JP2018069344A - Grinding wheel detachable jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attach/detach a grinding wheel to/from a mount from a lower side by a screw without contacting a grindstone.SOLUTION: A grinding wheel detachable jig (70), which is used when a grinding wheel (41) in which plural grindstones (60) are annularly arranged on a wheel base (42) with a flange, is fitted to a mount (34) of a grinder, is so configured as to comprise: a cylindrical jig body (71) in which a storage part (72) for storing the grindstone is formed; a support pin (74) which is protruded on a top face of the jig body so as to be inserted in two through holes of plural through holes (46) of the flange of the wheel base; and a screw entrance and exit part (75) in which an outer periphery of the jig body is notched so as to expose the remaining through holes downward thereby enabling entrance/exit of a screw (77) into/from the through hole.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a grinding wheel attaching / detaching jig used when attaching / detaching a grinding wheel from a grinding apparatus.

  In the grinding apparatus, a grinding wheel in which grinding wheels are arranged in an annular shape is mounted on a mount at the tip of a spindle. A normal grinding wheel is attached to a mount by inserting a bolt from above into a through hole formed in the mount, and screwing the tip of the bolt protruding downward from the through hole into a screw hole of the grinding wheel. A grinding wheel protection jig that protects a grinding wheel of a grinding wheel when the grinding wheel is mounted has been proposed (for example, see Patent Document 1). In the grinding wheel protection jig described in Patent Document 1, an annular housing portion is formed so as to cover the outer periphery and the bottom surface of the grinding wheel, and the grinding wheel is protected by the housing portion over the entire circumference.

JP 2011-121128 A

  By the way, in some grinding apparatuses, a grinding wheel is attached to the mount from below with a bolt. In such a grinding wheel, it is necessary to insert a bolt into a through hole formed in the grinding wheel from below, and screw the tip of the bolt protruding upward from the through hole into the screw hole of the mount. However, the grinding wheel protection jig described in Patent Document 1 is not compatible with such a grinding wheel, and a bolt interferes with the grinding wheel holding jig so that the grinding wheel is screwed to the mount from below. Can not do it. Further, if the grinding wheel is to be mounted without using a jig, the operator's hand may be touched.

  The present invention has been made in view of such points, and an object of the present invention is to provide a grinding wheel attaching / detaching jig capable of attaching / detaching a grinding wheel to / from a mount from below with a screw without touching a grinding wheel. One.

  A grinding wheel mounting tool according to an aspect of the present invention is a grinding wheel attaching / detaching jig that mounts a grinding wheel in which a grinding wheel is annularly arranged on a disc-shaped base on a mount, and the mount includes the mount of the mount. Three or more screw holes arranged at an equal angle with respect to the center are provided, and the grinding wheel has three or more through holes that allow the screws to pass through correspondingly to the screw holes outside the annular grinding wheel. The grinding wheel attaching / detaching jig includes a housing part for housing the grinding wheel, a mounting part for mounting the base, and a support pin inserted into at least two through holes to support the grinding wheel; A screw insertion / removal portion that allows the screw to enter and leave the through hole in which the support pin is not inserted.

  According to this configuration, the support pin of the grinding wheel attachment / detachment jig is inserted into at least two through holes of the grinding wheel, and the base of the grinding wheel is placed in a positioning state on the placement portion of the grinding wheel attachment / detachment jig. . At this time, the grinding wheel of the grinding wheel is housed and protected in the housing portion of the grinding wheel attaching / detaching jig, and the grinding wheel attaching / detaching jig is inserted into the through hole of the grinding wheel in which the support pin of the grinding wheel attaching / detaching jig is not inserted. The screw insertion / extraction part is positioned. Therefore, when the grinding wheel is screwed to the mount from below, the screw does not interfere with the grinding wheel attaching / detaching jig. In this way, the grinding wheel can be mounted on the mount of the grinding apparatus by holding the grinding wheel attaching / detaching jig without touching the grinding wheel.

  According to the present invention, by supporting the grinding wheel with the grinding wheel attaching / detaching jig, the grinding wheel can be mounted on the mount of the grinding device without touching the grinding wheel.

