JP2008139731A - Method for manufacturing right-angled triangular prism - Google Patents

Method for manufacturing right-angled triangular prism Download PDF

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JP2008139731A
JP2008139731A JP2006327886A JP2006327886A JP2008139731A JP 2008139731 A JP2008139731 A JP 2008139731A JP 2006327886 A JP2006327886 A JP 2006327886A JP 2006327886 A JP2006327886 A JP 2006327886A JP 2008139731 A JP2008139731 A JP 2008139731A
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laminated
triangular prism
cut
cutting
laminated body
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Masaki Iwamoto
将樹 岩本
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Miyazaki Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a right-angled triangular prism excellent in dimensional accuracy. <P>SOLUTION: The method includes a process for laying a plurality of rectangular flat plates of glass one on top of each other and laying the rectangular flat plates of glass one upon another in a staircase pattern, by sequentially shifting the planar direction positions of the flat plates of glass so that the angle made by the plane ranging over the edges of the respective flat plates of glass and the plate face of the flat plates of glass becomes an inclination angle of 45 degrees; a process for cutting a first layered body into a plurality of layered cut bodies; a process for mirror-polishing the cut surface of each layered cut body; a process for forming a second layered body; a process for forming a third layered body; a process for mirror-polishing the cut surface and both of the edge faces of the third layered body; a process for dividing the third layered body into a plurality of right-angled triangular poles; and a process for cutting the right-angled triangular poles into individual pieces of right-angled triangular prisms. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、プリズムの製造方法に関し、特に寸法精度の優れた直角三角プリズムの製造方法に関する。   The present invention relates to a method for manufacturing a prism, and more particularly to a method for manufacturing a right triangle prism having excellent dimensional accuracy.

CD(Compact Disc)やDVD(Digital Versatile Disc)等の光記録媒体から情報を再生したり、あるいは情報を記録したりする光ピックアップ装置においては、光学デバイスとしてプリズムが使用されている。
上記したような光学デバイスの製造方法に関しては特許文献等に数多くの例が開示されている。例えば、特許文献1にはプリズムとその製造方法が開示されている。
In an optical pickup device that reproduces information from or records information on an optical recording medium such as a CD (Compact Disc) or a DVD (Digital Versatile Disc), a prism is used as an optical device.
A number of examples are disclosed in patent documents and the like regarding the method of manufacturing an optical device as described above. For example, Patent Document 1 discloses a prism and a manufacturing method thereof.

図6は特許文献1に開示されているプリズムの構成を示した図である。また、図7は特許文献1に開示されているプリズムの製造方法を示した工程図である。
図6に示すプリズム20は、例えばBK−7等の透明な光学ガラスからなり、形状が直角二等辺三角形の直角三角プリズムである。
光信号等の光が当たる当光面21a、21b、21c同士が連接する断面は、略R形状のコーナー部20d、20e、20fからなり、その表面が火造り面となっている。
FIG. 6 is a diagram showing the configuration of the prism disclosed in Patent Document 1. In FIG. FIG. 7 is a process diagram showing a prism manufacturing method disclosed in Patent Document 1.
The prism 20 shown in FIG. 6 is a right triangle prism made of a transparent optical glass such as BK-7 and having a right isosceles triangle shape.
The cross-section where the light-receiving surfaces 21a, 21b, and 21c that receive light such as an optical signal are connected to each other includes substantially R-shaped corner portions 20d, 20e, and 20f, and the surface is a fire-making surface.

上記図6に示すようなプリズム20の製造方法は、図7(a)〜(d)に示す工程図に基づいている。図7(a)に示すガラス母材22はホウ珪酸系光学ガラスであるBK−7からなり、その形状は当光面となる表面22a、22b、22cを有する。またガラス母材22の断面は、表面22aを斜辺とする直角二等辺三角形であり、表面22b、22cの辺長はそれぞれ10mmから70mm程度である。
ガラス母材22を延伸成形する装置は図7(b)に示すように、ガラス母材22を把持する把持部を有する送り込み手段(図示せず)と、ガラス母材22を所定の温度に加熱する加熱炉23と、ローラー24a、24bの対を有してガラス母材22の下方を延伸成形する引張手段と、延伸されたガラスを切断する切断手段25とからなり、母材22とほぼ相似形の所望範囲の寸法を有し、図7(c)に示すような長尺体26に成型する装置である。得られた長尺体26は精密切断装置により所定の長さに切断し、図7(d)に示すようなプリズム27が得られる。
The manufacturing method of the prism 20 as shown in FIG. 6 is based on the process charts shown in FIGS. A glass base material 22 shown in FIG. 7 (a) is made of BK-7, which is a borosilicate optical glass, and has a surface 22a, 22b, 22c that is a light-receiving surface. The cross section of the glass base material 22 is a right isosceles triangle having the surface 22a as a hypotenuse, and the side lengths of the surfaces 22b and 22c are about 10 mm to 70 mm, respectively.
As shown in FIG. 7B, the apparatus for drawing and forming the glass base material 22 heats the glass base material 22 to a predetermined temperature by feeding means (not shown) having a gripping part for gripping the glass base material 22. A heating furnace 23, a tension means that has a pair of rollers 24a and 24b and stretches the lower part of the glass base material 22, and a cutting means 25 that cuts the stretched glass. This is an apparatus for forming a long body 26 as shown in FIG. The obtained long body 26 is cut into a predetermined length by a precision cutting device to obtain a prism 27 as shown in FIG.

