JP2011121128A - Removal jig of grinding wheel, and grinding wheel case - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a removal jig of a grinding wheel, along with a grinding wheel case, capable of protecting a grindstone and preventing the grinding water and grinding chips adhering to the grinding wheel from dropping on a floor. <P>SOLUTION: The removal jig of the grinding wheel detachably mounted on a lower surface of a wheel mount provided in a lower end of a rotating spindle includes an annular sidewall which surrounds an outer periphery of the grinding wheel and a bottom wall provided in a lower end of the annular sidewall. The bottom wall includes a wheel base support for supporting a lower surface inside a grindstone mount of a wheel base and a grindstone accommodating part for connecting the wheel base support to the lower end of the annular sidewall to accommodate a plurality of grindstones mounted on the grindstone mount of the wheel base and has a regulating means for regulating the rotation of the wheel base. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a grinding wheel attaching / detaching jig and a grinding wheel case which are provided in a grinding apparatus for grinding a workpiece such as a semiconductor wafer.

  In the semiconductor device manufacturing process, a plurality of regions are partitioned by dividing lines called streets arranged in a lattice pattern on the surface of a substantially wafer-shaped semiconductor wafer, and devices such as ICs, LSIs, etc. are partitioned in the partitioned regions. Form. Then, the semiconductor wafer is cut along the streets to divide the region in which the device is formed to manufacture individual semiconductor devices. In addition, optical device wafers in which gallium nitride compound semiconductors are laminated on the surface of sapphire substrates and silicon carbide (SiC) substrates are also cut into individual optical devices such as light-emitting diodes and laser diodes by cutting along the streets. Widely used in electrical equipment. The wafer divided in this way is ground to a predetermined thickness by a grinding device before being cut along the street.

  A grinding apparatus for grinding a back surface of a semiconductor wafer includes a chuck table having a holding surface for holding a wafer, a grinding unit for grinding a wafer held on the chuck table, and the grinding unit as a holding surface of the chuck table. And a grinding feed mechanism for grinding and feeding in a direction perpendicular to the vertical direction. The grinding unit includes a rotary spindle, a wheel mount provided at the lower end of the rotary spindle, and a grinding wheel that is detachably attached to the lower surface of the wheel mount. The grinding wheel includes an annular wheel base and a plurality of grinding wheels mounted on the lower surface of the wheel base, and the wheel base is attached to the lower surface of the wheel mount by fastening bolts. (For example, see Patent Document 1)

JP 2003-181767 A

  Thus, when the grinding wheel is accidentally dropped onto the chuck table when the grinding wheel is attached to or detached from the wheel mount, there is a problem that the grinding wheel is damaged or the chuck table is damaged. Moreover, when removing a grinding wheel from a wheel mount, there also exists a problem that the grinding water and grinding waste adhering to a grinding wheel dripped, and a floor is contaminated.

  The present invention has been made in view of the above-mentioned facts, and its main technical problem is to protect the grinding wheel and to prevent the grinding water and grinding debris adhering to the grinding wheel from dripping onto the floor. It is to provide a tool and a grinding wheel case.

In order to solve the above-mentioned main technical problem, according to the present invention, a chuck table for holding a workpiece and a grinding means for grinding a wafer held on the chuck table are provided. A spindle, a wheel mount provided at a lower end of the rotary spindle, and a grinding wheel that is detachably attached to a lower surface of the wheel mount. The grinding wheel includes an annular wheel base and the wheel base. Of a grinding wheel in a grinding device configured to be attached to a lower surface of a wheel mount by fastening bolts. A detachable jig,
An annular side wall surrounding the outer periphery of the grinding wheel, and a bottom wall provided at the lower end of the annular side wall,
The bottom wall connects a wheel base support portion that supports a lower surface inward from the grindstone mounting portion of the wheel base, and connects the wheel base support portion and a lower end of the annular side wall. A grinding wheel housing part that houses a plurality of grinding wheels mounted on the grinding wheel mounting part, and includes a regulating means for regulating the rotation of the wheel base.
A grinding wheel attachment / detachment jig is provided.

