JP7033030B2 - Tool management jig - Google Patents

Description

The present invention relates to a jig for managing tools such as a wrench.

In the semiconductor device manufacturing process, a plurality of regions are partitioned by scheduled division lines called streets arranged in a grid pattern on the surface of a semiconductor wafer having a substantially circular shape, and devices such as ICs and LSIs are placed in the partitioned regions. Form. Then, by cutting the semiconductor wafer along the street, the region where the device is formed is divided to manufacture individual semiconductor devices. The back surface of the wafer thus divided is ground by a grinding device before being cut along the street, and the wafer is processed to a predetermined thickness.

The grinding device for grinding the back surface of the semiconductor wafer includes a chuck table provided with a holding surface for holding the wafer, a grinding means for grinding the wafer held on the chuck table, and the grinding means on the holding surface of the chuck table. It is equipped with a grinding feed mechanism that feeds the grinding in the direction perpendicular to the direction (vertical direction).
The grinding means includes a rotary spindle, a wheel mount provided at the lower end of the rotary spindle, and a grinding wheel detachably mounted on the lower surface of the wheel mount. The grinding wheel is composed of an annular wheel base and a plurality of grinding wheels fixed to the lower surface of the wheel base. Then, the operator uses a wrench to fix the wheel base to the lower surface of the wheel mount with fastening bolts. (See, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2003-181767

In a grinding device as described above, the position where the holding surface of the chuck table and the grinding surface of the grinding wheel come into contact with each other in the grinding feed direction is set as a reference position, and the reference position is used to grind the work piece such as a wafer (finishing). Thickness) is controlled.

This reference alignment is called a so-called setup, and for example, a gauge having a predetermined thickness (for example, a gauge that the operator grinds the grindstone in a direction approaching the chuck table, that is, lowers it and puts it between the grindstone and the chuck table). It is carried out manually using a block gauge), and is an indispensable work every time a new grinding wheel is installed. If the reference alignment work has not been performed after the grinding wheel is installed, the reference position data of the previously installed grinding wheel remains in the grinding device, and the grinding wheel and chuck are used when the workpiece is ground. There is a risk that the device will break down due to contact with the table.

Therefore, there is a problem that the operator does not forget the reference alignment work which is indispensable after attaching the grinding wheel to the wheel mount.

In the present invention for solving the above problems, a wrench for fastening a fastening bolt used when attaching a grinding wheel to a grinding device and a chuck surface for sucking and holding a work piece and a grinding surface of the grinding wheel are used. It is a tool management jig that can centrally manage the gauge used for reference alignment. It is a box-shaped jig with a recess that can store the gauge on one side, and a wrench is placed on the opposite side of the surface where the recess is formed. A gauge and a grinding wheel used for reference alignment are composed of a tool holding unit having at least three or more protrusions that can be held, and a cover unit that covers the recess that houses the gauge of the tool holding unit. It is a tool management jig that prevents the operator from forgetting the reference alignment work performed after mounting the grinding wheel by centrally managing the wrench used for mounting.

In the tool management jig according to the present invention, a plurality of through holes are formed on one surface of the cover unit, and the cover unit can be used as a fastening bolt management jig by inserting the neck portion of the fastening bolt into the through holes. It is preferable that it can also be used.

The tool management jig according to the present invention makes it possible to centrally manage the gauge used for reference alignment and the wrench used for mounting the grinding wheel, so that the operator forgets the reference alignment work performed after mounting the grinding wheel. It is possible to prevent it from being lost. Further, since the gauge and the wrench are centrally managed, the work procedure can be known even when a worker who does not know that the reference alignment work is indispensable after replacing the grinding wheel. Further, the tool management jig according to the present invention can prevent one of the tools from being forgotten to be prepared or dropped when being carried, and improves the workability of replacing the grinding wheel.

In the tool management jig according to the present invention, since a plurality of through holes are formed on one surface of the cover unit, the cover unit can also be used as a fastening bolt management jig.

