JP2011090381A5 - - Google Patents
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- JP2011090381A5 JP2011090381A5 JP2009241343A JP2009241343A JP2011090381A5 JP 2011090381 A5 JP2011090381 A5 JP 2011090381A5 JP 2009241343 A JP2009241343 A JP 2009241343A JP 2009241343 A JP2009241343 A JP 2009241343A JP 2011090381 A5 JP2011090381 A5 JP 2011090381A5
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Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009241343A JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
| KR1020127010022A KR101416285B1 (ko) | 2009-10-20 | 2010-09-16 | 유량 제어기 |
| RU2012119820/28A RU2515208C2 (ru) | 2009-10-20 | 2010-09-16 | Регулятор потока |
| DE112010004226.8T DE112010004226B4 (de) | 2009-10-20 | 2010-09-16 | Durchflusssteuerung |
| BR112012009504-8A BR112012009504B1 (pt) | 2009-10-20 | 2010-09-16 | Controlador de Fluxo |
| US13/502,757 US8800593B2 (en) | 2009-10-20 | 2010-09-16 | Flow controller |
| CN201080047325.5A CN102576230B (zh) | 2009-10-20 | 2010-09-16 | 流控制器 |
| PCT/JP2010/066034 WO2011048896A1 (ja) | 2009-10-20 | 2010-09-16 | フローコントローラ |
| TW99133247A TWI432931B (zh) | 2009-10-20 | 2010-09-30 | 流量控制器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009241343A JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011090381A JP2011090381A (ja) | 2011-05-06 |
| JP2011090381A5 true JP2011090381A5 (ja) | 2011-07-21 |
| JP5250875B2 JP5250875B2 (ja) | 2013-07-31 |
Family
ID=43900136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009241343A Active JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8800593B2 (ja) |
| JP (1) | JP5250875B2 (ja) |
| KR (1) | KR101416285B1 (ja) |
| CN (1) | CN102576230B (ja) |
| BR (1) | BR112012009504B1 (ja) |
| DE (1) | DE112010004226B4 (ja) |
| RU (1) | RU2515208C2 (ja) |
| TW (1) | TWI432931B (ja) |
| WO (1) | WO2011048896A1 (ja) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL208815A0 (en) * | 2010-10-19 | 2011-01-31 | Raphael Valves Ind 1975 Ltd | An integrated ultrasonic flowmeter and hydraulic valve |
| CA2838547A1 (en) | 2011-05-26 | 2012-11-29 | Eaton Corporation | Valve assembly with integral sensors |
| CN103809621B (zh) * | 2012-11-13 | 2018-04-06 | 深圳迈瑞生物医疗电子股份有限公司 | 以机械式控制作为备用的电控式流量控制系统 |
| US9137595B2 (en) * | 2012-11-14 | 2015-09-15 | Knowles Electronics, Llc | Apparatus for prevention of pressure transients in microphones |
| US9235219B2 (en) * | 2012-12-27 | 2016-01-12 | Zhejiang Dunan Hetian Metal Co., Ltd. | Microvalve with integrated flow sensing capability |
| US9063551B2 (en) * | 2013-02-14 | 2015-06-23 | Intellihot Green Technologies, Inc. | Adaptive heating control system for a water heater |
| WO2015007318A1 (en) * | 2013-07-18 | 2015-01-22 | Abb Technology Ltd | Discrete pilot stage valve arrangement with fail freeze mode |
| KR20160105801A (ko) * | 2014-01-07 | 2016-09-07 | 썬듀 테크놀로지스 엘엘씨 | 유체-작동식 유량 제어 밸브 |
| DE102014010815A1 (de) * | 2014-07-23 | 2016-01-28 | Wabco Gmbh | Elektropneumatisches Regelventil |
| AU2015301275B2 (en) * | 2014-08-04 | 2020-06-11 | Tyco Fire Products Lp | Fluid control assemblies for sprinkler systems |
