JP2011040756A - 薄膜トランジスタ - Google Patents
薄膜トランジスタ Download PDFInfo
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- JP2011040756A JP2011040756A JP2010181407A JP2010181407A JP2011040756A JP 2011040756 A JP2011040756 A JP 2011040756A JP 2010181407 A JP2010181407 A JP 2010181407A JP 2010181407 A JP2010181407 A JP 2010181407A JP 2011040756 A JP2011040756 A JP 2011040756A
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- 239000010409 thin film Substances 0.000 title claims abstract description 56
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 197
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 96
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 96
- 239000004065 semiconductor Substances 0.000 claims abstract description 64
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 33
- 239000002905 metal composite material Substances 0.000 claims abstract description 33
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 25
- 239000010410 layer Substances 0.000 description 139
- 239000002238 carbon nanotube film Substances 0.000 description 38
- 239000000463 material Substances 0.000 description 15
- 238000009834 vaporization Methods 0.000 description 15
- 230000008016 vaporization Effects 0.000 description 15
- 239000000758 substrate Substances 0.000 description 14
- 239000003963 antioxidant agent Substances 0.000 description 10
- 230000003078 antioxidant effect Effects 0.000 description 10
- 238000009736 wetting Methods 0.000 description 8
- 239000000956 alloy Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000969 carrier Substances 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 230000003014 reinforcing effect Effects 0.000 description 7
- 230000001052 transient effect Effects 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 239000004698 Polyethylene Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000002079 double walled nanotube Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000011118 polyvinyl acetate Substances 0.000 description 2
- 238000001878 scanning electron micrograph Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002109 single walled nanotube Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000002048 multi walled nanotube Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/484—Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
- H10K85/221—Carbon nanotubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/745—Carbon nanotubes, CNTs having a modified surface
- Y10S977/748—Modified with atoms or molecules bonded to the surface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/75—Single-walled
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
【解決手段】本発明の薄膜トランジスタは、ソース電極と、前記ソース電極と分離して設置されるドレイン電極と、半導体層と、絶縁層と、ゲート電極を含む。前記半導体層が、前記ソース電極と、前記ドレイン電極とに電気的に接続され、前記ゲート電極が、前記絶縁層により、前記半導体層と、前記ソース電極と、前記ドレイン電極と絶縁状態で設置され、前記ソース電極と、ドレイン電極と、ゲート電極とは、それぞれカーボンナノチューブ―金属複合材料体からなる。前記カーボンナノチューブ―金属複合材料体は、カーボンナノチューブ構造体と、前記カーボンナノチューブ構造体に被覆された金属層とを含む。前記カーボンナノチューブ構造体は、複数のカーボンナノチューブのみからなる。
【選択図】図1
Description
タに関するものである。
図1を参照すると、本発明の実施例1は、薄膜トランジスタ100を提供する。該薄膜トランジスタ100は、トップゲート型(Top Gate Type)薄膜トランジスタであり、絶縁基板110の一つの表面に形成される。該薄膜トランジスタ100は、ゲート電極120、絶縁層130、半導体層140、ソース電極151及びドレイン電極152を含む。前記半導体層140は、前記絶縁基板110の一つの表面に設置される。前記ソース電極151及び前記ドレイン電極152は、それぞれ前記半導体層140の、前記絶縁基板110に接触する表面とは反対側の表面に、所定の距離で分離して設置され、該半導体層140に電気的に接続されている。前記絶縁層130は、前記ソース電極151、前記ドレイン電極152及び前記半導体層140を、被覆するように設置されている。前記ゲート電極120は、前記絶縁層130の前記半導体層140に接触する表面とは反対側の表面に設置され、且つ前記ソース電極151及び前記ドレイン電極152の間に設置されている。