また特許文献2には、2つの直角三角柱形状プリズムの傾斜面同士を接合し、一体化したビームスプリッタの製造方法が開示されている。
図8及び図9は、特許文献2に開示されているビームスプリッタの工程を示す概略図である。
図8(a)に示すガラス平板30は、板ガラス31の一方面(上面)に偏光分離膜32を形成すると共に、他方面(下面)にマッチング膜33を形成した構成を備えている。このように構成したガラス平板30を複数枚使用して積層体を形成する。図8(b)は治具34を用いて45度の傾斜角度でガラス平板30を積層する状態を示している。治具34は水平な板状のベース34aと、このベース34aから45度傾斜させて固定した傾斜側壁34bとからなる。偏光分離膜32を上面に、マッチング膜33を下面に夫々形成したガラス平板30をベース34aに順次積層する。この際、ガラス平板30の一端を傾斜側壁34bに沿って整列させることにより、各ガラス平板30が面方向に等距離ずれた階段状の積層体35が形成される。つまり、正面形状が略平行四辺形の積層体35となる。ここで、ガラス平板30同士の接着は、UV硬化型の光学接着剤で行う。
次に、接着剤により一体化された積層体35を治具34から取り外し、図8(c)に示すように破線35aで示す45度の傾斜角度に沿って、ワイヤーソー等を用い所定ピッチにて切断すると、図9(a)に示すような積層分割体36が得られる。
Patent Document 2 discloses a method of manufacturing a beam splitter in which the inclined surfaces of two right triangular prisms are joined together.
8 and 9 are schematic views showing the steps of the beam splitter disclosed in Patent Document 2. FIG.
A glass flat plate 30 shown in FIG. 8A has a configuration in which a polarization separation film 32 is formed on one surface (upper surface) of a plate glass 31 and a matching film 33 is formed on the other surface (lower surface). A laminated body is formed using a plurality of the glass flat plates 30 thus configured. FIG. 8B shows a state in which the glass flat plate 30 is laminated using the jig 34 at an inclination angle of 45 degrees. The jig 34 includes a horizontal plate-like base 34a and an inclined side wall 34b fixed by being inclined 45 degrees from the base 34a. A glass plate 30 having a polarization separation film 32 on the upper surface and a matching film 33 on the lower surface is sequentially laminated on the base 34a. At this time, by aligning one end of the glass flat plate 30 along the inclined side wall 34b, a step-like laminate 35 in which each glass flat plate 30 is shifted by an equal distance in the plane direction is formed. That is, the laminated body 35 has a substantially parallelogram front shape. Here, the glass flat plates 30 are bonded to each other with a UV curable optical adhesive.
Next, the laminated body 35 integrated with the adhesive is removed from the jig 34, and as shown in FIG. 8 (c), along the inclination angle of 45 degrees indicated by the broken line 35a, a wire saw or the like is used. Then, the laminated divided body 36 as shown in FIG. 9A is obtained.

次に、図9(b)に示すように積層分割体36の上下面(切断面)36a、36bを鏡面研磨すると共に、各面に反射膜をコーティングする。積層分割体36の両端部の鋭角状に突出している部分を先に切断するか、図9(c)に示すように積層分割体36を整合状態で積層して、積層体37を形成し、仮止めした上で切断してもよい。積層体37を切断面36aと直交する切断面37aに沿って、ワイヤーソー等を用い所定ピッチにて切断すると、図9(d)に示すビームスプリッタの連結体38となる。そして、切断面を鏡面研磨し、図9(d)に示す破線38aに沿って所定ピッチにてビームスプリッタ連結体を切断すると、図9(e)に示すようなビームスプリッタ39が得られることになる。
特開2003−329817公報 特開2000−143264公報
Next, as shown in FIG. 9B, the upper and lower surfaces (cut surfaces) 36a and 36b of the laminated divided body 36 are mirror-polished and a reflective film is coated on each surface. First, cut the acutely protruding portions at both ends of the laminated division 36 or laminate the laminated division 36 in an aligned state as shown in FIG. 9C to form a laminated body 37. It may be cut after being temporarily fixed. When the laminated body 37 is cut at a predetermined pitch using a wire saw or the like along the cut surface 37a orthogonal to the cut surface 36a, a beam splitter coupling body 38 shown in FIG. 9D is obtained. When the cut surface is mirror-polished and the beam splitter coupling body is cut at a predetermined pitch along the broken line 38a shown in FIG. 9D, a beam splitter 39 as shown in FIG. 9E is obtained. Become.
JP 2003-329817 A JP 2000-143264 A

