TW201820448A - Flange mechanism capable of suppressing occurrence of sucking cutting debris from the inner circumference surface of the cutting knife and the gap between the flange mechanism - Google Patents

Abstract

To suppress occurrence of suction from cutting debris and scratching. A flange mechanism is used for mounting a cutting knife as a spindle of rotation shaft. The cutting knife comprises: a disc-like base platform in which its center has a mounting hole, and a blade disposed at an exterior periphery edge of the base platform; characterized by having: a hub portion being a cylindrical shape prolonged toward the anteroposterior direction and, on the exterior circumference surface of the front side, having an O-ring mounting ditch mounted with an O-ring; a flange portion, which is protruded radially toward exterior side from the rear direction side of the hub portion and having a support surface supporting the base of the cutting knife and facing the front side; and a spindle mounting hole disposed to the inner side of the flange portion and inserted with the front end portion of the spindle so that the O-ring, which has an external diameter larger than the diameter of the mounting hole of the base and mounted to the hub portion of the O-ring mounting ditch, can be inserted into the mounting hole of the base, and the O-ring is in contact with an inner circumference surface of the base in order to support the cutting knife.

Description

Flange mechanism

[0001] The present invention relates to a flange mechanism that supports a cutting blade in a cutting device that cuts a workpiece by a rotating cutting blade.

[0002] There are known cutting devices that precisely cut a semiconductor wafer, a package substrate, a ceramic substrate, a glass substrate, or the like with a cutter. In this cutting device, a cutting blade is supported by a flange mechanism and fixed to a rotating shaft. [0003] There are several types of cutting tools installed in a cutting device. Among them, for example, a type of cutting blade called a hub blade in which a cutting edge is mounted on the outer periphery of an annular abutment is widely used because of its good workability. Patent Document 1 discloses a technique of using such a hub cutter by fixing it to a cutting device by a flange mechanism. [0004] The inner peripheral surface of the annular abutment of the cutting blade is used as an installation hole for penetrating the hub of the flange mechanism when the cutting blade is fixed by the flange mechanism. The diameter of the mounting hole (inner peripheral surface) of the annular abutment is manufactured so that the cutting tool can be attached to and detached from the flange mechanism, and is formed only outside the hub portion of the flange mechanism that penetrates the installation hole. The diameter is slightly larger. [0005] When the cutter is fixed to the flange mechanism, the hub portion is penetrated through the mounting hole while the inner peripheral surface of the mounting hole of the cutter is parallel to the outer peripheral surface of the hub portion. However, if the cutter is tilted when the hub portion is penetrated through the installation hole, a so-called abrasion phenomenon may occur, and the inner peripheral surface of the annular abutment or the hub portion may be damaged to cause unevenness, and the abrasion phenomenon may be further induced. Whether or not the cutter can be penetrated into the mounting hole without tilting the cutting blade so that the abrasion phenomenon occurs is largely dependent on the technique of the operator. [0006] Therefore, Patent Document 3 discloses a device for attaching and detaching a cutter without using a human hand. In order to select a specific cutting tool and fix it to the flange mechanism, the device has a function of determining the type of the cutting tool. For example, an identification code (bar code) is provided on the side of the abutment of the cutting blade, and the device reads the identification code to thereby obtain information about the cutting blade by the device. [0007] In order to fix the cutting blade to the flange mechanism, the hub portion of the flange mechanism is passed through the mounting hole of the cutting blade, the cutting blade is arranged at a specific position, and then a nut and the like are screwed onto the hub portion. . However, since the cutting blade is a consumable, it is necessary to replace the cutting blade every predetermined period. In addition, as the workpiece is changed, the cutting blade must be replaced with an appropriate one. Therefore, there are many opportunities for loading and unloading the cutter. In order to attach and detach the cutter, it is necessary to loosen and tighten the nut. Therefore, if there are many opportunities for the cutter to attach and detach, the operating time of the cutting device will be reduced. [0008] Therefore, in Patent Document 2, a technology is disclosed in which a cutting tool is fixed instead of screwing a nut or the like to a hub, a flange mechanism for receiving the cutting tool is improved, and the cutting tool is held by vacuum suction. In the method of holding the cutting tool by vacuum suction, there is no need to use a nut or the like when the cutting tool is mounted or detached, so the cutting tool can be easily mounted and detached. In addition, the method of holding the cutting blade by vacuum suction can shorten the time required to replace the cutting blade, and thus can increase the operating time of the cutting device. [Prior Art Literature] [Patent Literature] [0009] [Patent Literature 1] Japanese Patent Laid-Open No. 2000-190155 [Patent Literature 2] Japanese Patent Laid-Open No. 2002-154054 [Patent Literature 3] Japanese Patent Laid-Open No. 2011-79098 Bulletin

