JP2010529650A - トランジスタアレイにおける閾値電圧のレイアウト感度の抑制方法 - Google Patents
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Abstract
Description
Claims (27)
- 集積回路における閾値電圧の変動を平滑化する方法であって、
MOSFETアレイの複数のトランジスタに結合する再結合表面を特定する工程と、
前記MOSFETアレイの前記複数のトランジスタにおける閾値電圧の変動が最小化されるように、当該表面に隣接する格子間原子の再結合に作用するように前記再結合表面を処理する工程と、を備え、
前記MOSFETアレイの前記複数のトランジスタにおける閾値電圧の変動が最小化されることを特徴とする閾値電圧の平滑化方法。 - 前記処理工程が、当該表面に隣接する格子間原子の再結合を促進するために、特定された表面に隣接するゲート電極を処理する工程を備えることを特徴とする請求項1に記載の平滑化方法。
- 前記処理工程が、当該表面に隣接する格子間原子の再結合を抑制するために、Si/STI界面を処理する工程を備えることを特徴とする請求項1に記載の平滑化方法。
- 前記処理工程が、
当該表面に隣接する格子間原子の再結合を抑制するために、Si/STI界面を処理する工程と、
当該表面に隣接する格子間原子の再結合を促進するために、特定された表面に隣接するゲート電極を処理する工程と、を備えることを特徴とする請求項1に記載の平滑化方法。 - 前記処理工程が、当該表面に隣接する格子間原子の再結合を促進するために、ゲート材料に高誘電率(high−k)材料を導入することにより、特定された表面に隣接する前記ゲート電極を処理する工程を備えることを特徴とする請求項2に記載の平滑化方法。
- 前記処理工程が、当該表面に隣接する格子間原子の再結合を促進するために、中誘電率(medium−k)の酸化物層を生成することにより、特定された表面に隣接する前記ゲート電極を処理する工程を備えることを特徴とする請求項2に記載の平滑化方法。
- 前記処理工程が、当該表面に隣接する格子間原子の再結合を抑制するために、前記Si/STI界面の隣接部にN又はF原子を導入することにより、前記Si/STI界面を処理する工程を備えることを特徴とする請求項3に記載の平滑化方法。
- 前記処理工程が、当該界面に隣接する格子間原子の再結合を抑制するために、STIに酸窒化物材料を用いることにより、前記Si/STI界面を処理する工程を備えることを特徴とする請求項3に記載の平滑化方法。
- 前記処理工程が、当該界面に隣接する格子間原子の再結合を抑制するために、前記Si/STI界面に隣接する窒化物ライナを有するSTIを形成することにより、前記Si/STI界面を処理する工程を備えることを特徴とする請求項3に記載の平滑化方法。
- トランジスタ間の閾値電圧の変動を平滑化するように構成されたMOSFETアレイであって、
基板内にシリコンから成る拡散領域と、
前記拡散領域の一部の上層にあり、トランジスタを規定するゲート材料と、
絶縁材料から成り、前記拡散領域を分離するシャロー・トレンチ・アイソレーション(STI)領域と、を備え、
前記アレイの前記トランジスタに結合する再結合表面は、当該表面に隣接する格子間原子の再結合に作用するように処理されており、
前記アレイの前記トランジスタにおける閾値電圧の変動が最小化されていることを特徴とするMOSFETアレイ。 - 選択されたゲート電極が、当該表面に隣接する格子間原子の再結合を促進するために、特定された表面に隣接して処理されていることを特徴とする請求項10に記載のMOSFETアレイ。
- 選択されたSi/STI界面が、当該表面に隣接する格子間原子の再結合を抑制するために処理されていることを特徴とする請求項10に記載のMOSFETアレイ。
- 選択されたSi/STI界面が、当該表面に隣接する格子間原子の再結合を抑制するために処理されており、
選択されたゲート電極が、当該表面に隣接する格子間原子の再結合を促進するために、特定された表面に隣接して処理されていることを特徴とする請求項10に記載のMOSFETアレイ。 - 前記選択されたゲート電極が、当該表面に隣接する格子間原子の再結合を促進するために、ゲート材料に高誘電率(high−k)材料を導入することにより、特定された表面に隣接して処理されていることを特徴とする請求項11に記載のMOSFETアレイ。
- 前記高誘電率(high−k)材料が、酸化ハフニウム(HfO2)であることを特徴とする請求項14に記載のMOSFETアレイ。
- 前記選択されたSi/STI界面が、当該表面に隣接する格子間原子の再結合を抑制するために、前記Si/STI界面の隣接部にN又はF原子を導入することにより処理されていることを特徴とする請求項12に記載のMOSFETアレイ。
- 前記選択されたSi/STI界面が、当該界面に隣接する格子間原子の再結合を抑制するために、STIに酸窒化物材料を用いることにより処理されていることを特徴とする請求項12に記載のMOSFETアレイ。
- 前記選択されたSi/STI界面が、当該界面に隣接する格子間原子の再結合を抑制するために、前記Si/STI界面に隣接する窒化物ライナを有するSTIを形成することにより処理されていることを特徴とする請求項12に記載のMOSFETアレイ。
- 閾値電圧の変動を平滑化するように構成されたMOSFETトランジスタであって、
シリコン拡散領域に形成されたソース領域及びドレイン領域と、
前記ソース領域と前記ドレイン領域の間にあり、上層にゲート材料を有するチャネル領域と、
絶縁材料から成り、前記拡散領域に隣接し、前記拡散領域を隣接する拡散領域と分離するシャロー・トレンチ・アイソレーション(STI)と、を備え、
レイアウト内のトランジスタに結合する再結合表面が、当該表面に隣接する格子間原子の再結合に作用するように処理されており、
前記トランジスタの前記閾値電圧が調節されていることを特徴とするMOSFETトランジスタ。 - 前記ゲート材料が、当該表面に隣接する格子間原子の再結合を促進するために、特定された表面に隣接して処理されていることを特徴とする請求項19に記載のMOSFETトランジスタ。
- Si/STI界面が、当該表面に隣接する格子間原子の再結合を抑制するために処理されていることを特徴とする請求項19に記載のMOSFETトランジスタ。
- Si/STI界面が、当該表面に隣接する格子間原子の再結合を抑制するために処理されており、