しかしながら、特許文献1に開示されたプリズムの製造方法を用いてプリズムを製造すると、直角三角プリズムの3つの稜は略R形状となり強固となるものの、所望の精度の直角三角プリズム、例えば直角の角度精度、各辺の寸法精度が得られないという問題があった。また、特許文献2には直角三角柱形状プリズムの傾斜面同士を接合したビームスプリッタの製造方法が開示されているものの、直角三角柱形プリズムの製造方法は開示されていないという問題があった。
本発明は上記問題点に鑑み寸法精度に優れた直角三角プリズムの製造方法を提供することにある。
However, when a prism is manufactured using the prism manufacturing method disclosed in Patent Document 1, the three edges of the right triangular prism are substantially R-shaped and become strong, but a right triangular prism having a desired accuracy, for example, a right angle There was a problem that accuracy and dimensional accuracy of each side could not be obtained. Further, although Patent Document 2 discloses a method for manufacturing a beam splitter in which inclined surfaces of a right triangular prism prism are joined together, there is a problem that a method for manufacturing a right triangular prism is not disclosed.
In view of the above problems, the present invention is to provide a method of manufacturing a right triangle prism having excellent dimensional accuracy.

上記目的を達成するため、本発明の直角三角プリズムの製造方法は、複数枚の矩形の平板状光学部材を仮止め材を介して積層すると共に、各平板状光学部材の端縁を結ぶ平面と平板状光学部材の板面とのなす角度が45°の傾斜角となるよう平板状光学部材の面方向位置を順次ずらして階段状に積層する第1積層体形成工程と、第1積層体形成工程において一体化された第1積層体を、45°の傾斜角に沿った所定ピッチの複数の平行な切断面にて複数の積層分割体に切断する第1の切断工程と、第1の切断工程により形成された各積層分割体の切断面を鏡面研磨する第1の鏡面研磨工程と、第1の鏡面研磨工程により鏡面研磨された複数の積層分割体の鏡面同士が対向するように整合状態で積層して、各積層分割体間を仮止め剤にて仮止めして第2積層体を形成する第2積層体形成工程と、第2積層体を第1の切断工程における切断面と直交する切断面にて切断して第3積層体を形成する第3積層体形成工程と、第3積層体形成工程により得られた第3積層体の切断面とその両端面とを鏡面研磨する第2の鏡面研磨工程と、第3積層体の仮止めを解除して複数の直角三角柱に分断する分断工程と、分断工程で得られた直角三角柱を長さ方向に直交して所定ピッチの複数の平行な切断面にて直角三角プリズムの個片に切断する第2の切断工程と、を含むことを特徴とする。
このような本発明によれば、寸法精度に優れた直角三角プリズムを製造することが可能となる。例えば、直角三角プリズムに要求される直角の角度精度は積層体の面に対して垂直に切断し、鏡面研磨工程を経るので要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、ラッピング仕上げ、ポリッシュ仕上げを含む鏡面研磨仕上げ工程を経るので、要求仕様を十分に満たす精度で構成することが可能になる。
In order to achieve the above object, a method for manufacturing a right triangular prism according to the present invention includes a method of laminating a plurality of rectangular flat plate optical members via a temporary fixing material, and a plane connecting edges of the flat plate optical members. A first laminated body forming step of sequentially laminating the plane direction positions of the flat optical member so that the angle between the flat optical member and the plate surface is 45 °, and forming the first laminated body; A first cutting step of cutting the first laminated body integrated in the step into a plurality of laminated divided bodies at a plurality of parallel cut surfaces having a predetermined pitch along an inclination angle of 45 °; The first mirror polishing step for mirror polishing the cut surface of each layered division formed in the process, and the alignment state so that the mirror surfaces of the plurality of layered divisions mirror-polished by the first mirror polishing step face each other Laminate with each other, and temporarily fix between each laminated division with temporary fixative A second laminated body forming step for forming the second laminated body, and a third laminated body for forming the third laminated body by cutting the second laminated body at a cut surface orthogonal to the cut surface in the first cutting step. Forming step, a second mirror polishing step of mirror-polishing the cut surface of the third laminate obtained by the third laminate formation step and both end surfaces thereof, and releasing the temporary fixing of the third laminate. A cutting step for dividing the right triangular prism into two, and a second cutting for cutting the right triangular prism obtained in the dividing step into individual pieces of a right triangular prism at a plurality of parallel cut surfaces having a predetermined pitch orthogonal to the length direction. And a process.
According to the present invention as described above, it is possible to manufacture a right triangular prism having excellent dimensional accuracy. For example, the right angle accuracy required for the right triangle prism is cut perpendicularly to the surface of the laminate and is subjected to a mirror polishing process, so that the required accuracy can be sufficiently satisfied. In addition, since the dimensional accuracy of the three surfaces of the right triangular prism is subjected to a mirror polishing finishing process including lapping finishing and polishing finishing, it can be configured with sufficient accuracy to satisfy the required specifications.