[Technical Problem to be Solved by the Invention] [0010] However, in the case where the cutting blade is held by the flange mechanism by vacuum suction, a vacuum pump must be used between the time when the cutting blade is mounted on the flange mechanism and when it is removed. Pu and others continue to operate to continue to attract cutters. Therefore, the cutting tool is also attracted during the cutting by the cutting tool. [0011] If the workpiece is cut by a cutter, the generated cutting chips will float in the ambient gas. Because there is a slight gap between the inner peripheral surface of the base of the cutting tool and the hub of the flange mechanism as described above, if the cutting tool is continuously attracted, the ambient gas containing cutting chips is sucked from the gap, Instead, it is attached to the cutter or flange mechanism. Therefore, in order to remove the attached cutting chips, it is necessary to periodically clean. In addition, when an identification code is provided on a side surface of the support surface side of the cutting blade, cutting chips may adhere to the identification code and a poor identification may occur. [0012] The present invention has been made in view of such a problem, and an object thereof is to provide a flange mechanism that makes it difficult for chips to be attracted from the gap between the inner peripheral surface of the cutting blade and the flange mechanism, and to suppress so-called abrasions. The occurrence of the phenomenon. [Technical Solution to Solve the Problem] [0013] According to an aspect of the present invention, a flange mechanism is provided for mounting a cutting blade on a rotating shaft as a rotating shaft; the cutting blade has: at the center A disc-shaped abutment having a mounting hole, and a cutting edge provided on an outer peripheral edge of the abutment; characterized in that the hub has a cylindrical shape that extends in the front-rear direction and is located on the outer periphery of the front side. The O-ring mounting groove is provided on the surface; the flange portion protrudes from the rear side of the hub portion toward the outside in the radial direction, and has a supporting surface that supports the abutment of the cutter and faces the front side. ; And a shaft installation hole, which is provided inside the flange portion and inserts a front end portion of the shaft; and an O-ring having a larger outer diameter than the diameter of the installation hole of the abutment is installed in the O The hub portion of the ring-shaped mounting groove is inserted into the mounting hole of the abutment, and the O-ring is brought into contact with the inner peripheral surface of the abutment, thereby supporting the cutter. [0014] Further, in a flange mechanism according to an aspect of the present invention, the flange portion includes a ring-shaped opening surrounding the hub portion on the support surface, and suction that communicates the opening and the suction source internally. It also has the function of attracting and fixing the cutter. [0015] In addition, according to another aspect of the present invention, there is provided a flange mechanism for attaching a cutting blade formed by a disc-shaped blade having a mounting hole in the center to a rotating shaft serving as a rotating shaft; It is characterized in that: the hub portion is a cylindrical shape elongated in the front-rear direction and has a male thread on the outer periphery of the front side; and the blade mounting portion is protruded from the rear side of the hub portion to the radial direction outer side, and The outer peripheral surface is provided with an O-ring installation groove on which an O-ring is installed; the flange portion protrudes from the rear side of the blade installation portion toward the outside in the radial direction, and has a support surface supporting the cutting blade and facing the front side; And the shaft mounting hole is provided inside the flange portion and the front end of the shaft is inserted; an O-ring having a larger outer diameter than the diameter of the mounting hole of the cutting tool is installed in the O-shape The cutting edge mounting portion of the ring mounting groove is inserted into the mounting hole of the cutting blade, and the O-ring is brought into contact with the inner peripheral surface of the cutting blade, thereby supporting the cutting blade. [Effects of the Invention] [0016] On the outer periphery of the flange mechanism according to one aspect of the present invention, an O-ring mounting groove is formed at a position corresponding to the inner peripheral surface of a cutting blade fixed at a predetermined position. A groove is installed in the O-ring, and an O-ring having a larger diameter than the diameter of the mounting hole (inner peripheral surface) of the abutment of the cutting tool is installed. The O-ring is constituted by, for example, an elastic body (an object having a large elastic limit). [0017] Therefore, when the cutting blade is arranged at a predetermined position, the inner peripheral surface of the cutting blade abuts on the O-ring installed in the O-ring mounting groove, and the O-ring is pushed inward in the radial direction. Then, the O-ring is deformed, and a force is generated from the inside of the O-ring toward the inner peripheral surface of the cutter. [0018] Therefore, the gap between the flange mechanism and the inner peripheral surface of the cutting blade is blocked. Therefore, even if the cutting blade is vacuum-sucked, ambient gas is not drawn from the gap. Therefore, chips and the like included in the ambient gas are less likely to adhere to the area where the negative pressure of the flange mechanism acts, and the number of cleaning operations can be reduced. In addition, since chips are attached to the side surface of the cutter facing the supporting surface of the flange mechanism, when an identification code is provided on the side surface, the chips are less likely to adhere to the identification code, and it is difficult for the identification code to fail to be identified. [0019] In addition, when the cutting blade is mounted on the flange mechanism, the inner peripheral surface of the cutting blade does not directly contact the flange mechanism, and the cutting blade is passed through the O-shape installed in the O-ring mounting groove. Since the ring is supported, occurrence of a so-called abrasion phenomenon can be suppressed. [0020] Therefore, according to the present invention, it is possible to provide a flange mechanism that makes it difficult for chips to be attracted from the gap between the inner peripheral surface of the cutting blade and the flange mechanism, and suppresses the occurrence of the so-called abrasion phenomenon.

