JP2008145482A - Manufacturing method of right-angled triangular prism - Google Patents

Manufacturing method of right-angled triangular prism Download PDF

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JP2008145482A
JP2008145482A JP2006329212A JP2006329212A JP2008145482A JP 2008145482 A JP2008145482 A JP 2008145482A JP 2006329212 A JP2006329212 A JP 2006329212A JP 2006329212 A JP2006329212 A JP 2006329212A JP 2008145482 A JP2008145482 A JP 2008145482A
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cutting
optical multilayer
multilayer film
polishing
peeling
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Masaki Iwamoto
将樹 岩本
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Miyazaki Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a right-angled triangular prism which is low in cost and is excellent in dimensional accuracy. <P>SOLUTION: The manufacturing method of the right-angled triangular prism comprises a process for forming a plate-shaped optical member by forming optical multilayered films respectively on upper and lower surfaces of a rectangular glass plate, a process for laminating plate-shaped optical members by using a temporarily fastening material, a process for cutting a laminated body by orthogonally intersecting its main surface, a process for carrying out mirror polishing of a cut surface of the cut laminated body, a process for forming optical multilayered films on respective flanks of the cut laminated body subjected to mirror polishing, a process for obtaining a regular square pole having a regular square end face by dissolving off the temporarily fastening material of the cut laminated body, a process for attaching the regular square pole to a cutting jig having a triangular groove, cutting the regular square pole along its diagonal line and then exfoliating the cut pole from the cutting jig, a process for attaching a right-angled triangular pole to a polishing jig having the triangular groove, carrying out mirror polishing of its slope and then exfoliating the polished pole from the polishing jig and a process for cutting the right-angled triangular pole the slope of which is subjected to mirror polishing at cutting surfaces orthogonally intersecting in a longitudinal direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、直角三角プリズムの製造方法に関し、特に光学多層膜を有する直角三角プリズムの製造方法に関する。   The present invention relates to a method for manufacturing a right triangle prism, and more particularly to a method for manufacturing a right triangle prism having an optical multilayer film.

CD(Compact Disc)やDVD(Digital Versatile Disc)等の光記録媒体から情報を再生したり、あるいは情報を記録したりする光ピックアップ装置においては、光学デバイスとしてプリズムが使用されている。
上記したような光学デバイスの製造方法に関しては特許文献等に数多くの例が開示されている。例えば、特許文献1にはプリズムとその製造方法が開示されている。
In an optical pickup device that reproduces information from or records information on an optical recording medium such as a CD (Compact Disc) or a DVD (Digital Versatile Disc), a prism is used as an optical device.
A number of examples are disclosed in patent documents and the like regarding the method of manufacturing an optical device as described above. For example, Patent Document 1 discloses a prism and a manufacturing method thereof.

図6は特許文献1に開示されているプリズムの構成を示した図である。また、図7は特許文献1に開示されているプリズムの製造方法を示した工程図である。
図6に示すプリズム30は、例えばBK−7等の透明な光学ガラスからなり、形状が直角二等辺三角形の直角三角プリズムである。
光信号等の光が当たる当光面31a、31b、31c同士が連接する断面は、略R形状のコーナー部30d、30e、30fからなり、その表面が火造り面となっている。
FIG. 6 is a diagram showing the configuration of the prism disclosed in Patent Document 1. In FIG. FIG. 7 is a process diagram showing a prism manufacturing method disclosed in Patent Document 1.
The prism 30 shown in FIG. 6 is a right triangle prism made of transparent optical glass such as BK-7 and having a right isosceles triangle shape.
The cross-section where the light-receiving surfaces 31a, 31b, 31c to which light such as an optical signal hits is composed of substantially R-shaped corner portions 30d, 30e, 30f, and the surface thereof is a fire-making surface.

上記図6に示すようなプリズム30の製造方法は、図7(a)〜(d)に示す工程図に基づいている。図7(a)に示すガラス母材32はホウ珪酸系光学ガラスであるBK−7からなり、その形状は当光面となる表面32a、32b、32cを有する。またガラス母材32の断面は、表面32aを斜辺とする直角二等辺三角形であり、表面32b、32cの辺長はそれぞれ10mmから70mm程度である。   The manufacturing method of the prism 30 as shown in FIG. 6 is based on the process charts shown in FIGS. The glass base material 32 shown to Fig.7 (a) consists of BK-7 which is a borosilicate type | system | group optical glass, and the shape has the surface 32a, 32b, 32c used as an optical surface. The cross section of the glass base material 32 is a right isosceles triangle having the surface 32a as an oblique side, and the side lengths of the surfaces 32b and 32c are about 10 mm to 70 mm, respectively.

ガラス母材32を延伸成形する装置は図7(b)に示すように、ガラス母材32を把持する把持部を有する送り込み手段(図示せず)と、ガラス母材32を所定の温度に加熱する加熱炉33と、ローラー34a、34bの対を有してガラス母材32の下方を延伸成形する引張手段と、延伸されたガラスを切断する切断手段35とからなる。この延伸成形装置は、母材32とほぼ相似形の所望範囲の寸法を有し、図7(c)に示すような長尺体36に成型する装置である。得られた長尺体36は精密切断装置により所定の長さに切断し、図7(d)に示すようなプリズムが得られる。   As shown in FIG. 7 (b), the apparatus for drawing and molding the glass base material 32 heats the glass base material 32 to a predetermined temperature by feeding means (not shown) having a gripping part for gripping the glass base material 32. A heating furnace 33, a pair of rollers 34a and 34b, a tension means for stretching and forming the lower part of the glass base material 32, and a cutting means 35 for cutting the stretched glass. This stretch molding device is a device that has a desired range of dimensions approximately similar to the base material 32 and is molded into a long body 36 as shown in FIG. The obtained long body 36 is cut into a predetermined length by a precision cutting device to obtain a prism as shown in FIG.