  The wheel base has an engaging portion formed on the lower surface inward from the grindstone mounting portion, and the restricting means comprises a positioning pin that is provided on the wheel base supporting portion of the bottom wall and engages with the engaging portion. ing. Further, the engaging portion formed on the wheel base is composed of a grinding water ejection hole opened on the lower surface inward from the grindstone mounting portion, and the positioning pins provided on the wheel base supporting portion on the bottom wall are ground water. It is comprised so that it may engage with an ejection hole.

Further, according to the present invention, the annular wheel base and the outer peripheral portion of the lower surface of the wheel base are detachably attached to the lower surface of the wheel mount provided at the lower end of the rotating spindle constituting the grinding means of the grinding apparatus. A grinding wheel case that accommodates a grinding wheel comprising a plurality of grinding wheels mounted on a grinding wheel mounting portion,
A container having an open upper surface for accommodating the grinding wheel, and a lid fitted on the container;
The container is composed of an annular side wall surrounding the outer periphery of the grinding wheel, and a bottom wall provided at the lower end of the annular side wall,
The bottom wall connects a wheel base support portion that supports a lower surface inward from the grindstone mounting portion of the wheel base, and connects the wheel base support portion and a lower end of the annular side wall. A grinding wheel housing part that houses a plurality of grinding wheels mounted on the grinding wheel mounting part, and includes a regulating means for regulating the rotation of the wheel base.
A grinding wheel case is provided.

  The grinding wheel attaching / detaching jig according to the present invention is configured as described above. When the grinding wheel is removed from the wheel mount, the grinding wheel is covered with the attaching / detaching jig from the lower side. Even if water or grinding debris adheres, the grinding water or grinding debris is accommodated in the detachable jig and does not contaminate the floor or the like. Also, when mounting the grinding wheel on the wheel mount, it is carried out with the grinding wheel housed in a detachable jig and covered with the grinding wheel from below. Therefore, the grinding wheel is not damaged and the chuck table and the like are not damaged.

  Further, the grinding wheel case according to the present invention comprises a container having an open upper surface for accommodating the grinding wheel and a lid that is externally fitted to the container, and the container has the same configuration as the attachment / detachment jig for the grinding wheel. When the grinding wheel stored and stored in the grinding wheel case is attached to the wheel mount, the grinding wheel can be safely attached to the wheel mount by functioning the grinding wheel as an attaching / detaching jig.

The perspective view of the grinding apparatus for implementing attachment / detachment of a grinding wheel using the attachment / detachment jig | tool of the grinding wheel comprised according to this invention. The perspective view of the wheel mount which comprises the grinding means with which the grinding apparatus shown in FIG. 1 is equipped. Sectional drawing of the wheel mount shown in FIG. The perspective view of the grinding wheel with which the wheel mount shown in FIG. 2 is mounted | worn. Sectional drawing of the grinding wheel shown in FIG. The perspective view which shows the state which mounted | wore the grinding wheel shown in FIG. 4 and FIG. 5 with the wheel mount shown in FIG. 2 and FIG. The perspective view of the attachment / detachment jig | tool of the grinding wheel comprised according to this invention. Sectional drawing of the attachment / detachment jig | tool of the grinding wheel shown in FIG. The perspective view which shows the state which accommodated the grinding wheel in the attachment / detachment jig | tool of the grinding wheel shown in FIG.7 and FIG.8. Explanatory drawing which shows the operation | work which removes the grinding wheel with which the wheel mount was mounted | worn using the attachment / detachment jig of the grinding wheel shown in FIG.7 and FIG.8. 1 is a cross-sectional view of a grinding wheel case constructed in accordance with the present invention. 1 is a perspective view of a grinding wheel case configured in accordance with the present invention.

