JP2021010988A - Grindstone part protection member and wheel case - Google Patents

Abstract

To reduce the risk of damage to a grinding stone when the repair and the like of a component of a grinding attachment are performed in a state in which a grinding unit is mounted on a spindle via a wheel mount.SOLUTION: A grindstone part protection member is used to protect a grindstone part of a grinding attachment that comprises a spindle for being fitted with a grinding wheel having an annular wheel base and the grindstone part annularly provided on one surface of the wheel base. The grindstone part protection member comprises a cover member capable of accommodating the one surface side of the wheel base in the state of covering the grindstone part, and a fixture for fixing a position of the cover member with respect to the wheel base.SELECTED DRAWING: Figure 3

Description

The present invention relates to a grindstone portion protecting member that protects the grindstone portion of the grinding wheel, and a wheel case that can accommodate the grinding wheel.

In order to grind a workpiece such as a semiconductor wafer, for example, a grinding device is used. The grinding apparatus usually includes a chuck table that sucks and holds the workpiece, and a grinding unit that is arranged above the chuck table.

The grinding unit has a cylindrical spindle that is rotatably housed in a cylindrical spindle housing. A rotary drive source for rotating the spindle is connected to the upper end of the spindle. Further, the upper surface side of the wheel mount is connected to the lower end side of the spindle.

A grinding wheel is connected to the lower surface side of the wheel mount. The grinding wheel has, for example, an annular wheel base made of a metal such as aluminum, and a plurality of grinding wheels arranged in an annular shape on one side located on the opposite side of the wheel mount.

By the way, when mounting a grinding wheel on a wheel mount, an operator generally manually mounts the grinding wheel. Therefore, there is a risk that the operator may accidentally collide the grinding wheel with a part of the grinding device to damage the grinding wheel, or the tool used for mounting work may accidentally collide with the grinding wheel to damage the grinding wheel.

Therefore, in order to prevent damage to the grinding wheel when the grinding wheel is mounted on the wheel mount, a method of fixing the other surface side of the grinding wheel to the lower surface side of the wheel mount while using a protective member that protects the lower portion of the grinding wheel. Is known (see, for example, Patent Document 1).

The protective member is provided with a substantially columnar handle on the surface opposite to the surface facing the grinding wheel. Further, an engaging protrusion is provided on the lower surface side of the wheel mount, and an elongated hole for engaging with the engaging protrusion is provided on the other surface side of the grinding wheel.

The operator grips the handle of the protective member and rotates the grinding wheel together with the protective member while the protective member supports one side of the grinding wheel. As a result, the engaging protrusion of the wheel mount and the elongated hole of the grinding wheel are engaged with each other, and the grinding wheel is temporarily fixed to the wheel mount. After temporary fixing, securely fix the grinding wheel and wheel mount with fixing members such as bolts. After the fixing work is completed, the protective member is removed from the grinding wheel to complete the mounting work.

When grinding the workpiece, the chuck table is rotated in a predetermined direction while the surface side of the workpiece is held by the holding surface of the chuck table. Further, the grinding wheel is lowered together with the spindle in a state where the grinding wheel is rotated in a predetermined direction with the spindle as a rotation axis. Then, the back surface of the wafer is ground by pressing the grinding wheel against the back surface of the wafer.

By the way, below the grinding unit, in addition to the holding table, components such as a thickness measuring instrument and a grinding water supply nozzle are provided. In order to avoid deterioration of grinding accuracy and grinding defects in the grinding device, it is necessary to repair, inspect, and clean each component.

JP-A-2008-207277

When repairing, inspecting, cleaning, etc. of each component while the grinding wheel is mounted on the spindle via the wheel mount, there is a risk that the operator may accidentally damage the grinding wheel with tools used for the work. If the grinding wheel is damaged, it is necessary to reattach a new grinding wheel, which increases the work time. In addition, the cost increases by the amount of the new grinding wheel.

The present invention has been made in view of the above problems, and reduces the risk of damage to the grinding wheel when repairing a component of the grinding device while the grinding unit is mounted on the spindle via a wheel mount. The purpose is to do.