また特許文献2には、2つの直角三角柱形状プリズムの傾斜面同士を接合し、一体化したビームスプリッタの製造方法が開示されている。特許文献2では、板ガラスの上面に偏光分離膜を形成すると共に、下面にマッチング膜を形成する。全く同一の構成を備えたガラス平板を複数枚使用して、45度の傾斜角度をつけた積層体を形成する。該積層体を45度の傾斜角度に沿って、ワイヤーソー等を用い所定ピッチにて切断し、積層分割体を形成する。該積層分割体の切断面を鏡面研磨すると共に、各面に反射膜をコーティングする。積層分割体を整合状態で積層して、積層体を形成する。該積層体を上記切断面と直交する切断面に沿って、ワイヤーソー等を用い所定ピッチにて切断すると、ビームスプリッタの連結体を得る。そして、所定ピッチにてビームスプリッタ連結体を切断すると、ビームスプリッタが得られる。   Patent Document 2 discloses a method of manufacturing a beam splitter in which inclined surfaces of two right triangular prisms are joined together. In Patent Document 2, a polarization separation film is formed on the upper surface of a plate glass, and a matching film is formed on the lower surface. A plurality of glass flat plates having the same configuration are used to form a laminated body with an inclination angle of 45 degrees. The laminated body is cut at a predetermined pitch using a wire saw or the like along an inclination angle of 45 degrees to form a laminated divided body. The cut surface of the laminated divided body is mirror-polished and a reflective film is coated on each surface. A laminated body is formed by stacking the laminated division bodies in an aligned state. When the laminated body is cut at a predetermined pitch using a wire saw or the like along a cutting plane orthogonal to the cutting plane, a coupled body of beam splitters is obtained. And if a beam splitter coupling body is cut | disconnected by a predetermined pitch, a beam splitter will be obtained.

また特許文献3にはビームスプリッタの他の製造方法が開示されている。特許文献3では、両面が鏡面研磨されたガラスプレートの一方の面に偏光分離膜を形成し、さらにUV硬化型接着剤を塗布する。UV硬化型接着剤を塗布したガラスプレートの上に、同様なガラスプレートを積層すると、中間部材(偏光分離膜とUV硬化型接着剤)を挟持したプレート積層体が形成される。該プレート積層体を一側面に沿って所定の間隔で切断すると、端面が正方形の細長い正四角柱が形成される。次に、研磨治具を用いて前記正四角柱を対角線に沿って4つの角を研磨すると、2つの直角三角プリズムの斜面同士を接合し、該接合面に偏光膜を挟持して一体化したビームスプリッタが得られる、と開示されている。
特開2003−329817公報 特開2000−143264公報 特開2003−137615公報
Patent Document 3 discloses another method of manufacturing a beam splitter. In Patent Document 3, a polarization separation film is formed on one surface of a glass plate whose both surfaces are mirror-polished, and a UV curable adhesive is further applied. When a similar glass plate is laminated on a glass plate coated with a UV curable adhesive, a plate laminate in which an intermediate member (polarized light separation film and UV curable adhesive) is sandwiched is formed. When the plate laminate is cut along a side surface at a predetermined interval, an elongated regular quadrangular prism having a square end surface is formed. Next, when the four corners of the square prism are polished along a diagonal line using a polishing jig, the inclined surfaces of the two right triangular prisms are joined together, and a polarizing film is sandwiched between the joined surfaces to be integrated It is disclosed that a splitter is obtained.
JP 2003-329817 A JP 2000-143264 A JP 2003-137615 A

しかしながら、特許文献1に開示されたプリズムの製造方法を用いてプリズムを製造すると、直角三角プリズムの3つの稜は略R形状となり強固となるものの、所望の精度の直角三角プリズム、例えば直角の角度精度、各辺の寸法精度が得られないという問題があった。また、特許文献2には立方体形状のビームスプリッタについては開示されているものの、直角を挟む側面に光学多層膜を備えた直角三角形状のプリズムについては開示されていない。また、特許文献3には2つの直角三角プリズムの斜面同士を接合し、該接合面に偏光膜を挟持して一体化したビームスプリッタの製造方法が開示されている。該製造方法を応用して直角三角形状のプリズムを形成することはできるものの、研磨工程(削り出し工程)に大幅な工数が掛かり、コストが増大するという問題があった。
本発明は上記問題点に鑑み、低コストでしかも寸法精度に優れた直角三角プリズムの製造方法を提供することにある。
However, when a prism is manufactured using the prism manufacturing method disclosed in Patent Document 1, the three edges of the right triangular prism are substantially R-shaped and become strong, but a right triangular prism having a desired accuracy, for example, a right angle There was a problem that accuracy and dimensional accuracy of each side could not be obtained. Further, although Patent Document 2 discloses a cube-shaped beam splitter, it does not disclose a right-triangular prism having an optical multilayer film on a side surface sandwiching a right angle. Patent Document 3 discloses a method of manufacturing a beam splitter in which the inclined surfaces of two right-angled triangular prisms are joined together and a polarizing film is sandwiched between the joined surfaces. Although the manufacturing method can be applied to form a right triangular prism, there has been a problem that the polishing process (machining process) takes a great number of steps and costs increase.
In view of the above problems, the present invention is to provide a method for manufacturing a right triangular prism that is low in cost and excellent in dimensional accuracy.

