JP2011045040A5 - - Google Patents

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Publication number
JP2011045040A5
JP2011045040A5 JP2010096557A JP2010096557A JP2011045040A5 JP 2011045040 A5 JP2011045040 A5 JP 2011045040A5 JP 2010096557 A JP2010096557 A JP 2010096557A JP 2010096557 A JP2010096557 A JP 2010096557A JP 2011045040 A5 JP2011045040 A5 JP 2011045040A5
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JP
Japan
Prior art keywords
wiring
upper electrode
substrate
cavity
electrically connect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010096557A
Other languages
English (en)
Japanese (ja)
Other versions
JP5495918B2 (ja
JP2011045040A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010096557A priority Critical patent/JP5495918B2/ja
Priority claimed from JP2010096557A external-priority patent/JP5495918B2/ja
Priority to US12/839,701 priority patent/US9143877B2/en
Publication of JP2011045040A publication Critical patent/JP2011045040A/ja
Publication of JP2011045040A5 publication Critical patent/JP2011045040A5/ja
Application granted granted Critical
Publication of JP5495918B2 publication Critical patent/JP5495918B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010096557A 2009-07-24 2010-04-20 電気機械変換装置、及び電気機械変換装置の作製方法 Expired - Fee Related JP5495918B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010096557A JP5495918B2 (ja) 2009-07-24 2010-04-20 電気機械変換装置、及び電気機械変換装置の作製方法
US12/839,701 US9143877B2 (en) 2009-07-24 2010-07-20 Electromechanical transducer device and method of making the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009172723 2009-07-24
JP2009172723 2009-07-24
JP2010096557A JP5495918B2 (ja) 2009-07-24 2010-04-20 電気機械変換装置、及び電気機械変換装置の作製方法

Publications (3)

Publication Number Publication Date
JP2011045040A JP2011045040A (ja) 2011-03-03
JP2011045040A5 true JP2011045040A5 (OSRAM) 2013-05-23
JP5495918B2 JP5495918B2 (ja) 2014-05-21

Family

ID=43496658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010096557A Expired - Fee Related JP5495918B2 (ja) 2009-07-24 2010-04-20 電気機械変換装置、及び電気機械変換装置の作製方法

Country Status (2)

Country Link
US (1) US9143877B2 (OSRAM)
JP (1) JP5495918B2 (OSRAM)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW453207U (en) 2001-01-18 2001-09-01 Superweigh Entpr Co Ltd Multifunctional exercise machine
JP5436013B2 (ja) * 2009-04-10 2014-03-05 キヤノン株式会社 機械電気変化素子
JP5404365B2 (ja) * 2009-12-16 2014-01-29 キヤノン株式会社 電気機械変換装置及びその製造方法
JP5570311B2 (ja) * 2010-06-07 2014-08-13 キヤノン株式会社 電気機械変換装置、検体診断装置
JP5702966B2 (ja) * 2010-08-02 2015-04-15 キヤノン株式会社 電気機械変換装置及びその作製方法
JP5961246B2 (ja) * 2011-03-22 2016-08-02 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ
US9802224B2 (en) * 2011-12-20 2017-10-31 Koninklijke Philips N.V. Ultrasound transducer device and method of manufacturing the same
WO2015044827A1 (en) * 2013-09-27 2015-04-02 Koninklijke Philips N.V. Ultrasound transducer assembly and method for transmitting and receiving ultrasound waves
KR102155695B1 (ko) * 2014-02-12 2020-09-21 삼성전자주식회사 전기 음향 변환기
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
JP2016101417A (ja) * 2014-11-28 2016-06-02 キヤノン株式会社 静電容量型音響波トランスデューサ及びこれを備えた被検体情報取得装置
TW201908021A (zh) 2017-06-21 2019-03-01 美商蝴蝶網路公司 具有電性隔離的電極部分的個別單元的微加工超音波換能器
EP3459646A1 (en) * 2017-09-22 2019-03-27 Koninklijke Philips N.V. Ultrasound transducer device and method for controlling the same

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH067719B2 (ja) 1985-03-26 1994-01-26 日本電気株式会社 超音波トランスジユ−サ
JPH11176307A (ja) * 1997-12-08 1999-07-02 Omron Corp 静電マイクロリレー
US6109113A (en) * 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture
US6430109B1 (en) 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US7545075B2 (en) * 2004-06-04 2009-06-09 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer array with through-substrate electrical connection and method of fabricating same
JP2006012889A (ja) * 2004-06-22 2006-01-12 Canon Inc 半導体チップの製造方法および半導体装置の製造方法
US20070299345A1 (en) * 2004-10-27 2007-12-27 Hideo Adachi Capacitive Ultrasonic Transducer and Endo Cavity Ultrasonic Diagnosis System Using the Same
JP4624763B2 (ja) * 2004-10-27 2011-02-02 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
JP4632853B2 (ja) * 2005-05-13 2011-02-16 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子とその製造方法
US8796901B2 (en) * 2005-06-17 2014-08-05 Kolo Technologies, Inc. Micro-electro-mechanical transducer having an insulation extension
JP4724505B2 (ja) * 2005-09-09 2011-07-13 株式会社日立製作所 超音波探触子およびその製造方法
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
JP4699259B2 (ja) * 2006-03-31 2011-06-08 株式会社日立製作所 超音波トランスデューサ
US7745973B2 (en) * 2006-05-03 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Acoustic crosstalk reduction for capacitive micromachined ultrasonic transducers in immersion
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
JP5430245B2 (ja) * 2008-06-24 2014-02-26 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
JP5376982B2 (ja) * 2008-06-30 2013-12-25 キヤノン株式会社 機械電気変換素子と機械電気変換装置および機械電気変換装置の作製方法
JP5404365B2 (ja) * 2009-12-16 2014-01-29 キヤノン株式会社 電気機械変換装置及びその製造方法

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