According to one aspect of the present invention, the grindstone portion of a grinding device including a spindle on which a grinding wheel having an annular wheel base and a grindstone portion provided in an annular shape on one surface of the wheel base is mounted. A cover member that is used to protect the wheel base and can accommodate the one side of the wheel base while covering the grindstone portion, and the cover member with respect to the wheel base. A grindstone portion protective member including a fixture for fixing the position is provided.

Preferably, the fixture is at least one of a screw hole provided on the lower end side of the spindle and a screw hole on the wheel mount with the upper surface side connected to the lower end side of the spindle and the lower surface side connected to the wheel base. A bolt that can be fastened to a spindle, or a clamp that can fix the cover member to the wheel mount.

According to another aspect of the present invention, the wheel case is a wheel case capable of accommodating a grinding wheel having an annular wheel base and a grindstone portion provided in an annular shape on one surface of the wheel base. Is a cover member capable of accommodating the one side of the wheel base while covering the grindstone portion, and a lid covering the other side of the wheel base located on the side opposite to the one side of the wheel base. A member and a fixture for fixing the cover member and the lid member are provided, and by fixing the cover member and the lid member with the fixture, the wheel base becomes the cover member. Provided is a wheel case that is sandwiched between the lid member and the position of the cover member and the wheel base with respect to the lid member is fixed.

The grindstone portion protecting member according to one aspect of the present invention includes a cover member capable of accommodating one surface side of the wheel base while covering the grindstone portion, and a fixture for fixing the position of the cover member with respect to the wheel base. And. When repairing a component of the grinding device while the grinding wheel is fixed to the wheel base, the position of the cover member can be fixed to the wheel base while the grindstone portion is protected by the cover member. Therefore, the operator can perform work such as repair with both hands while reducing the risk of damage to the grindstone portion.

It is a partial cross-sectional side view of a grinding apparatus. It is a top view of a chuck table and the like. FIG. 3A is a perspective view of the protective member, and FIG. 3B is a partial cross-sectional side view of the protective member. FIG. 4A is a partial cross-sectional side view of the protective member or the like when the protective member is fixed to the spindle, and FIG. 4B is a partial cross-sectional side view of the protective member or the like after the protective member is fixed to the spindle. It is a figure. It is a partial cross-sectional side view of a protective member or the like which concerns on a modification. 6 (A) is a perspective view of the lid member, FIG. 6 (B) is a cross-sectional view of the cover member and the lid member, and FIG. 6 (C) is a cover member in a state where the grinding wheel is housed in the wheel case. It is a cross-sectional view of a lid member and the like.

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, the grinding apparatus 2 will be described with reference to FIGS. 1 and 2. FIG. 1 is a partial cross-sectional side view of the grinding device 2. The grinding device 2 has a substantially rectangular parallelepiped base 4 that supports a plurality of components.

A substantially disk-shaped chuck table 10 is provided on the base 4. The chuck table 10 has a frame body 10a made of ceramics. A flow path is provided in the frame body 10a, and one end of the flow path is connected to a suction source (not shown) such as an ejector.

The frame body 10a has a recess formed by a disk-shaped space on the upper surface side. A substantially disk-shaped porous plate 10b is fixed to this recess. The porous plate 10b has a flat circular lower surface and a substantially conical upper surface.

The other end of the flow path of the frame body 10a is connected to the porous plate 10b. When the suction source is operated, a negative pressure is generated on the upper surface of the porous plate 10b, and the workpiece or the like is sucked and held on the upper surface. Therefore, the upper surface of the chuck table 10 functions as a holding surface 10c.

A disk-shaped table base 12 is connected to the lower surface side of the chuck table 10. A θ table 14 having a drive mechanism (not shown) such as a motor is connected to the lower surface side of the table base 12. By operating this drive mechanism, the chuck table 10 rotates around a predetermined rotation shaft 10d.

One fixed support member 16a and two movable support members 16b are provided on the lower surface side of the table base 12. One fixed support member 16a and two movable support members 16b are connected to the table base 12 in a state of being separated by 120 degrees in the circumferential direction of the table base 12.