It is a perspective view of the grinding device of this embodiment. It is a perspective view of the grinding wheel and grinding wheel attachment-and-detachment jig | tool of this Embodiment. It is explanatory drawing of mounting | wearing operation | movement of the grinding wheel of this Embodiment. It is a schematic diagram of the mount and grinding wheel of a modification.

  Hereinafter, the grinding apparatus according to the present embodiment will be described with reference to the accompanying drawings. FIG. 1 is a perspective view of the grinding apparatus of the present embodiment. In the following description, the grinding device is not limited to the configuration described in FIG. 1 as long as the grinding wheel can be screwed to the mount from below.

  As shown in FIG. 1, the grinding apparatus 1 performs TAIKO (registered trademark) grinding on the wafer W on the holding table 15 using a small grinding wheel 41 in which a large number of grinding wheels 60 are arranged in an annular shape. It is configured. TAIKO grinding refers to a process of forming a ring-shaped convex portion by thinning while leaving the outer peripheral region of the wafer W. The thinned wafer W is reinforced by the ring-shaped convex portion, and warpage of the wafer W and problems during transportation are prevented. The wafer W is not limited to a semiconductor wafer or an optical device wafer, and may be a plate-like object to be ground, and is carried into the grinding apparatus 1 with the protective tape T attached.

  A rectangular opening extending in the X-axis direction is formed on the upper surface of the base 10 of the grinding apparatus 1, and this opening is covered with a movable plate 11 and a bellows-shaped waterproof cover 12 that can move together with the holding table 15. ing. Below the waterproof cover 12, ball screw type advancing / retreating means (not shown) for moving the holding table 15 back and forth in the X-axis direction is provided. The holding table 15 is connected to a rotating means (not shown) and is configured to be rotatable by driving the rotating means. On the upper surface of the holding table 15, a holding surface 16 that sucks and holds the wafer W is formed by a multi-porous porous ceramic material.

  The column 18 on the base 10 is provided with a grinding feed means 21 for grinding and feeding the grinding means 31 to the holding table 15 in the Z-axis direction. The grinding feed means 21 has a pair of guide rails 22 arranged in the column 18 and parallel to the Z-axis direction, and a motor-driven Z-axis table 23 slidably installed on the pair of guide rails 22. . Nut portions (not shown) are formed on the back side of the Z-axis table 23, and a ball screw 24 is screwed to these nut portions. The ball screw 24 is rotationally driven by a drive motor 25 connected to one end of the ball screw 24, whereby the grinding means 31 is moved along the guide rail 22 in the Z-axis direction.

  The grinding means 31 is attached to the front surface of the Z-axis table 23 via a housing 32, and is configured to rotate the grinding wheel 41 about the central axis by the spindle 33. The spindle 33 is a so-called air spindle, and rotatably supports the spindle shaft via high-pressure air inside the casing. A mount 34 is connected to the tip of the spindle shaft, and a small grinding wheel 41 for TAIKO grinding in which a large number of grinding wheels 60 are arranged in an annular shape is mounted on the mount 34. The grinding wheel 60 is formed by solidifying diamond abrasive grains with a binder such as metal bond or resin bond.

  The height position of the grinding means 31 is measured by a linear scale 61. The linear scale 61 measures the height position of the grinding means 31 by reading the scale of the scale part 63 provided on the surface of the guide rail 22 by the reading part 62 provided on the Z-axis table 23. Further, a thickness measuring unit 65 for measuring the thickness of the wafer W is provided on the upper surface of the base 10. The thickness measuring means 65 brings a pair of contacts 66 and 67 into contact with the holding surface 16 of the holding table 15 and the upper surface of the wafer W, and from the difference between the holding surface height of the holding table 15 and the upper surface height of the wafer W, The thickness is measured.