Preferred embodiments of a grinding wheel attachment / detachment jig constructed according to the present invention will be described below in more detail with reference to the accompanying drawings.
FIG. 1 shows a perspective view of a grinding apparatus equipped with a grinding wheel that is attached and detached by a grinding wheel attaching and detaching jig constructed according to the present invention. The grinding apparatus shown in FIG. 1 is provided with an apparatus housing generally indicated by numeral 2. This device housing 2 has a rectangular parallelepiped main portion 21 that extends elongated and an upright wall 22 that is provided at the rear end portion (upper right end in FIG. 1) of the main portion 21 and extends upward. A pair of guide rails 221 and 221 extending in the vertical direction are provided on the front surface of the upright wall 22. The movable base 3 is slidably mounted on the pair of guide rails 221 and 221. The movable base 3 is provided with a pair of legs 31 and 31 extending vertically on both sides of the rear surface, and the pair of legs 31 and 31 is slidably engaged with the pair of guide rails 221 and 221. Guided grooves 311 and 311 are formed. Thus, a support portion 32 protruding forward is provided on the front surface of the movable base 31 slidably mounted on the pair of guide rails 221 and 221 provided on the upright wall 22. The spindle unit 4 as a grinding means is attached to the support portion 32.

  The spindle unit 4 includes a cylindrical spindle housing 41 attached to the support portion 32, a rotary spindle 42 rotatably disposed on the spindle housing 41, and a drive source for rotationally driving the rotary spindle 42. The servo motor 43 is provided. One end (lower end in FIG. 1) of the rotary spindle 42 rotatably supported by the spindle housing 41 is disposed so as to protrude from the lower end of the spindle housing 41, and a wheel mount is mounted on one end (lower end in FIG. 1). 44 is provided. The grinding wheel 5 is attached to the lower surface of the wheel mount 44.

The wheel mount 44 and the grinding wheel 5 will be described with reference to FIGS.
2 is a perspective view of the wheel mount 44 provided at the lower end of the rotary spindle 42, and FIG. 3 is a cross-sectional view of the wheel mount 44 shown in FIG. The wheel mount 44 shown in FIGS. 2 and 3 is formed in a circular shape and is integrally provided at the lower end of the rotary spindle 42. As shown in FIG. 2, the wheel mount 44 is formed with four bolt insertion holes 441 (three are shown in FIG. 2) at predetermined intervals in the circumferential direction. Further, as shown in FIG. 3, the wheel mount 44 is formed with a communication passage 442 that communicates with the grinding water supply passage 421 that is formed at the axis of the rotary spindle 42 and is connected to the grinding water supply means. The passage 442 opens on the lower surface. On the lower surface of the wheel mount 44, two locking members 443 that engage with semicircular cutouts provided on the grinding wheel 5 described later are disposed opposite to each other with a phase of 180 degrees ( FIG. 3 shows only one locking member 443). The locking member 443 includes a shaft portion 443a and a circular locking portion 443b provided at the lower end of the shaft portion 443a.

The grinding wheel 5 attached to the wheel mount 44 configured as described above will be described with reference to FIGS.
4 shows a perspective view of the grinding wheel 5, and FIG. 5 shows a cross-sectional view of the grinding wheel 5 shown in FIG. A grinding wheel 5 shown in FIGS. 4 and 5 includes an annular wheel base 51 and a plurality of grinding wheels 52 mounted on a grindstone mounting portion on an outer peripheral portion of the lower surface of the wheel base 51. The wheel base 51 includes a grindstone mounting portion 511 on the outer peripheral portion of the lower surface, and a flange portion 512 that protrudes inwardly from the grindstone mounting portion 511. The flange portion 512 is formed with a step above the grindstone mounting portion 511 in the illustrated embodiment. In the wheel base 51 formed in this way, an annular grinding water supply groove 513 is formed on the upper surface at a position corresponding to the communication path 442 formed in the wheel mount 44, and the grinding water supply groove A plurality of grinding water ejection holes 514 communicating with 513 and opening on the lower surface of the flange portion 512 are provided. In addition, an annular engagement portion 515 formed to project inward is provided at the upper end portion of the wheel base 51, and the engagement portion 515 provided on the wheel mount 44 is engaged with the annular engagement portion 515. A semicircular cutout 515a having a size that allows the locking portion 443b of the member 443 to be inserted is formed. The wheel base 51 thus formed is provided with four female screw holes 516 formed from the upper surface at positions corresponding to the plurality of bolt insertion holes 441 formed in the wheel mount 44. An alignment mark 517 is provided on the outer peripheral surface of the wheel base 51 at a position corresponding to one of the plurality of female screw holes 516. In relation to the alignment mark 517, an alignment mark 444 is also provided on the outer peripheral surface of the wheel mount 44 as shown in FIG. The alignment mark 444 provided on the outer peripheral surface of the wheel mount 44 is formed at a position displaced by a predetermined amount from a position corresponding to one bolt insertion hole 441. The amount of displacement is set to an amount corresponding to the distance from the outer peripheral surface of the shaft portion 443a constituting the locking member 443 to the outer peripheral edge of the circular locking portion 443b.