Although the height of the upper end of the fixed support member 16a is fixed, the height of the upper end of the movable support member 16b can be moved in the vertical direction. By adjusting the heights of the upper ends of the two movable support members 16b, the rotation shaft 10d of the chuck table 10 can be tilted by a predetermined angle with respect to the vertical direction.

A thickness measuring unit 18 is provided on the side of the chuck table 10. The thickness measuring unit 18 has a first height measuring device 18a provided above the frame body 10a and a second height measuring device 18b provided above the porous plate 10b.

For example, the height of the upper surface of the frame body 10a is measured by the first height measuring device 18a, and the height of the upper surface of the workpiece held by the holding surface 10c is measured by the second height measuring device 18b. .. Then, the thickness of the workpiece is calculated by calculating the difference between the height of the upper surface of the workpiece and the height of the upper surface of the frame body 10a.

A grinding water supply unit 19 is provided at a position different from the thickness measuring unit 18 on the side portion of the chuck table 10. The grinding water supply unit 19 is connected to a grinding water supply source (not shown) that stores grinding water such as pure water.

The grinding water supply unit 19 is provided so as to have a first pipe portion provided along the vertical direction and a second pipe portion bent approximately 90 degrees from the upper end of the first pipe portion toward the rotation axis 10d of the chuck table 10. Including the pipe part of. A nozzle 19a is provided at the tip of the second pipe portion.

A rectangular parallelepiped column 6 is provided on the rear side (one side in the X-axis direction) of the base 4. A grinding feed unit 20 is provided on the front side (the other side in the X-axis direction) of the column 6. The grinding feed unit 20 has a pair of guide rails 20a parallel to the height direction of the column 6.

Each guide rail 20a is fixed to the front surface of the column 6. A moving plate 20b is slidably attached to each guide rail 20a. A nut portion 20c is provided on the rear side of the moving plate 20b.

A ball screw 20d provided parallel to the height direction (Z-axis direction) of the column 6 is connected to the nut portion 20c in a rotatable manner. A pulse motor 20e is connected to one end of the ball screw 20d in the height direction. If the ball screw 20d is rotated by the pulse motor 20e, the moving plate 20b moves along the guide rail 20a.

A grinding unit 22 is provided on the front side of the moving plate 20b. The grinding unit 22 has a cylindrical holding member 22a. The holding member 22a is fixed to the front surface of the moving plate 20b.

A spindle housing 22b is provided inside the holding member 22a. An annular cushioning member 22c made of rubber or the like is provided below the spindle housing 22b. The spindle housing 22b is supported on the bottom surface of the holding member 22a via the cushioning member 22c.

A part of the spindle 22d is housed in the spindle housing 22b in a rotatable manner. A rotation drive mechanism (not shown) such as a motor is connected to the upper end of the spindle 22d.

A cylindrical opening 22f (see FIG. 4A) is formed inside the spindle 22d. A female screw is formed on the side surface 22h on the lower end side of the opening 22f. The opening 22f functions as a screw hole to which a bolt 40a, which will be described later, can be fastened.

The lower end of the spindle 22d is located below the bottom of the holding member 22a. The upper surface side of the disk-shaped wheel mount 22e is connected to the lower end side of the spindle 22d. A cylindrical opening 22g (see FIG. 4A) that penetrates from the upper surface to the lower surface of the wheel mount 22e is formed at the center of the wheel mount 22e when the wheel mount 22e is placed on the upper surface. The center of the circle with the opening 22g substantially coincides with the center of the circle with the opening 22f.

No female screw is formed on the side surface 22i of the opening 22g in the present embodiment. The opening 22g of the present embodiment is a hole (so-called clearance hole) larger than the diameter of the shaft portion of the bolt 40a. However, a female screw may be formed on the side surface 22i as well as the opening 22g.

A female screw may be formed on at least one of the side surface 22h of the opening 22f and the side surface 22i of the opening 22g. At least one of the opening 22f and the opening 22g on which the female screw is formed functions as a screw hole to which the bolt 40a described later can be fastened.

Inside the wheel mount 22e, a plurality of first flow paths (not shown) are formed radially from the opening 22g. The upper surface side of the annular grinding wheel 24 is mounted on the lower surface side of the wheel mount 22e.

