JP2019177444A - Attachment/detachment jig for grinding wheel - Google Patents

Abstract

To provide an attachment/detachment jig which can prevent a grinding wheel from rotating in the jig when the grinding wheel is attached to a mount to prevent attachment work from becoming troublesome.SOLUTION: An attachment/detachment jig 6 is used in a grinding device 1 in which grinding means 7 comprises a spindle 70, a mount 73 arranged at a lower end of the spindle 70 and a grinding wheel 74 to be attached to a lower surface of the mount 73, and the grinding wheel 74 is constituted of a wheel base 741, a grindstone 740 to be attached to a lower surface of the wheel base 741 and a grinding water supply port 743 arranged concentrically inside a grindstone attachment part 741b, and the wheel base 741 is attached to a lower surface of the mount 73 by a bolt 79, which comprises a bottom plate 60, a support part 61, arranged at the bottom plate 60, which supports a region closer to inside than a grindstone attachment part 741b on the lower surface of the wheel base 741 and pins 62 arranged at the support part 61 on a circumference having the same diameter as a diameter of a circumference in which a supply port 743 is arranged to oppose to the supply port 743 of the wheel base 741 supported by the support part 61.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an attaching / detaching jig used when attaching / detaching a grinding wheel from a wheel mount.

  A grinding apparatus that grinds the back surface of a wafer and thins it to a desired thickness includes a chuck table having a holding surface for holding the wafer, a grinding means for grinding the wafer held on the chuck table with a grinding wheel, Grinding feed means for grinding and feeding the grinding means in a direction perpendicular to the holding surface of the chuck table.

  The grinding means includes a spindle, a wheel mount provided at the lower end of the spindle, and a grinding wheel that is detachably attached to the lower surface of the wheel mount. The grinding wheel includes an annular wheel base and a plurality of grinding wheels arranged in an annular shape on the lower surface of the wheel base, and the wheel base is attached to the lower surface of the wheel mount by fastening bolts. (For example, refer to Patent Document 1).

  When attaching a grinding wheel to a wheel mount, the grinding wheel may be damaged or the chuck table may be damaged by the grinding wheel. In order to prevent such a situation from occurring, a grinding wheel attaching / detaching jig (see, for example, Patent Document 2) is used. That is, the grinding wheel is attached to the wheel mount in a state where the grinding wheel is accommodated in the grinding wheel attaching / detaching jig so that the operator does not touch the grinding wheel directly.

JP 2003-181767 A JP 2011-121128 A

However, when attaching the grinding wheel to the wheel mount, it is necessary to match the screw hole of the grinding wheel with the stupid hole of the wheel mount. At this time, the grinding wheel may rotate in the grinding wheel attaching / detaching jig. There is a problem that the alignment work between the screw hole and the idiot hole is not successful and takes time and effort.
Therefore, when attaching the grinding wheel to the wheel mount using the grinding wheel attaching / detaching jig (or removing it from the wheel mount), make sure that the grinding wheel does not rotate in the wheel attaching / detaching jig. There is a problem of avoiding troublesome work.

  In order to solve the above-mentioned problems, the present invention comprises a chuck table for holding a wafer and a grinding means for grinding the wafer held on the chuck table. The grinding means is arranged on a spindle and a lower end of the spindle. And a grinding wheel that is detachably attached to the lower surface of the wheel mount. The grinding wheel includes an annular wheel base and an annular grindstone at an outer peripheral portion of the lower surface of the wheel base. A plurality of grinding wheels mounted on the mounting portion, and a supply port for supplying grinding water to the grinding wheel disposed concentrically with the annular wheel mounting portion inside the wheel mounting portion, In a grinding apparatus in which a wheel base is attached to a lower surface of the wheel mount by a fastening bolt, an attachment / detachment jig for attaching / detaching the grinding wheel, and a bottom plate, A wheel base support portion that is disposed on the bottom plate and supports a region inside the wheel mounting portion on the lower surface of the wheel base, and faces the supply port of the wheel base supported by the wheel base support portion. A grinding wheel attachment / detachment jig including a pin disposed on the bottom plate on a circumference having the same diameter as the circumference on which the supply port is disposed.

  The attachment / detachment jig includes an annular side wall that stands on an outer peripheral edge of the bottom plate and surrounds an outer periphery of the grinding wheel supported by the wheel base support portion, and the bottom plate and the annular side wall define the wheel base. It is preferable to form a grindstone storage portion that accommodates the plurality of grinding wheels mounted on the grindstone mounting portion.

