JP2010507924A - 温度変化の急速な基板保持構造 - Google Patents
温度変化の急速な基板保持構造 Download PDFInfo
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Abstract
【選択図】 図1
Description
発明の概要
[0005]このような欠点に部分的に取り組むために、第一態様において、本発明は、III−V族窒化物膜の堆積に用いられる半導体処理ユニットに用いられる急速温度変化能力を持つ基板支持構造を提供する。
[0022]典型的な一つのIII−V族窒化物ベースの膜構造はGaNベースのLED構造100として図1に示されている。それはサファイア(0001)基板104の上に製造される。n型GaN層112は、基板の上に形成されるGaNバッファ層108の上に堆積される。デバイスの活性領域は、InGaN層を備える図面に示される、多層量子井戸層116に具体化される。pn接合は、上に横たわるp型AlGaN層120で形成され、p型GaN層124はコンタクト層として作用する。
[0024]図2は、例示的化学気相堆積(“CVD”)システムの簡易図であり、個々の堆積ステップが行われ得るチャンバの基本構造が示されている。このシステムは熱大気圧未満CVD(“SACVD”)だけでなく他のプロセス、例えば、リフロー、ドライブイン、洗浄、エッチング、堆積、ゲッタリングのプロセスを行うのに適する。一部の場合に、多ステッププロセスはなお個々のチャンバ内で行うことができ、その後、他のチャンバに搬送するために除去される。システムの主な要素には、特に、ガス又は蒸気の分配システム220からのプロセスガスや他のガスを受容する真空チャンバ215と、真空システム225と、制御システム(図示せず)とが含まれる。これらの要素や他の要素は、以下に詳述される。図面は説明のために単一チャンバのみの構造を示しているが、同様の構造を持つ複数のチャンバがクラスタツールの一部として準備されてもよく、それぞれが或る全体の製造プロセスの異なる態様を行うように調整されることは理解される。しかしながら、本発明がそのように制限されること、例えば、非真空チャンバを用いることができること、本発明の基板支持構造と方法が所望される場合には大気圧で行うことができることは理解される。
[0033]ここで本発明のある態様による個々のチャンバとエンクロージャを見ると、更にまた図2は、例えば、GaNベースLEDのようなIII−V族窒化物膜のMOCVD堆積に用いることができる例示的半導体エンクロージャを示す正面透視図である。しかしながら、エンクロージャと関連した要素はこのようなMOCVD処理に限定されない。一実施形態において、真空チャンバ215は、一般的には、構成されたサセプタのような基板支持構造208と、一つ又は複数のヒータ226を含む。更にまた、本発明は、真空チャンバに限定されず、適切な半導体反応チャンバ又はエンクロージャを含むことができる。使用中、基板支持構造208は、一つ以上の基板ウエハ209を支持し、且つ堆積とプロセス中に可能である急速な温度変化を示すように構成される。或る実施形態において、基板支持構造208は、サファイアウエハのような一つ以上の基板ウエハを支持するように構成されるサセプタを含むことができ、このようなウエハを保持するように構成された一つ以上の支持体の押込み部を含むことができる。当業者によって理解されるように、一つ又は複数のヒータ226は、基板支持構造と一つ又は複数の基板ウエハ(209)を所望の設定値温度に制御可能に加熱する加熱素子(図示せず)を含む。或る実施形態において、基板支持構造208、例えば、サセプタは、加熱素子(図示せず)を組込むことができる。或る実施形態において、加熱素子は加熱中の温度均一性を助けるために用いることができる。いかなる適切な加熱素子も基板支持構造に組込むことができる。例えば、電気加熱素子をサセプタの材料に組込むことができる。サセプタを単独で又はリアクタチャンバエンクロージャ内に位置する一つ又は複数の他のヒータ226とともに制御可能に加熱することができる。
Claims (24)
- III−V族窒化物膜の堆積のための半導体処理ユニットに用いられる急速温度変化能力を持つ基板支持面であって、該基板支持面が、
約10℃/秒を超える急速な温度変化を可能にするように構成されたサセプタ表面、
を備えている前記基板支持面。 - サセプタが、約15℃/秒を超える急速な温度変化を可能にするように構成される、請求項1記載の基板支持面。
- サセプタが、約20℃/秒を超える急速な温度変化を可能にするように構成される、請求項1記載の基板支持面。
- 該サセプタが、約1mm〜約5mm厚のプラットフォームを備えている、請求項1記載の基板支持面。
- 該サセプタが、加熱中、一様な温度分布を助ける加熱素子を備えている、請求項1記載の基板支持面。