The grinding wheel 24 has an annular wheel base 24a made of a metal such as aluminum. The wheel base 24a is connected to the lower surface side of the wheel mount 22e. That is, the grinding wheel 24 is mounted on the spindle 22d via the wheel mount 22e.

The wheel base 24a has a plurality of openings (not shown) discretely provided in the circumferential direction of the inner peripheral side surface. Each opening penetrates from the upper surface to the lower surface of the wheel base 24a and can be connected to the first flow path of the wheel mount 22e.

When the workpiece is ground by the grinding wheel 24, the grinding water is supplied from either one or both of the wheel base 24a and the grinding water supply unit 19. Whether to supply the grinding water from either one or both is determined according to the grinding conditions and the like. When the grinding water is supplied from the wheel base 24a, it passes through the grinding water supply path composed of the opening 22f, the first flow path, the opening of the wheel base 24a, etc., and the workpiece is processed from each opening of the wheel base 24a. Grinding water is supplied to.

A plurality of grinding wheels 24c (grindstone portions) are arranged in an annular shape on the lower surface (one surface) 24b of the wheel base 24a (so-called segment arrangement). An annular grinding wheel may be provided instead of the plurality of grinding wheels 24c (so-called continuous arrangement).

The grinding wheel 24 is arranged above the grinding water supply unit 19 in such a manner that a part of the annular lower surface 24b is located on the rotation center (intersection of the holding surface 10c and the rotation shaft 10d) of the chuck table 10. There is. FIG. 2 is a top view of the chuck table 10 and the like. Note that FIG. 2 simplifies the grinding wheel 24 and shows only a plurality of grinding wheels 24c.

When the rotation drive mechanism connected to the spindle 22d is driven, the grinding wheel 24 rotates around the axis of the spindle 22d. When the grinding unit 22 is lowered by using the grinding unit 22 and the grinding wheel 24c is pressed against the workpiece while the workpiece is held by the chuck table 10, the workpiece is ground.

Next, a protective member (grindstone portion protective member) 26 for protecting the grinding wheel 24c will be described with reference to FIGS. 3 (A), 3 (B), 4 (A), and 4 (B). To do. FIG. 3A is a perspective view of the protective member 26. Further, FIG. 3B is a partial cross-sectional side view of the protective member 26.

The protective member 26 has a cover member 28 that can cover the lower part of the grinding wheel 24. The cover member 28 is made of a resin material that is transparent to visible light, such as polyethylene terephthalate (PET).

The cover member 28 has a disk portion 30. The inner peripheral side surface of the cylindrical first cylindrical portion 32 is connected to the outer peripheral portion of the disk portion 30. One end of the first cylindrical portion 32 in the height direction protrudes from one surface 30a of the disk portion 30 on one side in the height direction of the first cylindrical portion 32. An annular convex portion 32a is formed on one end side of the first cylindrical portion 32 in the height direction.

An annular slope is formed inside and outside the top of the convex portion 32a, respectively. A plurality of cushioning pads 32b are discretely provided in the circumferential direction of the ring on the annular slope located outside the top.

The cushioning pad 32b is made of, for example, a foam of a synthetic resin such as polyurethane. The cushioning pad 32b is, for example, a resin sponge. The buffer pad 32b is provided at each of the positions of the disk portion 30 at 0 o'clock, 3 o'clock, 6 o'clock and 9 o'clock when the disk portion 30 is viewed from above.

The other end of the first cylindrical portion 32 protrudes from the other surface 30b (the surface located on the opposite side of the one surface 30a) of the disk portion 30 on the other side in the height direction of the first cylindrical portion 32. The inner peripheral side surface of the annular portion 34 is connected to the outer peripheral side surface on the other end side of the first cylindrical portion 32.

The other end side of the inner peripheral side surface of the second cylindrical portion 36 having an inner diameter larger than the outer diameter of the first cylindrical portion 32 is connected to the outer peripheral side surface of the annular portion 34. The second cylindrical portion 36 has substantially the same height as the first cylindrical portion 32, and one end of the second cylindrical portion 36 is located at substantially the same height as the top of the convex portion 32a of the first cylindrical portion 32.