It is a perspective view which shows a part of an example of a grinding apparatus. It is an exploded perspective view which shows an example of a grinding means. It is a perspective view which shows an example of the tool holding unit which constitutes a tool management jig, the cover unit which constitutes a tool management jig, a wrench, a fastening bolt, and a gauge. It is sectional drawing which shows an example of a gauge. It is a perspective view explaining a tool management jig and a wrench in a state where a tool holding unit is combined with a cover unit. FIG. 6A is a perspective view showing a state in which the gauge and the wrench are centrally managed by the tool management jig from the tool management jig side. FIG. 6B is a perspective view showing a state in which the gauge and the wrench are centrally managed by the tool management jig from the wrench side. FIG. 7A is a plan view showing a state in which the gauge and the wrench are centrally managed by the tool management jig from the tool management jig side. FIG. 7B is a plan view showing a state in which the gauge and the wrench are centrally managed by the tool management jig from the wrench side. It is a perspective view which shows the state which the cover unit of a tool management jig is used as a fastening bolt management jig.

The grinding device 1 shown in FIG. 1 is a device for grinding a workpiece W such as a semiconductor wafer held on a chuck table 30 by a rotating grinding wheel 74 of a grinding means 7, and is a device base 10 and a device base. It is provided with a column 11 erected at the rear (+ Y direction side) on the 10.

The grinding device 1 is provided with a turntable 17 on the device base 10, and for example, a plurality of (one in the illustrated example) chuck tables 30 are arranged at equal intervals in the circumferential direction on the upper surface of the turntable 17. It is set up. A rotation axis (not shown) for rotating the turntable 17 is arranged at the center of the turntable 17, and the turntable 17 can be rotated around the rotation axis. By rotating the turntable 17, each chuck table 30 can be revolved and moved to a position below the grinding means 7.

The chuck table 30 arranged on the turntable 17 has, for example, a circular outer shape and has an upper surface 30a made of a porous member or the like. The upper surface 30a communicates with a suction source (not shown), and the suction force generated by the suction source sucks is transmitted to the upper surface 30a, so that the chuck table 30 sucks and holds the workpiece W on the upper surface 30a. do. Further, the chuck table 30 can rotate around the axis in the Z-axis direction (vertical direction) on the turntable 17.

A grinding feed means 5 for moving the grinding means 7 in the Z-axis direction is arranged on the front surface of the column 11. The grinding feed means 5 includes a ball screw (not shown) having an axial center in the Z-axis direction, a pair of guide rails 51 arranged in parallel with the ball screw, a motor 52 connected to the upper end of the ball screw to rotate the ball screw, and the inside. The nut is screwed into the ball screw and the side portion is in sliding contact with the guide rail 51. When the motor 52 rotates the ball screw (not shown), the elevating plate 53 guides the guide rail 51 accordingly. Then, it reciprocates in the Z-axis direction, and the grinding means 7 fixed to the elevating plate 53 is grounded and fed in the Z-axis direction.

The grinding device 1 includes, for example, a grinding feed position detecting means 2 for detecting the position of the grinding means 7 moved by the grinding feed means 5. The grinding feed position detecting means 2 is, for example, a scale fixed to the column 11 and extending in the moving direction (Z-axis direction) of the grinding means 7, and a scale fixed to the elevating plate 53 and moving together with the elevating plate 53 along the scale. It is equipped with a reading unit that reads the scale of. The reading unit is, for example, an optical type that reads the reflected light of the scale formed on the scale, detects the scale on the scale, and detects the height position of the grinding means 7 in the Z-axis direction.

The grinding means 7 for grinding the workpiece W held on the chuck table 30 includes a spindle 70 whose axial direction is the Z-axis direction, and a housing 71 that rotatably supports the spindle 70 and is fixed to the elevating plate 53. A motor 72 for rotationally driving the spindle 70, a circular plate-shaped wheel mount 73 arranged at the lower end of the spindle 70, and a grinding wheel 74 detachably mounted on the lower surface of the wheel mount 73 are provided.

