JP7021879B2 - mount - Google Patents

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JP7021879B2
JP7021879B2 JP2017157425A JP2017157425A JP7021879B2 JP 7021879 B2 JP7021879 B2 JP 7021879B2 JP 2017157425 A JP2017157425 A JP 2017157425A JP 2017157425 A JP2017157425 A JP 2017157425A JP 7021879 B2 JP7021879 B2 JP 7021879B2
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mount
grinding wheel
base
spindle
screw
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JP2019034376A (en
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裕樹 阿部
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Disco Corp
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Disco Corp
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Priority to JP2017157425A priority Critical patent/JP7021879B2/en
Priority to KR1020180089284A priority patent/KR102557594B1/en
Priority to CN201810895422.8A priority patent/CN109397086B/en
Priority to TW107128569A priority patent/TWI786167B/en
Publication of JP2019034376A publication Critical patent/JP2019034376A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00Means for securing grinding wheels on rotary arbors
    • B24B45/006Quick mount and release means for disc-like wheels, e.g. on power tools
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Eye Examination Apparatus (AREA)
  • Liquid Crystal Substances (AREA)

Description

本発明は、スピンドルに研削ホイールを装着するためのマウントに関する。 The present invention relates to a mount for mounting a grinding wheel on a spindle.

ウェーハ等の板状ワークの表面を研削する研削装置は、研削ホイールを備えている。研削ホイールは、環状の基台と、その基台の下面に固定された環状の砥石とを有し、切削装置のスピンドルの下端にマウントを介して装着される。マウントは、基台の内側面に嵌合する円板状凸部を有する。研削ホイールは、その基台の内側面を円板状凸部の外周面に全周に亘って嵌合させることにより、研削ホイールの中心をスピンドルの軸心と一致させてマウントに装着される。研削ホイールは、その砥石がある程度まで摩耗したらマウントから取り外され新品と交換される。 A grinding device that grinds the surface of a plate-shaped workpiece such as a wafer is provided with a grinding wheel. The grinding wheel has an annular base and an annular grindstone fixed to the lower surface of the base, and is mounted on the lower end of the spindle of the cutting device via a mount. The mount has a disc-shaped protrusion that fits into the inner surface of the base. The grinding wheel is mounted on the mount so that the center of the grinding wheel is aligned with the axis of the spindle by fitting the inner surface of the base to the outer peripheral surface of the disk-shaped convex portion over the entire circumference. When the grindstone is worn to some extent, the grinding wheel is removed from the mount and replaced with a new one.

研削ホイールの位置決めを正確に行うためには、マウントの円板状凸部と研削ホイールの基台の内周との隙間ができるだけ小さいことが好ましい。しかし、その隙間が小さすぎるとマウントへの研削ホイールの脱着がし難くなるため、円板状凸部と基台との間には少し隙間を持たせてある(例えば、特許文献1参照)。 In order to accurately position the grinding wheel, it is preferable that the gap between the disc-shaped protrusion of the mount and the inner circumference of the base of the grinding wheel is as small as possible. However, if the gap is too small, it becomes difficult to attach / detach the grinding wheel to / from the mount, so that a slight gap is provided between the disc-shaped convex portion and the base (see, for example, Patent Document 1).

特開2015-199146号公報JP-A-2015-199146

上記のように、円板状凸部と基台との間には少し隙間があるため、その隙間には毛細管現象によって研削屑を含む研削水が浸入することになる。そして、その研削水が乾燥することにより、円板状凸部と基台との隙間が全周に亘って研削屑で埋められる。その結果、円板状凸部と基台とが研削屑で強固に接着された状態になり、研削ホイールを交換する際の研削ホイールの取り外しの妨げとなる。 As described above, since there is a slight gap between the disc-shaped convex portion and the base, grinding water containing grinding debris infiltrates into the gap due to the capillary phenomenon. Then, as the grinding water dries, the gap between the disc-shaped convex portion and the base is filled with grinding debris over the entire circumference. As a result, the disc-shaped convex portion and the base are firmly adhered to each other by the grinding debris, which hinders the removal of the grinding wheel when the grinding wheel is replaced.