The outer peripheral side surface of the first cylindrical portion 32, the inner peripheral side surface of the second cylindrical portion 36, and one surface 34a of the annular portion 34 connected to the outer peripheral side surface of the first cylindrical portion 32 and the inner peripheral side surface of the second cylindrical portion 36 are , Consists of an annular recess 38.

With the cover member 28 close to the wheel base 24a and the cushioning pad 32b in contact with the inner peripheral side surface of the wheel base 24a, the recess 38 has a sufficient depth so that the grinding wheel 24c does not contact one surface 34a. Have. The depth of the concave portion 38 (the depth from the top of the convex portion 32a of the first cylindrical portion 32 to the one surface 34a of the annular portion 34) is, for example, 5 mm or more and 30 mm or less.

Further, the recess 38 has a width larger than the width of the grinding wheel 24c. The inner diameter of the recess 38 (that is, the outer diameter of the first cylindrical portion 32) is, for example, 180 mm or more and 300 mm or less, and the outer diameter of the recess 38 (that is, the inner diameter of the second cylindrical portion 36) is larger than the inner diameter of the recess 38. Is also 10 mm or more and 40 mm or less larger.

At the center of one surface 30a of the disk portion 30, a cylindrical opening 30c that penetrates from one surface 30a to the other surface 30b is provided. The shaft portion of the bolt (fixing tool) 40a is inserted into the opening 30c. However, no female screw is formed on the side surface of the opening 30c of the present embodiment. The opening 30c is a hole (so-called clearance hole) having a diameter larger than the diameter of the shaft portion of the bolt 40a and smaller than the diameter of the head portion.

The bolt 40a is inserted into the opening 30c in such a manner that the lower neck (that is, the seat surface) of the head contacts the other surface 30b of the disk portion 30. In the present embodiment, in order to prevent the bolt 40a from falling, the nut 40b is attached to the shaft portion of the bolt 40a protruding from one surface 30a of the disk portion 30. However, in the protective member 26, the nut 40b is not essential and may be omitted.

The grinding wheel 24c is protected by mounting the protective member 26 on the grinding wheel 24 from below the grinding wheel 24. FIG. 4A is a partial cross-sectional side view of the protective member 26 and the like when the protective member 26 is fixed to the spindle 22d.

When the protective member 26 is attached to the grinding unit 22, the shaft portion of the bolt 40a is fastened to the female screw on the side surface 22h of the opening 22f with the grinding wheel 24c covered from below by the recess 38 of the cover member 28.

If a female screw is formed on the side surface 22i of the opening 22g in addition to the female screw on the side surface 22h of the opening 22f, the bolt 40a is fastened to the opening 22f and the opening 22g. Further, when the female screw is not formed on the side surface 22h of the opening 22f and the female screw is formed only on the side surface 22i of the opening 22g, the bolt 40a is fastened only to the opening 22g. In this way, the bolt 40a is fastened to at least one of the opening 22f and the opening 22g where the female screw is formed (that is, the screw hole).

As a result, the cover member 28 is fixed to the wheel base 24a. In the present embodiment, since the cover member 28 is transparent, the bolts 40a can be easily fastened as compared with the case where the cover member 28 is not transparent.

When the lower surface 24b side of the wheel base 24a is accommodated by the cover member 28, the cushioning pad 32b comes into contact with the inner peripheral side surface of the wheel base 24a. However, the disk portion 30, the first cylindrical portion 32, the annular portion 34, and the second cylindrical portion 36 of the cover member 28 do not come into contact with the grinding wheel 24c.

FIG. 4B is a partial cross-sectional side view of the protective member 26 and the like after the protective member 26 is fixed to the spindle 22d. The protective member 26 protects a plurality of grinding wheels 24c when a worker manually repairs or the like in a relatively narrow space directly under the grinding unit 22 with the grinding wheel 24 fixed to the wheel base 24a. Used to do.