  The bottom plate includes an advancing / retreating means for advancing and retreating the pin in the axial direction of the spindle, and the advancing / retreating means includes a spring that biases the pin in a direction to protrude from the bottom plate, and a spring accommodating portion that accommodates the spring in an expandable manner. And when the wheel base support portion supports the wheel base, when the pin cannot enter the supply port, the spring is contracted to accommodate the pin in the bottom plate, and the pin and the supply When the opening is aligned, it is preferable that the pin accommodated in the bottom plate is made to enter the supply opening by the biasing force of the spring.

  The attachment / detachment jig according to the present invention includes a bottom plate, a wheel base support portion that is disposed on the bottom plate and supports a region inside the grinding wheel mounting portion on the lower surface of the wheel base, and a wheel base supported by the wheel base support portion. And a pin disposed on the bottom plate on the circumference of the same diameter as the circumference on which the supply port is disposed so as to face the supply port of the base, and therefore the grinding wheel was accommodated on the attachment / detachment jig At this time, the pin is inserted into the supply port of the wheel base, and the grinding wheel does not rotate on the attachment / detachment jig. Therefore, when attaching a grinding wheel housed in a mounting / dismounting jig to the wheel mount with fastening bolts, positioning of the wheel mount's foolish hole and the screw hole of the grinding wheel that does not rotate in the mounting / dismounting jig becomes easy, and mounting There will be no time-consuming work.

  The attachment / detachment jig is provided with an annular side wall that stands on the outer peripheral edge of the bottom plate and surrounds the outer periphery of the grinding wheel supported by the wheel base support portion, and is attached to the grinding wheel mounting portion of the wheel base by the bottom plate and the annular side wall. By forming a grindstone storage part that accommodates multiple grinding wheels, when attaching a grinding wheel accommodated in a detachable jig to the wheel mount, the operator will not touch the grinding wheel carelessly. It becomes possible to prevent damage and the like.

  The bottom plate includes an advancing / retreating means for advancing and retreating the pin in the axial direction of the spindle, and the advancing / retreating means includes a spring that biases the pin in a direction to protrude from the bottom plate and a spring accommodating portion that accommodates the spring in an expandable manner. Therefore, if the pin cannot enter the supply port when the wheel base support part supports the wheel base, the spring is contracted to accommodate the pin in the bottom plate, and when the pin and the supply port are aligned, Since the pin that has been accommodated can enter the supply port by the biasing force of the spring, it is possible to prevent the pin from damaging the lower surface of the grinding wheel when the pin cannot enter the supply port. Is possible.

It is a perspective view which shows an example of a grinding device. It is a perspective view which shows an example of a wheel mount, a grinding wheel, and an attachment / detachment jig. It is a perspective view which shows the lower surface side of a wheel mount. It is a perspective view which shows the lower surface side of a grinding wheel. It is sectional drawing which shows an example of an attachment / detachment jig. It is a perspective view of the attachment / detachment jig which is not provided with an annular side wall. It is sectional drawing explaining the grinding wheel accommodated in the attachment or detachment jig being in the state which can be attached to a wheel mount. It is sectional drawing explaining the state which has attached the grinding wheel accommodated in the attachment or detachment jig to the wheel mount. It is sectional drawing explaining the state which has removed the grinding wheel with which the wheel mount was mounted | worn using the attachment / detachment jig.

A grinding apparatus 1 shown in FIG. 1 is an apparatus for grinding a wafer W held on a chuck table 3 by a grinding means 7, and includes a base 10 extending in the Y-axis direction and a rear side (+ Y direction side) on the base 10. And a column 11 standing upright.
The wafer W shown in FIG. 1 is, for example, a circular plate-like semiconductor wafer, and a plurality of devices are formed on the surface Wa of the wafer W facing downward in FIG. Being protected. The back surface Wb of the wafer W facing upward is a surface to be ground on which grinding is performed.

  The chuck table 3 having a circular outer shape disposed on the base 10 includes a holding surface 30 that is made of a porous member or the like and sucks and holds the wafer W. The holding surface 30 communicates with a suction source (not shown) such as a vacuum generator, and the suction force generated by the suction of the suction source is transmitted to the holding surface 30. Further, the chuck table 3 can be rotated around the axis in the Z-axis direction while being surrounded from the periphery by the cover 39, and the Y-axis direction feeding means (not shown) disposed below the cover 39 moves the top of the base 10. It can move back and forth in the Y-axis direction.

