JP5364519B2 - 追尾式レーザ干渉測長計 - Google Patents

追尾式レーザ干渉測長計 Download PDF

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Publication number
JP5364519B2
JP5364519B2 JP2009216426A JP2009216426A JP5364519B2 JP 5364519 B2 JP5364519 B2 JP 5364519B2 JP 2009216426 A JP2009216426 A JP 2009216426A JP 2009216426 A JP2009216426 A JP 2009216426A JP 5364519 B2 JP5364519 B2 JP 5364519B2
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JP
Japan
Prior art keywords
light
retroreflector
main body
rotation mechanism
tracking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009216426A
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English (en)
Japanese (ja)
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JP2011064610A (ja
JP2011064610A5 (enExample
Inventor
正之 奈良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP2009216426A priority Critical patent/JP5364519B2/ja
Priority to EP10177473A priority patent/EP2299234B1/en
Priority to US12/884,700 priority patent/US8514405B2/en
Publication of JP2011064610A publication Critical patent/JP2011064610A/ja
Publication of JP2011064610A5 publication Critical patent/JP2011064610A5/ja
Application granted granted Critical
Publication of JP5364519B2 publication Critical patent/JP5364519B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/66—Tracking systems using electromagnetic waves other than radio waves

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP2009216426A 2009-09-18 2009-09-18 追尾式レーザ干渉測長計 Expired - Fee Related JP5364519B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009216426A JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計
EP10177473A EP2299234B1 (en) 2009-09-18 2010-09-17 Tracking type laser gauge interferometer
US12/884,700 US8514405B2 (en) 2009-09-18 2010-09-17 Tracking type laser gauge interferometer with rotation mechanism correction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009216426A JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計

Publications (3)

Publication Number Publication Date
JP2011064610A JP2011064610A (ja) 2011-03-31
JP2011064610A5 JP2011064610A5 (enExample) 2012-11-08
JP5364519B2 true JP5364519B2 (ja) 2013-12-11

Family

ID=43242149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009216426A Expired - Fee Related JP5364519B2 (ja) 2009-09-18 2009-09-18 追尾式レーザ干渉測長計

Country Status (3)

Country Link
US (1) US8514405B2 (enExample)
EP (1) EP2299234B1 (enExample)
JP (1) JP5364519B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8803055B2 (en) * 2009-01-09 2014-08-12 Automated Precision Inc. Volumetric error compensation system with laser tracker and active target
AT512768B1 (de) * 2012-03-28 2017-01-15 Riegl Laser Measurement Systems Gmbh Laser-Scanner
CN103292745B (zh) * 2013-05-07 2015-09-02 中国人民解放军军械工程学院 一种分离体内孔件的同轴度测量装置
WO2016170723A1 (ja) * 2015-04-20 2016-10-27 パナソニックＩｐマネジメント株式会社 振動可視化素子、振動計測システム、及び振動計測方法
TWI595252B (zh) * 2016-05-10 2017-08-11 財團法人工業技術研究院 測距裝置及其測距方法
JP6799414B2 (ja) * 2016-08-10 2020-12-16 株式会社ミツトヨ 追尾式レーザ干渉計のフィードバックゲイン調整方法及び装置
KR102101877B1 (ko) * 2019-10-18 2020-04-17 (주)패스넷 3차원 입체 센싱장치
US20250123095A1 (en) * 2023-10-13 2025-04-17 Zygo Corporation Dynamic interferometer illuminator

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62106307A (ja) * 1985-11-02 1987-05-16 Olympus Optical Co Ltd 面形状測定機の被検面の位置決め方法及び治具
US4714339B2 (en) * 1986-02-28 2000-05-23 Us Commerce Three and five axis laser tracking systems
JP2603429B2 (ja) 1993-10-25 1997-04-23 工業技術院長 追尾式レーザ干渉計
US7800758B1 (en) * 1999-07-23 2010-09-21 Faro Laser Trackers, Llc Laser-based coordinate measuring device and laser-based method for measuring coordinates
ATE491961T1 (de) * 2001-04-10 2011-01-15 Faro Tech Inc Chopper-stabilisiertes messgerät für absolute distanzen
JP4776454B2 (ja) * 2005-07-26 2011-09-21 株式会社ミツトヨ 追尾式レーザ干渉計
EP1750085B1 (en) * 2005-07-26 2013-07-31 Mitutoyo Corporation Laser tracking interferometer
JP4776473B2 (ja) * 2006-08-25 2011-09-21 株式会社ミツトヨ 光軸偏向型レーザ干渉計、その校正方法、補正方法、及び、測定方法
JP4771898B2 (ja) * 2006-09-04 2011-09-14 株式会社ミツトヨ レーザ干渉追尾測長方法及び装置
JP5193490B2 (ja) * 2007-04-20 2013-05-08 株式会社ミツトヨ 追尾式レーザ干渉計による測定方法
JP5244339B2 (ja) * 2007-06-20 2013-07-24 株式会社ミツトヨ 追尾式レーザ干渉計および追尾式レーザ干渉計の復帰方法

Also Published As

Publication number Publication date
JP2011064610A (ja) 2011-03-31
EP2299234B1 (en) 2013-03-06
US8514405B2 (en) 2013-08-20
EP2299234A1 (en) 2011-03-23
US20110069319A1 (en) 2011-03-24

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