JP2010532426A - 基板上に剥離剤の層を施すための方法及び装置 - Google Patents
基板上に剥離剤の層を施すための方法及び装置 Download PDFInfo
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- JP2010532426A JP2010532426A JP2010513783A JP2010513783A JP2010532426A JP 2010532426 A JP2010532426 A JP 2010532426A JP 2010513783 A JP2010513783 A JP 2010513783A JP 2010513783 A JP2010513783 A JP 2010513783A JP 2010532426 A JP2010532426 A JP 2010532426A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
Description
Claims (22)
- 剥離剤を、基板に向けられた少なくとも1つのノズルを備えた真空室の内室内で気化させ、真空室内で移動する又は移動可能な基板上に剥離剤の層を施すための方法において、
液状の剥離剤を、気化室の内室内に噴射して、気化させることを特徴とする、基板上に剥離剤の層を施すための方法。 - 基板の所定の速度において、基板上の剥離剤の所定の層厚に相当する量の剥離剤を噴射する、請求項1記載の方法。
- 剥離剤を、供給管路を介して、有利には大気圧下にある貯蔵容器から供給する、請求項1又は2記載の方法。
- 大気圧よりも高い圧力下にある気化室に剥離剤を供給する、請求項1から3までのいずれか1項記載の方法。
- 剥離剤の真空フラッシングを行う、請求項1から4までのいずれか1項記載の方法。
- 剥離剤の噴射を、基板の運動開始時に開始し、かつ/または基板の運動終了時に終了させる、請求項1から5までのいずれか1項記載の方法。
- 剥離剤の噴射量を、基板の速度に関連して変化させる、請求項1から6までのいずれか1項記載の方法。
- 有利な形式で容積ポンプによって供給を行う、請求項1から7までのいずれか1項記載の方法。
- 有利な形式で加熱可能な安全弁によって噴射を行う、請求項1から8までのいずれか1項記載の方法。
- 内燃機関の運転段階中に内室を排気する、請求項1から9までのいずれか1項記載の方法。
- 内室及び/又はノズルの壁部を、剥離剤の沸騰温度よりも高い温度に加熱する、請求項1から10までのいずれか1項記載の方法。
- 運転段階中に、内室と真空室との間の気化室の圧力差を維持する、請求項1から11までのいずれか1項記載の方法。
- 剥離剤を、有利には内室の壁部とは無関係に加熱された、内室内の面に噴射する、請求項1から12までのいずれか1項記載の方法。
- ノズルの内室側の開口を、ラビリンスプレートによって、剥離剤が噴射される領域に対して遮蔽する、請求項1から13までのいずれか1項記載の方法。
- 真空室内で移動するか又は移動可能な基板に、剥離剤の層を施すための装置であって、前記真空室が少なくとも1つの金属蒸発装置を有しており、基板に向けられた少なくとも1つのノズルを備えた気化室が設けられており、剥離剤が供給管路を介して前記気化室の内室に供給可能である形式のものにおいて、
前記供給管路が噴射装置に接続されており、該噴射装置によって、液状の剥離剤が気化室の内室内に噴射可能又は噴射され、それによって液状の剥離剤が気化されるようになっていることを特徴とする、基板上に剥離剤の層を施すための装置。 - 前記噴射装置が、有利には加熱可能な安全弁を有している、請求項15記載の装置。
- 前記供給管路が、有利な形式で容積ポンプに接続されている、請求項16記載の装置。
- 前記気化室の内室内に、有利には室壁とは無関係に加熱可能な気化面が配置されている、請求項15から17までのいずれか1項記載の装置。
- 前記安全弁が、測地学的に見て、前記気化面の上側に配置されている、請求項15から18までのいずれか1項記載の装置。
- 前記ノズルが、測地学的に見て、前記安全弁の上側に配置された、内室側の開口を有している、請求項15から19までのいずれか1項記載の装置。
- 気化室の内室が、測地学的に見て、前記安全弁の上側に配置されており、また測地学的に見てノズルの内室側の開口の下側にラビリンスプレートが配置されている、請求項20記載の装置。
- 前記供給管路が剥離剤のための貯蔵容器に接続されている、請求項15から21までのいずれか1項記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007031457A DE102007031457A1 (de) | 2007-07-05 | 2007-07-05 | Verfahren und Vorrichtung zur Aufbringung einer Schicht eines Trennmittels auf ein Substrat |
PCT/EP2008/005428 WO2009003701A2 (de) | 2007-07-05 | 2008-07-03 | Verfahren und vorrichtung zur aufbringung einer schicht eines trennmittels auf ein substrat |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2010532426A true JP2010532426A (ja) | 2010-10-07 |
Family
ID=40042986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010513783A Pending JP2010532426A (ja) | 2007-07-05 | 2008-07-03 | 基板上に剥離剤の層を施すための方法及び装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20090011127A1 (ja) |
EP (1) | EP2176440A2 (ja) |
JP (1) | JP2010532426A (ja) |
CN (1) | CN101337220A (ja) |
DE (1) | DE102007031457A1 (ja) |
WO (1) | WO2009003701A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014508223A (ja) * | 2011-02-10 | 2014-04-03 | アップル インコーポレイテッド | 疎油性被覆のための直接液体蒸発 |
US9282653B2 (en) | 2011-06-24 | 2016-03-08 | Apple Inc. | Enhanced glass impact durability through application of thin films |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110229659A1 (en) * | 2010-03-22 | 2011-09-22 | Timothy Ray Reynolds | Ion beam assisted deposition of ophthalmic lens coatings |
