JP2011081300A5 - - Google Patents

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JP2011081300A5
JP2011081300A5 JP2009235101A JP2009235101A JP2011081300A5 JP 2011081300 A5 JP2011081300 A5 JP 2011081300A5 JP 2009235101 A JP2009235101 A JP 2009235101A JP 2009235101 A JP2009235101 A JP 2009235101A JP 2011081300 A5 JP2011081300 A5 JP 2011081300A5
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light reflecting
mirror
imaging element
symmetric imaging
manufacturing
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本発明の第一の態様の反射型面対称結像素子の製造方法は、直交する第1及び第2光反射面を有する微小ミラーユニットがマトリクス状に配列された平板状の構造体からなり、入射光を前記第1及び第2光反射面により2回反射する反射型面対称結像素子の製造方法であって、複数の平板ミラーをその光反射主面を同一方向に向けて積層して前記複数の平板ミラーを固着させることにより平行ミラーブロックを形成する積層工程と、前記平行ミラーブロックを前記複数の平板ミラーの光反射主面に対して垂直となる方向に等間隔で切断して複数の長手光反射面が平行に配列された少なくとも2つのミラーシートを形成する切断工程と、前記2つのミラーシートのうちの一方のミラーシートの長手光反射面と他方のミラーシートの長手光反射面とが直交するように前記2つのミラーシートを貼り合わせて前記反射型面対称結像素子を作成する貼り合わせ工程と、を備え、前記一方のミラーシートの長手光反射面が前記第1光反射面となり、他方のミラーシートの長手光反射面が前記第2光反射面となることを特徴としている。 The manufacturing method of the reflective surface-symmetric imaging element according to the first aspect of the present invention comprises a flat structure in which micromirror units having orthogonal first and second light reflecting surfaces are arranged in a matrix, A method of manufacturing a reflective surface-symmetric imaging element that reflects incident light twice by the first and second light reflecting surfaces, wherein a plurality of flat mirrors are laminated with their light reflecting main surfaces facing in the same direction. A laminating step of forming parallel mirror blocks by fixing the plurality of flat mirrors, and cutting the parallel mirror blocks at equal intervals in a direction perpendicular to the light reflecting main surface of the plurality of flat mirrors. A cutting step of forming at least two mirror sheets in which the longitudinal light reflecting surfaces of the two mirror sheets are arranged in parallel, the longitudinal light reflecting surface of one of the two mirror sheets, and the longitudinal light reflecting surface of the other mirror sheet And bonding the two mirror sheets so that the two mirror sheets are orthogonal to each other to create the reflective surface-symmetric imaging element, and the longitudinal light reflecting surface of the one mirror sheet is the first light reflecting surface The longitudinal light reflecting surface of the other mirror sheet is the second light reflecting surface.

本発明の第二の態様の反射型面対称結像素子の製造方法は、直交する第1及び第2光反射面を有する微小ミラーユニットがマトリクス状に配列された平板状の構造体からなり、入射光を前記第1及び第2光反射面により2回反射する反射型面対称結像素子の製造方法であって、複数の平板ミラーをその光反射主面を同一方向に向けて積層して前記複数の平板ミラーを固着させることにより平行ミラーブロックを形成する第1積層工程と、前記平行ミラーブロックを前記複数の平板ミラー各々の光反射主面に対して垂直となる方向に第1所定の厚さ間隔で切断して複数の長手光反射面が平行に配列された複数のミラーシートを作成する第1切断工程と、前記複数のミラーシート各々のいずれか一方の主面に光反射膜を形成する光反射膜形成工程と、前記複数のミラーシートをその光反射膜形成主面を同一方向に向けて積層して前記複数のミラーシートを固着させることにより直交ミラーブロックを形成する第2積層工程と、前記複数のミラーシート各々が有する前記複数の長手光反射面及び前記光反射膜形成主面に対して垂直となる方向に前記直交ミラーブロックを第2所定の厚さ間隔で切断して前記微小ミラーユニット毎に直交する前記第1及び第2光反射面を有する前記反射型面対称結像素子を作成する第2切断工程と、を備えることを特徴としている。 The manufacturing method of the reflective surface-symmetric imaging element according to the second aspect of the present invention comprises a flat structure in which micromirror units having orthogonal first and second light reflecting surfaces are arranged in a matrix. A method of manufacturing a reflective surface-symmetric imaging element that reflects incident light twice by the first and second light reflecting surfaces, wherein a plurality of flat mirrors are laminated with their light reflecting main surfaces facing in the same direction. A first stacking step of forming parallel mirror blocks by fixing the plurality of flat mirrors; and a first predetermined step in a direction perpendicular to the light reflecting main surface of each of the plurality of flat mirrors. A first cutting step of creating a plurality of mirror sheets in which a plurality of longitudinal light reflecting surfaces are arranged in parallel by cutting at a thickness interval; and a light reflecting film is provided on one main surface of each of the plurality of mirror sheets Light reflection film forming process to be formed A second laminating step of forming the orthogonal mirror block by laminating the plurality of mirror sheets with the light reflection film forming main surfaces thereof oriented in the same direction and fixing the plurality of mirror sheets; and the plurality of mirror sheets The orthogonal mirror block is cut at a second predetermined thickness interval in a direction perpendicular to the plurality of longitudinal light reflecting surfaces and the light reflecting film forming main surface that each has, and is orthogonal to each minute mirror unit. And a second cutting step of creating the reflection-type plane-symmetric imaging element having the first and second light reflecting surfaces.