As shown in FIG. 2, inside the spindle 70, a flow path 70a that communicates with a grinding water supply source (not shown) and serves as a passage for grinding water is formed so as to penetrate in the axial direction (Z-axis direction) of the spindle 70. The flow path 70a further communicates with the flow path 70b formed in the wheel mount 73. A plurality of flow paths 70b are formed inside the wheel mount 73 in a direction orthogonal to the axial direction of the spindle 70 and at regular intervals in the circumferential direction of the wheel mount 73 (only two are shown in FIG. 2). The lower end side of each flow path 70b is open in the outer peripheral side region of the lower surface of the wheel mount 73, respectively.

In the region on the outer peripheral side of the wheel mount 73, a plurality of (for example, four at 90 degree intervals) bolt insertion holes 730 are formed through in the thickness direction (Z-axis direction) at regular intervals in the circumferential direction. ..
For example, in the central region of the lower surface of the wheel mount 73, a circular fitting portion (not shown) that fits into the opening 742 of the grinding wheel 74 is formed to have a predetermined thickness.

As shown in FIG. 2, the grinding wheel 74 includes an annular wheel base 741, and the wheel base 741 has a circular opening 742 that penetrates in the thickness direction.
In the region on the outer peripheral side of the upper surface of the wheel base 741, a plurality of female screw holes 744 (for example, four at 90-degree intervals) are formed at regular intervals in the circumferential direction toward the thickness direction. Each female screw hole 744 corresponds to each bolt insertion hole 730 provided in the wheel mount 73.

As shown in FIG. 2, in the region on the outer peripheral side of the lower surface of the wheel base 741, a plurality of grinding wheels 740 are annularly fixed with an appropriate adhesive with a gap of a predetermined width at equal intervals in the circumferential direction. There is. Each grinding wheel 740 is formed into a substantially rectangular parallelepiped shape, for example, with diamond abrasive grains or the like fixed to it by a resin bond, a metal bond, or the like.

A grinding water supply port 745 facing the opening of each flow path 70b on the lower surface of the wheel mount 73 penetrates into a region on the inner peripheral side of the region on the upper surface of the wheel base 741 where each female screw hole 744 is formed. It is formed so that grinding water can be supplied from the grinding water supply port 745 toward the grinding wheel 740.

The tool management jig 6 shown in FIG. 3 includes a wrench 8 for fastening a fastening bolt 79 used when attaching the grinding wheel 74 to the grinding device 1 shown in FIG. 1, and a grinding surface (lower surface) of the grinding wheel 740 of the grinding wheel 74. ) And the gauge 9 used for reference alignment with the upper surface 30a of the chuck table 30 that attracts and holds the workpiece W can be centrally managed.

The wrench 8 is, for example, a torque wrench or a ratchet wrench. It is provided with an arranged head portion 82. A square drive 820 to which a socket (not shown) that engages with the drive surface (outer surface) of the head 791 of the fastening bolt 79 to be attached is attached to the head portion 82 is arranged together with a gear or the like. The configuration of the wrench 8 is not limited to the example shown in this embodiment. For example, the main body portion 80 and the grip portion 81 may be formed in a columnar shape. Further, the head portion 82 may also be of a so-called monkey type, and instead of a square drive 820 or a gear, a driver for inserting into a hexagonal hole formed in the head 791 of the fastening bolt 79 is arranged. It may be provided.

The gauge 9 is called a block gauge (reference piece having a predetermined thickness), and is formed in the shape of a substantially rectangular plate having a rectangular outer shape. The lower surface of the gauge 9 is flat, and the upper surface is formed in three steps from the lowest step portion 91 to the middle step portion 92 and the highest step portion 93 in a stepped manner. Each step portion 91 to 93 is parallel to the lower surface, and the heights 91a, 92a, 93a shown in FIG. 4 are accurately recognized in advance. For example, the height 91a is 5000 μm, the height 92a is 5010 μm, and the height 93a is 5020 μm.

The tool management jig 6 includes a box-shaped tool holding unit 60 made of, for example, a resin such as engineering plastic, and having a recess 600 formed on one surface 60a (upper surface in FIG. 3) capable of accommodating a gauge 9. The recess 600 formed on one surface 60a of the tool holding unit 60 is formed, for example, in a size and depth capable of accommodating the entire gauge 9.