  On the front surface on the −Y direction side of the column 11, there is disposed a grinding feed means 5 for grinding and feeding the grinding means 7 in the Z-axis direction (vertical direction) that is separated from or approaches the chuck table 3. The grinding feed means 5 is connected to a ball screw 50 having a vertical (Z-axis direction) axis center, a pair of guide rails 51 arranged in parallel to the ball screw 50, and an upper end of the ball screw 50, and rotates the ball screw 50. And a lifting plate 53 whose inner nut is screwed to the ball screw 50 and whose side portion is in sliding contact with the guide rail 51. When the motor 52 rotates the ball screw 50, the lifting plate 53 is moved accordingly. Is guided by the guide rail 51 and reciprocates in the Z-axis direction, and the grinding means 7 fixed to the lifting plate 53 is ground and fed in the Z-axis direction.

  The grinding means 7 for grinding the wafer W held on the chuck table 3 rotates a spindle 70 whose axial direction is a vertical direction (Z-axis direction), a housing 71 that rotatably supports the spindle 70, and the spindle 70. A driving motor 72, a circular plate-like wheel mount 73 disposed at the lower end of the spindle 70, a grinding wheel 74 that is detachably mounted on the lower surface of the wheel mount 73, and a housing 71 that supports the spindle 70 are accommodated. And a holder 75 fixed to the lifting plate 53 of the grinding feed means 5.

As shown in FIG. 2, a flow path 70 a that communicates with a grinding water supply source (not shown) and is a passage for grinding water is formed in the spindle 70 so as to penetrate in the axial direction (Z-axis direction) of the spindle 70. The flow path 70 a further communicates with a flow path 70 b formed in the wheel mount 73. The flow paths 70b are formed in the wheel mount 73 in a direction orthogonal to the axial direction of the spindle 70 at a constant interval in the circumferential direction of the wheel mount 73. Openings are made in the outer peripheral area of the lower surface 73b of the mount 73, respectively.
In the region on the outer peripheral side of the wheel mount 73, a plurality of bolt insertion holes (stupid holes) 730 penetrate in the thickness direction (Z-axis direction) at regular intervals in the circumferential direction (for example, six at intervals of 60 degrees). Is formed.

For example, a convex portion 731 (see FIG. 3) that fits into the opening 742 of the grinding wheel 74 is formed with a predetermined thickness in the central region of the lower surface 73b of the wheel mount 73, and the lower surface of the convex portion 731 is formed on the lower surface of the convex portion 731. Two wheel hooking portions 731a that are engaged with a semicircular cutout 746c (see FIG. 2) of the grinding wheel 74, which will be described later, and on which the grinding wheel 74 is hooked are disposed at an interval of 180 degrees in the circumferential direction. . The circular plate-like wheel hooking portion 731 a is formed so that a part thereof protrudes outward from the outer peripheral edge of the convex portion 731 integrally with the lower surface of the convex portion 731.
In addition, the lower surface 73b of the wheel mount 73 is a flush flat surface, and the convex portion 731 and the wheel hooking portion 731a may not be formed.

As shown in FIG. 2, the grinding wheel 74 includes an annular wheel base 741, and the wheel base 741 includes a circular opening 742 that penetrates in the thickness direction.
In a region on the outer peripheral side of the upper surface 741a of the wheel base 741, a plurality of female screw holes 744 (for example, six at intervals of 60 degrees) are formed in the thickness direction at regular intervals in the circumferential direction. Each female screw hole 744 corresponds to each bolt insertion hole 730 provided in the wheel mount 73.

Around the opening 742 of the grinding wheel 74 is formed a flange portion 746 that extends horizontally outward in the radial direction. The flange portion 746 is inserted through the wheel hook portion 731 a provided in the wheel mount 73. A semi-circular cutout 746c is formed so as to be opposed to each other by 180 degrees apart in the circumferential direction.
The wheel base 741 may be configured not to include the brim portion 746 and the semicircular notch 746c.

