JP2010287260A - 垂直磁気記録媒体 - Google Patents
垂直磁気記録媒体 Download PDFInfo
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- JP2010287260A JP2010287260A JP2009138175A JP2009138175A JP2010287260A JP 2010287260 A JP2010287260 A JP 2010287260A JP 2009138175 A JP2009138175 A JP 2009138175A JP 2009138175 A JP2009138175 A JP 2009138175A JP 2010287260 A JP2010287260 A JP 2010287260A
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 199
- 239000010410 layer Substances 0.000 claims abstract description 364
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 77
- 239000000956 alloy Substances 0.000 claims abstract description 77
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000011241 protective layer Substances 0.000 claims abstract description 15
- 229910001004 magnetic alloy Inorganic materials 0.000 claims abstract description 10
- 229910003321 CoFe Inorganic materials 0.000 claims abstract description 7
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 7
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
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- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910000929 Ru alloy Inorganic materials 0.000 claims 2
- 239000013078 crystal Substances 0.000 abstract description 40
- 239000000463 material Substances 0.000 description 24
- 230000000052 comparative effect Effects 0.000 description 23
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 21
- 238000011156 evaluation Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 239000000696 magnetic material Substances 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 7
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- 238000005204 segregation Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910019222 CoCrPt Inorganic materials 0.000 description 4
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 4
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- 239000000203 mixture Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 239000004721 Polyphenylene oxide Substances 0.000 description 3
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
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- 230000001050 lubricating effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 3
- 229920000570 polyether Polymers 0.000 description 3
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 2
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 230000006866 deterioration Effects 0.000 description 2
- 238000007865 diluting Methods 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910017141 AlTa Inorganic materials 0.000 description 1
- 229910017150 AlTi Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 241000790646 Cotinis Species 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 125000001475 halogen functional group Chemical group 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 239000006249 magnetic particle Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
- G11B5/678—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer having three or more magnetic layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7379—Seed layer, e.g. at least one non-magnetic layer is specifically adapted as a seed or seeding layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Landscapes