  In addition, the grinding apparatus 1 is provided with a control unit 69 that controls each part of the apparatus. The control unit 69 includes a processor that executes various processes, a memory, and the like. The memory is composed of one or a plurality of storage media such as a ROM (Read Only Memory) and a RAM (Random Access Memory) depending on the application. In this grinding apparatus 1, the central portion excluding the outer peripheral portion of the wafer W is thinned to a predetermined thickness by pressing the grinding wheel 60 disposed on the small grinding wheel 41 against the wafer W while rotating it. At this time, the grinding feed amount is controlled based on the measurement results of the linear scale 61 and the thickness measuring means 65.

  In such a grinding apparatus 1 for TAIKO grinding, unlike a normal grinding apparatus, the grinding wheel 41 is attached to the mount 34 by being screwed from below. When the grinding wheel 41 is directly gripped and attached to the mount 34 of the grinding apparatus 1, the operator's hand may touch the grinding wheel 60. In particular, the grinding wheel for finishing has a weaker bonding force of the abrasive grains than the grinding wheel for rough grinding, so that there is a possibility that the grinding wheel will be lost when touching the grinding wheel. Further, the grinding wheel 41 for TAIKO has a different wheel diameter depending on the wafer size, and it is difficult to prepare a dedicated attaching / detaching jig that serves as a protective cover for each wheel diameter.

  Therefore, the present applicant pays attention to the fact that the diameter of the TAIKO grinding wheel 41 varies depending on the wafer size, but the diameter of the flange attached to the mount 34 of the grinding apparatus 1 does not change, and all wheel diameters are changed. A grinding wheel attaching / detaching jig 70 that can be covered has been devised (see FIG. 2). By supporting the grinding wheel 41 with the grinding wheel attaching / detaching jig 70, the grinding wheel 41 can be attached to the mount 34 of the grinding apparatus from below without touching the grinding wheel. In addition, since the flange of the grinding wheel 41 is supported by the grinding wheel attaching / detaching jig 70, it is not necessary to prepare the grinding wheel attaching / detaching jig 70 for each wafer size.

  Hereinafter, the grinding wheel and the grinding wheel attaching / detaching jig will be described with reference to FIG. FIG. 2 is a perspective view of the grinding wheel and the grinding wheel attaching / detaching jig of the present embodiment. In addition, in FIG. 2, although the example which illustrated two types of grinding wheels from which a wheel diameter differs is shown, a wheel diameter is not specifically limited.

  As shown in FIG. 2, the grinding wheels 41 and 51 have different wheel diameters of the cylindrical portions 43 and 53 of the wheel bases 42 and 52 with flanges, and are changed to the mount 34 according to the wafer size to be ground. Used. A plurality of grinding wheels 60 are annularly arranged below the cylindrical portions 43 and 53 of the wheel bases 42 and 52, and a flange portion 44 extending radially outward is formed above the cylindrical portions 43 and 53. 54 are connected. The upper surfaces of the flange portions 44 and 54 are mounting surfaces 45 and 55 to be mounted on the mount 34 of the grinding apparatus 1, and the mount 34 has four screw holes 36 at an equal angle centered on the center of the mount 34. Is formed.

  In the flange portions 44 and 54 of the grinding wheels 41 and 51, four through holes 46 through which screws are passed in correspondence with the screw holes 36 of the mount 34 outside the cylindrical portions 43 and 53 (a plurality of grinding wheels 60). , 56 are formed. The grinding wheels 41 and 51 are screwed into the mount 34 by inserting screws into the through holes 46 and 56 of the flange portions 44 and 54 from below and tightening the screws into the screw holes 36 in the mount 34. Thus, although the grinding wheels 41 and 51 have different wheel diameters, the flange portions 44 and 54 have the same diameter, and the through holes 46 corresponding to the screw holes 36 of the mount 34 are located at the same locations of the flange portions 44 and 54. , 56 are formed.