CN104040017B (zh) | 2011-10-21 | 2018-01-30 | 欧瑞康先进科技股份公司 | 直接液体淀积 |
Citations (7)
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JPS60153113A (ja) * | 1983-12-19 | 1985-08-12 | スペクトラム コントロ−ル インコ−ポレ−テツド | モノリシック多層コンデンサおよびその製造方法 |
JPH0243042A (ja) * | 1988-04-29 | 1990-02-13 | Spectrum Control Inc | 多層構造及びその製法 |
JPH10287966A (ja) * | 1997-02-12 | 1998-10-27 | Toray Ind Inc | オイル薄膜の形成方法およびその薄膜を用いた蒸着製品の製造方法 |
JPH11147282A (ja) * | 1997-11-18 | 1999-06-02 | Matsushita Electric Ind Co Ltd | 積層体の製造方法 |
JP2000195751A (ja) * | 1998-12-25 | 2000-07-14 | Matsushita Electric Ind Co Ltd | 有機薄膜コンデンサ用積層シ―トの製造方法 |
JP2002327261A (ja) * | 2001-02-01 | 2002-11-15 | Toray Ind Inc | 有機高分子のコーティング方法 |
JP2005014483A (ja) * | 2003-06-27 | 2005-01-20 | Toppan Printing Co Ltd | 積層体の製造方法 |
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US4022928A (en) * | 1975-05-22 | 1977-05-10 | Piwcyzk Bernhard P | Vacuum deposition methods and masking structure |
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DE3224234A1 (de) * | 1981-09-01 | 1983-03-10 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung von metallfreien streifen bei der metallbedampfung eines isolierstoffbandes und vorrichtung zur durchfuehrung des verfahrens |
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JP3796831B2 (ja) * | 1996-09-03 | 2006-07-12 | 東レ株式会社 | 真空蒸着装置 |
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EP1035553B1 (en) | 1997-11-18 | 2006-12-27 | Matsushita Electric Industrial Co., Ltd. | Methods for producing a layered product |
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-
2007
- 2007-07-05 DE DE102007031457A patent/DE102007031457A1/de not_active Ceased
- 2007-10-19 CN CNA2007101643075A patent/CN101337220A/zh active Pending
- 2007-11-29 US US11/947,491 patent/US20090011127A1/en not_active Abandoned
-
2008
- 2008-07-03 EP EP08773839A patent/EP2176440A2/de not_active Withdrawn
- 2008-07-03 JP JP2010513783A patent/JP2010532426A/ja active Pending
- 2008-07-03 WO PCT/EP2008/005428 patent/WO2009003701A2/de active Application Filing
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS60153113A (ja) * | 1983-12-19 | 1985-08-12 | スペクトラム コントロ−ル インコ−ポレ−テツド | モノリシック多層コンデンサおよびその製造方法 |
JPH0243042A (ja) * | 1988-04-29 | 1990-02-13 | Spectrum Control Inc | 多層構造及びその製法 |
JPH10287966A (ja) * | 1997-02-12 | 1998-10-27 | Toray Ind Inc | オイル薄膜の形成方法およびその薄膜を用いた蒸着製品の製造方法 |
JPH11147282A (ja) * | 1997-11-18 | 1999-06-02 | Matsushita Electric Ind Co Ltd | 積層体の製造方法 |
JP2000195751A (ja) * | 1998-12-25 | 2000-07-14 | Matsushita Electric Ind Co Ltd | 有機薄膜コンデンサ用積層シ―トの製造方法 |
JP2002327261A (ja) * | 2001-02-01 | 2002-11-15 | Toray Ind Inc | 有機高分子のコーティング方法 |
JP2005014483A (ja) * | 2003-06-27 | 2005-01-20 | Toppan Printing Co Ltd | 積層体の製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014508223A (ja) * | 2011-02-10 | 2014-04-03 | アップル インコーポレイテッド | 疎油性被覆のための直接液体蒸発 |
US9282653B2 (en) | 2011-06-24 | 2016-03-08 | Apple Inc. | Enhanced glass impact durability through application of thin films |
Also Published As
Publication number | Publication date |
---|---|
EP2176440A2 (de) | 2010-04-21 |
US20090011127A1 (en) | 2009-01-08 |
CN101337220A (zh) | 2009-01-07 |
WO2009003701A3 (de) | 2009-04-23 |
DE102007031457A1 (de) | 2009-01-08 |
WO2009003701A2 (de) | 2009-01-08 |
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