * | 1997-02-21 | 1998-09-11 | Sony Corp | 半導体発光装置の製造方法 |
| US6937405B2 (en) * | 2000-03-03 | 2005-08-30 | Ricoh Company, Ltd. | Optical pickup projecting two laser beams from apparently approximated light-emitting points |
| JP2003043281A (ja) * | 2001-07-26 | 2003-02-13 | Kyocera Chemical Corp | 光導波回路及びその製造方法 |
| JP3931703B2 (ja) * | 2001-12-27 | 2007-06-20 | 株式会社日立製作所 | 光学素子搭載基板及びその製造方法 |
| GB0201969D0 (en) * | 2002-01-29 | 2002-03-13 | Qinetiq Ltd | Integrated optics devices |
| JP2004069395A (ja) * | 2002-08-02 | 2004-03-04 | Nec Corp | マイクロチップ、マイクロチップの製造方法および成分検出方法 |
| US7110630B2 (en) * | 2003-03-27 | 2006-09-19 | Japan Aviation Electronics Industry Limited | Optical element assembly and method of making the same |
| JP2005195651A (ja) * | 2003-12-26 | 2005-07-21 | Internatl Business Mach Corp <Ibm> | 光接続基板、光伝送システム、及び製造方法 |
| JP2008122475A (ja) * | 2006-11-08 | 2008-05-29 | Nippon Telegr & Teleph Corp <Ntt> | 光導波路、光導波路の作製方法、導波路作製用の金型、および金型の作製方法 |
| JP2008197380A (ja) * | 2007-02-13 | 2008-08-28 | Central Glass Co Ltd | 多チャンネル光路変換素子とその作製方法 |
| US20090041409A1 (en) * | 2007-08-06 | 2009-02-12 | Xyratex Technology Limited | electro-optical printed circuit board and a method of making an electro-optical printed circuit board |
| KR101251028B1 (ko) * | 2008-04-26 | 2013-04-04 | 광주과학기술원 | 광배선 구조물 및 그 제조방법 |
-
2009
- 2009-12-18 JP JP2009287926A patent/JP5369301B2/ja active Active
-
2010
- 2010-12-16 US US12/969,832 patent/US8532457B2/en active Active
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