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
【解決手段】基板11上に密着層12、軟磁性下地層13、平坦化層14、シード層15、中間層16、磁気記録層17、保護層18が順次形成されてなる垂直磁気記録媒体において、シード層15は第一シード層151と第二シード層152の積層構造とし、第一シード層151はNiW合金を主成分とするfcc構造を有する非磁性合金により構成し、第二シード層152はNiFe合金若しくはCoFe合金を主成分とするfcc構造を有する軟磁性合金によって構成する。
【選択図】図1
Description
前記第一シード層はNiW合金であることが望ましい。また、前記NiW合金のW含有量は20原子%以下であることが望ましい。
前記第一シード層はNiWCr合金であっても良い。
前記第二シード層は、NiFe若しくはCoFeを主成分とする合金であることが望ましい。また、第二シード層はさらに、W,V,Taのうち少なくともいずれかを含むことが望ましい。
前記第一シード層はNiW合金であることが望ましい。また、前記NiW合金のW含有量は20原子%以下であることが望ましい。
前記第一シード層はNiWCr合金であっても良い。
前記第二シード層は、NiFe若しくはCoFeを主成分とする合金であることが望ましい。また、第二シード層はさらに、W,V,Taのうち少なくともいずれかを含むことが望ましい。
磁気記録層の保護層としては、カーボンを主体とする厚さ2nm以上、8nm以下の膜を形成し、さらにパーフルオロアルキルポリエーテル等の潤滑層を用いることが好ましい。これにより信頼性の高い垂直磁気記録媒体が得られる。
以下、実施例について、図面を参照して説明する。
Claims (16)
- 基板上に少なくとも軟磁性下地層、シード層、中間層、磁気記録層、保護層を有する垂直磁気記録媒体であって、前記シード層は前記基板側から第一シード層と第二シード層を有し、前記第一シード層はfcc構造を有する非磁性合金であり、前記第二シード層はfcc構造を有する軟磁性合金であることを特徴とする垂直磁気記録媒体。
- 前記第一シード層はNiW合金であることを特徴とする請求項1に記載の垂直磁気記録媒体。
- 前記NiW合金のW含有量が20原子%以下であることを特徴とする請求項2に記載の垂直磁気記録媒体。
- 前記第一シード層はNiWCr合金であることを特徴とする請求項1に記載の垂直磁気記録媒体。
- 前記第二シード層は、NiFe若しくはCoFeを主成分とする合金であることを特徴とする請求項2に記載の垂直磁気記録媒体
- 前記第二シード層はさらに、W,V,Taのうち少なくともいずれかを含むことを特徴とする請求項5に記載の垂直磁気記録媒体。
- 前記第一シード層の膜厚は2nm〜8nmの範囲であり、前記第二シード層の膜厚は2nm〜7nmの範囲であることを特徴とする請求項1に記載の垂直磁気記録媒体。
- 前記中間層はRu或るいはRu合金であることを特徴とする請求項1に記載の垂直磁気記録媒体。
- 基板上に少なくとも軟磁性下地層、シード層、中間層、磁気記録層、保護層を有する垂直磁気記録媒体であって、前記シード層は前記基板側から第一シード層と第二シード層の積層膜を単位膜とする2周期以上の積層構造であり、前記第一シード層はfcc構造を有する非磁性合金であり、前記第二シード層はfcc構造を有する軟磁性合金であることを特徴とする垂直磁気記録媒体。
- 前記第一シード層はNiW合金であることを特徴とする請求項9に記載の垂直磁気記録媒体。
- 前記NiW合金のW含有量が20原子%以下であることを特徴とする請求項10に記載の垂直磁気記録媒体。
- 前記第一シード層はNiWCr合金であることを特徴とする請求項9に記載の垂直磁気記録媒体。
- 前記第二シード層は、NiFe若しくはCoFeを主成分とする合金であることを特徴とする請求項10に記載の垂直磁気記録媒体。
- 前記第二シード層はさらに、W,V,Taのうち少なくともいずれかを含むことを特徴とする請求項13に記載の垂直磁気記録媒体。
- 前記第一シード層の膜厚は1nm〜4nmの範囲であり、前記第二シード層の膜厚は1nm〜4nmの範囲であることを特徴とする請求項9に記載の垂直磁気記録媒体
- 前記中間層がRu或るいはRu合金であることを特徴とする請求項9に記載の垂直磁気記録媒体。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009138175A JP5443065B2 (ja) | 2009-06-09 | 2009-06-09 | 垂直磁気記録媒体 |
US12/793,608 US8390956B2 (en) | 2009-06-09 | 2010-06-03 | Perpendicular magnetic recording medium having FCC seed layers |
CN201010202485.4A CN101923864B (zh) | 2009-06-09 | 2010-06-09 | 垂直磁记录介质及其制造和相应的磁存储装置 |
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JP2009138175A JP5443065B2 (ja) | 2009-06-09 | 2009-06-09 | 垂直磁気記録媒体 |
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JP2010287260A true JP2010287260A (ja) | 2010-12-24 |
JP5443065B2 JP5443065B2 (ja) | 2014-03-19 |
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JP2009138175A Expired - Fee Related JP5443065B2 (ja) | 2009-06-09 | 2009-06-09 | 垂直磁気記録媒体 |
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US (1) | US8390956B2 (ja) |
JP (1) | JP5443065B2 (ja) |
CN (1) | CN101923864B (ja) |
Cited By (4)
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JP2011086356A (ja) * | 2009-10-19 | 2011-04-28 | Showa Denko Kk | 磁気記録媒体及び磁気記録再生装置 |
WO2012111568A1 (ja) * | 2011-02-16 | 2012-08-23 | 山陽特殊製鋼株式会社 | 磁気記録用軟磁性合金、スパッタリングターゲット材及び磁気記録媒体 |
JP2014010852A (ja) * | 2012-06-28 | 2014-01-20 | Showa Denko Kk | 磁気記録媒体及び磁気記憶装置 |
CN104488029A (zh) * | 2012-08-13 | 2015-04-01 | 山阳特殊制钢株式会社 | 磁记录用软磁性合金和溅射靶材以及磁记录介质 |
