JP2017523440A5 - - Google Patents

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Publication number
JP2017523440A5
JP2017523440A5 JP2017525303A JP2017525303A JP2017523440A5 JP 2017523440 A5 JP2017523440 A5 JP 2017523440A5 JP 2017525303 A JP2017525303 A JP 2017525303A JP 2017525303 A JP2017525303 A JP 2017525303A JP 2017523440 A5 JP2017523440 A5 JP 2017523440A5
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JP
Japan
Prior art keywords
fiber
cantilever
single mode
angle
lens
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JP2017525303A
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English (en)
Japanese (ja)
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JP2017523440A (ja
JP6556236B2 (ja
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Priority claimed from PCT/US2015/041467 external-priority patent/WO2016014623A1/en
Publication of JP2017523440A publication Critical patent/JP2017523440A/ja
Publication of JP2017523440A5 publication Critical patent/JP2017523440A5/ja
Application granted granted Critical
Publication of JP6556236B2 publication Critical patent/JP6556236B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2017525303A 2014-07-22 2015-07-22 走査型プローブ顕微鏡ヘッドの設計 Expired - Fee Related JP6556236B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462027385P 2014-07-22 2014-07-22
US62/027,385 2014-07-22
PCT/US2015/041467 WO2016014623A1 (en) 2014-07-22 2015-07-22 Scanning probe microscope head design

Publications (3)

Publication Number Publication Date
JP2017523440A JP2017523440A (ja) 2017-08-17
JP2017523440A5 true JP2017523440A5 (enExample) 2018-08-30
JP6556236B2 JP6556236B2 (ja) 2019-08-07

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ID=55163672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017525303A Expired - Fee Related JP6556236B2 (ja) 2014-07-22 2015-07-22 走査型プローブ顕微鏡ヘッドの設計

Country Status (4)

Country Link
US (1) US9366695B2 (enExample)
EP (1) EP3172579A4 (enExample)
JP (1) JP6556236B2 (enExample)
WO (1) WO2016014623A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9797922B2 (en) * 2014-07-22 2017-10-24 Angstrom Science, Inc. Scanning probe microscope head design
US10670807B2 (en) * 2016-12-15 2020-06-02 Ayar Labs, Inc. Lens assembly for optical fiber coupling to target and associated methods
EP3404424A1 (en) * 2017-05-15 2018-11-21 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Scanning probe microscopy system for and method of mapping nanostructures on the surface of a sample
DE102018210098B4 (de) * 2018-06-21 2022-02-03 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren zum Untersuchen und/oder zum Bearbeiten einer Probe
CN109099845B (zh) * 2018-07-06 2020-07-10 江西洪都航空工业集团有限责任公司 一种高速摄影测量三维位移的方法
KR102642140B1 (ko) * 2021-11-16 2024-02-28 국립안동대학교 산학협력단 원자 현미경

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
JP2900552B2 (ja) * 1990-07-26 1999-06-02 株式会社ニコン 微小力検出器
US6564087B1 (en) * 1991-04-29 2003-05-13 Massachusetts Institute Of Technology Fiber optic needle probes for optical coherence tomography imaging
RU2148378C1 (ru) * 1998-03-06 2000-05-10 Геликонов Валентин Михайлович Устройство для оптической когерентной томографии, оптоволоконное сканирующее устройство и способ диагностики биоткани in vivo
US6882429B1 (en) * 1999-07-20 2005-04-19 California Institute Of Technology Transverse optical fiber devices for optical sensing
KR100486937B1 (ko) * 2002-06-11 2005-05-03 한국표준과학연구원 광섬유에 의해 구현된 패브리 페로 공진기와 이를 이용한 원자간력 현미경에서의 외팔보 탐침의 변위 측정 및 보정시스템
JP2005049219A (ja) * 2003-07-29 2005-02-24 Toudai Tlo Ltd 走査型プローブ顕微鏡
JP2005147979A (ja) * 2003-11-19 2005-06-09 Jeol Ltd 走査形プローブ顕微鏡
JP2008051555A (ja) * 2006-08-22 2008-03-06 Sii Nanotechnology Inc 光学式変位検出機構及びそれを用いたプローブ顕微鏡
JP2009061525A (ja) * 2007-09-05 2009-03-26 Jtekt Corp 硬脆材料の研削方法、光ファイバアレイの製造方法、及び硬脆材料の加工装置
JP5226481B2 (ja) * 2008-11-27 2013-07-03 株式会社日立ハイテクサイエンス 自己変位検出型カンチレバーおよび走査型プローブ顕微鏡
JP5369046B2 (ja) * 2010-04-28 2013-12-18 株式会社フジクラ 光ファイバアレイ、光スイッチ、光ファイバ及び端面加工方法

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