前記ゲート材料が、当該表面に隣接する格子間原子の再結合を促進するために、前記チャネル表面に隣接して処理されていることを特徴とする請求項19に記載のMOSFETトランジスタ。 - ゲート電極が、当該表面に隣接する格子間原子の再結合を促進するために、高誘電率(high−k)材料を導入することにより、前記チャネル表面に隣接して処理されていることを特徴とする請求項20に記載のMOSFETトランジスタ。
- 前記高誘電率(high−k)材料が、酸化ハフニウム(HfO2)であることを特徴とする請求項23に記載のMOSFETトランジスタ。
- Si/STI材料が、当該表面に隣接する格子間原子の再結合を抑制するために、Si/STI界面の隣接部にN又はF原子を備えることを特徴とする請求項19に記載のMOSFETトランジスタ。
- Si/STIが、当該表面に隣接する格子間原子の再結合を抑制するために、STIに酸窒化物材料を備えることを特徴とする請求項19に記載のMOSFETトランジスタ。
- 少なくとも1つのSi/STI界面が、当該界面に隣接する格子間原子の再結合を抑制するために、前記Si/STI界面に隣接する窒化物ライナを備えることを特徴とする請求項12に記載のMOSFETトランジスタ。
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US11/757,294 US7691693B2 (en) | 2007-06-01 | 2007-06-01 | Method for suppressing layout sensitivity of threshold voltage in a transistor array |
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PCT/US2008/051358 WO2008150556A1 (en) | 2007-06-01 | 2008-01-17 | Method for suppressing layout sensitivity of threshold voltage in a transistor array |
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Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07307382A (ja) * | 1994-05-13 | 1995-11-21 | Sony Corp | トレンチ素子分離構造およびその形成方法 |
JPH11126829A (ja) * | 1997-08-28 | 1999-05-11 | Texas Instr Inc <Ti> | 半導体装置の製法 |
JP2001156291A (ja) * | 1999-09-17 | 2001-06-08 | Nec Corp | Mosトランジスタの製造方法 |
JP2004179301A (ja) * | 2002-11-26 | 2004-06-24 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
JP2004186359A (ja) * | 2002-12-03 | 2004-07-02 | Renesas Technology Corp | 半導体集積回路装置およびその製造方法 |
JP2006190727A (ja) * | 2005-01-04 | 2006-07-20 | Renesas Technology Corp | 半導体集積回路 |
JP2007019450A (ja) * | 2005-06-10 | 2007-01-25 | Fujitsu Ltd | 半導体装置およびその製造方法 |
JP2007073660A (ja) * | 2005-09-06 | 2007-03-22 | Renesas Technology Corp | 半導体装置およびその製造方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR910006249B1 (ko) * | 1983-04-01 | 1991-08-17 | 가부시기가이샤 히다찌세이사꾸쇼 | 반도체 장치 |
JPH0338044A (ja) * | 1989-07-05 | 1991-02-19 | Toshiba Corp | 半導体装置の製造方法 |
US5592012A (en) * | 1993-04-06 | 1997-01-07 | Sharp Kabushiki Kaisha | Multivalued semiconductor read only storage device and method of driving the device and method of manufacturing the device |
JPH0878682A (ja) | 1994-07-08 | 1996-03-22 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
US5552332A (en) | 1995-06-02 | 1996-09-03 | Motorola, Inc. | Process for fabricating a MOSFET device having reduced reverse short channel effects |
US6590230B1 (en) * | 1996-10-15 | 2003-07-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
JPH11168069A (ja) | 1997-12-03 | 1999-06-22 | Nec Corp | 半導体装置の製造方法 |
US6960818B1 (en) * | 1997-12-30 | 2005-11-01 | Siemens Aktiengesellschaft | Recessed shallow trench isolation structure nitride liner and method for making same |
US6180476B1 (en) * | 1998-11-06 | 2001-01-30 | Advanced Micro Devices, Inc. | Dual amorphization implant process for ultra-shallow drain and source extensions |