上記目的を達成するため、本発明は、直角を挟む側面にそれぞれ第1及び第2の光学多層膜を備えた直角三角プリズムの製造方法であって、矩形の平板状光学部材の一方面に第1の光学多層膜を形成し、他方面に第2の光学多層膜を形成する第1の光学多層膜形成工程と、複数の平板状光学部材を第1の仮止め剤を介して積層する積層体形成工程と、積層体形成工程にて形成された積層体の主面に対して直交する所定ピッチの複数の切断面にて切断する第1の切断工程と、第1の切断工程により切断された積層分割体の切断面を鏡面研磨する鏡面研磨工程と、鏡面研磨工程により鏡面研磨された積層分割体の一方の側面に第1の光学多層膜を、他方の側面に第2の光学多層膜を夫々形成する第2の光学多層膜形成工程と、第2の光学多層膜形成工程にて側面に光学多層膜が形成された積層分割体の第1の仮止め剤を剥離して端面が正方形の正四角柱を形成する剥離工程と、正四角柱を三角形状の溝の先端部に長方形の溝を有する切断治具に第2の仮止め剤を介して装着する第1の装着工程と、切断治具に装着した正四角柱を該正四角柱の対角線に沿って切断し、切断治具より剥離する切断剥離工程と、切断剥離工程により得られた直角三角柱を三角形の溝を有する研磨治具に第2の仮止め剤を介して装着する第2の装着工程と、第2の装着工程により研磨治具に装着した複数の直角三角柱の斜面を鏡面研磨し、研磨治具より剥離する鏡面研磨・剥離工程と、鏡面研磨・剥離工程にて斜面が鏡面研磨された直角三角柱を長手方向に直交して所定ピッチの複数の切断面にて切断する第2の切断工程と、を含むことを特徴とする。
このような本発明によれば、寸法精度に優れた光学多層膜を有する直角三角プリズムを製造することが可能となる。例えば、直角三角プリズムに要求される直角の角度精度は切断治具の三角溝に固定して切断するので、要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、所定の矩形の平板状光学部材を選び、積層体を適切に切断することにより、要求仕様を十分に満たす精度で構成することが可能になる。研磨工程に大幅な工数が掛からないためコストが増大するといったこともない。
In order to achieve the above object, the present invention provides a method for manufacturing a right-angled triangular prism having first and second optical multilayer films on side surfaces sandwiching a right angle, wherein the first surface is formed on one side of a rectangular flat optical member. 1st optical multilayer film formation process which forms 1 optical multilayer film, and forms the 2nd optical multilayer film in the other side, and lamination which laminates a plurality of tabular optical members via the 1st temporary fixative Cut by a first cutting step, a first cutting step of cutting at a plurality of cut surfaces having a predetermined pitch orthogonal to a main surface of the laminate formed in the laminate forming step, and a first cutting step. A mirror polishing step of mirror-polishing the cut surface of the laminated divided body, a first optical multilayer film on one side surface of the laminated divided body mirror-polished by the mirror polishing step, and a second optical multilayer film on the other side surface A second optical multilayer film forming step, and a second optical multilayer film shape A peeling step of peeling off the first temporary fixing agent of the multilayer divided body having the optical multilayer film formed on the side surface in the process to form a square prism having a square end face; and the square pillar at the tip of the triangular groove A first mounting step of mounting on a cutting jig having a rectangular groove via a second temporary fixing agent, and cutting a regular square column mounted on the cutting jig along a diagonal line of the regular square column; A cutting and peeling step for further peeling, a second mounting step for mounting the right triangular prism obtained by the cutting and peeling step on a polishing jig having a triangular groove via a second temporary fixing agent, and a second mounting step Mirror-polishing the slopes of a plurality of right-angled triangular prisms attached to a polishing jig and peeling them off from the polishing jigs, and the right-angled triangular prisms whose slopes are mirror-polished in the mirror polishing / peeling process in the longitudinal direction A second one that cuts at a plurality of cutting surfaces orthogonal to each other at a predetermined pitch Characterized in that it comprises a cutting step.
According to the present invention as described above, a right triangular prism having an optical multilayer film excellent in dimensional accuracy can be manufactured. For example, since the right angle accuracy required for the right triangle prism is fixed to the triangular groove of the cutting jig and cut, the required accuracy can be sufficiently satisfied. In addition, the dimensional accuracy of the three surfaces of the right triangular prism can be configured with sufficient accuracy to satisfy the required specifications by selecting a predetermined rectangular flat plate optical member and appropriately cutting the laminate. Since the polishing process does not require a large number of steps, the cost does not increase.

また本発明は、直角を挟む側面にそれぞれ第1及び第2の光学多層膜を備えた直角三角プリズムの製造方法であって、矩形の平板状光学部材の一方面に第1の光学多層膜を形成し、他方面に第2の光学多層膜を形成する第1の光学多層膜形成工程と、複数の平板状光学部材を第1の仮止め剤を介して積層する積層体形成工程と、積層体形成工程にて形成された積層体の主面に対して直交する所定ピッチの複数の切断面にて切断する第1の切断工程と、第1の切断工程により切断された積層分割体の切断面を鏡面研磨する鏡面研磨工程と、鏡面研磨工程により鏡面研磨された積層分割体の第1の仮止め剤を剥離して、対向する2つの側面に第1及び第2の光学多層膜が形成された端面が正方形の正四角柱を形成する剥離工程と、剥離工程により得られた正四角柱の対向する2つの鏡面研磨面にそれぞれ第1及び第2の光学多層膜を形成する第2の光学多層膜形成工程と、光学多層膜形成工程にて光学多層膜を形成された正四角柱を三角形状の溝の先端部に長方形の溝を有する切断治具に第2の仮止め剤を介して装着する第1の装着工程と、切断治具に装着した正四角柱を該正四角柱の対角線に沿って切断し、切断治具より剥離する切断剥離工程と、切断剥離工程により得られた直角三角柱を三角形の溝を有する研磨治具に第2の仮止め剤を介して装着する第2の装着工程と、第2の装着工程により研磨治具に装着した複数の直角三角柱の斜面を鏡面研磨し、研磨治具より剥離する鏡面研磨・剥離工程と、鏡面研磨・剥離工程にて斜面が鏡面研磨された直角三角柱を長手方向に直交して所定ピッチの複数の切断面にて切断する第2の切断工程と、を含むことを特徴とする。
このような直角三角プリズムの製造方法によれば、寸法精度に優れた光学多層膜を有する直角三角プリズムを製造することが可能となる。例えば、直角三角プリズムに要求される直角の角度精度は切断治具の三角溝に固定して切断するので、要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、所定の矩形の平板状光学部材を選び、積層体を適切に切断することにより、要求仕様を十分に満たす精度で構成することが可能になる。また、研磨工程に大幅な工数が掛からないためコストが増大するといったこともない。
The present invention also relates to a method of manufacturing a right triangular prism having first and second optical multilayer films on side surfaces sandwiching a right angle, wherein the first optical multilayer film is provided on one surface of a rectangular flat optical member. A first optical multilayer film forming step of forming a second optical multilayer film on the other surface, a multilayer body forming step of laminating a plurality of flat optical members via a first temporary fixing agent, and laminating A first cutting step of cutting at a plurality of cut surfaces having a predetermined pitch orthogonal to a main surface of the laminated body formed in the body forming step, and cutting of the multilayer divided body cut by the first cutting step Mirror polishing process for mirror-polishing the surface, and peeling off the first temporary fixing agent of the layered product that has been mirror-polished by the mirror polishing process to form the first and second optical multilayer films on the two opposing side surfaces By the peeling process and the peeling process in which the end face formed is a square square prism The optical multilayer film was formed in the second optical multilayer film forming step and the optical multilayer film forming step in which the first and second optical multilayer films were respectively formed on the two mirror-polished surfaces facing each other of the square prism A first mounting step of mounting a regular quadrangular prism on a cutting jig having a rectangular groove at the tip of a triangular groove via a second temporary fixing agent; and the regular quadrangular column mounted on the cutting jig A cutting and peeling step of cutting along the diagonal line of the cutting and peeling from the cutting jig, and a right triangular prism obtained by the cutting and peeling step is attached to the polishing jig having a triangular groove via the second temporary fixing agent. The mirror surface polishing / peeling process of mirror-polishing the slopes of a plurality of right-angled triangular prisms attached to the polishing jig in the mounting process 2 and the second mounting process, and the slopes in the mirror polishing / peeling process A right-angled triangular prism that is mirror-polished is perpendicular to the longitudinal direction. Characterized in that it comprises a second cutting step of cutting by a plurality of cut surfaces of constant pitch, the.
According to such a method for manufacturing a right triangular prism, it is possible to manufacture a right triangular prism having an optical multilayer film with excellent dimensional accuracy. For example, since the right angle accuracy required for the right triangle prism is fixed to the triangular groove of the cutting jig and cut, the required accuracy can be sufficiently satisfied. In addition, the dimensional accuracy of the three surfaces of the right triangular prism can be configured with sufficient accuracy to satisfy the required specifications by selecting a predetermined rectangular flat plate optical member and appropriately cutting the laminate. In addition, since the polishing process does not require a large number of steps, the cost does not increase.