In one example, the protective member 26 is used when repairing, inspecting, cleaning, adjusting the angle, etc. of the nozzle 19a of the grinding water supply unit 19. By fixing the position of the cover member 28 with respect to the wheel base 24a while the plurality of grinding wheels 24c are protected by the cover member 28, the plurality of grinding wheels 24c are repaired during work such as repairing the components of the grinding device 2. Can reduce the risk of damage. Further, since the operator does not need to support the protective member 26 with one hand, the work such as repair can be performed with both hands.

By the way, the fixture for fixing the cover member 28 to the wheel base 24a is not limited to the bolt 40a. Instead of the bolt 40a, a clamp (fixing tool) 42 may be provided on the outer peripheral side surface of the second cylindrical portion 36. FIG. 5 is a partial cross-sectional side view of the protective member 26 and the like according to the modified example.

The protective member 26 according to the modified example includes one clamp 42 fixed to one end side of the outer peripheral side surface of the second cylindrical portion 36 and a position advanced by 180 degrees in the circumferential direction of the outer peripheral side of the second cylindrical portion 36. It has another clamp 42 fixed to. However, the number of clamps 42 is not limited to two. Three or more clamps 42 may be provided on the cover member 28.

The clamp 42 has an arm portion 42a whose one end side is fixed to the cover member 28. The arm portion 42a has a rotating portion on one end side so that the arm portion 42a can rotate along the radial direction of the second cylindrical portion 36. An urging member such as a torsion spring is provided in this rotating portion.

The urging member urges the arm portion 42a so that, for example, when no external force is applied to the arm portion 42a, the arm portion 42a is tilted inward of the second cylindrical portion 36. Further, a flat plate-shaped pressing portion 42b provided so as to bend from the arm portion 42a to the disk portion 30 side is connected to the other end side of the arm portion 42a.

When the protective member 26 according to the modified example is attached to the grinding unit 22, the cover member 28 is raised until the cushioning pad 32b comes into contact with the inner peripheral side surface of the wheel base 24a. At this time, an external force in a direction opposite to the urging force is applied to the arm portion 42a so that the distance between the pair of pressing portions 42b is larger than the diameter of the wheel mount 22e.

After the cushioning pad 32b comes into contact with the inner peripheral side surface of the wheel base 24a, the external force applied to the arm portion 42a is reduced to zero. Then, the pressing portion 42b of the arm portion 42a is fixed to the wheel mount 22e by the urging force so as to partially cover the upper surface of the wheel mount 22e. In this way, the cover member 28 is fixed to the wheel mount 22e with the clamp 42.

The protective member 26 is not only mounted on the grinding unit 22, but may also be used as a part of a wheel case 44 (see FIG. 6C) that houses the grinding wheel 24 removed from the grinding unit 22.

In the wheel case 44, in addition to the protective member 26 accommodating the lower surface 24b side of the grinding wheel 24, the upper surface (other surface) 24d (see FIG. 6B) side located on the opposite side of the lower surface 24b of the grinding wheel 24. It has a lid member 46 that covers. FIG. 6A is a perspective view of the lid member 46.

The lid member 46 includes a disk portion 48 having a circular one surface 48a and another surface 48b, respectively. A cylindrical opening 48c is provided at the center of one surface 48a and the other surface 48b of the disk portion 48. A female screw is formed on the side surface 48d of the opening 48c. That is, the opening 48c functions as a screw hole. Further, the inner peripheral side surface of the cylindrical portion 50 is connected to the outer peripheral side surface of the disk portion 48.

When the grinding wheel 24 is housed in the wheel case 44, first, the lower surface 24b side of the grinding wheel 24 removed from the grinding unit 22 is covered with the protective member 26. Then, the upper surface 24d side of the grinding wheel 24 is covered with the lid member 46, and the bolt 40a is fastened to the opening 48c. As a result, the lid member 46 is fixed to the cover member 28 with bolts 40a.

FIG. 6B is a cross-sectional view of the cover member 28 and the lid member 46 and the like, and FIG. 6C is a cross-sectional view of the cover member 28 and the lid member 46 and the like in a state where the grinding wheel 24 is housed in the wheel case 44. It is a figure.