At least three or more (three in this embodiment, only two are shown) protrusions 603 that can hold the wrench 8 are formed on the facing surface 60b of the one side 60a of the tool holding unit 60 in the Z-axis direction. .. The shape of the protrusion 603 is, for example, a square hook shape that matches the shape of the main body 80 of the wrench 8, but is not limited thereto.
The protrusion 603 can be rotated from the outside to the inside by a spring or the like (not shown), so that the protrusion 603 can be opened on the facing surface 60b when the wrench 8 is held by the tool holding unit 60. You may.

The cover unit 62 that covers the recess 600 for accommodating the gauge 9 of the tool holding unit 60 shown in FIG. 3 is, for example, hung from the rectangular plate-shaped top plate 620 and the outer peripheral portion of the lower surface of the top plate 620 in the −Z direction. It is provided with two side plates 621 and the like. A support portion 623a is formed on the lower end side of the two side plates 621 so as to slightly project toward the accommodating portion 623 side (inside) of the cover unit 62.
For example, a plurality of through holes 620a (for example, eight in the example shown in FIG. 3) in which the fastening bolts 79 are inserted and held are formed on one surface (upper surface) of the top plate 620 of the cover unit 62. The through hole 620a is formed to have a diameter larger than the diameter of the neck portion 790 of the fastening bolt 79 and a diameter smaller than the diameter of the head portion 791 of the fastening bolt 79.

As shown in FIG. 5, by inserting the tool holding unit 60 into the accommodating portion 623 of the cover unit 62, the recess 600 in which the gauge 9 of the tool holding unit 60 is housed is covered, and the tool holding unit 60 is covered. The facing 60b is in a state of being supported by the support portion 623a of the cover unit 62.
Further, as shown in FIGS. 6 (A) and 6 (B) and FIGS. 7 (A) and 7 (B), the main body 80 of the wrench 8 is aligned with the facing 60b of the tool holding unit 60, and the main body 80 is projected 603. The wrench 8 and the gauge 9 are centrally managed by the tool management jig 6 by being supported by the tool management jig 6.

Hereinafter, the grinding wheel 74 is attached to the wheel mount 73 shown in FIG. 2 by the operator using the wrench 8 and the gauge 9 in a state of being centrally controlled by the tool management jig 6, and then the grinding means shown in FIG. A case where the reference alignment work of No. 7 is performed will be described.

At the time of the above installation work, the operator brings the tool management jig 6 in a state where the wrench 8 and the gauge 9 are centrally managed to the work place, and as shown in FIG. 3, the tool holding unit 60 for accommodating the gauge 9 and the cover. Separate the unit 62, the wrench 8 and the gauge 9.
Further, by inserting the fastening bolt 79 into the through hole 620a formed in the top plate 620 of the cover unit 62 and using the cover unit 62 as the fastening bolt management jig as shown in FIG. 8, the fastening bolt 79 can be used. Make sure that it can be taken out immediately and that it does not roll and fall and disappear.

The operator positions the grinding wheel 74 shown in FIG. 2 below the wheel mount 73. That is, the upper surface of the grinding wheel 74 faces the lower surface of the wheel mount 73, and the center of rotation of the grinding wheel 74 and the center of rotation of the wheel mount 73 substantially coincide with each other.
Next, the grinding wheel 74 is lifted and the opening 742 of the grinding wheel 74 is inserted into a fitting portion (not shown) formed on the lower surface of the wheel mount 73.

Further, the operator rotates the grinding wheel 74 to align the plurality of bolt insertion holes 730 formed in the wheel mount 73 with the plurality of female screw holes 744 provided in the wheel base 741 so as to overlap each other. ..
Then, the fastening bolt 79 is pulled out from the cover unit 62, and as shown in FIG. 2, the fastening bolt 79 is inserted from the plurality of bolt insertion holes 730 formed in the wheel mount 73, and a plurality of fastening bolts 79 are provided on the wheel base 741. The grinding wheel 74 can be attached to the lower surface of the wheel mount 73 by screwing it into the female screw hole 744 (see FIG. 1). Further, the operator uses a wrench 8 to tighten the fastening bolt 79 so as not to loosen it. Further, the flow path 70b that opens on the lower surface of the wheel mount 73 and the grinding water supply port 745 formed on the upper surface of the wheel base 741 are in communication with each other.