  In order to attach the grinding wheel 5 configured as described above to the wheel mount 44, the grinding wheel 5 is positioned below the wheel mount 44, and the alignment mark 517 provided on the outer peripheral surface of the wheel base 51 and the wheel mount 44. The upper surface of the wheel base 51 is pressed against the lower surface of the wheel mount 44 at a position where the alignment mark 444 provided on the outer peripheral surface of the wheel base 51 coincides. As a result, the semicircular cutout 515a formed in the annular engagement portion 515 provided at the upper end portion of the wheel base 51 is fitted into the engagement portion 443b of the engagement member 443 provided in the wheel mount 44. Insert. Next, when the grinding wheel 5 is rotated, the inner peripheral edge of the semicircular notch 515a formed in the annular engaging portion 515 comes into contact with the outer peripheral surface of the shaft portion 443a constituting the locking member 443, and A part of the stop part 443b overlaps with a part of the annular engaging part 515. Therefore, even when the grinding wheel 5 is released, a part of the annular engaging portion 515 is engaged with a part of the engaging portion 443b of the engaging member 443, and the grinding wheel 5 is supported by the engaging member 443b. It becomes a state. In this state, the plurality of bolt insertion holes 441 formed in the wheel mount 44 and the plurality of female screw holes 516 provided in the wheel base 51 are positioned at corresponding positions. Thus, the plurality of bolt insertion holes 441 formed in the wheel mount 44 and the plurality of female screw holes 516 provided in the wheel base 51 are positioned at the corresponding positions, and the plurality of bolt insertion holes 441 formed in the wheel mount 44 are positioned in corresponding positions. By inserting the fastening bolt 55 from the bolt insertion hole 441 and screwing it into a plurality of female screw holes 515 provided in the wheel base 51, the grinding wheel 5 can be attached to the lower surface of the wheel mount 44 as shown in FIG. it can.

  Referring back to FIG. 1, the grinding apparatus in the illustrated embodiment moves the spindle unit 4 in the vertical direction (perpendicular to the holding surface of the chuck table described later) along the pair of guide rails 221 and 221. Grinding feeding means 6 that is moved in the direction) is provided. The grinding feed means 6 includes a male screw rod 61 disposed on the front side of the upright wall 22 and extending in the vertical direction. The male threaded rod 61 is rotatably supported by bearing members 62 and 63 whose upper end and lower end are attached to the upright wall 22. The upper bearing member 62 is provided with a pulse motor 64 as a drive source for rotationally driving the male screw rod 61, and the output shaft of the pulse motor 64 is connected to the male screw rod 61 by transmission. A connecting portion (not shown) that protrudes rearward from the central portion in the width direction is also formed on the rear surface of the movable base 3, and a through female screw hole (not shown) is formed in the connecting portion. The male screw rod 61 is screwed into the female screw hole. Accordingly, when the pulse motor 64 is rotated forward, the moving base 3 and the spindle unit 4 are lowered or advanced, and when the pulse motor 64 is reversed, the movable base 3 and the spindle unit 4 are raised or retracted.