[0022] An embodiment of the present invention will be described. First, the cutting apparatus using the flange mechanism of this embodiment is demonstrated using FIG. 1. FIG. The flange mechanism of this embodiment is a cutting unit used in the cutting device. [0023] The constituent elements of the cutting device will be described. As shown in FIG. 1, the cutting device 2 includes a device base 4 that supports each component. A long rectangular opening 4a is formed on the upper surface of the device base 4 in the X-axis direction (processing feed direction). [0024] In the opening 4a, an X-axis moving stage 6, an X-axis moving mechanism (not shown) that moves the X-axis moving stage 6 in the X-axis direction, and a dust-proof and drip-proof covering the X-axis moving mechanism are provided. Cover 8. This X-axis moving mechanism is provided with a pair of X-axis guides (not shown) parallel to the X-axis direction, and an X-axis moving table 6 is mounted on the X-axis guide so as to be able to slide. [0025] A nut portion (not shown) is provided on the lower side of the X-axis moving stage 6, and an X-axis ball screw (not shown) parallel to the X-axis guide is screwed to the nut portion. . An X-axis pulse motor (not shown) is connected to one end of the X-axis ball screw. When the X-axis ball screw is rotated by the X-axis pulse motor, the X-axis moving table 6 moves along the X-axis guide in the X-axis direction. [0026] The X-axis moving stage 6 is provided with a clamping stage 10 for attracting and holding a workpiece. The clamping table 10 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). The holding table 10 is processed and fed in the X-axis direction by the aforementioned X-axis moving mechanism. [0027] The surface (upper surface) of the holding table 10 is a holding surface 10a that attracts and holds the workpiece. The holding surface 10 a is connected to a suction source (not shown) through a flow path (not shown) formed inside the holding table 10. Around the holding table 10, a jig 10b for fixing a workpiece is provided. [0028] The processed object is, for example, a semiconductor wafer, attached to an adhesive tape held on a ring frame, and processed integrally with the ring frame. If a to-be-processed object is processed using a ring frame and an adhesive tape, the to-be-processed object can be protected from the impact etc. which arise at the time of conveyance. In addition, if the tape is expanded, it is possible to divide the workpiece to be cut or increase the interval between the divided wafers. In addition, without using a ring frame and an adhesive tape, the workpiece may be individually cut. [0029] A protruding portion 12 protruding from the device base 4 to the side is provided at a corner portion in front of the device base 4 that is away from the opening 4a. A space is formed inside the protruding portion 12, and a cassette lifter 16 is provided in the space. A cassette 18 capable of accommodating a plurality of processed objects is placed on the cassette elevator 16. [0030] At a position close to the opening 4a, a conveying unit (not shown) for conveying the object to be processed to the clamping table 10 is provided. The workpiece to be pulled out of the cassette 18 by the transport unit is placed on the holding surface 10 a of the holding table 10. [0031] A support structure 20 supporting the cutting unit 14 for cutting a workpiece on the upper surface of the device base 4 is disposed so as to protrude above the opening 4a. A cutting unit moving mechanism 22 for moving the cutting unit 14 in the Y-axis direction (cut-out direction) and the Z-axis direction is provided on an upper portion of the front surface of the support structure 20. [0032] The cutting unit moving mechanism 22 is provided with a pair of Y-axis guides 24 arranged in front of the support structure 20 and parallel to the Y-axis direction. A Y-axis moving plate 26 constituting the cutting unit moving mechanism 22 is attached to the Y-axis guide 24 in a slidable manner. A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 26. A Y-axis ball screw 28 parallel to the Y-axis guide 24 is screwed to the nut portion. [0033] A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28. When the Y-axis ball screw 28 is rotated by a Y-axis pulse motor, the Y-axis moving plate 26 moves along the Y-axis guide 24 in the Y-axis direction. A pair of Z-axis guides 30 are provided on the surface (front) of the Y-axis moving plate 26 in parallel to the Z-axis direction. A Z-axis moving plate 32 is attached to the Z-axis guide 30 so as to be able to slide. [0034] A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 32. A Z-axis ball screw parallel to the Z-axis guide 30 is screwed to the nut portion. 34. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34. When the Z-axis ball screw 34 is rotated by the Z-axis pulse motor 36, the Z-axis moving plate 32 moves along the Z-axis guide 30 in the Z-axis direction. [0035] A cutting unit 14 and an imaging unit (camera) 38 for processing a workpiece are fixed to a lower portion of the Z-axis moving plate 32. If the Y-axis moving plate 26 is moved in the Y-axis direction by the cutting unit moving mechanism 22, the cutting unit 14 and the imaging unit (camera) 38 are indexed and fed. If the Z-axis moving plate 32 is moved in the Z-axis direction, Then, the cutting unit 14 and the imaging unit (camera) 38 are raised and lowered. [0036] The cutting unit 14 includes an annular cutting blade 14a (see FIG. 2 and the like) mounted on one end side of a rotating shaft 48 (see FIG. 2 and the like) constituting a rotation axis parallel to the Y-axis direction. The cutting blade 14a has a disc-shaped base 14c. A substantially circular mounting hole 14d is formed in a central portion of the base 14c and penetrates the base 14c. An annular cutting edge for cutting into a workpiece is fixed to an outer peripheral portion of the base 14c. [0037] A rotation driving source (not shown) such as a motor is connected to the other end side of the rotation shaft 48 to rotate the cutting blade 14a mounted on the rotation