本発明は、このような問題にかんがみなされたもので、その目的は、研削ホイールの位置決めを正確に行うとともに研削ホイールを交換する際の研削ホイールの取り外しを容易に行えるようにすることにある。 The present invention has been considered to have such a problem, and an object of the present invention is to accurately position the grinding wheel and to easily remove the grinding wheel when replacing the grinding wheel.

本発明は、スピンドルの先端に連結され、砥石を環状に配設した研削ホイールの中心を該スピンドルの軸心と一致させて装着するマウントであって、研削ホイールは、一方の端面を該マウントに装着される被装着面とする環状の基台と、他方の面に配設された環状の該砥石と、を備え、該マウントは、該研削ホイールを装着する環状の装着面と、該マウントの中心を中心として等角度で該基台の内側面に接触する少なくとも3つの凸部と、該研削ホイールを該マウントに取り付けるためのねじを挿通させる研削ホイール用ねじ挿通孔と、を備え、該基台には、該研削ホイールを該マウントに取り付けるため該研削ホイール用ねじ挿通孔に対応した複数のねじ穴が配設され、該少なくとも3つの凸部が該基台の内側面に接触することにより該スピンドルの軸心に該研削ホイールの中心を位置づけ、該ねじを該研削ホイール用ねじ挿通孔に挿通し該ねじ穴に螺合させて締め付けることによって該研削ホイールが該マウントに固定され、該凸部が該基台の内側面と接触しない部分においては該マウントと該基台の内側面との間に大きな隙間が形成される。 The present invention is a mount that is connected to the tip of a spindle and is mounted so that the center of a grinding wheel in which a grindstone is arranged in an annular shape is aligned with the axis of the spindle. The mount comprises an annular base as a mounting surface to be mounted and the annular grindstone disposed on the other surface, and the mount has an annular mounting surface on which the grinding wheel is mounted and the mount. The base is provided with at least three protrusions that come into contact with the inner surface of the base at an equal angle around the center, and a screw insertion hole for the grinding wheel through which a screw for attaching the grinding wheel to the mount is inserted. The table is provided with a plurality of screw holes corresponding to the screw insertion holes for the grinding wheel in order to mount the grinding wheel on the mount, and the at least three protrusions come into contact with the inner surface of the base. The grinding wheel is fixed to the mount by positioning the center of the grinding wheel at the axis of the spindle, inserting the screw into the screw insertion hole for the grinding wheel, screwing it into the screw hole, and tightening the screw hole. A large gap is formed between the mount and the inner surface of the base at the portion where the portion does not contact the inner surface of the base.

本発明に係るマウントによれば、少なくとも3つの凸部が基台の内側面に接触することによりスピンドルの軸心に研削ホイールの中心を位置づけることができ、それらの凸部が基台の内側面と接触しない部分においてはマウントと基台の内側面との間に大きな隙間が形成されることにより、マウントと基台の内側面との接触部が全周に亘って研削屑で接着された状態になるのを防止できる。したがって、研削ホイールの位置決めを正確に行うとともに研削ホイールを交換する際の研削ホイールの取り外しを容易に行うことができる。 According to the mount according to the present invention, the center of the grinding wheel can be positioned at the axis of the spindle by contacting at least three convex portions with the inner surface of the base, and these convex portions are the inner surface of the base. A large gap is formed between the mount and the inner surface of the base in the portion that does not come into contact with the mount, so that the contact portion between the mount and the inner surface of the base is adhered with grinding debris over the entire circumference. Can be prevented from becoming. Therefore, the grinding wheel can be accurately positioned and the grinding wheel can be easily removed when the grinding wheel is replaced.

スピンドル、マウント及び研削ホイールを示す分解斜視図である。It is an exploded perspective view which shows the spindle, the mount and the grinding wheel. マウントの第2実施形態を示す底面図である。It is a bottom view which shows the 2nd Embodiment of a mount. マウントの第3実施形態を示す底面図である。It is a bottom view which shows the 3rd Embodiment of a mount. マウントの第4実施形態を示す底面図である。It is a bottom view which shows the 4th Embodiment of a mount.