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JP5337451B2 (ja) * | 2008-11-06 | 2013-11-06 | エイチジーエスティーネザーランドビーブイ | 垂直磁気記録媒体 |
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WO2012082998A1 (en) * | 2010-12-15 | 2012-06-21 | Seagate Technology Llc | Magnetic sensor seed layer with magnetic and nonmagnetic layers |
US20120250178A1 (en) * | 2011-03-31 | 2012-10-04 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic media with thermal insulation layer for thermally assisted magnetic data recording |
JP5782819B2 (ja) * | 2011-05-12 | 2015-09-24 | 富士電機株式会社 | 垂直磁気記録媒体 |
US8956741B1 (en) | 2011-06-30 | 2015-02-17 | WD Media, LLC | Magnetic recording media with small grain size and narrow c-axis dispersion by using dual seed layer with substrate bias |
US8422176B1 (en) * | 2011-11-15 | 2013-04-16 | Western Digital (Fremont), Llc | Method and system for providing a magnetic read transducer having a bilayer magnetic seed layer |
US10609843B2 (en) * | 2012-10-04 | 2020-03-31 | Compass Datacenters, Llc | Magnetic blocking tiles for a datacenter facility |
US8946707B2 (en) | 2013-01-30 | 2015-02-03 | HGST Netherlands B.V. | Tunneling magnetoresistance (TMR) read sensor with an integrated auxilliary ferromagnetic shield |
CN104575529A (zh) * | 2013-10-10 | 2015-04-29 | 株式会社东芝 | 垂直磁记录介质及磁记录再现装置 |
JP2015088197A (ja) * | 2013-10-28 | 2015-05-07 | 昭和電工株式会社 | 磁気記録媒体および磁気記憶装置 |
US9165571B2 (en) * | 2013-11-11 | 2015-10-20 | Seagate Technology Llc | Magnetic stack coupling buffer layer |
US9685184B1 (en) | 2014-09-25 | 2017-06-20 | WD Media, LLC | NiFeX-based seed layer for magnetic recording media |
US9818442B2 (en) | 2014-12-01 | 2017-11-14 | WD Media, LLC | Magnetic media having improved magnetic grain size distribution and intergranular segregation |
US9990940B1 (en) | 2014-12-30 | 2018-06-05 | WD Media, LLC | Seed structure for perpendicular magnetic recording media |
WO2016118080A1 (en) * | 2015-01-21 | 2016-07-28 | Agency for Science,Technology and Research | Layer arrangement and method for fabricating thereof |
US9697857B1 (en) | 2015-05-29 | 2017-07-04 | Seagate Technology Llc | Three dimensional data storage media |
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US11475916B1 (en) * | 2021-06-23 | 2022-10-18 | Western Digital Technologies, Inc. | Dual seed layer for magnetic recording media |
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2009
- 2009-06-09 JP JP2009138175A patent/JP5443065B2/ja not_active Expired - Fee Related
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2010
- 2010-06-03 US US12/793,608 patent/US8390956B2/en active Active
- 2010-06-09 CN CN201010202485.4A patent/CN101923864B/zh active Active
Patent Citations (4)
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JP2014010852A (ja) * | 2012-06-28 | 2014-01-20 | Showa Denko Kk | 磁気記録媒体及び磁気記憶装置 |
CN104488029A (zh) * | 2012-08-13 | 2015-04-01 | 山阳特殊制钢株式会社 | 磁记录用软磁性合金和溅射靶材以及磁记录介质 |
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JP5443065B2 (ja) | 2014-03-19 |
US8390956B2 (en) | 2013-03-05 |
CN101923864B (zh) | 2014-12-10 |
CN101923864A (zh) | 2010-12-22 |
US20100309580A1 (en) | 2010-12-09 |
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