Next, the operator moves on to the reference alignment work of the grinding means 7 shown in FIG. The gauge 9 shown in FIG. 3 is placed on the upper surface 30a of the chuck table 30, the grinding means 7 to which the grinding wheel 74 is attached is lowered by the grinding feed means 5, and the grinding wheel 740 is placed on the grinding surface (lower surface) of the gauge 9. It approaches the upper surface of any step portion 91 to 93, and stores, for example, the height position (origin position) of the grinding means 7 detected by the grinding feed position detecting means 2 at the time of contacting the step portion 91. .. Then, the height 91a of the step portion 91 of the gauge 9 with which the grinding wheel 740 is in contact is set in the grinding device 1 as the distance between the upper surface 30a of the chuck table 30 and the grinding surface of the grinding wheel 740 of the grinding wheel 74. ..

As described above, the tool management jig 6 according to the present invention is performed after the grinding wheel 74 is attached by making it possible to centrally manage the gauge 9 used for reference alignment and the wrench 8 used for attaching the grinding wheel 74. It is possible to prevent the operator from forgetting the reference alignment work. Further, since the gauge 9 and the wrench 8 are centrally managed, the work procedure can be known even when a worker who does not know that the reference alignment work is indispensable after the replacement of the grinding wheel 74 works. .. Further, the tool management jig 6 according to the present invention can prevent one of the tools from being forgotten to be prepared or dropped when being carried, and improves the workability of replacing or attaching the grinding wheel 74.

Needless to say, the tool management jig 6 according to the present invention is not limited to the above-described embodiment, and may be implemented in various different forms within the scope of the technical idea. Further, the components of the grinding device 1, the wrench 8, and the gauge 9 shown in the attached drawings are not limited to this, and can be appropriately changed within the range in which the effects of the present invention can be exhibited.
The grinding performed by the grinding device 1 also includes polishing (dry polishing and CMP polishing) of the workpiece W with a polishing pad made of a non-woven fabric such as felt.

1: Grinding device 10: Equipment base 11: Column 17: Turntable 30: Chuck table 5: Grinding feed means 8: Grinding feed position detection means 7: Grinding means 70: Spindle 71: Housing 72: Motor
73: Wheel mount 730: Bolt insertion hole 74: Grinding wheel 740: Grinding wheel 741: Wheel base 742: Opening 744: Female screw hole 745: Grinding water supply port
79: Fastening bolt 790: Neck
2: Grinding feed position detecting means 2
6: Tool management jig 60: Tool holding unit 600: Recessed portion 60a: One side of the tool holding unit 60b: Facing the tool holding unit 603: Protrusion 62: Cover unit 620: Top plate 621: Side plate 623: Accommodating part 623a: Support part 620a: Through hole 8: Wrench 80: Main body 81: Grip 82: Head 820: Square drive 9: Gauge 91-93: Step

Claims (2)

Centralized management of the wrench that fastens the fastening bolts used when attaching the grinding wheel to the grinding device and the gauge used for reference alignment between the grinding surface of the grinding wheel and the upper surface of the chuck table that attracts and holds the workpiece. A possible tool management jig
A box-shaped tool holding unit having a recess for accommodating the gauge on one surface, and a tool holding unit having at least three protrusions capable of holding a wrench on the opposite surface of the recessed surface.
It is composed of a cover unit that covers the recess that houses the gauge of the tool holding unit.
A tool management jig that prevents workers from forgetting the reference alignment work performed after mounting the grinding wheel by centrally managing the gauge used for reference alignment and the wrench used to mount the grinding wheel. A claim characterized in that a plurality of through holes are formed on one surface of the cover unit, and the cover unit can also be used as a fastening bolt management jig by inserting the neck portion of the fastening bolt into the through holes. Item 1. The tool management jig according to item 1.

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