  The grinding wheel attaching / detaching jig 70 is used to attach the grinding wheels 41 and 51 to the mount 34, and two opposing portions of the outer peripheral surface of the cylindrical jig main body 71 are notched flat. Yes. The inner side of the jig main body 71 is opened so that the cylindrical portions 43 and 53 of the wheel bases 42 and 52 enter, and becomes an accommodating portion 72 in which the grinding stone 60 disposed in the cylindrical portions 43 and 53 is accommodated. ing. The upper surface of the jig body 71 is a mounting portion 73 on which the flange portions 44 and 54 of the wheel bases 42 and 52 are mounted. The parts 44 and 54 are supported from below over the entire circumference.

  Two support pins 74 protrude from the mounting portion 73 of the jig body 71 so as to correspond to the two through holes 46 and 56 facing each other among the four through holes 46 and 56 of the flange portions 44 and 54. ing. By inserting each support pin 74 into the through holes 46 and 56 of the flange portions 44 and 54, the grinding wheel 41 is supported in a positioning state with respect to the jig body 71. Further, the jig body 71 is flattened at portions corresponding to the remaining through holes 46 and 56 in which the support pins 74 are not inserted among the four through holes 46 and 56 of the flange portions 44 and 54. Yes. The notch portion is a screw insertion / extraction portion 75 that allows the screw to enter and exit when the grinding wheels 41, 51 are attached to the mount 34.

  In this way, the support pins 74 of the jig body 71 are positioned in the through holes 46 and 56 of the flange portions 44 and 54, and the grinding wheels 41 and 51 are placed on the placement portion 73 of the jig body 71. At this time, the distance from the mounting portion 73 of the jig main body 71 to the lower surface is larger than the distance from the lower surface of the flange portions 44 and 54 to the grinding surface, and the grinding stone 60 protrudes from the lower surface of the jig main body 71. There is no. Further, the two through holes 46 and 56 of the flange portions 44 and 54 are exposed at the screw insertion / extraction portion 75 of the jig main body 71, and a work space is secured when the grinding wheels 41 and 51 are screwed to the mount 34. Therefore, the grinding wheels 41 and 51 can be attached to the mount 34 without touching the grinding wheel 60.

  Next, with reference to FIG. 3, the mounting operation of the grinding wheel with respect to the mount of the grinding apparatus will be described. FIG. 3 is an explanatory diagram of the mounting operation of the grinding wheel of the present embodiment. 3A and 3B is a cross-sectional view of the grinding wheel attachment / detachment jig cut along the aa plane in FIG. 2, and the grinding wheel attachment / detachment jig of FIG. 3C is cut along the bb plane in FIG. FIG.

  As shown in FIG. 3A, the grinding wheel 41 and the grinding wheel attaching / detaching jig 70 are brought close to each other so that the cylindrical portion 43 of the grinding wheel 41 enters the accommodating portion 72 of the grinding wheel attaching / detaching jig 70. At this time, the direction of the grinding wheel attaching / detaching jig 70 is adjusted with respect to the grinding wheel 41 so that the through hole 46 of the flange portion 44 of the grinding wheel 41 is positioned on the support pin 74 of the grinding wheel attaching / detaching jig 70. . The cylindrical portion 43 of the grinding wheel 41 enters the housing portion 72 of the grinding wheel attaching / detaching jig 70, and the support pin 74 of the grinding wheel attaching / detaching jig 70 enters the through hole 46 of the flange portion 44, whereby the grinding wheel 41 is ground. A wheel attaching / detaching jig 70 is attached.

  As shown in FIG. 3B, when the flange portion 44 of the grinding wheel 41 is placed on the placement portion 73 of the grinding wheel attaching / detaching jig 70, the cylindrical portion 43 of the grinding wheel 41 is accommodated in the grinding wheel attaching / detaching jig 70. Part 72 is accommodated. At this time, since the grinding wheel 60 disposed on the grinding wheel 41 is positioned above the lower surface of the grinding wheel attaching / detaching jig 70, the grinding wheel 60 is entirely protected by the grinding wheel attaching / detaching jig 70. Further, since the support pins 74 of the grinding wheel attaching / detaching jig 70 are inserted into the through holes 46 of the grinding wheel 41, the orientation of the grinding wheel 41 is fixed and the rattling of the grinding wheel attaching / detaching jig 70 is prevented.