図1に示す研削ホイール10は、研削装置に備えるスピンドル30の下端に、マウント20を介して交換可能に取り付けられる。なお、図1においては、上下が反転して示されている。 The grinding wheel 10 shown in FIG. 1 is replaceably attached to the lower end of the spindle 30 provided in the grinding device via the mount 20. In addition, in FIG. 1, it is shown upside down.

研削ホイール10は、一方の端面(被装着面)12がマウント20に装着される環状の基台11と、他方の端面13に配設された環状の研削砥石15とを備える。基台11の被装着面12には、研削ホイール10をマウント20に取り付けるための図示しない複数のねじ穴が周方向に等間隔に配設されている。 The grinding wheel 10 includes an annular base 11 on which one end surface (mounted surface) 12 is mounted on the mount 20, and an annular grinding wheel 15 arranged on the other end surface 13. On the mounted surface 12 of the base 11, a plurality of screw holes (not shown) for mounting the grinding wheel 10 on the mount 20 are arranged at equal intervals in the circumferential direction.

マウント20は、円板状のマウント本体21とマウント本体21の下面22に一体的に設けられた板状凸部23とを有する。マウント本体21の外径寸法は、研削ホイール10の基台11の外径寸法と等しい。マウント本体21の下面22の周縁部は、研削ホイール10の被装着面12が装着される環状の装着面24をなす。 The mount 20 has a disk-shaped mount main body 21 and a plate-shaped convex portion 23 integrally provided on the lower surface 22 of the mount main body 21. The outer diameter of the mount body 21 is equal to the outer diameter of the base 11 of the grinding wheel 10. The peripheral edge of the lower surface 22 of the mount body 21 forms an annular mounting surface 24 on which the mounted surface 12 of the grinding wheel 10 is mounted.

板状凸部23は、正方形状に形成された板状部材の四隅を面取りして4つの凸部25を設けた形状に形成されており、各凸部25は、基台11の内側面14と曲率が略等しい円弧状の接触面26を有する。また、4つの凸部25は、マウント20の中心を中心として等角度(この例では90°毎)に配置されている。各凸部25の接触面26が基台11の内側面14に接触して嵌合することにより、マウント20に対する研削ホイール10の位置決めがなされる。なお、4つの凸部25の接触面26の合計面積は、基台11の内側面14と同径の従来構造の円板状凸部の全周面積の1/4以下である。 The plate-shaped convex portion 23 is formed in a shape in which four convex portions 25 are provided by chamfering the four corners of the plate-shaped member formed in a square shape, and each convex portion 25 is formed on the inner side surface 14 of the base 11. It has an arcuate contact surface 26 having a curvature substantially equal to that of the contact surface 26. Further, the four convex portions 25 are arranged at equal angles (every 90 ° in this example) about the center of the mount 20. The contact surface 26 of each convex portion 25 is in contact with and fitted to the inner side surface 14 of the base 11, so that the grinding wheel 10 is positioned with respect to the mount 20. The total area of the contact surfaces 26 of the four convex portions 25 is 1/4 or less of the total peripheral area of the disk-shaped convex portions of the conventional structure having the same diameter as the inner side surface 14 of the base 11.

マウント20には、これをスピンドル30に固定するための複数のスピンドル用ねじ挿通孔27と、研削ホイール10をマウント20に取り付けるための複数の研削ホイール用ねじ挿通孔28とが設けられている。スピンドル用ねじ挿通孔27は、マウント本体21及び板状凸部23を貫通させて周方向に等間隔に配設されている。研削ホイール用ねじ挿通孔28は、装着面24の径方向中央部に周方向に等間隔に配設されている。 The mount 20 is provided with a plurality of spindle screw insertion holes 27 for fixing the spindle 30 and a plurality of grinding wheel screw insertion holes 28 for attaching the grinding wheel 10 to the mount 20. The spindle screw insertion holes 27 are arranged at equal intervals in the circumferential direction so as to pass through the mount main body 21 and the plate-shaped convex portion 23. The screw insertion holes 28 for the grinding wheel are arranged at equal intervals in the circumferential direction in the radial center portion of the mounting surface 24.