以下、本発明に係る直角三角プリズムの製造方法の実施形態を図面に基づいて詳細に説明する。
図1乃至図4は本発明に係る直角三角形プリズムの製造方法を説明するための工程概略図である。
この場合は、先ず、第1の光学多層膜形成工程として、図1(a)に示すように矩形のガラス平板2の上面(一方面)に第1の光学多層膜3を、下面(他方面)に第2の光学多層膜4を形成して平板状光学部材1を形成する。
次に、積層体形成工程として、図1(b)に示すように、上面に第1の光学多層膜3、下面に第2の光学多層膜4を夫々形成した平板状光学部材1を図示しない第1の仮止め剤を介して複数層積層して積層体5を形成する。この際、平板状光学部材1の端面を結ぶ平面が平板状光学部材1の主面に対して垂直になるように、つまり、積層体5の正面図が長方形となるように、図示しない直角治具等を用いて積層する。尚、前記第1の仮止め剤は、例えば、シフトワックスや水溶性の接着剤等を使用する。
Hereinafter, an embodiment of a manufacturing method of a right triangle prism according to the present invention will be described in detail with reference to the drawings.
1 to 4 are process schematic diagrams for explaining a method of manufacturing a right triangle prism according to the present invention.
In this case, first, as a first optical multilayer film forming step, the first optical multilayer film 3 is placed on the upper surface (one surface) of the rectangular glass flat plate 2 as shown in FIG. ), The second optical multilayer film 4 is formed to form the flat optical member 1.
Next, as shown in FIG. 1B, a flat plate-shaped optical member 1 in which the first optical multilayer film 3 is formed on the upper surface and the second optical multilayer film 4 is formed on the lower surface is not shown in the laminate formation process. A laminated body 5 is formed by laminating a plurality of layers via the first temporary fixing agent. At this time, a right angle treatment (not shown) is performed so that the plane connecting the end faces of the flat optical member 1 is perpendicular to the main surface of the flat optical member 1, that is, the front view of the laminate 5 is rectangular. Laminate using tools. For example, shift wax or water-soluble adhesive is used as the first temporary fixing agent.

そして、第1の切断工程として、図1(c)に示すように積層体5をその主面(積層面)に対して直交する所定ピッチの複数の切断面5aにて切断して、図1(d)に示す積層分割体6を形成し、次いで、鏡面研磨工程として、この積層分割体6の切断面5aに鏡面研磨加工を施す。
次に、第2の光学多層膜形成工程として、図2(a)に示すように、積層分割体6の鏡面研磨を施した2つの側面にそれぞれ第1の光学多層膜7aと第2の光学多層膜7bとを形成する。この後、剥離工程として、積層分割体7の前記第1の仮止め剤を剥離することで、図2(b)に示すような端面が正方形状で4つの側面にそれぞれ第1の光学多層膜3、7aと第2の光学多層膜4、7bとが形成された正四角柱8が得られる。
Then, as a first cutting step, as shown in FIG. 1 (c), the laminate 5 is cut at a plurality of cut surfaces 5a having a predetermined pitch orthogonal to the main surface (laminated surface). The laminated division body 6 shown in (d) is formed, and then a mirror polishing process is performed on the cut surface 5a of the laminated division body 6 as a mirror polishing step.
Next, as a second optical multilayer film forming step, as shown in FIG. 2A, the first optical multilayer film 7a and the second optical film are respectively formed on the two side surfaces of the laminated divided body 6 which have been subjected to mirror polishing. A multilayer film 7b is formed. Thereafter, as the peeling step, the first temporary fixing agent of the layered divided body 7 is peeled off, so that the end surfaces as shown in FIG. Thus, a regular quadratic prism 8 in which 3, 7a and the second optical multilayer films 4, 7b are formed is obtained.