  As shown in FIG. 3C, when the grinding wheel attaching / detaching jig 70 is viewed from another direction, the flat screw-out portion 75 of the grinding wheel attaching / detaching jig 70 is positioned directly below the through hole 46 of the grinding wheel 41. It has been. When the grinding wheel 41 is mounted, the grinding wheel attaching / detaching jig 70 is held, the grinding wheel 41 is brought close to the mount 34, and a screw 77 is inserted into the through hole 46 in which the support pin 74 is not inserted. At this time, since the screw insertion / extraction portion 75 is cut away so as to avoid the screw 77, the flange portion 44 can be screwed to the mount 34 without the screw 77 interfering with the grinding wheel attaching / detaching jig 70.

  When the grinding wheel 41 is screwed at two places on the mount 34, the grinding wheel attaching / detaching jig 70 is removed from the grinding wheel 41, and the grinding wheel 41 is screwed at the remaining two places on the mount 34. Thus, by using the grinding wheel attaching / detaching jig 70, the operator's hand does not touch the grinding wheel 60, and the grinding wheel 41 is prevented from being damaged. Further, since the grinding wheel attaching / detaching jig 70 is partially cut out and the two through holes 46 of the grinding wheel 41 are exposed downward, the grinding wheel 41 is screwed to the mount 34 through the through holes 46. be able to.

  Since the grinding wheel 41 having a large wheel diameter and the grinding wheel 51 having a small wheel diameter (see FIG. 2) have the same flange diameter, the grinding wheel 51 is also mounted on the mount 34 in the same procedure as the above mounting operation. be able to. Since the grinding wheel attaching / detaching jig 70 can cover different wheel diameters, it is not necessary to prepare the grinding wheel attaching / detaching jig 70 for each wheel diameter (for each wafer size). Further, the grinding wheel attaching / detaching jig 70 can protect the grinding wheel 60 not only when the grinding wheels 41 and 51 are attached to the mount 34 but also when the grinding wheels 41 and 51 are detached or carried.

  As described above, in the grinding wheel attaching / detaching jig 70 of the present embodiment, the grinding wheel 60 of the grinding wheel 41 is housed and protected in the housing portion 72 of the grinding wheel attaching / detaching jig 70, and the grinding wheel 41 penetrates. The screw insertion / extraction part 75 of the grinding wheel attaching / detaching jig 70 is positioned in the hole 46. Therefore, the screw 77 does not interfere with the grinding wheel attaching / detaching jig 70 when the grinding wheel 41 is screwed to the mount 34 from below. Thus, the grinding wheel 41 can be mounted on the mount 34 of the grinding apparatus 1 by holding the grinding wheel attaching / detaching jig 70 without touching the grinding wheel 60.

  In the present embodiment, since the mounting surface of the mount 34 and the mounting surface of the grinding wheel 41 are flat, it is difficult to align the through hole 46 of the grinding wheel 41 with the screw hole 36 of the mount 34. That is, the centers of the mount 34 and the grinding wheel 41 must be aligned with each other, and if the mount 34 and the grinding wheel 41 are not aligned in the circumferential direction, the grinding wheel 41 is inserted into the screw hole 36 of the mount 34. The through hole 46 is not positioned. Therefore, the mounting surface of the mount and the mounting surface of the grinding wheel may be positioned so that the centers of the mount and the grinding wheel coincide with each other.

  For example, as shown in FIG. 4A, a recess 83 having a size corresponding to the flange diameter of the grinding wheel 86 may be formed on the mounting surface 82 of the mount 81. Thus, by fitting the flange portion 87 of the grinding wheel 86 inside the recess 83 of the mount 81, the centers of the mount 81 and the grinding wheel 86 coincide with each other, so that only the circumferential direction of the mount 81 and the grinding wheel 86 can be adjusted. In this case, the through hole 88 of the grinding wheel 86 can be easily positioned in the screw hole 84 of the mount 81. Further, as shown in FIG. 4B, a convex portion 93 may be provided on the mounting surface 92 of the mount 91, and a concave portion 98 into which the convex portion 93 is inserted may be provided on the mounting surface 97 of the grinding wheel 96.