shaft. The details of the cutting unit 14 will be described later. [0038] When cutting a workpiece, for example, the holding table 10 holding the workpiece is moved relative to the cutting unit 14 so that the position of the cutting blade 14a is aligned with the processing target region of the workpiece. Next, the cutting blade 14a is lowered to a predetermined height, and the clamping table 10 is processed and fed while the cutting blade 14a is rotated. Thereby, cutting of a to-be-processed object by the cutting blade 14a can be performed. [0039] The processed object is transferred from the holding table 10 to the cleaning unit 40 by a transfer mechanism (not shown). The cleaning unit 40 includes a rotary table 42 that sucks and holds a workpiece in a cylindrical cleaning space. A rotary driving source (not shown) that rotates the rotary table 42 at a predetermined speed is connected to a lower portion of the rotary table 42. [0040] Above the turntable 42, a spray nozzle 44 for spraying a cleaning fluid (typically, a two-fluid mixture of water and air) toward the workpiece is disposed. When the rotary table 42 holding the workpiece is rotated and the cleaning fluid is sprayed from the spray nozzle 44, the workpiece can be washed. The workpiece to be cleaned by the cleaning unit 40 is stored in the cassette 18 by, for example, a conveyance mechanism (not shown). [0041] The cutting unit 14 of the cutting device 2 will be described in detail. FIG. 2 is an exploded perspective view schematically showing the structure of the cutting unit 14. The cutting unit 14 includes a shaft housing 46 fixed to a lower portion of the Z-axis moving plate 32. A rotating shaft 48 is housed inside the rotating shaft housing 46 and supported by an air bearing so as to be rotatable about the Y-axis. [0042] One end side (front end side) of the rotating shaft 48 is provided with a push-out portion 48a that gradually decreases in diameter as it approaches the one end, and a cylindrical front-end small-diameter portion 48b extending from the push-out portion 48a. The tip portion of the tip small-diameter portion 48b is a male thread 48c. The male thread 48c is cut in a direction that is locked by being rotated by the rotation direction of the rotary shaft 48 during cutting. However, the male thread 48c may not be formed. Furthermore, a screw hole 48d is formed at the front end of the rotating shaft 48. [0043] A rotation joint 50 is fixed to the end portion 46a of the shaft housing 46. The rotary joint 50 includes a cylindrical hub portion 50a and a flange portion 50b formed on the outer periphery of the cylindrical hub portion 50a. A receiving hole 50c is formed inside the cylindrical hub portion 50a. The rotary joint 50 is a tube 50d having one end connected to the receiving hole 50c, and the other end side of the tube 50d is connected to a suction source (not shown). [0044] A plurality of screw holes 46b are formed at an end portion 46a of the shaft housing 46. On the other hand, a plurality of mounting holes 50e corresponding to the plurality of screw holes 46b are formed in the flange portion 50b of the rotary joint 50. A screw 50f is inserted into the mounting holes 50e, and is locked to a screw hole 46b formed at an end portion 46a of the shaft case 46, whereby the rotary joint 50 is mounted on the end portion 46a of the shaft case 46. [0045] In such a state that the rotary joint 50 is mounted on the end portion 46a of the rotary shaft housing 46, a flange mechanism 52 is partially mounted on the front end of the rotary shaft 48 and is accommodated in the receiving hole 50c of the rotary joint 50. [0046] Hereinafter, the flange mechanism 52 will be described in detail with reference to FIGS. 2, 3 (A), and 3 (B). 3 (A) is a schematic cross-sectional view showing a cross-sectional structure of the flange mechanism 52 and the cutting blade 14a in a state before the flange mechanism 52 is mounted with the cutting blade 14a. Fig. 3 (B) is a schematic cross-sectional view of the flange mechanism 52 and the cutter 14a in a state where the cutter 14a is mounted on the flange mechanism 52. [0047] The flange mechanism 52 is provided with a cylindrical boss portion 56 that extends in the front-rear direction, a disc-shaped flange portion 58 that protrudes from the rear side of the hub portion 56 to the outside in the radial direction of the hub portion 56, A cylindrical portion 62 protruding from a rear side of the flange portion 58. The receiving hole 50c of the rotary joint 50 is a cylindrical portion 62 in which the flange mechanism 52 is received. When mounting the cutting blade 14a, the mounting hole 14d attached to the cutting blade 14a is inserted into the hub portion 56 of the flange mechanism 52 so that the side surface of the cutting blade 14a abuts on the flange portion 58. [0048] The hub portion 56, the flange portion 58, and the cylindrical portion 62 are arranged so that their respective central axes overlap. That is, a shaft connecting respective centers of the two bottom surfaces of the cylindrical portion 56 of the hub portion 56, a shaft connecting respective centers of the two circular surfaces of the disc-shaped flange portion 58, and a continuous connecting portion of the cylindrical portion 62 The axis to the center of the surface of the flange portion 58 and the surface facing the surface overlaps with each other to form a straight line. [0049] Inside the flange mechanism 52, a rotation shaft mounting hole 54 opened on the side of the cylindrical portion 62 is formed. The rotation shaft installation hole 54 is formed in a shape corresponding to the front end of the rotation shaft 48 so that the center shaft and the rotation center of the rotation shaft 48 coincide with each other when the rotation shaft 48 is installed in the rotation shaft installation hole 54. The shaft mounting hole 54 has an opening at the hub 56 side, and a bolt 66 can be screwed into the screw hole 48 d inserted in the front end of the shaft 48 inserted into the shaft mounting hole 54. [0050] The disc-shaped flange portion 58 has a ring-shaped