  As shown in FIG. 4, the outer peripheral portion of the lower surface of the wheel base 741 is an annular grindstone mounting portion 741b having a substantially flat surface, and the grindstone mounting portion 741b has a gap having a predetermined width at equal intervals in the circumferential direction. A plurality of grinding wheels 740 are fixed in an annular shape with an appropriate adhesive. Each grinding wheel 740 is formed in a substantially rectangular parallelepiped shape with diamond abrasive grains or the like fixed by, for example, resin bond or metal bond.

  A region inside the annular grindstone mounting portion 741b on the lower surface of the wheel base 741 includes, for example, an inclined surface 741c that is inclined at a predetermined angle and a lower surface 746b of the flange portion 746. The inclined surface 741c has a plurality of supply ports 743 through which grinding water such as pure water jets concentrically with the annular grindstone mounting portion 741b at equal intervals in the circumferential direction (for example, six at 60 degrees). Is formed. Grinding water supplied from the supply port 743 flows through the inclined surface 741c toward the grinding wheel 740 to cool the wheel base 741, and further, the grinding wheel 740 and the location where the wafer W shown in FIG. 1 is ground. Then, the generated grinding waste is removed from the surface to be ground of the wafer W.

  As shown in FIG. 2, for example, in the region on the inner peripheral side of the region where the female screw holes 744 of the upper surface 741 a of the wheel base 741 are formed, the flow paths 70 b of the lower surface 73 b of the wheel mount 73 are formed. An annular groove 745 that faces the opening and into which grinding water from the wheel mount 73 flows is formed, and the supply port 743 described above is opened at the groove bottom of the annular groove 745. In addition, the opening of each flow path 70b in the lower surface 73b of the wheel mount 73 and the supply port 743 of the grinding wheel 74 may directly communicate with each other without using the annular groove 745.

2 and 5 is used when the grinding wheel 74 is attached to the wheel mount 73 (or when it is removed from the wheel mount 73).
The attaching / detaching jig 6 made of a synthetic resin or a metal such as SUS having a certain degree of hardness has a bottom plate 60 and a flange portion 746 that is disposed on the bottom plate 60 and is an area inside the grinding wheel mounting portion 741b on the lower surface of the wheel base 741. The wheel base support portion 61 that supports the lower surface 746b of the wheel base, and the same diameter as the circumference on which the supply port 743 is disposed so as to face the supply port 743 of the wheel base 741 supported by the wheel base support portion 61 And a pin 62 disposed on the bottom plate 60 on the circumference.

  The bottom plate 60 is formed in a circular shape having a larger diameter than the outer diameter of the grinding wheel 74. As shown in FIG. 5, the lower surface side of the bottom plate 60 is notched in a columnar shape with a predetermined depth, for example, and a grip that the operator grips when using the attachment / detachment jig 6 is provided at the center thereof. A portion 600 is formed. Although the gripping part 600 may not be formed on the bottom plate 60, the operator can grip the gripping part 600 during the detaching operation of the grinding wheel 74, so that handling when using the attaching / detaching jig 6 is facilitated.

  On the upper surface of the bottom plate 60, a substantially truncated cone-shaped base portion 601 on which the wheel base support portion 61 is disposed is erected. For example, the wheel base support portion 61 is directed upward from the upper surface of the base portion 601. And a cylindrical outer shape formed integrally. The upper surface 601a of the base 601 is an annular inclined surface that faces the inclined surface 741c of the wheel base 741 and is inclined at an angle that matches the inclination angle of the inclined surface 741c (see FIG. 4).

In the present embodiment, the wheel base support portion 61 is in a state where the upper surface (circular surface 611) is in contact with the lower surface 746b of the flange portion 746, which is an area inside the grindstone mounting portion 741b on the lower surface of the wheel base 741. The wheel base 741 is supported. The diameter of the circular surface 611 is set to be slightly smaller than the outer diameter of the brim portion 746, for example.
The wheel base support part 61 is not limited to the example in this embodiment. For example, by adjusting the height (thickness) of the wheel base support portion 61, the circular surface 611 contacts the lower surface 746 b of the collar portion 746, and the base portion 601 of the bottom plate 60 contacts the inclined surface 741 c of the wheel base 741. The attaching / detaching jig 6 may support the grinding wheel 74 in a state where the annular upper surface 601a is in contact.