  As described above, the positioning convex portion is provided as the first positioning portion on one of the mounting surface of the mount and the mounting surface of the grinding wheel, and the other is engaged with the first positioning portion. A positioning recess may be provided as the positioning portion. Further, by forming the outer peripheral surfaces of the positioning convex portion and the positioning concave portion in a polygonal shape, not only the centers of the mount and the grinding wheel but also the circumferential directions of the mount and the grinding wheel may be made to coincide at the same time.

  Moreover, in this Embodiment, although it was set as the structure by which four screw holes are formed in a mount, it is not limited to this structure. It is sufficient that at least three or more screw holes are formed in the mount at an equal angle around the center of the mount. Therefore, it is sufficient that at least three or more through holes are formed in the grinding wheel corresponding to the screw holes of the mount.

  Moreover, in this Embodiment, although the inner side of the jig | tool main body of the grinding wheel attachment / detachment jig is penetrated and the accommodating part is formed, it is not limited to this structure. The accommodating part should just be able to accommodate a grinding wheel, for example, the accommodating part inside a jig | tool main body may be formed in the bottomed cylinder shape.

  Moreover, in this Embodiment, although it was set as the structure by which two support pins protrude in the grinding wheel attachment / detachment jig, it is not limited to this structure. The grinding wheel attaching / detaching jig only needs to be provided with support pins to be inserted into at least two through holes of the grinding wheel. For example, three support pins may be provided in a protruding manner.

  Moreover, in this Embodiment, although the screw insertion / extraction part of the grinding wheel attachment / detachment jig | tool was notched and formed in the outer peripheral surface of a jig | tool main body, it is not limited to this structure. The screw insertion / extraction portion may be configured to allow the screw to enter and exit the through hole of the grinding wheel in which the support pin is not inserted, and the outer periphery of the jig main body is formed so as to avoid the through hole. Good.

  Moreover, although each embodiment of the present invention has been described, as the other embodiment of the present invention, the above embodiment and modifications may be combined in whole or in part.

  The embodiments of the present invention are not limited to the above-described embodiments and modifications, and various changes, substitutions, and modifications may be made without departing from the spirit of the technical idea of the present invention. Furthermore, if the technical idea of the present invention can be realized in another way by technological advancement or another derived technique, the method may be used. Accordingly, the claims cover all embodiments that can be included within the scope of the technical idea of the present invention.

  Moreover, although this Embodiment demonstrated the structure which applied this invention to the attachment / detachment jig of a grinding wheel, it is also possible to apply to the attachment / detachment jig of the processing tool which attaches / detaches a processing tool, without touching a processing surface. It is.

  As described above, the present invention has an effect that the grinding wheel can be attached to and detached from the mount with a screw without touching the grinding wheel. In particular, the grinding wheel for TAIKO grinding is mounted. It is useful for a grinding wheel attachment / detachment jig that attaches / detaches.

34 Grinding machine mount 36 Mount screw hole 41, 51 Grinding wheel 42, 52 Wheel base (base)
44, 54 Flange part 46, 56 Through hole in flange part 60 Grinding wheel 70 Grinding wheel attachment / detachment jig 71 Jig body 72 Storage part 73 Placement part 74 Support pin 75 Screw insertion / extraction part 77 Screw

Claims (1)

A grinding wheel attaching / detaching jig for mounting a grinding wheel having a circular grinding wheel disposed on a disk-shaped base on a mount,
The mount includes three or more screw holes arranged at an equal angle around the center of the mount,
The grinding wheel includes three or more through holes that allow the screws to pass outside the annular grinding wheel so as to correspond to the screw holes,
The grinding wheel attachment / detachment jig is
A housing portion for housing the grinding wheel, a placement portion for placing the base, a support pin inserted into at least two of the through holes to support the grinding wheel, and the penetration in which the support pin is not inserted A grinding wheel attaching / detaching jig comprising a screw insertion / extraction portion that allows a screw to enter and exit from a hole.

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