| JP6481282B2 (ja) * | 2014-08-15 | 2019-03-13 | アルメックスコーセイ株式会社 | 気体流量制御装置および気体流量制御弁 |
| FR3035469B1 (fr) * | 2015-04-23 | 2017-05-12 | Snecma | Vanne et procede de commande |
| US10427179B2 (en) | 2015-09-17 | 2019-10-01 | Cnh Industrial America Llc | Low flow metering system |
| DE102016006545A1 (de) * | 2016-05-25 | 2017-11-30 | Hydac System Gmbh | Ventilvorrichtung |
| DE102017002034A1 (de) * | 2016-07-20 | 2018-01-25 | Lubing Maschinenfabrik Ludwig Bening Gmbh & Co. Kg | Druckminderer für Tiertränken sowie Verfahren zum Verstellen mindestens eines Druckminderers für Tiertränken |
| US10781713B2 (en) * | 2016-12-28 | 2020-09-22 | Hamilton Sundstrand Corporation | Starter air valve systems configured for low speed motoring |
| US10301963B2 (en) | 2016-12-28 | 2019-05-28 | Hamilton Sundstrand Corporation | Starter air valve systems configured for low speed motoring |
| US10409298B2 (en) * | 2017-04-27 | 2019-09-10 | Marotta Controls, Inc. | Electronically controlled regulator |
| CN108933061B (zh) * | 2017-05-18 | 2019-09-20 | 南京梅山冶金发展有限公司 | 炸药台车输送管控制装置及控制方法 |
| CN111033104B (zh) * | 2017-09-30 | 2021-12-03 | 株式会社富士金 | 阀以及流体供给管线 |
| TWI681111B (zh) * | 2018-06-26 | 2020-01-01 | 陳瑋样 | 流體調節裝置 |
| TWI662213B (zh) * | 2018-10-30 | 2019-06-11 | 台灣氣立股份有限公司 | Two-stage intake and two-stage exhaust structure of electronically controlled proportional valve |
| TWI689676B (zh) * | 2019-01-10 | 2020-04-01 | 台灣氣立股份有限公司 | 電控大容量比例閥 |
| TWI689678B (zh) * | 2019-03-07 | 2020-04-01 | 台灣氣立股份有限公司 | 真空電控比例閥 |
| TWI689679B (zh) * | 2019-03-08 | 2020-04-01 | 台灣氣立股份有限公司 | 真空大容量電控比例閥 |
| EP3734234B1 (en) | 2019-04-30 | 2022-05-04 | Fas Medic S.A. | Fluid sensing apparatus |
| DE102020201178A1 (de) * | 2020-01-31 | 2021-08-05 | Robert Bosch Gesellschaft mit beschränkter Haftung | Absperrventil für ein Brennstoffzellensystem, Brennstoffzellensystem |
| JP7424322B2 (ja) * | 2021-01-19 | 2024-01-30 | Smc株式会社 | 流体圧力制御装置 |
| US11360014B1 (en) * | 2021-07-19 | 2022-06-14 | Multi-Chem Group, Llc | Methods and systems for characterizing fluid composition and process optimization in industrial water operations using MEMS technology |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3103949A (en) * | 1959-12-02 | 1963-09-17 | Fiorentini Pietro | Pressure relief devices |
| JPS61173319A (ja) * | 1985-01-26 | 1986-08-05 | Shoketsu Kinzoku Kogyo Co Ltd | 流体用レギユレ−タ |
| JPH0750418B2 (ja) * | 1986-07-15 | 1995-05-31 | 黒田精工株式会社 | 空気圧レギユレ−タ |
| JPS63316110A (ja) * | 1987-06-19 | 1988-12-23 | Hitachi Metals Ltd | デジタルバルブを用いたパイロット式ガスガバナ− |
| US5109692A (en) * | 1988-08-25 | 1992-05-05 | Fisher Controls International Inc. | Diagnostic apparatus and method for fluid control valves |
| US5632465A (en) * | 1990-10-29 | 1997-05-27 | Cordua; Paul M. | Valve assembly |
| JP2784154B2 (ja) * | 1994-12-27 | 1998-08-06 | シーケーディ株式会社 | マスフローコントローラ |
| JP3247282B2 (ja) * | 1995-10-03 | 2002-01-15 | エスエムシー株式会社 | 空気圧レギュレータ |
| US5944048A (en) * | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