また本発明の直角三角プリズムの製造方法は、分断工程で得られた直角三角柱の直角を挟む2つの側面にそれぞれ所定の多層膜を形成する多層膜形成工程をさらに備え、第2の切断工程において、多層膜形成工程より得られた直角三角柱を長さ方向に直交して所定ピッチの複数の平行な切断面にて切断することを特徴とする。
このような本発明によれば、寸法精度に優れた光学多層膜を有する直角三角プリズムを製造することが可能となる。例えば光学多層膜を有する直角三角プリズムに要求される直角の角度精度は積層体の面に対して垂直に切断し、鏡面研磨工程を経るので要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、ラッピング仕上げ、ポリッシュ仕上げを含む鏡面研磨仕上げ工程を経るので、要求仕様を十分に満たす精度で構成できる。
The method for manufacturing a right triangular prism according to the present invention further includes a multilayer film forming step of forming a predetermined multilayer film on each of two side faces sandwiching the right angle of the right triangular prism obtained in the dividing step, and in the second cutting step, The right triangular prism obtained from the multilayer film forming step is cut at a plurality of parallel cut surfaces having a predetermined pitch perpendicular to the length direction.
According to the present invention as described above, a right triangular prism having an optical multilayer film excellent in dimensional accuracy can be manufactured. For example, the right angle accuracy required for a right triangle prism having an optical multilayer film is cut perpendicularly to the surface of the laminate and undergoes a mirror polishing process, so that the required accuracy can be sufficiently satisfied. In addition, the dimensional accuracy of the three surfaces of the right triangular prism can be configured with sufficient accuracy to satisfy the required specifications because it undergoes a mirror polishing finishing process including lapping finishing and polishing finishing.

以下、本発明に係る直角三角形プリズムの製造方法の実施形態を図面に基づいて詳細に説明する。
図1及び図2は本実施形態の直角三角形プリズムの製造方法を説明するための工程図である。
この場合、図1(a)に示す矩形の平板状光学部材であるガラス平板1は、上下平面1a、1bが鏡面研磨仕上げされている。
この場合は、先ず、第1積層体形成工程として、上記したようなガラス平板1を複数枚使用して積層体を形成する。図1(b)は治具2を用いて45度の傾斜角度でガラス平板1を積層する状態を示している。治具2は水平な板状のベース2aと、このベース2aから45度傾斜させて固定した傾斜側壁2bとからなる。ガラス平板1をベース2a上に順次積層し、ガラス平板1の一端を傾斜側壁2bに沿って整列させることにより、各ガラス平板1が面方向に等距離ずれた階段状の第1積層体3が形成される。つまり、各ガラス平板1の端縁を結ぶ平面と各ガラス平板1の板面とのなす角度が45度の傾斜角となり、正面形状が略平行四辺形の積層体となる。このとき、ガラス平板1同士の接着は仮止め剤により行う。尚、前記第1の仮止め剤は、例えば、シフトワックスや水溶性の接着剤等を使用する。
Hereinafter, an embodiment of a method for manufacturing a right triangle prism according to the present invention will be described in detail with reference to the drawings.
1 and 2 are process diagrams for explaining a method of manufacturing a right triangle prism according to the present embodiment.
In this case, as for the glass flat plate 1 which is a rectangular flat optical member shown in FIG. 1A, the upper and lower flat surfaces 1a and 1b are mirror-polished.
In this case, first, as a 1st laminated body formation process, a laminated body is formed using multiple glass flat plates 1 as mentioned above. FIG. 1B shows a state in which the glass flat plate 1 is laminated using the jig 2 at an inclination angle of 45 degrees. The jig 2 includes a horizontal plate-like base 2a and an inclined side wall 2b fixed by being inclined 45 degrees from the base 2a. The glass flat plate 1 is sequentially laminated on the base 2a, and one end of the glass flat plate 1 is aligned along the inclined side wall 2b. It is formed. That is, the angle formed by the plane connecting the edges of each glass flat plate 1 and the plate surface of each glass flat plate 1 is an inclination angle of 45 degrees, and the front shape is a laminated body having a substantially parallelogram. At this time, the glass plates 1 are bonded to each other with a temporary fixing agent. For example, shift wax or water-soluble adhesive is used as the first temporary fixing agent.