- 該基板支持面が、ニッケル-鉄合金、石英、シリコン、炭化シリコン、又は炭素複合物を備えている、請求項1記載の基板支持面。
- III−V族窒化物膜の堆積に用いられる半導体処理ユニットであって、該半導体処理ユニットが、
エンクロージャと、
該エンクロージャ内に置かれた少なくとも一つの基板ウエハを支持するように構成された基板支持構造と、
処理中、該基板支持構造と該少なくとも一つの基板ウエハを加熱するように構成された少なくとも一つのヒータと、
処理中、該エンクロージャにプロセスガスを分配するように構成されたガス分配システムと、
を備え、該基板支持構造が約10℃/秒を超える急速な温度変化を可能にするように構成されたサセプタ表面を備えている、前記半導体処理ユニット。 - サセプタが、約15℃/秒を超える急速な温度変化を可能にするように構成される、請求項7記載の半導体処理ユニット。
- サセプタが、約20℃/秒を超える急速な温度変化を可能にするように構成される、請求項7記載の半導体処理ユニット。
- 該基板支持構造が、ニッケル-鉄合金、石英、シリコン、炭化シリコン、又は炭素複合物を備えている、請求項7記載の半導体処理ユニット。
- 少なくとも一つのヒータが放射ランプヒータである、請求項7記載の半導体処理ユニット。
- 該サセプタが、約1mm〜約5mm厚のプラットフォームを備えている、請求項7記載の基板支持面。
- 該サセプタが、加熱中、一様な温度分布を助ける加熱素子を備えている、請求項7記載の基板支持面。
- III−V族窒化物膜の堆積に用いられる半導体処理ユニットを備えているLEDクラスタツールであって、該半導体処理ユニットが、
エンクロージャと、
該エンクロージャ内に置かれた少なくとも一つの基板ウエハを支持するように構成された基板支持構造と、
処理中、該基板支持構造と該少なくとも一つの基板ウエハを加熱するように構成された少なくとも一つのヒータと、
処理中、該エンクロージャにプロセスガスを分配するように構成されたガス分配システムと、
を備え、該基板支持構造が約10℃/秒を超える急速な温度変化を可能にするように構成されたサセプタ表面を備えている、前記LEDクラスタツール。 - サセプタが、約15℃/秒を超える急速な温度変化を可能にするように構成される、請求項14記載のLEDクラスタツール。
- サセプタが、約20℃/秒を超える急速な温度変化を可能にするように構成される、請求項14記載のLEDクラスタツール。
- 該基板支持構造が、ニッケル-鉄合金、石英、シリコン、炭化シリコン、又は炭素複合物を備えている、請求項14記載のLEDクラスタツール。
- 少なくとも一つのヒータが放射ランプヒータである、請求項14記載の半導体処理ユニット。
- 該サセプタが、約1mm〜約5mm厚のプラットフォームを備えている、請求項14記載の基板支持面。
- 該サセプタが、加熱中、一様な温度分布を助ける加熱要素を備えている、請求項14記載の基板支持面。
- 単一半導体処理ユニット内に複数の半導体III−V族窒化物膜プロセスを行う方法であって、該プロセスの少なくとも一つがその他のプロセスと異なる温度で行われる方法であって、
III−V族窒化物膜の堆積に用いられる半導体処理ユニットを準備するステップであって、該半導体処理ユニットが、
エンクロージャと、
該エンクロージャ内に置かれた少なくとも一つの基板ウエハを支持するように構成された基板支持構造と、
処理中、該基板支持構造と該少なくとも一つの基板ウエハを加熱するように構成された少なくとも一つのヒータと、
処理中、該エンクロージャにプロセスガスを分配するように構成されたガス分配システムと、
を備え、該基板支持構造が約10℃/秒を超える急速な温度変化を可能にするように構成されたサセプタ表面を備えている、前記ステップと、
基板支持構造上の半導体反応チャンバ内に第一半導体ウエハを置くステップと、
第一温度において該反応チャンバ内で第一プロセスを行うステップと、
該半導体処理ユニットの該設定値温度を第二温度に変化させ且つ該半導体基板支持体が約10℃/秒を超える温度の変化速度で該第二温度に達することを可能にするステップと、
該第二温度において該反応チャンバ内で少なくとも第二プロセスを行うステップと、
を含む前記方法。 - サセプタが、約15℃/秒を超える急速な温度変化を可能にするように構成される、請求項21記載の方法。
- サセプタが、約20℃/秒を超える急速な温度変化を可能にするように構成される、請求項21記載の方法。
- プロセスステップ間の約10℃/秒を超える該温度変化によって、プロセスステップ間の10℃/秒未満の温度傾斜を用いて堆積されたIII−V族窒化物膜と比較して、成長停止界面で膜不純物の少ないIII−V族窒化物膜が得られる、請求項21記載の方法。
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