US6429062B1 (en) * | 1999-09-20 | 2002-08-06 | Koninklike Philips Electronics N.V. | Integrated-circuit manufacturing using high interstitial-recombination-rate blocking layer for source/drain extension implant |
US6313011B1 (en) * | 1999-10-28 | 2001-11-06 | Koninklijke Philips Electronics N.V. (Kpenv) | Method for suppressing narrow width effects in CMOS technology |
JP2001144170A (ja) * | 1999-11-11 | 2001-05-25 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP4408653B2 (ja) * | 2003-05-30 | 2010-02-03 | 東京エレクトロン株式会社 | 基板処理方法および半導体装置の製造方法 |
US6982207B2 (en) * | 2003-07-11 | 2006-01-03 | Micron Technology, Inc. | Methods for filling high aspect ratio trenches in semiconductor layers |
US6998666B2 (en) * | 2004-01-09 | 2006-02-14 | International Business Machines Corporation | Nitrided STI liner oxide for reduced corner device impact on vertical device performance |
US7169675B2 (en) | 2004-07-07 | 2007-01-30 | Chartered Semiconductor Manufacturing, Ltd | Material architecture for the fabrication of low temperature transistor |
US7316960B2 (en) * | 2004-07-13 | 2008-01-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strain enhanced ultra shallow junction formation |
US7271464B2 (en) * | 2004-08-24 | 2007-09-18 | Micron Technology, Inc. | Liner for shallow trench isolation |
US7538351B2 (en) * | 2005-03-23 | 2009-05-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for forming an SOI structure with improved carrier mobility and ESD protection |
US7521763B2 (en) * | 2007-01-03 | 2009-04-21 | International Business Machines Corporation | Dual stress STI |
-
2007
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07307382A (ja) * | 1994-05-13 | 1995-11-21 | Sony Corp | トレンチ素子分離構造およびその形成方法 |
JPH11126829A (ja) * | 1997-08-28 | 1999-05-11 | Texas Instr Inc <Ti> | 半導体装置の製法 |
JP2001156291A (ja) * | 1999-09-17 | 2001-06-08 | Nec Corp | Mosトランジスタの製造方法 |
JP2004179301A (ja) * | 2002-11-26 | 2004-06-24 | Renesas Technology Corp | 半導体集積回路装置の製造方法 |
JP2004186359A (ja) * | 2002-12-03 | 2004-07-02 | Renesas Technology Corp | 半導体集積回路装置およびその製造方法 |
JP2006190727A (ja) * | 2005-01-04 | 2006-07-20 | Renesas Technology Corp | 半導体集積回路 |
JP2007019450A (ja) * | 2005-06-10 | 2007-01-25 | Fujitsu Ltd | 半導体装置およびその製造方法 |
JP2007073660A (ja) * | 2005-09-06 | 2007-03-22 | Renesas Technology Corp | 半導体装置およびその製造方法 |
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US20090236673A1 (en) | 2009-09-24 |
EP2153467A1 (en) | 2010-02-17 |
CN101681923B (zh) | 2014-06-18 |
JP5108941B2 (ja) | 2012-12-26 |
TWI369743B (en) | 2012-08-01 |
US7705406B2 (en) | 2010-04-27 |
TW200849407A (en) | 2008-12-16 |
KR101143912B1 (ko) | 2012-05-11 |
EP2153467A4 (en) | 2012-05-30 |
US20080296698A1 (en) | 2008-12-04 |
CN101681923A (zh) | 2010-03-24 |
KR20100007868A (ko) | 2010-01-22 |
WO2008150556A1 (en) | 2008-12-11 |
US7691693B2 (en) | 2010-04-06 |
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