次に、第1の切断工程として、仮止め剤により一体化された第1積層体3を治具2から取り外し、図1(b)の破線3aで示す45度の傾斜角度に沿ってワイヤーソー等を用い所定ピッチの複数の平行な断面にて切断すると、図1(c)に示すような複数の積層分割体4が得られる。
次に、第1の鏡面研磨工程として、得られた積層分割体4の切断面3aを鏡面研磨する。次に、第2の積層体形成工程として、図1(d)に示すように積層分割体4の鏡面同士が対向するように整合状態で積層して第2積層体5を形成する。
なお、積層分割体4の両端部の鋭角状に突出している部分は、鏡面加工を行う前に切断するか、或いは第2積層体形成工程において仮止め剤にて仮止めした上で切断してもよい。
Next, as a first cutting step, the first laminated body 3 integrated with the temporary fixing agent is removed from the jig 2, and a wire saw is taken along a 45 ° inclination angle indicated by a broken line 3a in FIG. Etc. is used to cut a plurality of laminated sections 4 as shown in FIG. 1C.
Next, as a first mirror polishing step, the cut surface 3a of the obtained multilayer divided body 4 is mirror polished. Next, as a second laminated body forming step, the second laminated body 5 is formed by laminating in an aligned state so that the mirror surfaces of the laminated divided bodies 4 face each other as shown in FIG.
In addition, the part which protrudes in the acute angle shape of the both ends of the laminated division body 4 is cut | disconnected before performing a mirror surface process, or it cut | disconnects after temporarily fixing with a temporary fixing agent in a 2nd laminated body formation process. Also good.

次に、第3積層体形成工程として、第2積層体5を切断面3aと直交する切断面5aに沿ってワイヤーソー等を用いて切断(分断)して図2(a)に示す第3積層体6を形成する。
次に、第2の鏡面研磨工程として、図2(a)に示す第3積層体6の両主面6a、6bを鏡面研磨する。この後、分断工程として、図2(a)に示した第3積層体6の仮止め材を溶解除去し、同図(b)に示すような複数の直角三角柱7を得る。得られた直角三角柱7の直角を挟む2つの面7a、7bは前工程にて鏡面研磨処理が施されている。また、直角三角柱7の斜面7cはガラス平板1の主面1a、1bであるので、鏡面研磨された面を有する。
次に、第2の切断工程として、図2(c)に示すように直角三角柱7をその長さ方向8に直交し、所定ピッチの複数の平行な断面(破線9)にて直角三角柱7を切断すると、図2(d)に示す直角三角プリズム10を得ることができる。
Next, as a third laminated body forming step, the second laminated body 5 is cut (divided) using a wire saw or the like along the cut surface 5a orthogonal to the cut surface 3a, and the third laminate shown in FIG. The laminated body 6 is formed.
Next, as a second mirror polishing step, both main surfaces 6a and 6b of the third laminate 6 shown in FIG. 2A are mirror-polished. Thereafter, as a dividing step, the temporary fixing material of the third laminated body 6 shown in FIG. 2A is dissolved and removed to obtain a plurality of right triangular prisms 7 as shown in FIG. The two surfaces 7a and 7b sandwiching the right angle of the obtained right triangular prism 7 are mirror-polished in the previous step. Further, since the inclined surface 7c of the right triangular prism 7 is the main surface 1a, 1b of the glass flat plate 1, it has a mirror-polished surface.
Next, as a second cutting step, as shown in FIG. 2 (c), the right triangular prism 7 is perpendicular to the longitudinal direction 8 thereof, and the right triangular prism 7 is formed in a plurality of parallel cross sections (broken lines 9) with a predetermined pitch. When cut, a right triangular prism 10 shown in FIG. 2D can be obtained.

このように直角三角プリズムを製造すれば、従来の特許文献1に開示されている製造方法に比べて寸法精度に優れた直角三角プリズムを製造することが可能になる。例えば、直角三角プリズムに要求される直角の角度精度は積層体の面に対して垂直に切断し、鏡面研磨工程を経るので要求精度を十分に満たすことができる。また、直角三角プリズムの三面の寸法精度は、ラッピング仕上げ、ポリッシュ仕上げを含む鏡面研磨仕上げ工程を経るので、要求仕様を十分に満たす精度で構成することが可能になる。   If a right triangular prism is manufactured in this way, it is possible to manufacture a right triangular prism that is superior in dimensional accuracy as compared to the manufacturing method disclosed in the conventional Patent Document 1. For example, the right angle accuracy required for the right triangle prism is cut perpendicularly to the surface of the laminate and is subjected to a mirror polishing process, so that the required accuracy can be sufficiently satisfied. In addition, since the dimensional accuracy of the three surfaces of the right triangular prism is subjected to a mirror polishing finishing process including lapping finishing and polishing finishing, it can be configured with sufficient accuracy to satisfy the required specifications.