support surface 58a on the outside in the radial direction of the surface facing the front side, and has a ring-shaped groove 58b on the inside in the radial direction surrounded by the support surface 58a. . The annular support surface 58a is in contact with the cutting blade 14a inserted into the hub portion 56 and supports one side surface 14b of the cutting blade 14a. At the bottom of the annular groove 58b, a plurality of suction holes 58c separated at predetermined intervals in the circumferential direction are opened. [0051] An annular groove 62a is formed on the outer peripheral surface of the cylindrical portion 62 so as to surround the cylindrical portion 62 in the circumferential direction. The annular groove 62a is formed with a plurality of communication holes 62b separated at predetermined intervals in the circumferential direction. The suction hole 58c and the communication hole 62b are connected by a communication path 64 formed from the flange portion 58 to the cylindrical portion 62. [0052] An O-ring mounting groove 60 is formed on the outer peripheral surface on the front side of the hub portion 56 so as to surround the hub portion 56 in the circumferential direction. The O-ring mounting groove 60 is formed so as to correspond to the inner peripheral surface of the mounting hole 14d of the base 14c of the cutting blade 14a that is exposed on the support surface 58a of the flange portion 58 and is arranged at a predetermined position. Make settings. [0053] A groove 60 is installed in the O-ring, and an O-ring 60a is installed. The O-ring 60a is made of, for example, an elastomer (a body having a large elastic limit) made of a resin such as rubber or silicone. The O-ring 60a has an outer diameter larger than the diameter of the mounting hole 14d of the base 14c of the cutter 14a. [0054] An air supply path 100 is formed inside the flange mechanism 52. The gas supply path 100 is, for example, one end opened at a surface opposite to the flange part 58 of the hub part 56 and the other end opened at the bottom of the O-ring mounting groove 60. The gas supply path 100 is connected to the O-ring mounting groove 60 and the outside. The structure and function of the gas supply path 100 will be described later. In addition, the flange mechanism 52 of the present invention may not be provided with the gas supply path 100. [0055] The flange mechanism 52 is fixed to the front end of the rotary shaft 48 by locking the bolt 66 to the screw hole 48d at the front end of the rotary shaft 48 in a state where the rotary shaft mounting hole 54 is inserted into the rotary shaft 48. [0056] After the flange mechanism 52 is fixed to the front end portion of the rotating shaft 48, a cutting blade 14a having a mounting hole 14d in the center of the base 14c is inserted into the hub portion 56 of the flange mechanism 52, and the cutting blade 14a One side surface 14 b is in contact with the support surface 58 a of the flange portion 58. At this time, the inner peripheral surface of the mounting hole 14d exposed to the cutter 14a is close to the O-ring mounting groove 60 of the hub portion 56, and the inner peripheral surface of the cutter 14a is in contact with the O-ring mounting groove. The outer periphery of the O-ring 60a of 60. [0057] If the inner peripheral surface of the cutting blade 14a positioned at a predetermined position presses the O-ring 60a from the outer peripheral side and deforms the O-ring 60a, the inside of the O-ring 60a will face the cutting The reaction force of the inner peripheral surface of the blade 14a. In this way, the O-ring 60a is in close contact with the inner peripheral surface of the cutting blade 14a to fill the gap between the two. [0058] After the cutting blade 14a is arranged at a predetermined position, the suction source connected to the tube 50d is operated, and a negative pressure is applied to the cutting blade 14a via the annular groove 62a, the communication path 64, and the annular groove 58b. In this way, the cutting blade 14 a is attracted and fixed to the support surface 58 a of the flange portion 58. Then, until the cutting blade 14a is removed, the suction source is continuously operated, and a negative pressure is continuously applied to the cutting blade 14a. [0059] Here, the diameter of the mounting hole 14d (inner peripheral surface) of the base 14c of the cutter 14a is formed to be slightly larger than the outer diameter of the hub portion 56. This is to prevent the so-called abrasion phenomenon from occurring when the hub portion 56 is inserted into the mounting hole 14d of the cutting blade 14a. Therefore, a gap is generated between the inner peripheral surface of the cutting blade 14 a and the hub portion 56. If the gap is not blocked, external ambient gas is attracted from the gap. In this way, when chips and the like generated when the workpiece is cut are contained in the ambient gas, the ambient gas containing the chips is sucked from the gap. [0060] Therefore, the cutting chips may enter the area where the negative pressure acts in the flange mechanism 52 and adhere to the wall surface, so it is necessary to periodically clean the flange mechanism 52. In addition, cutting chips are also attached to the side surface 14b of the cutting blade 14a facing the support surface 58a. Therefore, when an identification code is provided on the side surface 14b, cutting chips may adhere to the identification code, resulting in poor recognition. [0061] On the other hand, in the flange mechanism 52 of the present embodiment, the gap between the inner peripheral surface of the cutter 14a and the hub portion 56 is blocked by the O-ring 60a, so that the cutting chips are not prevented from the gap. Being sucked in, it is possible to suppress such problems caused by the cutting chips and the like. [0062] In addition, when the cutting blade 14a is fixed to the flange mechanism 52 by a method other than holding by suction, if the cutting blade 14a is installed through the O-ring 60a installed in the O-ring installation groove 60, In the hub portion 56, the cutting blade 14 a and the