| WO1998035279A1 (en) * | 1997-02-06 | 1998-08-13 | Smc Kabushiki Kaisha | Pneumatic pressure regulator |
| US5865205A (en) * | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
| US6457696B1 (en) * | 1998-11-06 | 2002-10-01 | Tgk Co., Ltd. | Pilot operated flow regulating valve |
| US6389364B1 (en) * | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
| US6354319B1 (en) * | 2000-04-13 | 2002-03-12 | Dresser, Inc. | Low differential, pilot operated fluid pressure regulation apparatus and method |
| JP3634733B2 (ja) * | 2000-09-22 | 2005-03-30 | Ｓｍｃ株式会社 | 流体圧力調整装置 |
| JP2002181594A (ja) * | 2000-12-11 | 2002-06-26 | Yamatake Corp | 流量制御ユニット |
| US6830229B2 (en) * | 2001-05-22 | 2004-12-14 | Lockheed Martin Corporation | Two-stage valve suitable as high-flow high-pressure microvalve |
| US6779541B2 (en) * | 2001-10-12 | 2004-08-24 | Smc Kabushiki Kaisha | Fluid pressure regulator |
| US7809473B2 (en) * | 2002-06-24 | 2010-10-05 | Mks Instruments, Inc. | Apparatus and method for pressure fluctuation insensitive mass flow control |
| KR100517405B1 (ko) * | 2003-06-27 | 2005-09-27 | 삼성전자주식회사 | 질량 유량 제어기 및 이를 갖는 가스 공급 장치 |
| RU2310104C2 (ru) * | 2005-08-09 | 2007-11-10 | ООО "Научно-производственное предприятие "Омикрон" | Регулятор потока |
| JP2007058337A (ja) * | 2005-08-22 | 2007-03-08 | Asahi Organic Chem Ind Co Ltd | 流体制御装置 |
| US20070205384A1 (en) | 2006-03-02 | 2007-09-06 | Smc Kabushiki Kaisha | Flow Rate Control Apparatus |
| US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
| CN101354273B (zh) * | 2008-07-17 | 2010-07-07 | 美新半导体（无锡）有限公司 | 复合式气体流量测量方法及其装置 |
| US7905139B2 (en) * | 2008-08-25 | 2011-03-15 | Brooks Instrument, Llc | Mass flow controller with improved dynamic |
| US20100051110A1 (en) * | 2008-09-04 | 2010-03-04 | Ch2M Hill, Inc. | Gas actuated valve |
| JP2010169657A (ja) * | 2008-12-25 | 2010-08-05 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
| US8160833B2 (en) * | 2009-07-14 | 2012-04-17 | Hitachi Metals, Ltd | Thermal mass flow sensor with improved response across fluid types |
| US8499786B2 (en) * | 2010-04-09 | 2013-08-06 | Hitachi Metals, Ltd | Mass flow controller with enhanced operating range |
| IL208815A0 (en) * | 2010-10-19 | 2011-01-31 | Raphael Valves Ind 1975 Ltd | An integrated ultrasonic flowmeter and hydraulic valve |
-
2009
- 2009-10-20 JP JP2009241343A patent/JP5250875B2/ja active Active
-
2010
- 2010-09-16 KR KR1020127010022A patent/KR101416285B1/ko active IP Right Grant
- 2010-09-16 DE DE112010004226.8T patent/DE112010004226B4/de not_active Expired - Fee Related
- 2010-09-16 BR BR112012009504-8A patent/BR112012009504B1/pt not_active IP Right Cessation
- 2010-09-16 US US13/502,757 patent/US8800593B2/en active Active
- 2010-09-16 CN CN201080047325.5A patent/CN102576230B/zh not_active Expired - Fee Related
- 2010-09-16 RU RU2012119820/28A patent/RU2515208C2/ru not_active IP Right Cessation
- 2010-09-16 WO PCT/JP2010/066034 patent/WO2011048896A1/ja active Application Filing
- 2010-09-30 TW TW99133247A patent/TWI432931B/zh active