次に、図3及び図4を用いて直角三角プリズムの他の製造方法として光学多層膜を付した直角三角プリズムの製造方法について説明する。なお、この場合は、上記直角三角プリズムの製造方法で説明した図1(a)〜(d)及び図2(a)〜(b)までの工程は同じであるので説明は省略する。
図3に示すように直角を挟む2つの側面に夫々多層光学膜11a、11bを形成した直角三角プリズム11を作製する場合には、上記した図2(b)までの工程により、図4(a)に示すような直角三角柱12を得る。
そして、直角三角柱12の直角を挟む面12a、12bに蒸着等の手段を用いて、図4(b)に示すような光学多層膜13a、13bを形成し、多層膜を付した直角三角柱12を得る。次に、図4(c)に示すように、多層膜を付した直角三角柱12を長さ方向に直交して所定ピッチの複数の平行な断面14にて切断することで図3に示すような個片の直角三角プリズム11を得ることができる。
このようにして光学多層膜を有する直角三角プリズムを製造すれば、寸法精度に優れた多層光学膜を有する直角三角プリズムを製造することが可能となる。
Next, a manufacturing method of a right triangular prism provided with an optical multilayer film will be described as another manufacturing method of the right triangular prism with reference to FIGS. In this case, the steps from FIG. 1A to FIG. 1D and FIG. 2A to FIG. 2B described in the method for manufacturing the right triangular prism are the same, and the description thereof is omitted.
As shown in FIG. 3, when the right triangular prism 11 having the multilayer optical films 11a and 11b formed on the two side surfaces sandwiching the right angle is manufactured, the steps up to FIG. A right triangular prism 12 as shown in FIG.
Then, optical multilayer films 13a and 13b as shown in FIG. 4B are formed on the surfaces 12a and 12b sandwiching the right angle of the right triangular prism 12 by means of vapor deposition or the like, and the right triangular prism 12 to which the multilayer film is attached is formed. obtain. Next, as shown in FIG. 4C, the right triangular prism 12 provided with the multilayer film is cut at a plurality of parallel sections 14 having a predetermined pitch perpendicular to the length direction as shown in FIG. Individual right triangular prisms 11 can be obtained.
If a right triangular prism having an optical multilayer film is manufactured in this manner, a right triangular prism having a multilayer optical film having excellent dimensional accuracy can be manufactured.