hub portion 56 are not easily in direct contact with each other. Therefore, occurrence of a so-called abrasion phenomenon can be suppressed. [0063] For example, as shown in FIG. 4 (A) and FIG. 4 (B), when the cutting blade 14a is fixed to the flange mechanism by not using suction but by locking the nut, The O-ring installed in the O-ring installation groove is also beneficial to the installation of the cutter 14a. Here, FIG. 4 (A) is a schematic cross-sectional view showing the nut 68, the cutting blade 14a, and the flange mechanism 70, and FIG. 4 (B) is a diagram showing the cutting blade 14a fixed to the flange mechanism 70 by using the nut 68 A schematic sectional view of the state. [0064] Also, unlike the flange mechanism 52 shown in FIG. 3 (A), the flange mechanism 70 shown in FIG. 4 (A) omits a structure for suction holding. An O-ring attachment groove 74 is formed on the outer peripheral surface of the hub portion 72 of the flange mechanism 70 similarly to the flange mechanism 52. The O-ring mounting groove 74 is formed at a position corresponding to the inner peripheral surface of the cutting blade 14a arranged at a predetermined position. [0065] A male screw is formed at the front end of the front side of the hub 72. The male screw is a female screw screwed to the inner periphery of the nut 68. As shown in FIG. 4 (B), in a state where the O-ring 74 a mounted on the O-ring mounting groove 74 is in contact with the inner peripheral surface of the cutter 14 a, the nut 68 is screwed onto the hub 72. The side of the flange mechanism 70 of the cutting blade 14a that is not facing the flange portion 70a is pressed by a nut 68. In this way, the cutter 14 a is sandwiched between the nut 68 and the flange portion 70 a of the flange mechanism 70. [0066] The cutter includes, for example, a resin grinding stone in which diamond abrasive grains are cemented with a resin binder, a ceramic bonded grinding stone in which diamond abrasive grains are cemented in a porcelain binder, or a diamond grindstone is borrowed. Nickel plating is used as a fixed cutter for electroplated grindstones. [0067] FIGS. 5 (A) and 5 (B) are side views showing an example of a cutting blade. The cutting blade 76 shown in Figs. 5 (A) and 5 (B) is a hub blade (hub blade) attached to an outer periphery of an annular base 80 provided with a mounting hole 78 in the center. ) Kind of cutter. Fig. 5 (A) is a side view of a side surface of the flange mechanism on a side not facing the flange portion, and Fig. 5 (B) is a side view of a side surface of the flange mechanism on a side opposite to the flange portion. [0068] The diameter of the mounting hole 78 of the annular abutment 80 of the cutter 76 is made so that the cutter 76 can be attached to and detached from the flange mechanism, and the flange is made only smaller than the flange passing through the mounting hole 78. The outer diameter of the hub of the mechanism is slightly larger. In addition, as shown in FIG. 5 (B), an identification code 84 is provided on a side surface of the cutter 76 opposite to the flange portion of the flange mechanism. [0069] In the identification code 84, information such as the type and manufacturing number of the cutter 76 is stored. For example, in a case where a specific cutter 76 is attached to and detached from the flange mechanism using a device for attaching and detaching the cutter without a dummy's hand, the device reads information about the cutter 76 from the identification code 84 and the like. Therefore, if the identification code 84 is dirty, the device cannot read the information stored in the identification code 84, which causes a problem. [0070] In this regard, if the cutter 76 is attached to the flange mechanism of the present embodiment, the flange mechanism and the flange mechanism can be sealed by an O-ring provided with an O-ring in the flange mechanism. The gap between the inner peripheral surfaces of the cutting blade 76. Therefore, even if the cutting blade 76 is sucked and held by the flange mechanism, it is possible to suppress the suction of cutting chips and the like from the gap, and the identification code 84 is less likely to be contaminated by the cutting chips and the like. [0071] In addition, the flange mechanism of this embodiment can hold a cutting tool called a ring cutter (or a washer cutter) in addition to the hub cutter. The so-called ring knife is a cutting knife without abutment and made of grinding stone. FIG. 6 (A) is an exploded perspective view showing a part of a cutting unit using a ring-shaped cutting blade 86. FIG. FIG. 6 (B) is a cross-sectional view showing a state where the ring-shaped cutting blade 86 is fixed to the flange mechanism 88. [0072] The flange mechanism 88 of the cutter 86 holding the ring-shaped cutter is provided with, for example, a cylindrical hub portion 90 extending in the front-rear direction, and a blade edge protruding outward from the hub portion 90 in the radial direction is provided. The portion 92 is a flange portion 94 protruding toward the outside in the radial direction at a rear side than the blade mounting portion 92. A male thread 90a is formed at a front end of the hub portion 90 on the front side. [0073] The blade mounting portion 92 is provided with an O-ring mounting groove 92a on the outer periphery, and an O-ring 92b is mounted on the O-ring mounting groove 92a. The O-ring mounting groove 92 a is provided at a position corresponding to the inner peripheral surface of the cutting blade 86 when the cutting blade 86 is supported on the support surface 94 a of the flange portion 94. A groove 92a is installed in the O-ring, and an O-ring 92b is installed. The O-ring 92b is an elastic body having an outer diameter larger than the diameter of the inner peripheral surface (installation hole) of the cutting blade 86. [0074] The flange portion 94 has an annular support surface 94a opposite to the cutting blade 86. The cutter 86 is attached to the flange mechanism 88 in a state in which the inner peripheral surface of the cutting blade 86 is supported on the supporting surface 94a of the