By fixing the cover member 28 and the lid member 46 with the bolt 40a, the grinding wheel 24 has the cushioning pad 32b provided on the cover member 28 and one surface 48a of the lid member 46 in the height direction of the grinding wheel 24. It is sandwiched by and fixed in the wheel case 44. That is, the position of the grinding wheel 24 is fixed with respect to the cover member 28 and the lid member 46.

The wheel case 44 may be composed of a protective member 26 having a clamp 42 instead of the bolt 40a, and a lid member 46. In this case, when the cover member 28 is fixed to the lid member 46 by the pressing portion 42b holding down the other surface 48b, the grinding wheel 24 is sandwiched between the cushioning pad 32b and one surface 48a of the lid member 46 to form a wheel case. It is fixed in 44.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as the scope of the object of the present invention is not deviated. For example, the protective member 26 may not be provided with the cushioning pad 32b. In this case, when the lower surface 24b side of the wheel base 24a is accommodated by the cover member 28, the convex portion 32a of the first cylindrical portion 32 comes into contact with the inner peripheral side surface of the wheel base 24a. Also in this case, the cover member 28 does not come into contact with the grinding wheel 24c.

Further, for example, the clamp 42 only needs to be able to fix the cover member 28 to the wheel mount 22e and the lid member 46, so that the shape of the pressing portion 42b is not limited to a flat plate shape. For example, the pressing portion 42b may have a claw portion at the tip portion. In this case, a recess that can be engaged with the claw portion is provided on the upper surface side of the wheel mount 22e and the lid member 46.

2 Grinding device 4 Base 6 Column 10 Chuck table 10a Frame 10b Porous plate 10c Holding surface 10d Rotating shaft 12 Table base 14 θ Table 16a Fixed support member 16b Movable support member 18 Thickness measuring unit 18a First height Measuring instrument 18b Second height measuring instrument 19 Grinding water supply unit 19a Nozzle 20 Grinding feed unit 20a Guide rail 20b Moving plate 20c Nut part 20d Ball screw 20e Pulse motor 22 Grinding unit 22a Holding member 22b Spindle housing 22c Cushioning member 22d Spindle 22e Wheel mount 22f Opening 22g Opening 22h Side surface 22i Side surface 24 Grinding wheel 24a Wheel base 24b Bottom surface 24c Grinding grindstone 24d Top surface 26 Protective member 28 Cover member 30 Disk part 30a One side 30b Other side 30c Opening 32 First cylindrical part 32a Pad 34 Circular part 34a One side 36 Second cylindrical part 38 Recess 40a Bolt (fixing member)
40b nut 42 clamp (fixing member)
42a Arm 42b Hold 44 Wheel case 46 Lid member 48 Disc 48a One side 48b Other side 48c Opening 48d Side 50 Cylindrical part

Claims (3)

A grindstone used to protect the grindstone portion of a grinding device having a spindle on which a grinding wheel having an annular wheel base and a grindstone portion provided in an annular shape on one surface of the wheel base is mounted. It is a part protection member
A cover member capable of accommodating the one side of the wheel base while covering the grindstone portion,
Fixtures for fixing the position of the cover member to the wheel base, and
A grindstone portion protection member characterized by being provided with. The fixture is fastened to at least one of a screw hole provided on the lower end side of the spindle and a screw hole on the wheel mount with the upper surface side connected to the lower end side of the spindle and the lower surface side connected to the wheel base. The grindstone portion protecting member according to claim 1, wherein the cover member is a possible bolt or a clamp capable of fixing the cover member to the wheel mount. A wheel case capable of accommodating a grinding wheel having an annular wheel base and a grindstone portion provided in an annular shape on one surface of the wheel base.
The wheel case
A cover member capable of accommodating the one side of the wheel base while covering the grindstone portion,
A lid member that covers the other side of the wheel base, which is located on the side opposite to the one side of the wheel base.
Fixtures for fixing the cover member and the lid member,
With
By fixing the cover member and the lid member with the fixture, the wheel base is sandwiched between the cover member and the lid member, and the wheel base for the cover member and the lid member is provided. A wheel case characterized by a fixed position.