本発明の第一の態様の反射型面対称結像素子の製造方法によれば、複数の平板ミラーを積層して平行ミラーブロックを形成してからそれを薄く切断して少なくとも2つのミラーシートを作り出すので、従来の製造方法に比して手間がかからず、高精度の反射型面対称結像素子を短時間で量産することができる。また、各反射型面対称結像素子の光学精度の均一化を図ることができる。 According to the manufacturing method of the reflective surface-symmetric imaging element of the first aspect of the present invention , a plurality of flat mirrors are stacked to form a parallel mirror block, and then thinly cut to obtain at least two mirror sheets. Therefore, it takes less time than the conventional manufacturing method, and a high-precision reflective surface-symmetric imaging element can be mass-produced in a short time. Further, it is possible to make the optical accuracy of each reflection type plane-symmetric imaging element uniform.

本発明の第二の態様の反射型面対称結像素子の製造方法によれば、複数の平板ミラーを積層して平行ミラーブロックを形成してからそれを薄く切断して複数のミラーシートを作り出し、そのミラーシート各々の一方の主面に光反射膜を形成してそれらを積層して直交ミラーブロックを形成してからそれを薄く切断して反射型面対称結像素子を作り出すので、従来の製造方法に比して手間がかからず、高精度の反射型面対称結像素子を短時間で量産することができる。また、各反射型面対称結像素子の光学精度の均一化をより図ることができる。 According to the manufacturing method of the reflection-type plane-symmetric imaging element of the second aspect of the present invention , a plurality of flat mirrors are stacked to form a parallel mirror block, and then thinly cut to create a plurality of mirror sheets. Since a light reflecting film is formed on one main surface of each of the mirror sheets, they are laminated to form an orthogonal mirror block, and then thinly cut to create a reflective surface-symmetric imaging element. Compared to the manufacturing method, it takes less time and can mass-produce highly accurate reflective surface-symmetric imaging elements in a short time. In addition, the optical accuracy of each reflection type plane-symmetric imaging element can be made more uniform.

図5(a)〜(e)は本発明の第一の態様の反射型面対称結像素子の製造方法を示している。この製造方法においては、先ず、複数の平板ミラー31が準備される。平板ミラー31は図5(a)に示すように平板状であり、厚さWを有する。平面ミラー31の本体はアクリル等の透明プラスチック板又はガラス板からなる。平面ミラー31の両主面のうちの一方の主面は光反射膜の形成によって光反射主面31aとされている。光反射主面31aは平板ミラー31の本体側からの光を反射するようにされている。 5 (a) to 5 (e) show a method for manufacturing a reflective surface-symmetric imaging element according to the first aspect of the present invention . In this manufacturing method, first, a plurality of flat mirrors 31 are prepared. As shown in FIG. 5A, the flat mirror 31 is flat and has a thickness W. The main body of the plane mirror 31 is made of a transparent plastic plate such as acrylic or a glass plate. One main surface of both main surfaces of the plane mirror 31 is formed as a light reflecting main surface 31a by forming a light reflecting film. The light reflecting main surface 31 a reflects light from the main body side of the flat mirror 31.

