JP2011061047A5 - - Google Patents
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- Publication number
- JP2011061047A5 JP2011061047A5 JP2009209923A JP2009209923A JP2011061047A5 JP 2011061047 A5 JP2011061047 A5 JP 2011061047A5 JP 2009209923 A JP2009209923 A JP 2009209923A JP 2009209923 A JP2009209923 A JP 2009209923A JP 2011061047 A5 JP2011061047 A5 JP 2011061047A5
- Authority
- JP
- Japan
- Prior art keywords
- defect
- support apparatus
- displayed
- review
- review support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 claims 30
- 238000004891 communication Methods 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 3
- 238000003384 imaging method Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009209923A JP2011061047A (ja) | 2009-09-11 | 2009-09-11 | 欠陥レビュー支援装置，欠陥レビュー装置および検査支援装置 |
| PCT/JP2010/004160 WO2011030488A1 (ja) | 2009-09-11 | 2010-06-23 | 欠陥レビュー支援装置，欠陥レビュー装置および検査支援装置 |
| US13/391,313 US20120233542A1 (en) | 2009-09-11 | 2010-06-23 | Defect review support device, defect review device and inspection support device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009209923A JP2011061047A (ja) | 2009-09-11 | 2009-09-11 | 欠陥レビュー支援装置，欠陥レビュー装置および検査支援装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011061047A JP2011061047A (ja) | 2011-03-24 |
| JP2011061047A5 true JP2011061047A5 (enExample) | 2011-05-06 |
Family
ID=43732171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009209923A Pending JP2011061047A (ja) | 2009-09-11 | 2009-09-11 | 欠陥レビュー支援装置，欠陥レビュー装置および検査支援装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20120233542A1 (enExample) |
| JP (1) | JP2011061047A (enExample) |
| WO (1) | WO2011030488A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012238401A (ja) * | 2011-05-10 | 2012-12-06 | Hitachi High-Technologies Corp | 欠陥レビュー方法および装置 |
| US20130022240A1 (en) * | 2011-07-19 | 2013-01-24 | Wolters William C | Remote Automated Planning and Tracking of Recorded Data |
| US8723115B2 (en) * | 2012-03-27 | 2014-05-13 | Kla-Tencor Corporation | Method and apparatus for detecting buried defects |
| US9057965B2 (en) | 2012-12-03 | 2015-06-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of generating a set of defect candidates for wafer |
| US9449788B2 (en) | 2013-09-28 | 2016-09-20 | Kla-Tencor Corporation | Enhanced defect detection in electron beam inspection and review |
| US9535010B2 (en) * | 2014-05-15 | 2017-01-03 | Kla-Tencor Corp. | Defect sampling for electron beam review based on defect attributes from optical inspection and optical review |
| JP6388827B2 (ja) * | 2014-12-12 | 2018-09-12 | アンリツインフィビス株式会社 | Ｘ線検査装置 |
| JP6229672B2 (ja) | 2015-02-06 | 2017-11-15 | コニカミノルタ株式会社 | 画像形成装置及び履歴生成方法 |
| US10177048B2 (en) * | 2015-03-04 | 2019-01-08 | Applied Materials Israel Ltd. | System for inspecting and reviewing a sample |
| JP6422573B2 (ja) | 2015-04-30 | 2018-11-21 | 富士フイルム株式会社 | 画像処理装置及び画像処理方法及びプログラム |
| US11294164B2 (en) | 2019-07-26 | 2022-04-05 | Applied Materials Israel Ltd. | Integrated system and method |
| US12306007B2 (en) * | 2021-11-12 | 2025-05-20 | Rockwell Collins, Inc. | System and method for chart thumbnail image generation |
| US12304648B2 (en) | 2021-11-12 | 2025-05-20 | Rockwell Collins, Inc. | System and method for separating avionics charts into a plurality of display panels |
| US12254282B2 (en) | 2021-11-12 | 2025-03-18 | Rockwell Collins, Inc. | Method for automatically matching chart names |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61248165A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Medical Corp | 画像表示方法 |
| JP2958007B2 (ja) * | 1988-05-02 | 1999-10-06 | オリンパス光学工業株式会社 | 内視鏡装置 |
| US20030210281A1 (en) * | 2002-05-07 | 2003-11-13 | Troy Ellis | Magnifying a thumbnail image of a document |
| JP4078280B2 (ja) * | 2003-10-08 | 2008-04-23 | 株式会社日立ハイテクノロジーズ | 回路パターンの検査方法および検査装置 |
| JP2005259396A (ja) * | 2004-03-10 | 2005-09-22 | Hitachi High-Technologies Corp | 欠陥画像収集方法およびその装置 |
| JP3895334B2 (ja) * | 2004-03-31 | 2007-03-22 | アンリツ株式会社 | プリント基板検査装置 |
| US7606409B2 (en) * | 2004-11-19 | 2009-10-20 | Hitachi High-Technologies Corporation | Data processing equipment, inspection assistance system, and data processing method |
| JP4691453B2 (ja) * | 2006-02-22 | 2011-06-01 | 株式会社日立ハイテクノロジーズ | 欠陥表示方法およびその装置 |
| JP4825021B2 (ja) * | 2006-02-28 | 2011-11-30 | 株式会社日立ハイテクノロジーズ | レポートフォーマット設定方法、レポートフォーマット設定装置、及び欠陥レビューシステム |
| JP4976112B2 (ja) * | 2006-11-24 | 2012-07-18 | 株式会社日立ハイテクノロジーズ | 欠陥レビュー方法および装置 |
| US7895533B2 (en) * | 2007-03-13 | 2011-02-22 | Apple Inc. | Interactive image thumbnails |
| JP2009110116A (ja) * | 2007-10-26 | 2009-05-21 | Panasonic Electric Works Co Ltd | 画像検査システム |
-
2009
- 2009-09-11 JP JP2009209923A patent/JP2011061047A/ja active Pending
-
2010
- 2010-06-23 US US13/391,313 patent/US20120233542A1/en not_active Abandoned
- 2010-06-23 WO PCT/JP2010/004160 patent/WO2011030488A1/ja not_active Ceased