図5(a)は、上記のように作製した光学多層膜を有する直角三角プリズムの一例である。この図5に示す直角三角プリズム15は光路変更プリズムであり、直角を挟む側面に反射防止膜15a、15bがそれぞれ形成されている。この光路変更プリズム15に図中上方から光16が入射すると、斜面15cにより全反射されて、光路を90°変換された光17となり、光路変更プリズム15の側面から出射する。このように、図5に示す光路変更プリズム15は光の光路を90°変換する機能を有する。
図5(b)は、上記のように作製した光学多層膜を有する直角三角プリズムを用いて構成した光ピックアップ装置である。
図5(b)に示す光ピックアップ装置は、レーザーダイオード20a、20bと、偏光ビームスプリッタ21a、21bと、本発明の光学多層膜付直角三角プリズム22と、波長板23と、集光レンズ24と、光検出器26a、26bとを備えている。レーザーダイオード20aとして例えば、波長780nm帯のCDあるいは波長650nm帯のDVD用のレーザーダイオードを、レーザーダイオード20bに波長405nm帯の青色波長帯のレーザーダイオードを用いた光ピックアップ装置とすることができる。直角三角プリズム22の直角を挟む側面22a、22bの表面上には、波長780nm帯あるいは650nm帯のレーザー光を反射する光学特性を有する光学多層膜、波長405nm帯のレーザー光を反射する光学特性を有する光学多層膜がそれぞれ形成されている。このように、光ピックアップ装置に光学多層膜付直角三角プリズムを用いると、レーザーダイオードから出射する光路を90°変換してディスク25に入射させることができるので、光ピックアップ装置を小型化することができる。
なお、直角三角プリズムに形成する光学多層膜は前述の光学多層膜に限らず、例えば直角三角プリズムの斜面に偏光分離膜や所望の波長帯の光を反射する反射膜を形成することもできる。
また、本発明に係る直角三角形プリズムの製造方法の実施例では、ガラスを用いて説明したが、本発明はこれに限らず水晶等の光学部材にも広く適用できる。
FIG. 5A is an example of a right triangle prism having the optical multilayer film manufactured as described above. The right-angled triangular prism 15 shown in FIG. 5 is an optical path changing prism, and antireflection films 15a and 15b are formed on side surfaces sandwiching the right angle. When light 16 enters the optical path changing prism 15 from above in the figure, it is totally reflected by the inclined surface 15 c to become light 17 whose optical path has been converted by 90 °, and is emitted from the side surface of the optical path changing prism 15. As described above, the optical path changing prism 15 shown in FIG. 5 has a function of converting the optical path of light by 90 °.
FIG. 5B shows an optical pickup device configured using a right triangular prism having an optical multilayer film manufactured as described above.
The optical pickup device shown in FIG. 5B includes laser diodes 20a and 20b, polarizing beam splitters 21a and 21b, a right triangular prism 22 with an optical multilayer film according to the present invention, a wave plate 23, and a condenser lens 24. And photodetectors 26a and 26b. As the laser diode 20a, for example, a laser diode for a CD having a wavelength of 780 nm or a DVD having a wavelength of 650 nm may be used, and an optical pickup device using a laser diode having a blue wavelength band having a wavelength of 405 nm as the laser diode 20b may be used. On the surfaces of the side faces 22a and 22b sandwiching the right angle of the right triangular prism 22, an optical multilayer film having optical characteristics for reflecting laser light in the wavelength band of 780 nm or 650 nm, and optical characteristics for reflecting laser light in the wavelength band of 405 nm are provided. Each optical multilayer film is formed. As described above, when the right triangular prism with an optical multilayer film is used in the optical pickup device, the optical path emitted from the laser diode can be converted by 90 ° and incident on the disk 25. Therefore, the optical pickup device can be downsized. it can.
The optical multilayer film formed on the right triangular prism is not limited to the optical multilayer film described above. For example, a polarization separation film or a reflective film that reflects light in a desired wavelength band can be formed on the inclined surface of the right triangular prism.
In the embodiments of the manufacturing method of the right triangle prism according to the present invention, glass is used for explanation. However, the present invention is not limited to this and can be widely applied to optical members such as quartz.

本実施形態に係る直角三角プリズムの製造工程を示した図。The figure which showed the manufacturing process of the right triangle prism which concerns on this embodiment. 本実施形態に係る直角三角プリズムの製造工程を示した図。The figure which showed the manufacturing process of the right triangle prism which concerns on this embodiment. 多層光学膜を有する直角三角プリズムを示した図である。It is the figure which showed the right triangle prism which has a multilayer optical film. 図3に示した直角三角プリズムの製造工程を示した図。The figure which showed the manufacturing process of the right triangle prism shown in FIG. 直角三角プリズムの一例を示した図。The figure which showed an example of the right triangle prism. 従来の直角二等辺三角プリズムの構成を示した図。The figure which showed the structure of the conventional right-angled isosceles triangular prism. 図6に示すプリズムの製造方法を説明する工程図。Process drawing explaining the manufacturing method of the prism shown in FIG. 従来のビームスプリッタの製造方法の工程を示す図。The figure which shows the process of the manufacturing method of the conventional beam splitter. 従来のビームスプリッタの製造方法の工程を示す図。The figure which shows the process of the manufacturing method of the conventional beam splitter.

符号の説明Explanation of symbols

1…ガラス平板、2…治具、3…第1積層体、3a、5a、9、14…切断面、4…積層分割体、5…第2積層体、6…第3積層体、7…直角三角柱、10、11…直角三角プリズム、11a、11b、13a、13b…多層膜、15…光路変更プリズム   DESCRIPTION OF SYMBOLS 1 ... Glass flat plate, 2 ... Jig, 3 ... 1st laminated body, 3a, 5a, 9, 14 ... Cut surface, 4 ... Laminated division body, 5 ... 2nd laminated body, 6 ... 3rd laminated body, 7 ... Right-angled triangular prism, 10, 11 ... Right-angled triangular prism, 11a, 11b, 13a, 13b ... Multilayer film, 15 ... Optical path changing prism

Claims (2)