flange portion 94 on the side surface thereof and contacts the O-ring 92b. The flange mechanism 88 may have a structure for sucking and holding the cutting blade 86 similarly to the flange mechanism 52 described above, and the cutting blade 86 may be sucked and held by the flange portion 94. [0075] For example, a plurality of suction holes are provided in the annular groove on the inner peripheral side of the annular support surface 94a in the flange portion 94, and the cutting blade 86 passes through a communication path formed inside the flange portion 94. There is negative pressure. In this case, since the gap between the inner peripheral surface of the cutting blade 86 and the cutting edge mounting portion 92 is blocked by the O-ring 92b, it is difficult to attract ambient gas containing cutting chips from the gap. [0076] When the cutting blade 86 is attached or detached, if the inner peripheral surface of the cutting blade 86 comes into contact with the blade mounting portion 92 of the flange mechanism 88, a so-called abrasion phenomenon may occur. However, if the cutting edge mounting portion 92 supports the cutting blade 86 through the O-ring 92b, the occurrence of such abrasion can be suppressed. [0077] The flange mechanism 88 fixes the cutting blade 86 in cooperation with a mounting flange 96 that holds the cutting blade 86 between the flange mechanism 88 and a nut 98 that fixes the mounting flange 96. [0078] The attachment flange 96 is a ring-shaped member having a mounting hole in the center and a support surface opposed to the support surface 94a of the flange portion 94 on the outer periphery. The diameter of the mounting hole is slightly larger than the outer diameter of the hub portion of the flange mechanism 88, and the hub portion of the flange mechanism 88 is inserted into the mounting hole. The nut 98 is used to fix the attachment flange 96 to the flange mechanism 88 by a male screw 90 a screwed to the front end of the hub 90. [0079] The cutting blade 86 is arranged so as to be in contact with the O-ring 92b mounted on the blade mounting portion 92 and the support surface 94a of the flange portion 94. Next, the hub 90 is passed through the attachment hole of the attachment flange 96, and the cutter 86 is sandwiched between the support surface 94 a of the flange portion 94 and the support surface of the attachment flange 96. The nut 98 is screwed onto the male thread 90 a of the hub 90 to fix the attachment flange 96 to the flange mechanism 88. In this way, the cutter 86 is fixed. [0080] As described above, the flange mechanism of this embodiment has an O-ring mounting groove. The cutting tool is supported by an O-ring installed in the O-ring mounting groove. The O-ring is an elastic body having an outer diameter larger than the diameter of the mounting hole (inner peripheral surface) of the cutting blade, and seals the gap between the inner peripheral surface of the cutting blade and the flange mechanism. [0081] Therefore, even if a negative pressure is applied to the cutter to attract and hold the cutter, it is possible to suppress the inhalation of cutting chips and the like from the gap. In addition, since the contact between the flange mechanism and the inner peripheral surface of the cutting blade is suppressed, it is possible to suppress a so-called abrasion phenomenon. [0082] Next, the gas supply path 100 included in the flange mechanism of this embodiment will be described. An example of the flange mechanism provided with the air supply path 100 is shown in FIG. 3 (A) and FIG. 3 (B). As shown in FIGS. 3 (A) and 3 (B), the flange mechanism 52 is formed with a gas supply path 100 that reaches the O-ring mounting groove 60. When the O-ring seals the gap between the flange mechanism and the inner peripheral surface of the cutter, the greater the force pressing the O-ring, the greater the deformation of the O-ring, and the O-ring can be sealed with a stronger force. Plug the gap. [0083] Although the force that presses the O-ring is also generated when the inner peripheral surface of the cutter presses the O-ring, it is also caused by the pressure difference between the two spaces separated by the O-ring. That is, a pressure difference between the space where the negative pressure to attract the cutter and the internal space of the O-ring installation groove is generated, and a force for compressing the O-ring is generated. Moreover, the larger the pressure difference, the stronger the O-ring is compressed. [0084] When the cutter is sucked and held by the flange mechanism, the pressure difference is smaller than the space between the space where the negative pressure acts and the external space without reaching the air supply channel 100 of the O-ring installation groove. The pressure difference is smaller. This is because the flow path of the fluid between the O-ring installation groove and the outside is narrowed by an O-ring or a cutter, so that the pressure in the external space will not directly affect the O-ring. [0085] Therefore, if a gas supply path 100 is provided inside the flange mechanism to directly connect the internal space and the external space of the O-ring mounting groove, the gas supply path 100 will become a fluid between the two spaces. The flow path, therefore, the pressure difference increases as a force for compressing the O-ring. In this way, the O-ring is deformed to a greater extent and is in close contact with the inner peripheral surface of the cutter and the hub of the flange mechanism, and can be sealed with a stronger force. Therefore, it is possible to further suppress fluid from entering the negative pressure. space. [0086] The present invention is not limited to the description of the aforementioned embodiment, and can be implemented with various changes. For example, the flange mechanism of the present invention may not include the gas supply path 100. In addition, the structure, method, etc. of the aforementioned embodiments can be appropriately modified and implemented as long as they do not depart from the scope of the object of the present invention.