  Continuing the description with reference to FIG. 1, the chuck table mechanism 7 is disposed in the main portion 21 of the housing 2. The chuck table mechanism 7 includes a chuck table 71 as a workpiece holding means, a cover member 72 that covers the periphery of the chuck table 71, and bellows means 73 and 74 disposed in front of and behind the cover member 72. ing. The chuck table 71 is configured to be rotated by a rotation drive mechanism (not shown), and is configured to suck and hold a wafer as a workpiece on the upper surface thereof by operating a suction means (not shown). Further, the chuck table 71 is moved between a workpiece placement area 24 shown in FIG. 1 and a grinding area 25 facing the grinding wheel 44 constituting the grinding unit 4 by a chuck table moving means (not shown). The bellows means 73 and 74 can be formed from any suitable material such as campus cloth. The front end of the bellows means 73 is fixed to the front wall of the main portion 21, and the rear end is fixed to the front end surface of the cover member 72. The front end of the bellows means 74 is fixed to the rear end surface of the cover member 72, and the rear end is fixed to the front surface of the upright wall 22 of the apparatus housing 2. When the chuck table 71 is moved in the direction indicated by the arrow 23a, the bellows means 73 is expanded and the bellows means 74 is contracted. When the chuck table 61 is moved in the direction indicated by the arrow 23b, the bellows means 73 is By being contracted, the bellows means 74 is extended.

The grinding apparatus in the illustrated embodiment is configured as described above, and the operation thereof will be described below.
As shown in FIG. 1, a wafer W as a workpiece is placed on a holding surface, which is the upper surface of a chuck table 71 positioned in a workpiece placement area 24 of a grinding apparatus. A protective tape T for protecting the device is attached to the surface on which the device is formed on the wafer W, and the protective tape T side is placed on the upper surface of the chuck table 71. Then, the wafer W is sucked and held on the chuck table 71 via the protective tape T by operating a suction means (not shown). When the wafer W is sucked and held on the chuck table 71 in this way, the chuck table moving means (not shown) is operated to move the chuck table 71 in the direction indicated by the arrow 23a and position it in the grinding zone 25.

  When the chuck table 71 is positioned in the grinding area 25 in this manner, the chuck table 71 is rotated in a predetermined direction at a rotational speed of, for example, 300 rpm, and the grinding wheel 5 is ground while rotating at a rotational speed of, for example, 6000 rpm. The pulse motor 64 of the feeding means 6 is driven to rotate forward to lower the grinding unit 4, and the grinding surfaces of the grinding wheels 52 of the grinding wheel 5 are brought into contact with the upper surface (back surface) of the wafer W held on the chuck table 71. Feed a predetermined amount of grinding. As a result, the wafer W held on the chuck table 71 is ground to a predetermined thickness (grinding step). In this grinding process, a grinding water supply means (not shown) is activated, and the grinding water supply passage 421 formed in the rotary spindle 42, the polishing passage 442 formed in the wheel mount 44, and the wheel base 51 of the grinding wheel 5 are provided. Grinding water is supplied to the grinding portion by the grinding wheel 52 through the formed annular grinding water supply groove 513 and the grinding water ejection hole 514.

  When the grinding operation is performed as described above, the grinding wheel 52 is worn out, so that the grinding wheel 5 is replaced when a predetermined amount is worn out. When the grinding wheel 5 is removed from the wheel mount 44 in order to replace the grinding wheel 5, there is a problem that grinding water and grinding debris adhering to the grinding wheel 5 are dripped to contaminate the floor and the like. Further, if the grinding wheel 5 is accidentally dropped onto the chuck table 71 when the new grinding wheel 5 is mounted on the wheel mount 44, there is a problem that the grinding wheel 52 is damaged or the chuck table 71 is damaged. A grinding wheel attachment / detachment jig for solving such a problem will be described with reference to FIGS.