複数枚の矩形の平板状光学部材を仮止め材を介して積層すると共に、各平板状光学部材の端縁を結ぶ平面と平板状光学部材の板面とのなす角度が45°の傾斜角となるよう平板状光学部材の面方向位置を順次ずらして階段状に積層する第1積層体形成工程と、
前記第1積層体形成工程において一体化された第1積層体を、前記45°の傾斜角に沿った所定ピッチの複数の平行な切断面にて複数の積層分割体に切断する第1の切断工程と、
前記第1の切断工程により形成された各積層分割体の切断面を鏡面研磨する第1の鏡面研磨工程と、
前記第1の鏡面研磨工程により鏡面研磨された複数の積層分割体の鏡面同士が対向するように整合状態で積層して、各積層分割体間を仮止め剤にて仮止めして第2積層体を形成する第2積層体形成工程と、
前記第2積層体を前記第1の切断工程における切断面と直交する切断面にて切断して第3積層体を形成する第3積層体形成工程と、
前記第3積層体形成工程により得られた第3積層体の切断面とその両端面とを鏡面研磨する第2の鏡面研磨工程と、
前記第3積層体の仮止めを解除して複数の直角三角柱に分断する分断工程と、
前記分断工程で得られた直角三角柱を長さ方向に直交して所定ピッチの複数の平行な切断面にて直角三角プリズムの個片に切断する第2の切断工程と、を含むことを特徴とする直角三角プリズムの製造方法。
A plurality of rectangular flat plate-shaped optical members are laminated via a temporary fixing material, and an angle formed by a plane connecting the edges of the flat plate-shaped optical members and the plate surface of the flat plate-shaped optical member is an inclination angle of 45 ° A first laminated body forming step of sequentially laminating the plane direction position of the flat optical member so as to be laminated stepwise;
A first cutting in which the first laminated body integrated in the first laminated body forming step is cut into a plurality of laminated divided bodies at a plurality of parallel cut surfaces having a predetermined pitch along the 45 ° inclination angle. Process,
A first mirror polishing step of mirror polishing the cut surface of each of the laminated divided bodies formed by the first cutting step;
The plurality of laminated division bodies mirror-polished in the first mirror polishing step are laminated in an aligned state so as to face each other, and each laminated division is temporarily fixed with a temporary fixing agent to form a second lamination. A second laminate forming step for forming a body;
A third laminated body forming step of forming the third laminated body by cutting the second laminated body at a cut surface orthogonal to the cut surface in the first cutting step;
A second mirror polishing step of mirror polishing the cut surface of the third laminate obtained by the third laminate forming step and both end faces thereof;
A dividing step of releasing the temporary fixing of the third laminate and dividing into a plurality of right triangular prisms;
And a second cutting step of cutting the right triangular prism obtained in the dividing step into pieces of a right triangular prism at a plurality of parallel cut surfaces having a predetermined pitch orthogonal to the length direction. A manufacturing method of a right triangle prism.
前記分断工程で得られた直角三角柱の直角を挟む2つの側面にそれぞれ所定の多層膜を形成する多層膜形成工程をさらに備え、
前記第2の切断工程において、前記多層膜形成工程より得られた直角三角柱を長さ方向に直交して所定ピッチの複数の平行な切断面にて切断することを特徴とする請求項1に記載の直角三角プリズムの製造方法。
A multilayer film forming step of forming a predetermined multilayer film on each of two side surfaces sandwiching the right angle of the right triangular prism obtained in the dividing step;
2. The second cutting step, wherein the right triangular prism obtained from the multilayer film forming step is cut at a plurality of parallel cut surfaces having a predetermined pitch perpendicular to the length direction. Manufacturing method of right angle triangular prism.
JP2006327886A 2006-12-05 2006-12-05 Method for manufacturing right-angled triangular prism Withdrawn JP2008139731A (en)

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Cited By (4)

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WO2021230816A1 (en) * 2020-05-12 2021-11-18 Ams Sensors Singapore Pte. Ltd. Methods for manufacturing optical prisms
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110640576A (en) * 2019-10-29 2020-01-03 常州市奥普泰克光电科技有限公司 Processing device and processing method for processing 45-degree inclined elliptical blank substrate
WO2021230816A1 (en) * 2020-05-12 2021-11-18 Ams Sensors Singapore Pte. Ltd. Methods for manufacturing optical prisms
JP2023525348A (en) * 2020-05-12 2023-06-15 エイエムエス-オスラム エイジア パシフィック プライヴェット リミテッド Manufacturing method of optical prism
JP7526815B2 (en) 2020-05-12 2024-08-01 エイエムエス-オスラム エイジア パシフィック プライヴェット リミテッド Manufacturing method of optical prism
CN112987147A (en) * 2021-02-25 2021-06-18 北京空间机电研究所 Method for manufacturing hollow pyramid prism
CN112987147B (en) * 2021-02-25 2022-04-12 北京空间机电研究所 Method for manufacturing hollow pyramid prism
CN115847230A (en) * 2022-10-20 2023-03-28 张家港市光学仪器有限公司 Grinding processing method of roof prism
CN115847230B (en) * 2022-10-20 2023-11-21 张家港市光学仪器有限公司 Grinding processing method of roof prism

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