スピンドル30は、マウント20よりも小径の円柱状の部材である。スピンドル30の下端面31には、マウント20のスピンドル用ねじ挿通孔27に対応させて複数のねじ穴32が設けられている。ねじ穴32は、下端面31の周縁近傍に周方向に等間隔に配設されている。 The spindle 30 is a columnar member having a diameter smaller than that of the mount 20. A plurality of screw holes 32 are provided on the lower end surface 31 of the spindle 30 so as to correspond to the screw insertion holes 27 for the spindle of the mount 20. The screw holes 32 are arranged in the vicinity of the peripheral edge of the lower end surface 31 at equal intervals in the circumferential direction.

上記のように構成されたマウント20は、マウント本体21の上面29をスピンドル30の下端面31に接触させ、マウント20の各スピンドル用ねじ挿通孔27をスピンドル30の各ねじ穴32に合わせた状態で、図示しないねじをマウント20のスピンドル用ねじ挿通孔27に挿通しスピンドル30のねじ穴32に螺合させて締め付けることによりスピンドル30に同軸に位置決めされて固定される。 In the mount 20 configured as described above, the upper surface 29 of the mount body 21 is brought into contact with the lower end surface 31 of the spindle 30, and the screw insertion holes 27 for each spindle of the mount 20 are aligned with the screw holes 32 of the spindle 30. Then, a screw (not shown) is inserted into the spindle screw insertion hole 27 of the mount 20 and screwed into the screw hole 32 of the spindle 30 to be tightened so as to be coaxially positioned and fixed to the spindle 30.

研削ホイール10は、基台11の内側面14をスピンドル30に固定されたマウント本体21の板状凸部23に嵌合させるとともに基台11の被装着面12をマウント20の装着面24に接触させ、基台11の各ねじ穴をマウント20の各研削ホイール用ねじ挿通孔28に合わせた状態で、図示しないねじをマウント20の研削ホイール用ねじ挿通孔28に挿通し、基台11のねじ穴に螺合させて締め付けることによりマウント20に装着される。その際、板状凸部23の4つの凸部25が基台11の内側面14に接触して嵌合することにより、スピンドル30の軸心に研削ホイール10の中心が位置づけられる。そして、凸部25が基台11の内側面14と接触しない部分においては、マウント20と基台11の内側面14との間に、視認可能でかつ指や棒状のものなどを入れることが可能なほどの大きな隙間が形成される。 In the grinding wheel 10, the inner side surface 14 of the base 11 is fitted to the plate-shaped convex portion 23 of the mount body 21 fixed to the spindle 30, and the mounted surface 12 of the base 11 is in contact with the mounting surface 24 of the mount 20. Then, with each screw hole of the base 11 aligned with the screw insertion hole 28 for each grinding wheel of the mount 20, a screw (not shown) is inserted into the screw insertion hole 28 for the grinding wheel of the mount 20, and the screw of the base 11 is inserted. It is attached to the mount 20 by screwing it into the hole and tightening it. At that time, the center of the grinding wheel 10 is positioned at the axis of the spindle 30 by contacting and fitting the four convex portions 25 of the plate-shaped convex portion 23 with the inner side surface 14 of the base 11. Then, in the portion where the convex portion 25 does not come into contact with the inner side surface 14 of the base 11, a visible finger or a rod-shaped object can be inserted between the mount 20 and the inner side surface 14 of the base 11. What a big gap is formed.

凸部25と基台11の内側面14との間には、実際には研削ホイール10の取り外しを可能とするために若干の隙間が存在しており、スピンドル30を回転させて研削砥石15を被加工物に接触させるとともに、当該接触部分に研削水を供給すると、凸部25と基台11の内側面14との間の隙間には、毛細管現象によって研削屑を含む研削水が浸入する。そのため、その研削水が乾燥することにより、各凸部25と基台11との隙間が研削屑で埋められ、各凸部25と基台11とが研削屑で接着された状態になりうるが、4つの凸部25が基台11の内側面14と接触する接触面26の合計面積は、板状凸部23が基台11の内側面14に全周に亘って接触したと仮定した場合の接触面積のごく一部(1/4以下)であるので、研削ホイール10を交換する際の研削ホイール10の取り外しの妨げとはならない。 There is actually a slight gap between the convex portion 25 and the inner side surface 14 of the base 11 so that the grinding wheel 10 can be removed, and the spindle 30 is rotated to rotate the grinding wheel 15. When the object is brought into contact with the workpiece and the grinding water is supplied to the contact portion, the grinding water containing the grinding chips infiltrates into the gap between the convex portion 25 and the inner side surface 14 of the base 11 due to the capillary phenomenon. Therefore, when the grinding water dries, the gap between each convex portion 25 and the base 11 may be filled with grinding debris, and each convex portion 25 and the base 11 may be adhered to each other with the grinding debris. The total area of the contact surface 26 in which the four convex portions 25 are in contact with the inner surface surface 14 of the base 11 is based on the assumption that the plate-shaped convex portion 23 is in contact with the inner surface surface 14 of the base 11 over the entire circumference. Since it is a small part (1/4 or less) of the contact area of the grinding wheel 10, it does not hinder the removal of the grinding wheel 10 when the grinding wheel 10 is replaced.