  As shown in FIG. 5, the attaching / detaching jig 6 according to the present embodiment includes, for example, advancing / retracting means 64 for advancing and retracting a pin 62 on the bottom plate 60 in the axial direction (Z-axis direction) of the spindle 70 of the grinding means 7. The advancing / retracting means 64 includes a spring 640 that urges the pin 62 in a direction (+ Z direction) to jump out from the bottom plate 60, and a spring accommodating portion 641 that accommodates the spring 640 in an extendable manner. That is, the annular upper surface 601a of the base portion 601 of the bottom plate 60 has a plurality of accommodation holes (for example, six with 60 degrees each) having a depth that can accommodate the pins 62 and the springs 640 at regular intervals in the circumferential direction. It is formed, and the accommodation hole becomes the spring accommodation portion 641.

  In the spring accommodating portion 641, the spring 640 disposed below the pin 62 is a compression coil spring that accumulates an urging force that tries to push the pin 62 fixed to the upper end side upward by contracting. The pin 62 fixed to the upper end side of each spring 640 has a size to engage with the supply port 743 of the grinding wheel 74.

The detachable jig 6 in the present embodiment includes an annular side wall 65 that stands on the outer peripheral edge of the upper surface of the bottom plate 60 and surrounds the outer periphery of the grinding wheel 74 supported by the wheel base support portion 61. The annular side wall 65 is set to a value corresponding to the height of the grinding wheel 74. Due to the annular side wall 65, it is possible to prevent a mistake that an operator inadvertently touches and damages the grinding wheel 740 of the grinding wheel 74 accommodated in the attaching / detaching jig 6.
The bottom plate 60 and the annular side wall 65 form a grindstone accommodation portion 650 that accommodates a plurality of grinding stones 740 attached to the grindstone attachment portion 741b of the wheel base 741. The grindstone storage portion 650 is configured such that the lower surface and the outer surface of the plurality of grinding wheels 740 mounted on the grindstone mounting portion 741b are the bottom plate 60 with the wheel base support portion 61 supporting the lower surface 746b of the flange portion 746. The dimensions are set so as not to contact the annular side wall 65.
The attaching / detaching jig 6 may be configured not to include the annular side wall 65 as shown in FIG.

Below, the case where the grinding wheel 74 is attached to the wheel mount 73 using the attachment / detachment jig 6 according to the present invention described above will be described.
First, as shown in FIG. 2, the grinding wheel 74 is conveyed onto the attachment / detachment jig 6 by an unillustrated operator's hand, the lower surface of the grinding wheel 74 faces the upper surface of the attachment / detachment jig 6, and the grinding wheel The center of rotation of 74 and the center of the attachment / detachment jig 6 substantially coincide with each other, and the grinding wheel 74 is attached to the attachment / detachment jig 6 so that each supply port 743 of the grinding wheel 74 faces each pin 62 of the attachment / detachment jig 6. Is positioned above.

  As the grinding wheel 74 is lowered, the grinding wheel 740 is housed in the grinding wheel housing portion 650, and the six pins 62 of the attachment / detachment jig 6 enter the six supply ports 743 of the grinding wheel 74, respectively. As shown in FIG. 7, the relative rotation of the grinding wheel 74 with respect to the attachment / detachment jig 6 is restricted. And the wheel base support part 61 will be in the state which supported the wheel base 741 by making the circular surface 611 of the wheel base support part 61 contact | abut to the lower surface 746b of the collar part 746 of the grinding wheel 74. FIG.

On the other hand, when the positions of the pin 62 and the supply port 743 in the circumferential direction are shifted and the pin 62 cannot enter the supply port 743, the inclined surface 741 c of the grinding wheel 74 pushes the pin 62 downward, and the spring 640. The pin 62 is accommodated in the spring accommodating portion 641 in the bottom plate 60 while contracting. The spring 640 stores an urging force that causes the pin 62 to jump out from the bottom plate 60 in the + Z direction. Then, the circular surface 611 of the wheel base support portion 61 is brought into contact with the lower surface 746 b of the flange portion 746 of the grinding wheel 74.
In this state, the operator rotates the grinding wheel 74 on the attachment / detachment jig 6 so that the positions of the pin 62 and the supply port 743 in the circumferential direction are aligned, so that the pin 62 accommodated in the bottom plate 60 is spring-loaded. The urging force of 640 enters the supply port 743, and the relative rotation of the grinding wheel 74 with respect to the attachment / detachment jig 6 is restricted.