[0087]

2‧‧‧ cutting device

4‧‧‧ device abutment

4a‧‧‧ opening

6‧‧‧X-axis mobile stage

8‧‧‧Dustproof and dripproof cover

10‧‧‧ clamping table

10a‧‧‧ keep face

10b‧‧‧Jig

12‧‧‧ protrusion

14‧‧‧ cutting unit

14a, 76, 86‧‧‧ Cutter

14b‧‧‧ side

14c, 80‧‧‧ abutment

14d, 78‧‧‧ installation holes

16‧‧‧Box Lift

18‧‧‧ box

20‧‧‧ support structure

22‧‧‧ cutting unit moving mechanism

24‧‧‧Y-axis guide

26‧‧‧Y-axis moving plate

28‧‧‧Y-axis ball screw

30‧‧‧Z-axis guide

32‧‧‧Z axis moving plate

34‧‧‧Z-axis ball screw

36‧‧‧Z-axis pulse motor

38‧‧‧ camera unit (camera)

40‧‧‧washing unit

42‧‧‧Turntable

44‧‧‧jet nozzle

46‧‧‧Shaft housing

46a‧‧‧ tip

46b‧‧‧screw hole

48‧‧‧ shaft

48a‧‧‧Promotion Department

48b‧‧‧Front end small diameter part

48c‧‧‧male thread

48d‧‧‧screw holes

50‧‧‧ Rotary Joint

50a‧‧‧ cylindrical hub

50b‧‧‧ flange

50c‧‧‧Containment hole

50d‧‧‧tube

50e‧‧‧Mounting hole

50f‧‧‧screw

52, 70, 88‧‧‧ flange mechanism

54‧‧‧ shaft mounting holes

56, 72, 90‧‧‧ Hub

58, 70a, 94‧‧‧ flange

58a, 94a‧‧‧ bearing surface

58b‧‧‧Circular groove

58c‧‧‧Attraction hole

60, 74, 92a‧‧‧O-ring grooves

60a, 74a, 92b‧‧‧O-ring

62‧‧‧Cylinder

62a‧‧‧Circular groove

62b‧‧‧Connecting hole

64‧‧‧ Link Road

66‧‧‧ Bolt

68, 98‧‧‧ Nuts

82‧‧‧Blade

84‧‧‧Identification code

90a‧‧‧male thread

92‧‧‧Blade installation department

96‧‧‧ Loading flange

100‧‧‧ gas supply channel

[0021] FIG. 1 is a perspective view schematically showing a cutting device using a flange mechanism. [Fig. 2] is an exploded perspective view schematically showing a part of the cutting unit. [3] Fig. 3 (A) is an exploded cross-sectional view schematically showing a part of a cutting unit, and Fig. 3 (B) is a cross-sectional view schematically showing a part of a cutting unit. [FIG. 4] FIG. 4 (A) is an exploded cross-sectional view schematically showing a part of the cutting unit, and FIG. 4 (B) is a cross-sectional view schematically showing a part of the cutting unit. [Fig. 5] Fig. 5 (A) is a side view of one side of a hub-type cutter, and Fig. 5 (B) is a side view of the other side of a hub-type cutter. [FIG. 6] FIG. 6 (A) is an exploded cross-sectional view schematically showing a part of the cutting unit, and FIG. 6 (B) is a cross-sectional view schematically showing a part of the cutting unit.

Claims (3)

A flange mechanism is used to install a cutting blade on a rotating shaft as a rotating shaft. The cutting blade has a disc-shaped base having a mounting hole in the center, and an outer peripheral edge provided on the base. It is characterized by having: a hub portion, which is a cylindrical shape elongated in the front-rear direction, and has an O-ring installation groove on the outer peripheral surface of the front side, and an 形 -ring installation groove; The rear side of the hub portion protrudes outward in the radial direction and has a supporting surface that supports the abutment of the cutting blade and faces the front side; and a shaft mounting hole is provided inside the flange portion and a shaft is inserted therein The front end portion of the abutment; an O-ring having a larger outer diameter than the diameter of the mounting hole of the abutment is installed in the hub portion of the O-ring mounting groove into the mounting hole of the abutment, and The O-ring is brought into contact with the inner peripheral surface of the abutment, thereby supporting the cutter. The flange mechanism according to claim 1, wherein: 凸缘 the flange portion has: 环状 an annular opening surrounding the hub portion on the support surface; and an attraction path internally connecting the opening and an attraction source; and Attracts the cutter to a fixed function. The utility model relates to a flange mechanism, which is used to install a cutting blade formed by a disc-shaped blade having a mounting hole in the center on a rotating shaft as a rotating shaft. The flange mechanism is provided with: Cylindrical shape with male thread on the outer periphery of the front side; The trowel blade installation part protrudes from the rear side of the hub toward the outside in the radial direction, and has an O-ring installation on the outer peripheral surface with an O-ring Groove; flange portion, protruding from the rear side of the blade mounting portion toward the outside in the radial direction than the blade mounting portion, and having a support surface supporting the cutting blade and facing the front side; and a shaft mounting hole, The inside of the flange portion is inserted with the front end of the rotating shaft; an O-ring having a larger outer diameter than the diameter of the installation hole of the cutting tool is installed on the cutting edge of the O-ring installation groove The mounting portion is inserted into the mounting hole of the cutting blade, and the O-ring is brought into contact with the inner peripheral surface of the cutting blade, thereby supporting the cutting blade.