次に、第1の装着工程として、図2(c)に示すように正四角柱8を三角形状の溝10aの先端部に長方形の溝10bを形成した切断治具9に第2の仮止め剤を介して装着固定し、切断剥離工程として、図2(d)に示すように正四角柱8の対角線に沿ってスライサー等を用いて切断し、切断治具9より剥離することで、図3(a)に示すような直角三角柱11が得られる。ここで、図2(d)には一例としてスライサーのブレード部51と、該ブレード部51に装着した外周刃ブレード51aを示している。尚、前記第2の仮止め剤は、例えば、シフトワックス等を使用する。
図3(a)に示す直角三角柱11の直角を挟む面11a、11bには、それぞれ第1の光学多層膜と第2の光学多層膜とが形成されている。なお、図2(b)に示した例では隣接する側面が第1の光学多層膜3、7a(あるいは第2の光学多層膜4、7b)が配した例を示したが、隣接する側面にそれぞれ第1の光学多層膜3と第2の光学多層膜7b(あるいは第2の光学多層膜4と第1の光学多層膜7a)とを配してもよい。ただし、正四角柱8をその対角線に沿って切断する場合に切断して得られた三角柱の直角を挟む側面にそれぞれ第1の光学多層膜7aと第2の光学多層膜7bとが配されるように切断すればよい。
Next, as a first mounting step, as shown in FIG. 2 (c), a second temporary fixing agent is applied to a cutting jig 9 in which a regular square column 8 is formed with a rectangular groove 10b at the tip of a triangular groove 10a. As shown in FIG. 2D, the cutting and peeling process is performed by using a slicer or the like along the diagonal line of the regular quadratic prism 8 and peeling from the cutting jig 9 as shown in FIG. A right triangular prism 11 as shown in a) is obtained. Here, FIG. 2D shows a blade portion 51 of a slicer and an outer peripheral blade 51a attached to the blade portion 51 as an example. For example, a shift wax is used as the second temporary fixing agent.
A first optical multilayer film and a second optical multilayer film are formed on the surfaces 11a and 11b sandwiching the right angle of the right triangular prism 11 shown in FIG. In the example shown in FIG. 2B, an example in which the first optical multilayer films 3 and 7a (or the second optical multilayer films 4 and 7b) are arranged on the adjacent side surfaces is shown. The first optical multilayer film 3 and the second optical multilayer film 7b (or the second optical multilayer film 4 and the first optical multilayer film 7a) may be disposed, respectively. However, the first optical multilayer film 7a and the second optical multilayer film 7b are arranged on the side surfaces sandwiching the right angle of the triangular prism obtained by cutting the regular quadrangular prism 8 along its diagonal line. Just cut it.

次に、第2の装着工程として、図3(b)に示すように複数の三角形の溝12aが設けられた研磨治具12の溝12aに、図3(a)に示す直角三角柱11を装着し、第2の仮止め剤で固定した後、鏡面研磨・剥離工程として、直角三角柱11の斜面11cを鏡面研磨加工すると共に研磨治具12から直角三角柱11を剥離する。
この後、第2の切断工程として、図3(c)に示すように直角三角柱11’の長手方向に直交して所定ピッチの複数の切断面11a’にて切断して、図3(d)に示す直角三角プリズム13を得ることができる。つまり、直角三角プリズム13の直角を挟む側面には第1の光学多層膜13aと第2の光学多層膜13bが形成されており斜面は鏡面研磨加工が施されている直角三角プリズム13を得ることができる。
このように直角三角プリズム13を製造すれば、寸法精度に優れた光学多層膜を有する直角三角プリズムを製造することが可能となる。例えば、直角三角プリズム13に要求される直角の角度精度は切断治具の三角溝に固定して切断するので、要求精度を十分に満たすことができる。また、直角三角プリズム13の三面の寸法精度は、所定の矩形のガラス平板を選び、積層体を適切に切断することにより、要求仕様を十分に満たす精度で構成することが可能になる。また研磨工程に大幅な工数が掛からないためコストが増大するといったこともない。
Next, as a second mounting step, the right triangular prism 11 shown in FIG. 3A is attached to the groove 12a of the polishing jig 12 provided with a plurality of triangular grooves 12a as shown in FIG. 3B. Then, after fixing with the second temporary fixing agent, as the mirror polishing / peeling step, the inclined surface 11c of the right triangular prism 11 is mirror polished and the right triangular prism 11 is peeled from the polishing jig 12.
Thereafter, as a second cutting step, as shown in FIG. 3 (c), cutting is performed at a plurality of cutting surfaces 11a ′ having a predetermined pitch perpendicular to the longitudinal direction of the right triangular prism 11 ′. The right triangular prism 13 shown in FIG. That is, the first optical multilayer film 13a and the second optical multilayer film 13b are formed on the side surfaces sandwiching the right angle of the right-angle triangular prism 13, and the right-angle triangular prism 13 whose slope is mirror-polished is obtained. Can do.
If the right triangular prism 13 is manufactured in this way, a right triangular prism having an optical multilayer film with excellent dimensional accuracy can be manufactured. For example, since the right angle accuracy required for the right triangle prism 13 is fixed to the triangular groove of the cutting jig and cut, the required accuracy can be sufficiently satisfied. The dimensional accuracy of the three surfaces of the right triangular prism 13 can be configured with sufficient accuracy to satisfy the required specifications by selecting a predetermined rectangular glass flat plate and appropriately cutting the laminate. Further, the cost is not increased because the polishing process does not require a significant man-hour.