図8を参照すると、本発明の実施例2は、薄膜トランジスタ200を提供する。該薄膜トランジスタ200は、ボトムゲート型(Bottom Gate Type)薄膜トランジスタであり、絶縁基板210の一つの表面に形成される。該薄膜トランジスタ200は、ゲート電極220、絶縁層230、半導体層240、ソース電極251、ドレイン電極252を含む。
110、210 絶縁基板
120、220 ゲート電極
130、230 絶縁層
140、240 半導体層
151、251 ソース電極
152、252 ドレイン電極
156、256 チャンネル
20 カーボンナノチューブ―金属複合材料体
143a カーボンナノチューブフィルム
143b カーボンナノチューブセグメント
145 カーボンナノチューブ
Claims (2)
- ソース電極と、
前記ソース電極と分離して設置されるドレイン電極と、
半導体層と、
絶縁層と、
ゲート電極と、
を含む薄膜トランジスタにおいて、
前記半導体層が、前記ソース電極と、前記ドレイン電極とに電気的に接続され、
前記ゲート電極が、前記絶縁層により、前記半導体層と、前記ソース電極と、前記ドレイン電極と絶縁状態で設置され、
前記ソース電極と、ドレイン電極と、ゲート電極とは、それぞれカーボンナノチューブ―金属複合材料体からなり、
前記カーボンナノチューブ―金属複合材料体は、カーボンナノチューブ構造体と、前記カーボンナノチューブ構造体に被覆された金属層とを含み、
前記カーボンナノチューブ構造体は、複数のカーボンナノチューブのみからなることを特徴とする薄膜トランジスタ。 - 前記カーボンナノチューブ―金属複合材料体において、前記カーボンナノチューブ構造体における各々のカーボンナノチューブには、前記金属層が被覆されていることを特徴とする薄膜トランジスタ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910109336A CN101997035B (zh) | 2009-08-14 | 2009-08-14 | 薄膜晶体管 |
CN200910109336.0 | 2009-08-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011040756A true JP2011040756A (ja) | 2011-02-24 |
JP5174101B2 JP5174101B2 (ja) | 2013-04-03 |
Family
ID=43588089
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010181407A Active JP5174101B2 (ja) | 2009-08-14 | 2010-08-13 | 薄膜トランジスタ |
Country Status (3)
Country | Link |
---|---|
US (1) | US8227799B2 (ja) |
JP (1) | JP5174101B2 (ja) |
CN (1) | CN101997035B (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013016777A (ja) * | 2011-06-30 | 2013-01-24 | Qinghua Univ | 薄膜トランジスタ及びそれを利用した圧力センサー |
KR101882840B1 (ko) * | 2013-10-24 | 2018-08-24 | 중국 과학원, 쑤저우 나노기술 및 나노바이오닉스 연구소 | 탄소나노튜브 박막 트랜지스터, amoled 픽셀 유닛 플렉서블 구동회로 및 그 제조방법 |
JP2018195795A (ja) * | 2017-05-17 | 2018-12-06 | ツィンファ ユニバーシティ | 薄膜トランジスタ |
JP2018193289A (ja) * | 2017-05-17 | 2018-12-06 | ツィンファ ユニバーシティ | カーボンナノチューブ構造体 |
JP2020521326A (ja) * | 2017-05-23 | 2020-07-16 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | 半導体デバイスおよび半導体デバイス形成方法 |
US10784444B2 (en) | 2017-05-17 | 2020-09-22 | Tsinghua University | Light detector |
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US8969154B2 (en) * | 2011-08-23 | 2015-03-03 | Micron Technology, Inc. | Methods for fabricating semiconductor device structures and arrays of vertical transistor devices |
US9105702B2 (en) | 2012-11-16 | 2015-08-11 | International Business Machines Corporation | Transistors from vertical stacking of carbon nanotube thin films |
CN104103695B (zh) * | 2013-04-02 | 2017-01-25 | 清华大学 | 薄膜晶体管及其制备方法 |
CN104867876B (zh) | 2014-02-24 | 2017-11-14 | 清华大学 | 薄膜晶体管阵列的制备方法 |
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CN104900713B (zh) * | 2015-06-15 | 2017-12-08 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制作方法、显示基板、显示装置 |
US10665798B2 (en) * | 2016-07-14 | 2020-05-26 | International Business Machines Corporation | Carbon nanotube transistor and logic with end-bonded metal contacts |
US10665799B2 (en) * | 2016-07-14 | 2020-05-26 | International Business Machines Corporation | N-type end-bonded metal contacts for carbon nanotube transistors |
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US8227799B2 (en) | 2012-07-24 |
US20110037124A1 (en) | 2011-02-17 |
JP5174101B2 (ja) | 2013-04-03 |
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