このように、マウント20によれば、4つの凸部25が基台11の内側面14に接触して支持されることによりスピンドル30の軸心に研削ホイール10の中心を位置づけることができ、それらの凸部25が基台11の内側面14と接触しない部分においてはマウント20と基台11の内側面14との間に大きな隙間が形成されることにより、マウント20と基台11の内側面14との接触部が全周に亘って研削屑で接着された状態になるのを防止できるので、研削ホイール10の位置決めを正確に行うとともに研削ホイール10を交換する際の研削ホイール10の取り外しを容易に行えるようにすることができる。 As described above, according to the mount 20, the four convex portions 25 are in contact with and supported by the inner side surface 14 of the base 11, so that the center of the grinding wheel 10 can be positioned at the axis of the spindle 30. In the portion where the convex portion 25 does not come into contact with the inner side surface 14 of the base 11, a large gap is formed between the mount 20 and the inner side surface 14 of the base 11, so that the inner side surface of the mount 20 and the base 11 is formed. Since it is possible to prevent the contact portion with the 14 from being adhered by the grinding debris over the entire circumference, the grinding wheel 10 is accurately positioned and the grinding wheel 10 is removed when the grinding wheel 10 is replaced. It can be made easy.

なお、本発明の実施形態は上記の実施形態に限定されるものではなく、本発明の技術的思想の趣旨を逸脱しない範囲において様々に変更、置換、変形されてもよい。例えば、上記実施形態のマウント20は、4つの凸部25を有する略正方形の板状凸部23を有するものであるが、図2に示すマウント20aのように、3つの凸部25aを有する略正三角形の板状凸部23aを有するものであってもよい。この場合は、正三角形の頂点を面取りして基台11の内側面14と曲率半径の略等しい3つの凸部25aを設け、各凸部25aは、基台11の内側面14と曲率が略等しい円弧状の接触面26aを有する。また、略正五角形、略正六角形といった多角形状の板状凸部の各頂点を面取りした形状のマウントとしてもよい。 The embodiment of the present invention is not limited to the above embodiment, and may be variously modified, replaced, or modified without departing from the spirit of the technical idea of the present invention. For example, the mount 20 of the above embodiment has a substantially square plate-shaped convex portion 23 having four convex portions 25, but has three convex portions 25a as in the mount 20a shown in FIG. It may have an equilateral triangular plate-shaped convex portion 23a. In this case, the apex of the equilateral triangle is chamfered to provide three convex portions 25a having substantially the same radius of curvature as the inner surface 14 of the base 11, and each convex portion 25a has substantially the same curvature as the inner surface 14 of the base 11. It has the same arcuate contact surface 26a. Further, the mount may have a shape in which each apex of a polygonal plate-shaped convex portion such as a substantially regular pentagon or a substantially regular hexagon is chamfered.

さらに、上記実施形態では、板状凸部23の凸部25と基台11の内側面14とが面接触する構成を採用したが、図3に例示するマウント20bのように、板状凸部23bと基台11の内側面14とが点接触する構成としてもよい。この場合、正方形の板状凸部23bの4つの角が凸部25bとなって基台11の内側面14の4箇所に点接触することにより、研削ホイール10の位置決めがなされる。 Further, in the above embodiment, a configuration is adopted in which the convex portion 25 of the plate-shaped convex portion 23 and the inner side surface 14 of the base 11 are in surface contact with each other. The 23b and the inner side surface 14 of the base 11 may be in point contact with each other. In this case, the grinding wheel 10 is positioned by the four corners of the square plate-shaped convex portion 23b forming the convex portion 25b and making point contact with the four points of the inner side surface 14 of the base 11.