As described above, the bottom plate 60 is provided with the advancing / retreating means 64 for advancing and retreating the pin 62 in the Z-axis direction. When the wheel base support portion 61 supports the wheel base 741 and the pin 62 cannot enter the supply port 743 when the wheel base support portion 61 supports the wheel base 741, the spring 640 is contracted to reduce the pin 62. Since the pin 62 accommodated in the bottom plate 60 and the pin 62 and the supply port 743 are aligned, the pin 62 accommodated in the bottom plate 60 can enter the supply port 743 by the biasing force of the spring 640. Preventing the pin 62 from damaging the lower surface (inclined surface 741c) of the grinding wheel 74 when the 62 cannot enter the supply port 743 It can be.
The center alignment of the center of the grinding wheel 74 and the center of the attachment / detachment jig 6 is performed by adjusting the outer surface of the wheel base support 61 of the attachment / detachment jig 6 and the inner surface (inclination) of the wheel base 741 of the grinding wheel 74. The contact is made between the surface 741c and the lower surface 746b of the brim portion 746 and an annular inner peripheral surface that intersects the lower surface 746b perpendicularly. Further, when centering is performed, the pin 62 does not need to enter the supply port 743. That is, when the centering is performed with the grinding wheel 74 placed on the attaching / detaching jig 6, the pin 62 is accommodated in the attaching / detaching jig 6 and the grinding wheel 74 is later attached to the wheel mount 73. When the grinding wheel 74 is rotated in the attachment / detachment jig 6 and the supply port 743 and the pin 62 coincide with each other, the pin 62 accommodated in the bottom plate 60 protrudes upward by the biasing force of the spring 640 and the supply port 743. And the relative rotation of the grinding wheel 74 with respect to the attachment / detachment jig 6 is restricted. The attaching / detaching jig 6 may have a configuration including only one pin 62.

  As described above, in the state where the circular surface 611 of the wheel base support portion 61 is brought into contact with the lower surface 746b of the flange portion 746 of the grinding wheel 74 and the pin 62 enters the supply port 743, the attachment / detachment jig 6 is The grinding wheel 74 is accommodated in a state where it can be attached to the wheel mount 73.

  As shown in FIG. 7, the operator positions the grinding wheel 74 below the wheel mount 73 in a state where the grinding wheel 74 is accommodated in the attachment / detachment jig 6. That is, the upper surface 741a of the grinding wheel 74 faces the lower surface 73b of the wheel mount 73, and the rotation center of the grinding wheel 74 and the rotation center of the wheel mount 73 substantially coincide with each other. The grinding wheel 74 is positioned below the wheel mount 73 so that the two notches 746 c face the wheel hooking portions 731 a of the wheel mount 73.

Next, as shown in FIG. 8, the grinding wheel 74 is lifted through the attachment / detachment jig 6, the opening 742 of the grinding wheel 74 is inserted into the convex portion 731 of the wheel mount 73, and two flange portions 746 are provided. After inserting the notch 746c into the wheel hooking portion 731a, the grinding wheel 74 is rotated together with the attaching / detaching jig 6. As a result, the lower surface 746b of the brim portion 746 is supported by the wheel hooking portion 731a protruding to the lower surface 746b side of the brim portion 746. Therefore, the grinding wheel 74 is supported by the wheel hooking portion 731a even if the detachable jig 6 is removed, for example.
The circular surface 611 of the attaching / detaching jig 6 is pushed downward by the wheel hooking portion 731a by the thickness of the wheel hooking portion 731a. Therefore, although the circular surface 611 is separated from the lower surface 746b of the flange portion 746, the state in which the six pins 62 of the attachment / detachment jig 6 enter the six supply ports 743 of the grinding wheel 74 is maintained, and The state where the relative rotation of the grinding wheel 74 is restricted is also maintained.

Further, the operator rotates the grinding wheel 74 together with the attaching / detaching jig 6 to overlap the plurality of bolt insertion holes 730 formed in the wheel mount 73 and the plurality of female screw holes 744 provided in the wheel base 741. Align so that. Here, the grinding wheel 74 accommodated in the attachment / detachment jig 6 is not rotated by the pin 62 in the attachment / detachment jig 6, so that the positioning is easy.
Then, as shown in FIG. 8, by inserting fastening bolts 79 from a plurality of bolt insertion holes 730 formed in the wheel mount 73 and screwing them into a plurality of female screw holes 744 provided in the wheel base 741, A grinding wheel 74 can be attached to the lower surface 73 b of the wheel mount 73. In addition, the flow path 70b opened on the lower surface 73b of the wheel mount 73 and the annular groove 745 formed on the upper surface 741a of the wheel base 741 are in communication with each other.