  The grinding wheel attaching / detaching jig 8 shown in FIGS. 7 to 9 is formed in a container shape whose upper surface is opened by a synthetic resin. The attaching / detaching jig 8 includes an annular side wall 81 that surrounds the outer periphery of the grinding wheel 5, and a bottom wall 82 provided at the lower end of the annular side wall 81. The height of the annular side wall 81 is set to a value corresponding to the height of the grinding wheel 5, and two notches 811 are provided at the upper end thereof with a phase difference of 180 degrees. As shown in FIG. 8, the bottom wall 82 includes an annular wheel base support portion 821 that supports the lower surface of the flange portion 512 that protrudes inward from the grindstone mounting portion 511 of the wheel base 51, and a wheel base support portion 821. And a lower end of the annular side wall 81, and a grindstone accommodating portion 822 that accommodates a plurality of grinding wheels 52 mounted on the grindstone mounting portion 511 of the wheel base 51. The grindstone storage portion 822 is configured so that the lower surfaces of the plurality of grinding wheels 52 mounted on the grindstone mounting portion 511 do not come into contact with each other while the flange portion 512 of the wheel base 51 is supported by the wheel base support portion 821. It is configured. Therefore, the bottom wall 82 of the attachment / detachment jig 8 has a plurality of pieces mounted on the upper surface of the grindstone storage portion 822 and the grindstone mounting portion 511 in a state where the flange portion 512 of the wheel base 51 is supported by the wheel base support portion 821. The dimensional relationship is set such that a gap is formed between the lower surface of the grinding wheel 52. Further, two positioning pins 83 are arranged on the upper surface of the wheel base support portion 821 with a phase difference of 180 degrees. The two positioning pins 83 open to the flange portion 512 of the wheel base 51 in a state where the alignment mark 517 provided on the outer peripheral surface of the wheel base 51 coincides with the notch 811 as shown in FIG. It is provided at a position to be inserted into the grinding water ejection hole 514. In this way, when the two positioning pins 83 are inserted into the grinding water ejection holes 514 opened on the lower surface of the flange portion 512 of the wheel base 51, the relative rotation of the attaching / detaching jig 8 and the grinding wheel 5 is restricted. Is done. Therefore, the two positioning pins 83 function as a restricting means that engages with the grinding water ejection hole 514 as an engaging portion formed in the wheel base 51 and restricts the rotation of the wheel base 51. In the illustrated embodiment, the wheel base support portion 821 constituting the bottom wall 82 of the attachment / detachment jig 8 is formed in an annular shape and a hole is provided in the center. May be configured to be closed.

The grinding wheel attachment / detachment jig 8 in the illustrated embodiment is configured as described above. Hereinafter, an operation of removing the grinding wheel 5 attached to the wheel mount 44 using the attachment / detachment jig 8 will be described.
First, the fastening bolt 55 attached to the lower surface of the wheel mount 44 is loosened and removed. In this state, as shown in FIG. 10A, an annular ring provided on the wheel base 51 constituting the grinding wheel 5 is formed on a part of the locking portion 443b of the locking member 443 provided on the wheel mount 44. Since a part of the engaging portion 515 is engaged, the grinding wheel 5 is maintained in a state where it is supported by the locking member 443 of the wheel mount 44. Next, as shown in FIG. 10B, the detachable jig 8 is fitted from the lower side of the grinding wheel 5 supported by the wheel mount 44. This operation is carried out so that one of the notches 811 provided on the annular side wall 81 of the attachment / detachment jig 8 matches the alignment mark 517 provided on the outer peripheral surface of the wheel base 51. As a result, when the attachment / detachment jig 8 is fitted to the grinding wheel 5, the grinding water jets in which the two positioning pins 83 open to the lower surface of the flange portion 512 of the wheel base 51 as in the state shown in FIG. 8. Inserted into the hole 514, the relative rotation of the attachment / detachment jig 8 and the grinding wheel 5 is restricted. In this state where the relative rotation of the attachment / detachment jig 8 and the grinding wheel 5 is restricted, the alignment mark 517 provided on the outer peripheral surface of the wheel base 51 is attached to the attachment / detachment jig 8 and the grinding wheel 5. By rotating to a position corresponding to the alignment mark 444 provided on the outer peripheral surface, the locking portion 443b of the locking member 443 provided on the wheel mount 44 and the wheel base 51 constituting the grinding wheel 5 are provided. Since the semicircular cutouts 515a formed in the annular engaging portion 515 coincide with each other, the grinding wheel 5 can be detached from the wheel mount 44 by lowering the attaching / detaching jig 8 and the grinding wheel 5 downward. As described above, the operation of removing the grinding wheel 5 from the wheel mount 44 is performed in a state where the grinding wheels 52 of the grinding wheel 5 are covered from the lower side by the grinding wheel storage portion 822 of the attaching / detaching jig 8. Even if grinding water or grinding waste adheres, the grinding water or grinding waste is accommodated in the grindstone accommodating portion 822 of the detachable jig 8 and does not contaminate the floor or the like. Further, since the grinding wheel 5 is covered with the attaching / detaching jig 8 made of synthetic resin, the chuck table or the like is not damaged even if it is accidentally dropped.