本発明に係る直角三角プリズム製造方法の第2の実施例について説明する。
なお、この場合は、上記直角三角プリズムの製造方法で説明した図1までは上記の説明と同様であるため説明を省略する。
この場合は、図1(d)に示す積層分割体6の切断面5aを鏡面研磨加工した後、仮止め材を溶解除去して、図4に示すような正四角柱14を得る。図4に示すように正四角柱14の上下面にはそれぞれ第1及び第2の光学多層膜3、4が形成され、側面14a、14bは鏡面研磨が施されている。正四角柱14の鏡面研磨が施された側面14a、14bにそれぞれ第1及び第2の光学多層膜を形成すれば、図2(b)に示した正四角柱8と同様な正四角柱が得られる。それ以後の工程は図2(c)、(d)及び図3(a)から同図(d)に示した工程と同様な工程を用いることにより、直角三角プリズム13の直角を挟む側面にそれぞれ第1の光学多層膜と第2の光学多層膜とを有し、斜面は鏡面研磨加工が施された直角三角プリズムを製造することができる。
A second embodiment of the method for manufacturing a right triangular prism according to the present invention will be described.
In this case, the description up to FIG. 1 described in the manufacturing method of the right triangular prism is the same as the above description, and the description is omitted.
In this case, the cut surface 5a of the laminated divided body 6 shown in FIG. 1 (d) is mirror-polished, and then the temporary fixing material is dissolved and removed to obtain a regular square column 14 as shown in FIG. As shown in FIG. 4, the first and second optical multilayer films 3 and 4 are formed on the upper and lower surfaces of the regular square column 14, respectively, and the side surfaces 14a and 14b are mirror-polished. If the first and second optical multilayer films are formed on the side surfaces 14a and 14b, respectively, of which the regular square column 14 is mirror-polished, a regular square column similar to the regular square column 8 shown in FIG. 2B can be obtained. The subsequent processes are the same as the processes shown in FIGS. 2C, 2D and 3A to FIG. A right-angled triangular prism having a first optical multilayer film and a second optical multilayer film, whose slope is mirror-polished, can be manufactured.

このように直角三角プリズム13を製造すれば、上記同様、寸法精度に優れた光学多層膜を有する直角三角プリズムを製造することが可能となる。例えば、直角三角プリズムに要求される直角の角度精度は切断治具の三角溝に固定して切断するので、要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、所定の矩形のガラス平板を選び、積層体を適切に切断することにより、要求仕様を十分に満たす精度で構成することが可能になる。また、研磨工程に大幅な工数が掛からないためコストが増大するといったこともない。   If the right triangular prism 13 is manufactured in this way, a right triangular prism having an optical multilayer film with excellent dimensional accuracy can be manufactured as described above. For example, since the right angle accuracy required for the right triangle prism is fixed and cut in the triangular groove of the cutting jig, the required accuracy can be sufficiently satisfied. Further, the dimensional accuracy of the three surfaces of the right triangular prism can be configured with sufficient accuracy to satisfy the required specifications by selecting a predetermined rectangular glass plate and appropriately cutting the laminate. In addition, since the polishing process does not require a large number of steps, the cost does not increase.

図5(a)は、上記のように作製した光学多層膜を有する直角三角プリズムの一例である。この図5(a)に示す直角三角プリズム15は光路変更プリズムであり、直角を挟む側面に反射防止膜15a、15bがそれぞれ形成されている。この光路変更プリズム15に図中上方から光16が入射すると、斜面15cにより全反射されて、光路を90°変換された光17となり、光路変更プリズム15の側面から出射する。このように、図5(a)に示す光路変更プリズム15は光の光路を90°変換する機能を有する。   FIG. 5A is an example of a right triangle prism having the optical multilayer film manufactured as described above. The right triangular prism 15 shown in FIG. 5A is an optical path changing prism, and antireflection films 15a and 15b are formed on side surfaces sandwiching the right angle. When light 16 enters the optical path changing prism 15 from above in the figure, it is totally reflected by the inclined surface 15 c to become light 17 whose optical path is converted by 90 °, and is emitted from the side surface of the optical path changing prism 15. As described above, the optical path changing prism 15 shown in FIG. 5A has a function of converting the optical path of light by 90 °.

図5(b)は、上記のように作製した光学多層膜を有する直角三角プリズムを用いて構成した光ピックアップ装置である。
図5(b)に示す光ピックアップ装置は、レーザーダイオード20a、20bと、偏光ビームスプリッタ21a、21bと、本発明の光学多層膜付直角三角プリズム22と、波長板23と、集光レンズ24と、光検出器26a、26bとを備えている。レーザーダイオード20aとして例えば、波長780nm帯のCDあるいは波長650nm帯のDVD用のレーザーダイオードを、レーザーダイオード20bに波長405nm帯の青色波長帯のレーザーダイオードを用いた光ピックアップ装置とすることができる。直角三角プリズム22の直角を挟む側面22a、22bの表面上には、波長780nm帯あるいは650nm帯のレーザー光を反射する光学特性を有する光学多層膜、波長405nm帯のレーザー光を反射する光学特性を有する光学多層膜がそれぞれ形成されている。このように、光ピックアップ装置に光学多層膜付直角三角プリズムを用いると、レーザーダイオードから出射する光路を90°変換してディスク25に入射させることができるので、光ピックアップ装置を小型化することができる。
なお、直角三角プリズムに形成する光学多層膜は前述の光学多層膜に限らず、例えば直角三角プリズムの斜面に偏光分離膜や所望の波長帯の光を反射する反射膜を形成することもできる。
FIG. 5B shows an optical pickup device configured using a right triangular prism having an optical multilayer film manufactured as described above.
The optical pickup device shown in FIG. 5B includes laser diodes 20a and 20b, polarizing beam splitters 21a and 21b, a right triangular prism 22 with an optical multilayer film according to the present invention, a wave plate 23, and a condenser lens 24. And photodetectors 26a and 26b. As the laser diode 20a, for example, a laser diode for a CD having a wavelength of 780 nm or a DVD having a wavelength of 650 nm may be used, and an optical pickup device using a laser diode having a blue wavelength band having a wavelength of 405 nm as the laser diode 20b may be used. On the surfaces of the side faces 22a and 22b sandwiching the right angle of the right triangular prism 22, an optical multilayer film having optical characteristics for reflecting laser light in the wavelength band of 780 nm or 650 nm, and optical characteristics for reflecting laser light in the wavelength band of 405 nm are provided. Each optical multilayer film is formed. As described above, when the right triangular prism with an optical multilayer film is used in the optical pickup device, the optical path emitted from the laser diode can be converted by 90 ° and incident on the disk 25. Therefore, the optical pickup device can be downsized. it can.
The optical multilayer film formed on the right triangular prism is not limited to the optical multilayer film described above. For example, a polarization separation film or a reflective film that reflects light in a desired wavelength band can be formed on the inclined surface of the right triangular prism.