また、図4に示すマウント20cのように、円形の外周部から外側に突出した略半円状の小さな凸部25cを複数備える構成としてもよい。この場合の凸部25cは、基台11の内側面14よりも小さい曲率半径を有し、凸部25cの先端が基台11の内側面14に点接触することにより、研削ホイール10の位置決めがなされる。 Further, as in the mount 20c shown in FIG. 4, a plurality of small substantially semicircular convex portions 25c protruding outward from the circular outer peripheral portion may be provided. In this case, the convex portion 25c has a radius of curvature smaller than that of the inner side surface 14 of the base 11, and the tip of the convex portion 25c makes point contact with the inner side surface 14 of the base 11, so that the grinding wheel 10 can be positioned. Will be done.

10:研削ホイール 11:基台 12:被装着面
13:端面 14:内側面 15:研削砥石
20、20a、20b、20c:マウント 21:マウント本体 22:下面
23、23a、23b、23c:板状凸部 24:装着面
25、25a、25b、25c:凸部 26:接触面
27:スピンドル用ねじ挿通孔 28:研削ホイール用ねじ挿通孔 29:上面
30:スピンドル 31:下端面 32:ねじ穴
10: Grinding wheel 11: Base 12: Mounted surface 13: End surface 14: Inner surface 15: Grinding wheel 20, 20a, 20b, 20c: Mount 21: Mount body 22: Bottom surface 23, 23a, 23b, 23c: Plate shape Convex part 24: Mounting surface 25, 25a, 25b, 25c: Convex part 26: Contact surface 27: Screw insertion hole for spindle 28: Screw insertion hole for grinding wheel 29: Top surface 30: Spindle 31: Bottom surface 32: Screw hole

Claims (1)

スピンドルの先端に連結され、砥石を環状に配設した研削ホイールの中心を該スピンドルの軸心と一致させて装着するマウントであって、
研削ホイールは、一方の端面を該マウントに装着される被装着面とする環状の基台と、他方の面に配設された環状の該砥石と、を備え、
該マウントは、該研削ホイールを装着する環状の装着面と、該マウントの中心を中心として等角度で該基台の内側面に接触する少なくとも3つの凸部と、該研削ホイールを該マウントに取り付けるためのねじを挿通させる研削ホイール用ねじ挿通孔と、を備え、
該基台には、該研削ホイールを該マウントに取り付けるため該研削ホイール用ねじ挿通孔に対応した複数のねじ穴が配設され、
該少なくとも3つの凸部が該基台の内側面に接触することにより該スピンドルの軸心に該研削ホイールの中心を位置づけ、該ねじを該研削ホイール用ねじ挿通孔に挿通し該ねじ穴に螺合させて締め付けることによって該研削ホイールが該マウントに固定され、該凸部が該基台の内側面と接触しない部分においては該マウントと該基台の内側面との間に大きな隙間が形成されるマウント。
It is a mount that is connected to the tip of the spindle and is mounted so that the center of the grinding wheel with the grindstone arranged in an annular shape is aligned with the axis of the spindle.
The grinding wheel comprises an annular base having one end surface as a mounting surface to be mounted on the mount, and the annular grindstone disposed on the other end surface.
The mount has an annular mounting surface on which the grinding wheel is mounted, at least three protrusions that contact the inner surface of the base at an equal angle around the center of the mount, and the grinding wheel to be mounted on the mount. With a screw insertion hole for the grinding wheel to insert the screw for
The base is provided with a plurality of screw holes corresponding to the screw insertion holes for the grinding wheel in order to mount the grinding wheel on the mount.
The center of the grinding wheel is positioned at the axis of the spindle by contacting the inner side surface of the base with the at least three protrusions, and the screw is inserted into the screw insertion hole for the grinding wheel and screwed into the screw hole. The grinding wheel is fixed to the mount by fitting and tightening, and a large gap is formed between the mount and the inner surface of the base at the portion where the convex portion does not contact the inner surface of the base. Mount.
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