  When the grinding wheel 5 is removed from the wheel mount 44 as described above, a new grinding wheel 5 is attached to the wheel mount 44. The attaching operation of the grinding wheel 5 is carried out by accommodating the new grinding wheel 5 in the attaching / detaching jig 8 as shown in FIG. That is, the grinding wheel 5 is accommodated in the attaching / detaching jig 8 and positioned below the wheel mount 44. At this time, the attaching / detaching jig 8 and the grinding wheel 5 are set to positions where the alignment marks 517 provided on the outer peripheral surface of the wheel base 51 correspond to the alignment marks 444 provided on the outer peripheral surface of the wheel mount 44. Then, the wheel mount 44 is provided with a semicircular notch 515 a formed in an annular engagement portion 515 provided at the upper end of the wheel base 51 by lifting the attachment / detachment jig 8 and the grinding wheel 5. After the engaging portion 443b of the engaging member 443 is inserted, it rotates. As a result, as described above, the inner peripheral edge of the semicircular notch 515a formed in the annular engaging portion 515 comes into contact with the outer peripheral surface of the shaft portion 443a constituting the locking member 443, and the locking portion 443b A portion overlaps with a portion of the annular engagement portion 515. Therefore, even when the grinding wheel 5 is released, a part of the annular engaging portion 515 is engaged with a part of the engaging portion 443b of the engaging member 443, and the grinding wheel 5 is supported by the engaging member 443. It becomes the state. In this state, the plurality of bolt insertion holes 441 formed in the wheel mount 44 and the plurality of female screw holes 516 provided in the wheel base 51 are positioned at corresponding positions. In this way, the grinding wheel 5 is supported by the locking member 443 and the plurality of bolt insertion holes 441 formed in the wheel mount 44 and the plurality of female screw holes 516 provided in the wheel base 51 are positioned at corresponding positions. In this state, by inserting fastening bolts 55 from a plurality of bolt insertion holes 441 formed in the wheel mount 44 and screwing them into a plurality of female screw holes 516 provided in the wheel base 51, A grinding wheel 5 can be attached. The attaching / detaching jig 8 may be removed from the grinding wheel 5 while the grinding wheel 5 is supported by the locking member 443, or removed while the grinding wheel 5 is attached to the lower surface of the wheel mount 44. May be. As described above, the operation of mounting the grinding wheel 5 on the wheel mount 44 is performed in a state where the grinding wheel 5 is accommodated in the attaching / detaching jig 8 and the grinding wheel 5 is covered from the lower side, so that it is accidentally dropped. However, since the grinding wheel 52 does not directly contact the chuck table or the like, the grinding wheel 52 or the chuck table or the like is not damaged.

Next, a grinding wheel case that houses and stores the grinding wheel 5 will be described with reference to FIGS. 11 and 12.
A grinding wheel case 80 shown in FIGS. 11 and 12 is composed of a container 8a having an open upper surface for housing the grinding wheel 5, and a lid 8b that fits outside the container 8a. The container 8a has the same configuration as that of the grinding wheel attachment / detachment jig 8. Accordingly, the same parts as those constituting the grinding wheel attaching / detaching jig 8 in the container 8a are denoted by the same reference numerals, and the description thereof is omitted. The lid 8b includes an annular skirt portion 81b and a top wall 82b that closes the upper end of the annular skirt portion 81b, and is integrally formed of a synthetic resin in the same manner as the container 8a. The grinding wheel case 80 configured in this manner accommodates the grinding wheel 5 in the container 8a as shown in FIG. 11, and externally fits the lid 8b to the container 8a in which the grinding wheel 5 is accommodated as shown in FIG. Thus, the grinding wheel 5 can be stored in a stored state. In this way, when the grinding wheel 5 stored in the grinding wheel case 80 is mounted on the wheel mount 44 of the grinding device, the container 8a of the grinding wheel case 80 has the same configuration as the jig 8 for attaching and detaching the grinding wheel. Therefore, it functions as a mounting / removal jig for the grinding wheel and can be attached to the mounting operation described above.