(a)乃至(d)は本発明に係る直角三角柱プリズムの製造方法を示した概略工程図。(A) thru | or (d) are the schematic process drawings which showed the manufacturing method of the right triangular prism prism which concerns on this invention. (a)乃至(d)は本発明に係る直角三角柱プリズムの製造方法を示した概略工程図。(A) thru | or (d) are the schematic process drawings which showed the manufacturing method of the right triangular prism prism which concerns on this invention. (a)乃至(d)は本発明に係る直角三角柱プリズムの製造方法を示した概略工程図。(A) thru | or (d) are the schematic process drawings which showed the manufacturing method of the right triangular prism prism which concerns on this invention. 正四角柱を示す斜視図。The perspective view which shows a regular square pole. (a)は光路変更プリズムの一例を示した図、(b)は光ピックアップ装置の構成例を示した図。FIG. 4A is a diagram illustrating an example of an optical path changing prism, and FIG. 4B is a diagram illustrating a configuration example of an optical pickup device. 従来の直角二等辺三角プリズムの構成を示した図。The figure which showed the structure of the conventional right-angled isosceles triangular prism. (a)乃至(d)は図6に示すプリズムの製造方法を説明する工程図。(A) thru | or (d) is process drawing explaining the manufacturing method of the prism shown in FIG.

符号の説明Explanation of symbols

1…平板状光学部材、2…ガラス平板、3、13a…第1の光学多層膜、4、13b…第2の光学多層膜、5…積層体、5a…切断面、6…積層分割体、8…正四角柱、9…切断治具、10a…三角溝、12…研磨治具、13…直角三角プリズム、14…正四角柱、15a、15b…光学多層膜、51…ブレード   DESCRIPTION OF SYMBOLS 1 ... Flat optical member, 2 ... Glass flat plate, 3, 13a ... 1st optical multilayer film, 4, 13b ... 2nd optical multilayer film, 5 ... Laminated body, 5a ... Cut surface, 6 ... Laminated division body, DESCRIPTION OF SYMBOLS 8 ... Regular square column, 9 ... Cutting jig, 10a ... Triangular groove, 12 ... Polishing jig, 13 ... Right triangle prism, 14 ... Regular square column, 15a, 15b ... Optical multilayer film, 51 ... Blade

Claims (2)