図7(a)〜(g)は本発明の第二の態様の反射型面対称結像素子の製造方法を示している。この製造方法においては、図7(a)〜図7(d)の平板ミラー31からミラーシート34を作り出すまでの第1積層工程及び第1切断工程を含む部分は第1の実施例の図5(a)〜図5(d)の部分と同一であり、同一符号が付けられている。よって、この部分の説明は省略される。なお、平板ミラー31の厚さWとミラーシート34の厚さDとは等しくされる。 FIGS. 7A to 7G show a method for manufacturing a reflective surface-symmetric imaging element according to the second embodiment of the present invention . In this manufacturing method, the portion including the first laminating step and the first cutting step until the mirror sheet 34 is produced from the flat mirror 31 of FIGS. 7A to 7D is the same as that of the first embodiment shown in FIG. It is the same as the part of (a)-FIG.5 (d), and the same code | symbol is attached | subjected. Therefore, explanation of this part is omitted. In addition, the thickness W of the flat mirror 31 and the thickness D of the mirror sheet 34 are made equal.

Claims (3)

直交する第1及び第2光反射面を有する微小ミラーユニットがマトリクス状に配列された平板状の構造体からなり、入射光を前記第1及び第2光反射面により2回反射する反射型面対称結像素子の製造方法であって、
複数の平板ミラーをその光反射主面を同一方向に向けて積層して前記複数の平板ミラーを固着させることにより平行ミラーブロックを形成する積層工程と、
前記平行ミラーブロックを前記複数の平板ミラーの光反射主面に対して垂直となる方向に等間隔で切断して複数の長手光反射面が平行に配列された少なくとも2つのミラーシートを形成する切断工程と、
前記2つのミラーシートのうちの一方のミラーシートの長手光反射面と他方のミラーシートの長手光反射面とが直交するように前記2つのミラーシートを貼り合わせて前記反射型面対称結像素子を作成する貼り合わせ工程と、を備え、
前記一方のミラーシートの長手光反射面が前記第1光反射面となり、他方のミラーシートの長手光反射面が前記第2光反射面となることを特徴とする反射型面対称結像素子の製造方法。
A reflective surface that consists of a plate-like structure in which micromirror units having orthogonal first and second light reflecting surfaces are arranged in a matrix, and reflects incident light twice by the first and second light reflecting surfaces. A method of manufacturing a symmetric imaging element,
A laminating step of forming a parallel mirror block by laminating a plurality of flat mirrors with their light reflecting main surfaces oriented in the same direction and fixing the flat mirrors;
Cutting the parallel mirror block at equal intervals in a direction perpendicular to the light reflecting main surface of the plurality of flat mirrors to form at least two mirror sheets in which a plurality of long light reflecting surfaces are arranged in parallel Process,
The reflection-type plane-symmetric imaging element is formed by bonding the two mirror sheets so that the longitudinal light reflecting surface of one of the two mirror sheets is perpendicular to the longitudinal light reflecting surface of the other mirror sheet. And a bonding process for creating
A reflective surface-symmetric imaging element characterized in that the longitudinal light reflecting surface of the one mirror sheet is the first light reflecting surface, and the longitudinal light reflecting surface of the other mirror sheet is the second light reflecting surface. Production method.
前記切断工程において前記平行ミラーブロックの切断のために、ダイヤモンドを代表とする粒子化された砥石を金属又は樹脂製のワイヤに付着又は供給することによって切断を行うワイヤーソー、バンドソー、ダイシングブレード又はのこぎりを用いることを特徴とする請求項1記載の反射型面対称結像素子の製造方法。   A wire saw, a band saw, a dicing blade, or a saw that cuts the parallel mirror block by attaching or supplying a particleized grindstone represented by diamond to a metal or resin wire in order to cut the parallel mirror block in the cutting step. The method of manufacturing a reflection-type plane-symmetric imaging element according to claim 1, wherein: 前記積層工程において、前記複数の平板ミラー各々の前記光反射主面とは反対側の主面には、金属膜を予め形成しておき、前記平板ミラー同士を平面接合により固定することを特徴とする請求項1記載の反射型面対称結像素子の製造方法。
In the laminating step, a metal film is formed in advance on a main surface opposite to the light reflecting main surface of each of the plurality of flat plate mirrors, and the flat plate mirrors are fixed by plane bonding. A method for manufacturing a reflective surface-symmetric imaging element according to claim 1.
JP2009235101A 2009-10-09 2009-10-09 Method for manufacturing reflection type plane-symmetric imaging element Pending JP2011081300A (en)

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