2: Device housing 3: Moving base 4: Spindle unit 41: Spindle housing 42: Rotating spindle 44: Wheel mount 5: Grinding wheel 51: Wheel base 511: Grinding wheel mounting part 514: Grinding water ejection hole 52: Grinding grindstone 6 : Grinding feed means 7: chuck table mechanism 71: chuck table 8: grinding wheel attachment / detachment jig 81: annular side wall 82: bottom wall 821: wheel base support part 822: grinding wheel storage part 83: positioning pin 80: grinding wheel case 8a: Container 8b: Lid

Claims (6)

A chuck table for holding a workpiece; and a grinding means for grinding a wafer held on the chuck table, the grinding means comprising: a rotating spindle; and a wheel mount provided at a lower end of the rotating spindle; A grinding wheel that is detachably attached to the lower surface of the wheel mount, and the grinding wheel is attached to an annular wheel base and a grindstone mounting portion on an outer peripheral portion of the lower surface of the wheel base. A grinding wheel of a grinding wheel in a grinding apparatus configured such that the wheel base is attached to a lower surface of a wheel mount by a fastening bolt,
An annular side wall surrounding the outer periphery of the grinding wheel, and a bottom wall provided at the lower end of the annular side wall,
The bottom wall connects a wheel base support portion that supports a lower surface inward from the grindstone mounting portion of the wheel base, and connects the wheel base support portion and a lower end of the annular side wall. A grinding wheel housing part that houses a plurality of grinding wheels mounted on the grinding wheel mounting part, and includes a regulating means for regulating the rotation of the wheel base.
A grinding wheel attachment / detachment jig characterized by the above. The wheel base has an engagement portion formed on the lower surface inward from the grinding wheel mounting portion,
The grinding wheel attachment / detachment jig according to claim 1, wherein the regulating means includes a positioning pin provided on the wheel base support portion of the bottom wall and engaged with the engagement portion.   The engaging portion formed on the wheel base is composed of a grinding water ejection hole opened on the lower surface inward from the grindstone mounting portion, and positioning pins provided on the wheel base supporting portion on the bottom wall are The grinding wheel attachment / detachment jig according to claim 2, which engages with the grinding water ejection hole. A plurality of wheel bases that are detachably mounted on the lower surface of a wheel mount provided at the lower end of a rotating spindle constituting the grinding means of the grinding device, and a plurality of wheel wheels mounted on the outer peripheral portion of the wheel base on the lower surface of the wheel base. A grinding wheel case for accommodating a grinding wheel composed of a grinding wheel of
A container having an open upper surface for accommodating the grinding wheel, and a lid fitted on the container;
The container is composed of an annular side wall surrounding the outer periphery of the grinding wheel, and a bottom wall provided at the lower end of the annular side wall,
The bottom wall connects a wheel base support portion that supports a lower surface inward from the grindstone mounting portion of the wheel base, and connects the wheel base support portion and a lower end of the annular side wall. A grinding wheel housing part that houses a plurality of grinding wheels mounted on the grinding wheel mounting part, and includes a regulating means for regulating the rotation of the wheel base.
A grinding wheel case characterized by that. The wheel base has an engagement portion formed on the lower surface inward from the grinding wheel mounting portion,
The grinding wheel case according to claim 4, wherein the restricting means includes a positioning pin that is provided on the wheel base support portion of the bottom wall and engages with the engaging portion. The engaging portion formed on the wheel base is composed of a grinding water ejection hole opened on the lower surface inward from the grindstone mounting portion, and positioning pins provided on the wheel base supporting portion of the bottom wall are The grinding wheel case according to claim 5, wherein the grinding wheel case is engaged with the grinding water ejection hole.

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