  Thereafter, by lowering the attachment / detachment jig 6 downward, the pin 62 is removed from the supply port 743, the attachment / detachment jig 6 is detached from the grinding wheel 74, and the grinding means 7 can grind the wafer W shown in FIG. become.

  As described above, the attachment / detachment jig 6 according to the present invention supports the bottom plate 60 and the region (the lower surface 746b of the brim portion 746) that is disposed on the bottom plate 60 and located on the lower surface of the wheel base 741 from the grindstone mounting portion 741b. And a bottom plate on the circumference having the same diameter as the circumference on which the supply port 743 is disposed so as to face the supply port 743 of the wheel base 741 supported by the wheel base support 61. 60, the pin 62 enters the supply port 743 of the wheel base 741 when the grinding wheel 74 is accommodated in the attachment / detachment jig 6, and the attachment / detachment jig 6, the grinding wheel 74 does not rotate. Therefore, when the grinding wheel 74 accommodated in the attachment / detachment jig 6 is attached to the wheel mount 73 with the fastening bolt 79, the female screw hole 744 of the grinding wheel 74 that does not rotate in the attachment / detachment jig 6 and the bolt insertion hole of the wheel mount 73. Alignment with 730 is facilitated, so that trouble is not required for the mounting work.

  The attachment / detachment jig 6 includes an annular side wall 65 that stands on the outer peripheral edge of the bottom plate 60 and surrounds the outer periphery of the grinding wheel 74 supported by the wheel base support portion 61. The wheel base 741 is formed by the bottom plate 60 and the annular side wall 65. When the grinding wheel 74 accommodated in the attachment / detachment jig 6 is attached to the wheel mount 73 by forming the grinding wheel accommodation portion 650 that accommodates the plurality of grinding wheels 740 attached to the grinding stone attachment portion 741b, the operator The grinding wheel 740 is not inadvertently touched, and the grinding wheel 740 can be prevented from being damaged.

Below, the case where the wafer W shown in FIG. 1 is ground with the grinding apparatus 1 is demonstrated.
First, the wafer W is placed on the holding surface 30 of the chuck table 3 and sucked and held. Next, the chuck table 3 holding the wafer W moves to below the grinding means 7, and the wafer W and the grinding means 7 are aligned so that the rotational trajectory of the grinding wheel 740 passes through the rotation center of the wafer W. .
As the spindle 70 is rotationally driven by the motor 72 shown in FIG. 1, the grinding wheel 74 rotates. Further, the grinding means 7 is sent in the −Z direction by the grinding feed means 5, and the grinding wheel 740 that rotates is brought into contact with the back surface Wb of the wafer W to perform grinding. Further, since the chuck table 3 rotates around the axis in the Z-axis direction, the wafer W held on the holding surface 30 also rotates, so that the entire back surface Wb of the wafer W is ground.

  During grinding, grinding water is supplied to the contact portion between the grinding wheel 740 and the wafer W through the flow path 70 a in the spindle 70, the flow path 70 b of the wheel mount 73, the annular groove 745 of the grinding wheel 74, and the supply port 743. Then, the contact portion between the grinding wheel 740 and the back surface Wb of the wafer W is cooled and cleaned.

After the back surface Wb of the wafer W is ground by a predetermined amount, the grinding means 7 is pulled up in the + Z direction by the grinding feed means 5 and the grinding wheel 740 is separated from the wafer W.
Since the grinding wheel 740 is worn by performing the grinding process as described above on the plurality of wafers W, the grinding wheel 74 is removed from the wheel mount 73 and a new grinding wheel 74 is attached.

  When removing the grinding wheel 74 from the wheel mount 73, first, as shown in FIG. 9, the operator removes the fastening bolt 79 from the grinding wheel 74 and the wheel mount 73. Since the grinding wheel 74 is supported by the wheel hooking portion 731a (see FIG. 8), it does not fall from the wheel mount 73.

