JP2011064610A5 - - Google Patents

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Publication number
JP2011064610A5
JP2011064610A5 JP2009216426A JP2009216426A JP2011064610A5 JP 2011064610 A5 JP2011064610 A5 JP 2011064610A5 JP 2009216426 A JP2009216426 A JP 2009216426A JP 2009216426 A JP2009216426 A JP 2009216426A JP 2011064610 A5 JP2011064610 A5 JP 2011064610A5
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JP
Japan
Prior art keywords
retroreflector
light
tracking
main body
rotation mechanism
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JP2009216426A
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English (en)
Japanese (ja)
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JP2011064610A (ja
JP5364519B2 (ja
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Priority to JP2009216426A priority Critical patent/JP5364519B2/ja
Priority claimed from JP2009216426A external-priority patent/JP5364519B2/ja
Priority to EP10177473A priority patent/EP2299234B1/en
Priority to US12/884,700 priority patent/US8514405B2/en
Publication of JP2011064610A publication Critical patent/JP2011064610A/ja
Publication of JP2011064610A5 publication Critical patent/JP2011064610A5/ja
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Publication of JP5364519B2 publication Critical patent/JP5364519B2/ja
Expired - Fee Related legal-status Critical Current
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JP2009216426A 2009-09-18 2009-09-18 追尾式レーザ干渉測長計 Expired - Fee Related JP5364519B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009216426A JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計
EP10177473A EP2299234B1 (en) 2009-09-18 2010-09-17 Tracking type laser gauge interferometer
US12/884,700 US8514405B2 (en) 2009-09-18 2010-09-17 Tracking type laser gauge interferometer with rotation mechanism correction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009216426A JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計

Publications (3)

Publication Number Publication Date
JP2011064610A JP2011064610A (ja) 2011-03-31
JP2011064610A5 true JP2011064610A5 (enExample) 2012-11-08
JP5364519B2 JP5364519B2 (ja) 2013-12-11

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Family Applications (1)

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JP2009216426A Expired - Fee Related JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計

Country Status (3)

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US (1) US8514405B2 (enExample)
EP (1) EP2299234B1 (enExample)
JP (1) JP5364519B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8803055B2 (en) * 2009-01-09 2014-08-12 Automated Precision Inc. Volumetric error compensation system with laser tracker and active target
AT512768B1 (de) * 2012-03-28 2017-01-15 Riegl Laser Measurement Systems Gmbh Laser-Scanner
CN103292745B (zh) * 2013-05-07 2015-09-02 中国人民解放军军械工程学院 一种分离体内孔件的同轴度测量装置
WO2016170723A1 (ja) * 2015-04-20 2016-10-27 パナソニックＩｐマネジメント株式会社 振動可視化素子、振動計測システム、及び振動計測方法
TWI595252B (zh) * 2016-05-10 2017-08-11 財團法人工業技術研究院 測距裝置及其測距方法
JP6799414B2 (ja) * 2016-08-10 2020-12-16 株式会社ミツトヨ 追尾式レーザ干渉計のフィードバックゲイン調整方法及び装置
KR102101877B1 (ko) * 2019-10-18 2020-04-17 (주)패스넷 3차원 입체 센싱장치
US20250123095A1 (en) * 2023-10-13 2025-04-17 Zygo Corporation Dynamic interferometer illuminator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106307A (ja) * 1985-11-02 1987-05-16 Olympus Optical Co Ltd 面形状測定機の被検面の位置決め方法及び治具
US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
JP2603429B2 (ja) 1993-10-25 1997-04-23 工業技術院長 追尾式レーザ干渉計
US7800758B1 (en) * 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
ATE491961T1 (de) * 2001-04-10 2011-01-15 Faro Tech Inc Chopper-stabilisiertes messgerät für absolute distanzen
JP4776454B2 (ja) * 2005-07-26 2011-09-21 株式会社ミツトヨ 追尾式レーザ干渉計
EP1750085B1 (en) * 2005-07-26 2013-07-31 Mitutoyo Corporation Laser tracking interferometer
JP4776473B2 (ja) * 2006-08-25 2011-09-21 株式会社ミツトヨ 光軸偏向型レーザ干渉計、その校正方法、補正方法、及び、測定方法
JP4771898B2 (ja) * 2006-09-04 2011-09-14 株式会社ミツトヨ レーザ干渉追尾測長方法及び装置
JP5193490B2 (ja) * 2007-04-20 2013-05-08 株式会社ミツトヨ 追尾式レーザ干渉計による測定方法
JP5244339B2 (ja) * 2007-06-20 2013-07-24 株式会社ミツトヨ 追尾式レーザ干渉計および追尾式レーザ干渉計の復帰方法

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