JP2010276533A - 流量測定装置及び流体圧力測定装置 - Google Patents
流量測定装置及び流体圧力測定装置 Download PDFInfo
- Publication number
- JP2010276533A JP2010276533A JP2009131032A JP2009131032A JP2010276533A JP 2010276533 A JP2010276533 A JP 2010276533A JP 2009131032 A JP2009131032 A JP 2009131032A JP 2009131032 A JP2009131032 A JP 2009131032A JP 2010276533 A JP2010276533 A JP 2010276533A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- fluid
- flow rate
- pressure sensor
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 46
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 15
- 230000005489 elastic deformation Effects 0.000 claims abstract description 5
- 239000013078 crystal Substances 0.000 claims description 25
- 239000010453 quartz Substances 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 22
- 230000006870 function Effects 0.000 claims description 8
- 230000010355 oscillation Effects 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 230000000994 depressogenic effect Effects 0.000 abstract 4
- 238000005259 measurement Methods 0.000 description 10
- 230000010365 information processing Effects 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000012886 linear function Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000037237 body shape Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0023—Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
- G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measuring Volume Flow (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009131032A JP2010276533A (ja) | 2009-05-29 | 2009-05-29 | 流量測定装置及び流体圧力測定装置 |
| KR1020117024305A KR101305775B1 (ko) | 2009-05-29 | 2010-03-19 | 유량 측정 장치 및 유체 압력 측정 장치 |
| PCT/JP2010/054869 WO2010137392A1 (fr) | 2009-05-29 | 2010-03-19 | Dispositif de mesure de débit et de pression de fluide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009131032A JP2010276533A (ja) | 2009-05-29 | 2009-05-29 | 流量測定装置及び流体圧力測定装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2010276533A true JP2010276533A (ja) | 2010-12-09 |
Family
ID=43222515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009131032A Pending JP2010276533A (ja) | 2009-05-29 | 2009-05-29 | 流量測定装置及び流体圧力測定装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2010276533A (fr) |
| KR (1) | KR101305775B1 (fr) |
| WO (1) | WO2010137392A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018179715A (ja) * | 2017-04-11 | 2018-11-15 | 北陸電気工業株式会社 | パルス圧力検出装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2458358B1 (fr) * | 2010-11-29 | 2017-09-27 | Corning Incorporated | Capteurs de pression sans contact en ligne et procédés de mesure de la pression |
| WO2015066229A2 (fr) | 2013-10-30 | 2015-05-07 | Alphinity, Llc | Dispositif de contrôle de fluide à revêtement intérieur jetable avec capteur intégré |
| CN106233119B (zh) | 2014-01-17 | 2019-07-26 | 艾尔菲能堤有限责任公司 | 具有传感器功能的流体监测组件 |
| DE102017012067A1 (de) * | 2017-12-29 | 2019-07-04 | Endress+Hauser Flowtec Ag | Rohr für einen Meßwandler, Meßwandler mit einem solchen Rohr sowie damit gebildetes Meßsystem |
| KR102252038B1 (ko) | 2019-06-21 | 2021-05-14 | 세메스 주식회사 | 유체 분사량 산출 장치 및 이를 구비하는 스토커 시스템 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3274828A (en) * | 1963-08-27 | 1966-09-27 | Charles F Pulvari | Force sensor |
| US4175243A (en) * | 1977-11-17 | 1979-11-20 | Corbett James P | Temperature compensated oscillating crystal force transducer systems |
| JP2000510575A (ja) * | 1996-02-15 | 2000-08-15 | エヌティー インターナショナル インコーポレーテッド | 非汚染性本体を有する腐食性流体内の流量計 |
| JP2002340716A (ja) * | 2001-04-25 | 2002-11-27 | Oertli-Instrumente Ag | 圧力測定システム |
-
2009
- 2009-05-29 JP JP2009131032A patent/JP2010276533A/ja active Pending
-
2010
- 2010-03-19 KR KR1020117024305A patent/KR101305775B1/ko active IP Right Grant
- 2010-03-19 WO PCT/JP2010/054869 patent/WO2010137392A1/fr active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3274828A (en) * | 1963-08-27 | 1966-09-27 | Charles F Pulvari | Force sensor |
| US4175243A (en) * | 1977-11-17 | 1979-11-20 | Corbett James P | Temperature compensated oscillating crystal force transducer systems |
| JP2000510575A (ja) * | 1996-02-15 | 2000-08-15 | エヌティー インターナショナル インコーポレーテッド | 非汚染性本体を有する腐食性流体内の流量計 |
| JP2002340716A (ja) * | 2001-04-25 | 2002-11-27 | Oertli-Instrumente Ag | 圧力測定システム |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018179715A (ja) * | 2017-04-11 | 2018-11-15 | 北陸電気工業株式会社 | パルス圧力検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20120011011A (ko) | 2012-02-06 |
| KR101305775B1 (ko) | 2013-09-06 |
| WO2010137392A1 (fr) | 2010-12-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2010137392A1 (fr) | Dispositif de mesure de débit et de pression de fluide | |
| JP5594541B2 (ja) | 圧力検出器 | |
| US8919208B2 (en) | Ultrasonic flowmeter apparatus having a first and a second housing part with grooves for clamping a resilient conduit | |
| TWI778034B (zh) | 壓力感測器 | |
| US20080006085A1 (en) | Flow Sensor | |
| KR20130095608A (ko) | 유체 계측용 센서의 설치 구조 | |
| JP2009192220A (ja) | 流量センサおよびこれを用いた質量流量制御装置 | |
| JP4158980B2 (ja) | マルチ渦流量計 | |
| JP2012233872A (ja) | 半導体圧力センサおよびその製造方法 | |
| US10627271B2 (en) | Hydraulic system for ultrasonic flow measurement using reflective acoustic path approach | |
| JP2010066177A (ja) | 流量計及び流量制御装置 | |
| JP6663314B2 (ja) | 圧力センサ | |
| TW201518692A (zh) | 由聚合物材料製造科氏質量流率感測器之方法 | |
| JP7203302B2 (ja) | 超音波流量計 | |
| JP5634636B1 (ja) | 超音波流量計 | |
| US20210231473A1 (en) | Differential pressure type flowmeter | |
| JP2012181062A (ja) | 力検出器収容ケース、力測定器 | |
| JP2013108876A (ja) | 半導体圧力センサおよびその製造方法 | |
| WO2017122496A1 (fr) | Capteur de pression | |
| JP2013142539A (ja) | 質量流量計 | |
| KR101885854B1 (ko) | 박막 파손방지 기구를 갖는 열식유량센서 및 제조방법 | |
| US20220236128A1 (en) | Pressure sensor components having microfluidic channels | |
| US11287342B2 (en) | Capacitance manometer with improved baffle for improved detection accuracy | |
| JP2019082346A (ja) | 熱式流量計 | |
| JP2910764B1 (ja) | 静電容量型センサおよびそれを使用したフルイディック式流量計 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20110725 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110801 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20110725 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120904 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121015 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130219 |