直角を挟む側面にそれぞれ第1及び第2の光学多層膜を備えた直角三角プリズムの製造方法であって、
矩形の平板状光学部材の一方面に第1の光学多層膜を形成し、他方面に第2の光学多層膜を形成する第1の光学多層膜形成工程と、
前記複数の平板状光学部材を第1の仮止め剤を介して積層する積層体形成工程と、
前記積層体形成工程にて形成された積層体の主面に対して直交する所定ピッチの複数の切断面にて切断する第1の切断工程と、
前記第1の切断工程により切断された積層分割体の切断面を鏡面研磨する鏡面研磨工程と、
前記鏡面研磨工程により鏡面研磨された積層分割体の一方の側面に第1の光学多層膜を、他方の側面に第2の光学多層膜を夫々形成する第2の光学多層膜形成工程と、
前記第2の光学多層膜形成工程にて側面に光学多層膜が形成された積層分割体の第1の仮止め剤を剥離して端面が正方形の正四角柱を形成する剥離工程と、
前記正四角柱を三角形状の溝の先端部に長方形の溝を有する切断治具に第2の仮止め剤を介して装着する第1の装着工程と、
前記切断治具に装着した正四角柱を該正四角柱の対角線に沿って切断し、切断治具より剥離する切断剥離工程と、
前記切断剥離工程により得られた直角三角柱を三角形の溝を有する研磨治具に第2の仮止め剤を介して装着する第2の装着工程と、
前記第2の装着工程により研磨治具に装着した複数の直角三角柱の斜面を鏡面研磨し、研磨治具より剥離する鏡面研磨・剥離工程と、
前記鏡面研磨・剥離工程にて斜面が鏡面研磨された直角三角柱を長手方向に直交して所定ピッチの複数の切断面にて切断する第2の切断工程と、を含むことを特徴とする直角三角プリズムの製造方法。
A method of manufacturing a right triangular prism having first and second optical multilayer films on side surfaces sandwiching a right angle, respectively,
A first optical multilayer film forming step of forming a first optical multilayer film on one surface of a rectangular flat optical member and forming a second optical multilayer film on the other surface;
A laminated body forming step of laminating the plurality of flat optical members via a first temporary fixing agent;
A first cutting step of cutting at a plurality of cut surfaces having a predetermined pitch perpendicular to the main surface of the laminate formed in the laminate formation step;
A mirror polishing step of mirror polishing the cut surface of the laminate divided body cut by the first cutting step;
A second optical multilayer film forming step of forming a first optical multilayer film on one side surface of the multilayer divided body mirror-polished by the mirror polishing step and a second optical multilayer film on the other side surface,
A peeling step of peeling off the first temporary fixing agent of the laminated divided body having the optical multilayer film formed on the side surface in the second optical multilayer film forming step to form a square prism having a square end surface;
A first mounting step of mounting the regular quadrangular column on a cutting jig having a rectangular groove at the tip of a triangular groove via a second temporary fixing agent;
A cutting and peeling step of cutting the regular square column mounted on the cutting jig along the diagonal of the regular square column and peeling from the cutting jig,
A second mounting step of mounting the right triangular prism obtained by the cutting and peeling step on a polishing jig having a triangular groove via a second temporary fixing agent;
Mirror polishing of the slopes of a plurality of right triangular prisms mounted on the polishing jig in the second mounting step, and a mirror polishing / peeling step of peeling from the polishing jig;
And a second cutting step of cutting the right triangular prism whose surface is mirror-polished in the mirror polishing / peeling step at a plurality of cutting surfaces having a predetermined pitch perpendicular to the longitudinal direction. Manufacturing method of prism.
直角を挟む側面にそれぞれ第1及び第2の光学多層膜を備えた直角三角プリズムの製造方法であって、
矩形の平板状光学部材の一方面に第1の光学多層膜を形成し、他方面に第2の光学多層膜を形成する第1の光学多層膜形成工程と、
前記複数の平板状光学部材を第1の仮止め剤を介して積層する積層体形成工程と、
前記積層体形成工程にて形成された積層体の主面に対して直交する所定ピッチの複数の切断面にて切断する第1の切断工程と、
前記第1の切断工程により切断された積層分割体の切断面を鏡面研磨する鏡面研磨工程と、
前記鏡面研磨工程により鏡面研磨された積層分割体の第1の仮止め剤を剥離して、対向する2つの側面に第1及び第2の光学多層膜が形成された端面が正方形の正四角柱を形成する剥離工程と、
前記剥離工程により得られた正四角柱の対向する2つの鏡面研磨面にそれぞれ第1及び第2の光学多層膜を形成する第2の光学多層膜形成工程と、
前記光学多層膜形成工程にて光学多層膜を形成された正四角柱を三角形状の溝の先端部に長方形の溝を有する切断治具に第2の仮止め剤を介して装着する第1の装着工程と、
前記切断治具に装着した正四角柱を該正四角柱の対角線に沿って切断し、切断治具より剥離する切断剥離工程と、
前記切断剥離工程により得られた直角三角柱を三角形の溝を有する研磨治具に第2の仮止め剤を介して装着する第2の装着工程と、
前記第2の装着工程により研磨治具に装着した複数の直角三角柱の斜面を鏡面研磨し、研磨治具より剥離する鏡面研磨・剥離工程と、
前記鏡面研磨・剥離工程にて斜面が鏡面研磨された直角三角柱を長手方向に直交して所定ピッチの複数の切断面にて切断する第2の切断工程と、を含むことを特徴とする直角三角プリズムの製造方法。
A method of manufacturing a right triangular prism having first and second optical multilayer films on side surfaces sandwiching a right angle, respectively,
A first optical multilayer film forming step of forming a first optical multilayer film on one surface of a rectangular flat optical member and forming a second optical multilayer film on the other surface;
A laminated body forming step of laminating the plurality of flat optical members via a first temporary fixing agent;
A first cutting step of cutting at a plurality of cut surfaces having a predetermined pitch perpendicular to the main surface of the laminate formed in the laminate formation step;
A mirror polishing step of mirror polishing the cut surface of the laminate divided body cut by the first cutting step;
The first temporary fixing agent of the layered divided body that has been mirror-polished by the mirror-polishing step is peeled off, and a square square is formed on the end surfaces where the first and second optical multilayer films are formed on the two opposing side surfaces. A peeling step to form;
A second optical multilayer film forming step of forming first and second optical multilayer films respectively on two mirror-polished surfaces of the regular quadrangular prism obtained by the peeling step;
A first mounting in which the regular quadratic prism formed with the optical multilayer film in the optical multilayer film forming step is mounted to a cutting jig having a rectangular groove at the tip of the triangular groove through a second temporary fixing agent. Process,
A cutting and peeling step of cutting the regular square column mounted on the cutting jig along the diagonal of the regular square column and peeling from the cutting jig,
A second mounting step of mounting the right triangular prism obtained by the cutting and peeling step on a polishing jig having a triangular groove via a second temporary fixing agent;
Mirror polishing of the slopes of a plurality of right triangular prisms mounted on the polishing jig in the second mounting step, and a mirror polishing / peeling step of peeling from the polishing jig;
And a second cutting step of cutting the right triangular prism whose surface is mirror-polished in the mirror polishing / peeling step at a plurality of cutting surfaces having a predetermined pitch perpendicular to the longitudinal direction. Manufacturing method of prism.
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WO2010058741A1 (en) * 2008-11-21 2010-05-27 コニカミノルタオプト株式会社 Optical element manufacturing method
CN102601704A (en) * 2012-03-09 2012-07-25 浙江蓝特光学股份有限公司 Processing method of channel mould of solar cone prism
CN113050208A (en) * 2021-03-10 2021-06-29 浙江舜宇光学有限公司 Resin prism lens, film coating method thereof and long-focus camera
WO2021230816A1 (en) * 2020-05-12 2021-11-18 Ams Sensors Singapore Pte. Ltd. Methods for manufacturing optical prisms
CN114102331A (en) * 2021-11-26 2022-03-01 福建中策光电股份公司 Manufacturing method of right-angle prism
WO2024048127A1 (en) * 2022-09-02 2024-03-07 日本電気硝子株式会社 Prism, glass article, and method for manufacturing prism

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058741A1 (en) * 2008-11-21 2010-05-27 コニカミノルタオプト株式会社 Optical element manufacturing method
CN102601704A (en) * 2012-03-09 2012-07-25 浙江蓝特光学股份有限公司 Processing method of channel mould of solar cone prism
WO2021230816A1 (en) * 2020-05-12 2021-11-18 Ams Sensors Singapore Pte. Ltd. Methods for manufacturing optical prisms
JP2023525348A (en) * 2020-05-12 2023-06-15 エイエムエス-オスラム エイジア パシフィック プライヴェット リミテッド Manufacturing method of optical prism
JP7526815B2 (en) 2020-05-12 2024-08-01 エイエムエス-オスラム エイジア パシフィック プライヴェット リミテッド Manufacturing method of optical prism
CN113050208A (en) * 2021-03-10 2021-06-29 浙江舜宇光学有限公司 Resin prism lens, film coating method thereof and long-focus camera
CN114102331A (en) * 2021-11-26 2022-03-01 福建中策光电股份公司 Manufacturing method of right-angle prism
CN114102331B (en) * 2021-11-26 2024-03-26 福建中策光电股份公司 Manufacturing method of right-angle prism
WO2024048127A1 (en) * 2022-09-02 2024-03-07 日本電気硝子株式会社 Prism, glass article, and method for manufacturing prism

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