Next, the operator positions the attachment / detachment jig 6 below the grinding wheel 74. Then, the attachment / detachment jig 6 is lifted, and the six pins 62 of the attachment / detachment jig 6 are respectively entered into the six supply ports 743 of the grinding wheel 74. In this state, the grinding wheel 74 is rotated via the attaching / detaching jig 6 so that the wheel hook portion 731a provided on the wheel mount 73 and the two notches 746c of the flange portion 746 of the grinding wheel 74 overlap each other. . As a result, the wheel hooking portion 731a is detached from the two notches 746c of the flange portion 746, and the circular surface 611 of the wheel base support portion 61 comes into contact with the lower surface 746b of the flange portion 746 of the grinding wheel 74, so 6 is in a state where the grinding wheel 74 is accommodated.
Then, the attaching / detaching jig 6 is lowered to separate the grinding wheel 74 from the lower surface 73 b of the wheel mount 73. Thus, since an operator does not touch the grinding wheel 74 directly, the grinding wheel 74 is prevented from being damaged.

  Thereafter, the new grinding wheel 74 is attached to the wheel mount 73 using the attachment / detachment jig 6 in the same manner as described above.

  The attaching / detaching jig 6 according to the present invention is not limited to the above embodiment, and the shape and size of each component of the grinding means 7 or the attaching / detaching jig 6 shown in the attached drawings are also described. However, the present invention is not limited to this, and can be appropriately changed within a range in which the effect of the present invention can be exhibited.

W: Wafer
1: Grinding device 10: Base 11: Column 3: Chuck table 30: Holding surface 39: Cover 5: Grinding feed means
7: Grinding means 70: Spindle 70a: Flow path 71: Housing 72: Motor
73: Wheel mount 70b: Flow path 730: Bolt insertion hole 731: Convex portion 731a: Wheel hooking portion 74: Grinding wheel 740: Grinding wheel
741: Wheel base 741b: Grindstone mounting portion 741c: Inclined surface 742: Opening 744: Female screw hole 746: Collar portion 746b: Bottom surface of brim portion 746c: Notch 75: Holder 79: Fastening bolt 6: Detachment jig 60: Bottom plate 600: gripping portion 601: base
61: Wheel base support portion 611: Circular surface 62: Pin
64: Advance / Retreat means 640: Spring 641: Spring accommodating part
65: annular side wall 650: whetstone housing

Claims (3)

A chuck table for holding the wafer; and a grinding means for grinding the wafer held on the chuck table. The grinding means includes a spindle, a wheel mount disposed at a lower end of the spindle, A grinding wheel that is detachably mounted on the lower surface, the grinding wheel comprising: an annular wheel base; and a plurality of grinding wheels mounted on an annular grindstone mounting portion on an outer peripheral portion of the lower surface of the wheel base; A plurality of concentric circles and a supply port for supplying grinding water to the grinding wheel, and the wheel base is fastened to the lower surface of the wheel mount. In a grinding apparatus attached by a bolt, an attachment / detachment jig for attaching / detaching the grinding wheel,
A base plate, a wheel base support portion that is disposed on the bottom plate and supports a region on the lower surface of the wheel base inside the grinding wheel mounting portion, and the supply of the wheel base supported by the wheel base support portion A grinding wheel attachment / detachment jig comprising: a pin disposed on the bottom plate on a circumference having the same diameter as the circumference on which the supply port is disposed so as to face the mouth. Comprising an annular side wall that surrounds the outer periphery of the grinding wheel that is erected on the outer peripheral edge of the bottom plate and supported by the wheel base support portion;
The grinding wheel attachment / detachment jig according to claim 1, wherein the bottom plate and the annular side wall form a grinding wheel housing portion that houses the plurality of grinding wheels mounted on the grinding wheel mounting portion of the wheel base. Advancing and retracting means for advancing and retracting the pin in the axial direction of the spindle on the bottom plate;
The advancing / retreating means includes a spring that urges the pin in a direction to protrude from the bottom plate, and a spring accommodating portion that accommodates the spring in an expandable manner, and the wheel base support portion supports the wheel base. Sometimes when the pin cannot enter the supply port, the spring is contracted to accommodate the pin in the bottom plate, and when the pin and the supply port are aligned, the pin accommodated in the bottom plate is removed. The grinding wheel attachment / detachment jig according to claim 1 or 2, wherein the spring is made to enter the supply port by a biasing force of the spring.

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